Probe card fixing seat and wafer testing device

Abstract

The utility model relates to wafer test technical field especially, relate to a probe card fixing base and wafer testing arrangement, probe card fixing base includes fixed disc, and the middle part of fixed disc has the locating groove, insulating sheet is installed in the locating groove of fixed disc, and the movable fastener is set up on fixed disc to make probe card lock solid in the locating groove, and is pasted on the top of insulating sheet, movable fastener includes fixed part and bending part, fixed part is connected on fixed disc, and bending part is rotatably connected on fixed part, and bending part can rotate switching between vertical state and horizontal state. The utility model can avoid the problem that the probe card is fixed difficultly and the aluminum scrap influences test because of sliding screw possibly produced, reduces the risk of product and probe card damage, also can improve the efficiency that engineer maintains and maintains machine platform, can be directly installed on the machine platform and uses, and the machine platform itself does not need to do any change.

Description

Technical Field

[0001] This utility model relates to the field of wafer testing technology, and in particular to a probe card holder and a wafer testing device. Background Technology

[0002] During wafer testing, probe cards are used to directly contact the wafer product for electrical performance measurements. Therefore, ensuring a secure installation of the probe cards is crucial to effectively prevent abnormal test data caused by poor contact. As a core component of wafer testing, the probe cards must be securely fixed using a dedicated carrier. Generally, probe cards are mounted on probe card holders to ensure a highly stable state during testing.

[0003] Currently, most probe cards and probe card holders are connected by screws. However, this method has obvious drawbacks: long-term disassembly and assembly of screws can easily lead to stripping, resulting in the probe card not being securely fixed and making installation and disassembly difficult; in addition, disassembly and assembly of screws can easily generate metal shavings. If screws or shavings fall into the machine, they can cause test failures or even damage the probe card or product. Therefore, adopting a safe and effective probe card installation and fixing method is particularly important. Utility Model Content

[0004] The purpose of this invention is to provide a probe card holder and a wafer testing device to solve the technical problems of poor fixation and easy generation of metal debris caused by repeated screw installation and stripping in existing probe card fixing methods.

[0005] To solve the above-mentioned technical problems, this utility model is achieved through the following technical solution:

[0006] This utility model provides a probe card fixing base, including:

[0007] A fixed plate, wherein the fixed plate has a positioning groove in the middle;

[0008] An insulating sheet is installed in the positioning groove of the fixed plate; and

[0009] A movable fastener is provided on the fixed plate to lock the probe card in the positioning groove and fit against the upper part of the insulating sheet. The movable fastener includes a fixing part and a bending part. The fixing part is connected to the fixed plate, and the bending part is rotatably connected to the fixing part. The bending part can rotate between a vertical state and a horizontal state. When the bending part is in a vertical state, it is coaxial with the fixing part to insert or withdraw the probe card. When the bending part is in a horizontal state, it presses the probe card.

[0010] In one embodiment of the present invention, multiple movable fasteners are provided circumferentially on the fixed disk.

[0011] In one embodiment of the present invention, a plurality of first mounting holes are provided on the fixed plate along the circumferential direction, and the fixing part of each of the movable fasteners is connected to each of the first mounting holes, and at least one of the first mounting holes is close to the inner edge of the positioning groove, and at least one of the first mounting holes is close to the outer edge of the positioning groove.

[0012] In one embodiment of the present invention, the first mounting hole has an internal thread, the fixing part of the movable fastener has a threaded section, and the outer periphery of the threaded section is provided with an external thread that mates with the internal thread.

[0013] In one embodiment of the present invention, the top end of the fixing part of the movable fastener has a protrusion, the bottom end of the bent part of the movable fastener has a groove, the opposite sides of the protrusion are flat, the bottom edge of the groove is arc-shaped, the groove cooperates with the protrusion, and is rotatably connected by a fixing pin passing through the protrusion and the groove.

[0014] In one embodiment of the present invention, the bent portion of the movable fastener includes a first connecting segment and a second connecting segment connected in sequence. The first connecting segment is conical with a gradually increasing outer diameter and a spherical top, and the second connecting segment is cylindrical. The fixing portion of the movable fastener is at least partially a cylindrical segment and has the same outer diameter as the second connecting segment.

[0015] In one embodiment of the present invention, two positioning planes are symmetrically arranged on the outer peripheral wall of the bent portion of the movable fastener, and the positioning planes extend from the bottom end of the bent portion along the axis of the bent portion to the top end of the bent portion.

[0016] In one embodiment of the present invention, the insulating sheet is provided with a plurality of second mounting holes along the circumferential direction, and a plurality of pressure detection elements are provided along the circumferential direction on the side of the insulating sheet away from the fixed plate, and the pressure detection elements are located between adjacent second mounting holes.

[0017] In one embodiment of the present invention, the pressure detection element has an arc-shaped sheet structure, and the radial width of the pressure detection element is less than or equal to the radial width of the insulating sheet.

[0018] This utility model also provides a wafer testing device, which includes the probe card holder as described above.

[0019] In summary, the probe card holder and wafer testing device provided by this utility model have the following unexpected effects: by setting a movable fastener on the fixed plate, the movable fastener can insert or withdraw the probe card when the bending part is in a vertical state, and can press the probe card when the bending part is in a horizontal state, thereby avoiding the stripping of screws that may affect the fixation of the probe card, as well as the possible impact of debris on the test, reducing the risk of product and probe card damage, and improving the work efficiency of replacing probe cards. In addition, the movable fastener can be directly installed on the machine tool without any modification to the machine tool itself.

[0020] Furthermore, by setting pressure detection elements on the insulating sheet, the overall pressure status of the probe card can be monitored in real time, avoiding damage to the probe card or reducing its service life due to prolonged abnormal conditions, while also improving the efficiency of machine maintenance and inspection.

[0021] Of course, any product implementing this utility model does not necessarily need to achieve all of the advantages described above at the same time. Attached Figure Description

[0022] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application. It is obvious that the drawings described below are merely some embodiments of this application, and those skilled in the art can obtain other drawings based on these drawings without any inventive effort.

[0023] In the attached diagram:

[0024] Figure 1 This is a schematic diagram of the overall structure of the probe card holder (equipped with probe cards) provided in one embodiment of the present invention;

[0025] Figure 2 This is an exploded structural diagram of a probe card holder provided in one embodiment of the present invention (equipped with a probe card);

[0026] Figure 3 This is a schematic diagram of the structure of the fixed disk provided in one embodiment of the present utility model;

[0027] Figure 4 This is a schematic diagram of the structure of the insulating sheet provided in one embodiment of the present invention;

[0028] Figure 5 This is a schematic diagram of the overall structure of the movable fastener provided in one embodiment of the present invention. Figure 1 (The bent part is in a vertical position);

[0029] Figure 6 This is a schematic diagram of the overall structure of the movable fastener provided in one embodiment of the present invention. Figure 2 (The bent part is horizontal);

[0030] Figure 7 This is a schematic diagram of the fixing part of the movable fastener provided in one embodiment of the present invention;

[0031] Figure 8 This is a schematic diagram of the bent portion of a movable fastener provided in one embodiment of the present invention.

[0032] The attached figures are labeled as follows:

[0033] 1-Fixing plate; 11-Positioning groove; 12-First mounting hole;

[0034] 2-Insulating sheet; 21-Second mounting hole; 22-Pressure sensing element;

[0035] 3-Modible fastener; 31-Fixing part; 311-Threaded section; 312-Cylindrical section; 313-Protrusion; 314-First hole; 32-Bending part; 321-First connecting section; 322-Second connecting section; 323-Groove; 324-Second hole; 325-Positioning plane; 33-Fixing pin;

[0036] 4-Probe card. Detailed Implementation

[0037] The following specific examples illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. This utility model can also be implemented or applied through other different specific embodiments. Various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this utility model. In the absence of conflict, the following embodiments and features in the embodiments can be combined with each other.

[0038] It should be noted that the illustrations provided in the following embodiments are only schematic representations of the basic concept of the present invention. The drawings only show the components related to the present invention and are not drawn according to the actual number, shape and size of the components. In actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0039] In the following description, numerous details are explored to provide a more thorough explanation of embodiments of the present invention. However, it will be apparent to those skilled in the art that embodiments of the present invention may be practiced without these specific details. In other embodiments, well-known structures and devices are shown in block diagram form rather than in detail to avoid obscuring embodiments of the present invention.

[0040] In wafer testing, a probe card makes contact with the wafer under test. The probe card has several probes to perform electrical tests on the chip. Currently, the common method for fixing probe cards is to use screws to secure them to a probe card holder. However, repeated removal and installation of screws can lead to stripping, resulting in poor probe card fixation and difficulties in subsequent installation and removal. Furthermore, screw removal generates debris that falls onto the testing equipment, affecting testing and potentially damaging the probe card. Additionally, installing the insulating sheet is prone to reverse orientation, and subsequent screw installation may damage or break the mica sheet.

[0041] Based on this, one embodiment of the present invention provides a probe card fixing base, such as... Figures 1 to 6 As shown, the probe card holder includes: a fixed plate 1, an insulating sheet 2, and a movable fastener 3. The fixed plate 1 has a positioning groove 11 in the middle. The insulating sheet 2 is installed in the positioning groove 11 of the fixed plate 1. The movable fastener 3 is disposed on the fixed plate 1 to lock the probe card 4 in the positioning groove 11 and fits against the upper part of the insulating sheet 2. The movable fastener 3 includes a fixing part 31 and a bending part 32. The fixing part 31 is connected to the fixed plate 1, and the bending part 32 is rotatably connected to the fixing part 31. The bending part 32 can rotate and switch between a vertical state and a horizontal state. When the bending part 32 is in a vertical state, it is coaxial with the fixing part 31 to insert or withdraw the probe card 4. When the bending part 32 is in a horizontal state, it presses the probe card 4.

[0042] For details, please refer to Figure 1 and Figure 2 In this embodiment, the probe card holder can be fixed to the test equipment platform to support and fix the circular probe card 4 with several probes. See also... Figure 3 The fixing plate 1 is used to support the insulating sheet 2 and the probe card 4. The fixing plate 1 is an annular plate. The middle part of the fixing plate 1 has an annular positioning groove 11 for accommodating the insulating sheet 2 and the probe card 4. The depth of the positioning groove 11 is greater than the thickness of the stacked insulating sheet 2 and the probe card 4. The positioning groove 11 is adapted to the insulating sheet 2 and the probe card 4 to position the insulating sheet 2 and the probe card 4.

[0043] See Figure 2 The insulating sheet 2 is annular, and its outer diameter matches the positioning groove 11. The insulating sheet 2 is made of insulating material and prevents electrical short circuits between the probe card 4 and the fixed disk 1. This effectively avoids burning or damaging the test board inside the test head on the testing machine. The insulating sheet 2 also effectively reduces the impact of external electromagnetic interference on the test signal of the probe card 4, ensuring the accuracy of the test data. In this example, the insulating sheet 2 is a mica sheet, which has certain insulation and heat resistance properties.

[0044] See Figure 2 and Figure 5The fixing part 31 of the movable fastener 3 is connected to the positioning groove 11 of the fixed plate 1, providing support for the bending part 32. The bending part 32 of the movable fastener 3 protrudes from the bottom of the positioning groove 11, and the bending part 32 can switch between a vertical state and a horizontal state by rotation.

[0045] The fixing part 31 of the movable fastener 3 is pre-installed in the positioning groove 11. By making the bending part 32 vertical (i.e., the bending part 32 is coaxial with the fixing part 31), the insulating sheet 2 is installed into the positioning groove 11. Then, the probe card 4 is installed on the upper surface of the insulating sheet 2. By rotating the bending part 32 on the movable fastener 3 to a horizontal state, the probe card 4 is pressed and firmly fixed in the positioning groove 11, thereby fixing the probe card 4. When it is necessary to remove the probe card 4 or the insulating sheet 2, the bending part 32 of the movable fastener 3 can be rotated in the opposite direction to a vertical state to detach the probe card 4 or the insulating sheet 2 from the fixing plate 1 without the need for additional tools, which greatly improves the convenience and efficiency of operation.

[0046] Thus, on the one hand, since the fixing part 31 of the movable fastener 3 only needs to be pre-installed on the fixed plate 1, there is no need to repeatedly disassemble the movable fastener 3, which avoids the problem of screw stripping that is common when using screws for fixing. The probe card 4 can be quickly fixed by the bending part 32 of the movable fastener 3, and the reliability of the probe card 4 is guaranteed. Subsequent disassembly and assembly are convenient and quick, without the need for additional tools. Furthermore, since the locking or unlocking of the probe card 4 can be achieved by switching the state of the bending part 32 of the movable fastener 3, there will be no metal shavings, and the risk of screws or shavings falling onto the machine and affecting the test is avoided.

[0047] Compared to traditional screw fastening methods, the movable fastener 3 does not cause mechanical damage to the probe card 4 during installation and disassembly. Screw fastening can lead to scratches and deformation on the probe card 4 surface due to uneven force or friction between the screw and the probe card 4 when tightening and loosening screws, affecting the performance and lifespan of the probe card 4. The movable fastener 3, however, achieves locking and unlocking by rotating the bent portion 32, without generating additional mechanical stress on the probe card 4, thus effectively extending its lifespan and reducing testing costs.

[0048] On the other hand, since the movable fastener 3 protrudes at least partially from the bottom of the positioning groove 11, it ensures that when the insulating sheet 2 is installed, the two second mounting holes 21 on the insulating sheet 2 with different radial distances from its center are each aligned with the corresponding movable fastener 3, thus preventing the insulating sheet 2 from being placed in the wrong direction and playing a foolproof role.

[0049] See Figure 2Understandably, multiple movable fasteners 3 are arranged circumferentially on the fixed disk 1. This ensures that the probe clip 4 receives a uniform fixing force circumferentially, guaranteeing its stability on the horizontal plane and preventing tilting or loosening due to uneven local force. Preferably, multiple movable fasteners 3 are evenly distributed circumferentially on the fixed disk 1; in this example, four movable fasteners 3 are evenly distributed circumferentially on the fixed disk 1. In other examples, the number of movable fasteners 3 can be adjusted according to actual needs.

[0050] See Figure 3 In some embodiments, the fixed disk 1 has a plurality of first mounting holes 12 arranged circumferentially. The fixing part 31 of each movable fastener 3 is connected to each of the first mounting holes 12, and at least one first mounting hole 12 is close to the inner edge of the positioning groove 11, and at least one first mounting hole 12 is close to the outer edge of the positioning groove 11. Specifically, two opposite first mounting holes 12 may be arranged with different radial distances on the positioning groove 11. Since the two first mounting holes 12 are distributed circumferentially and have inner and outer positions, it is beneficial to connect the movable fastener 3 protruding on the fixed disk 1, which plays a role in preventing the insulating sheet 2 from being installed backwards. Furthermore, since the fixing part 31 of the movable fastener 3 is pre-connected to the first mounting hole 12, the movable fastener 3 does not need to be disassembled during repeated disassembly and assembly of the insulating sheet 2 and the probe card 4.

[0051] In the above embodiment, the first mounting hole 12 has an internal thread, and the fixing part 31 of the movable fastener 3 has a threaded section 311, with an external thread on the outer periphery that mates with the internal thread. Thus, by engaging the threaded section 311 of the fixing part 31 with the first mounting hole 12, the movable fastener 3 can be quickly installed on the fixed plate 1, providing reliable connection stability and facilitating disassembly and replacement.

[0052] See Figures 6 to 8 It should be noted that the fixed part 31 of the movable fastener 3 has a protrusion 313 at its top end, and the bent part 32 of the movable fastener 3 has a groove 323 at its bottom end. The opposite sides of the protrusion 313 are flat, and the bottom edge of the groove 323 is arc-shaped. The groove 323 mates with the protrusion 313 and is rotatably connected by a fixing pin 33 passing through the protrusion 313 and the groove 323. Specifically, the top of the protrusion 313 is arc-shaped, and a first hole 314 is formed on the side wall of the protrusion 313, which passes through the protrusion 313. A second hole 324 is formed on the side wall of the bent part 32, which passes through the groove 323. The groove 323 mates with the protrusion 313 and is connected by a fixing pin 33 passing through the first hole 314 and the second hole 324, so that the bent part 32 can switch between a vertical and a horizontal state.

[0053] There is a certain gap between the top of the protrusion 313 and the bottom of the groove 323 to ensure that the bent part 32 can smoothly switch between the vertical and horizontal states.

[0054] See Figure 7 The two sides of the protrusion 313 are designed as flat surfaces. When the groove 323 is engaged with the protrusion 313, the two flat surfaces of the protrusion 313 fit against the inner walls of the two sides of the groove 323, which can effectively prevent the bending part 32 from shifting in the horizontal direction relative to the fixing part 31, thus preventing the probe card 4 from being unstable.

[0055] See Figure 6 and Figure 8 The bottom edge of the groove 323 is arc-shaped, which facilitates the rotation of the bent part 32 relative to the fixed part 31, avoids interference between the bottom of the bent part 32 and the fixed part 31, and makes the bent part 32 rotate more smoothly.

[0056] A rotatable connection is achieved by a fixing pin 33 passing through the protrusion 313 and the groove 323. The fixing pin 33 can accurately position the relative position of the protrusion 313 and the groove 323, ensuring that the bent part 32 always rotates around the central axis of the fixing pin 33 during rotation, thus ensuring the stability of rotation.

[0057] See Figure 8 In some embodiments, the bent portion 32 of the movable fastener 3 includes a first connecting segment 321 and a second connecting segment 322 connected in sequence. The first connecting segment 321 is conical with a gradually increasing outer diameter and a spherical apex, while the second connecting segment 322 is cylindrical. The fixing portion 31 of the movable fastener 3 is at least partially a cylindrical segment 312, with the same outer diameter as the second connecting segment 322. Specifically, the first connecting segment 321 and the second connecting segment 322 are connected in sequence, and the transition between the first connecting segment 321 and the second connecting segment 322 is smooth. The first connecting section 321 of the bending part 32 is set as a cone shape with a spherical top, which facilitates the smooth passage of the bending part 32 through the insulating sheet 2 and the probe card 4, reduces installation resistance, and improves installation efficiency. The fixing part 31 has a cylindrical section 312 located between the protrusion 313 and the threaded section 311. The outer diameter of the cylindrical section 312 is the same as the outer diameter of the second connecting section 322, which makes the overall structure of the movable fastener 3 more symmetrical and balanced, reduces additional stress and deformation, and improves the overall stability of the movable fastener 3.

[0058] In addition, to ensure that the bent portion 32 can be pressed onto the probe card 4, in this example, the length ratio of the bent portion 32 to the fixing portion 31 is 1:1, the length ratio of the first connecting segment 321 to the second connecting segment 322 of the bent portion 32 is 1:1, and the depth ratio of the groove 323 to the length of the bent portion 32 is 3:10. The length ratio of the protrusion 313, the cylindrical segment 312, and the threaded segment 311 of the fixing portion 31 is 3:4:3. In other examples, adjustments can be made according to actual needs, and no specific limitation is made, as long as the bent portion 32 can be pressed tightly onto the probe card 4 after the fixing portion 31 is installed on the fixing plate 1.

[0059] See Figure 8 It is worth mentioning that two positioning planes 325 are symmetrically arranged on the outer peripheral wall of the bent portion 32 of the movable fastener 3. The positioning planes 325 extend from the bottom end of the bent portion 32 along the axis of the bent portion 32 to the top end of the bent portion 32. Specifically, by setting the positioning planes 325, when the bent portion 32 is in a horizontal state, the positioning planes 325 press the probe card 4, thereby ensuring that the bent portion 32 will not damage the surface of the probe card 4.

[0060] Furthermore, the bent portion 32 of the movable fastener 3 can uniformly press the probe card 4 in a horizontal state. Because the positioning plane 325 of the bent portion 32 has a large contact area with the probe card 4 and the pressure distribution is uniform, it ensures a tight fit between the probe card 4 and the insulating sheet 2. This allows the probes on the probe card 4 to maintain good electrical contact with the wafer surface, avoiding poor contact caused by excessive or insufficient local pressure, and further improving the accuracy and stability of the test.

[0061] See Figure 4 In some embodiments, the insulating sheet 2 has multiple second mounting holes 21 arranged circumferentially, and multiple pressure sensing elements 22 are arranged circumferentially on the side of the insulating sheet 2 facing away from the fixing plate 1, with the pressure sensing elements 22 located between adjacent second mounting holes 21. Specifically, the insulating sheet 2 is connected to the fixing plate 1 through the second mounting holes 21, and the positions of the second mounting holes 21 correspond one-to-one with the first mounting holes 12 of the fixing plate 1, thereby fixing it by means of movable fasteners 3 passing through the second mounting holes 21 to achieve positioning of the insulating sheet 2. The multiple second mounting holes 21 increase the number of connection points between the insulating sheet 2 and the fixing plate 1, improving the rigidity and stability of the connection.

[0062] It is worth mentioning that, since the fixed plate 1 has at least two opposite first mounting holes 12 with different radial distances on the positioning groove 11, that is, at least one first mounting hole 12 is close to the inner edge of the positioning groove 11 and at least one first mounting hole 12 is close to the outer edge of the positioning groove 11, and at least two first mounting holes 12 are distributed along the circumference of the fixed plate 1 and have different positions, correspondingly, the insulating sheet 2 also has at least two opposite second mounting holes 21 with different radial distances on the insulating sheet 2, that is, at least two second mounting holes 21 are distributed along the circumference of the insulating sheet 2 and have different positions. Thus, combined with the movable fastener 3 protruding in each first mounting hole 12 on the fixed plate 1, when the insulating sheet 2 is installed, each second mounting hole 21 must be aligned with the corresponding first mounting hole 12, thereby playing a foolproof role for the insulating sheet 2 and preventing the insulating sheet 2 from being installed backwards.

[0063] Multiple pressure sensors 22 are arranged circumferentially on the side of the insulating sheet 2 facing away from the fixing plate 1, and the pressure sensors 22 are located between adjacent second mounting holes 21. This arrangement allows the pressure sensors 22 to be evenly distributed in the circumferential area of ​​the insulating sheet 2, enabling comprehensive detection of the pressure on the insulating sheet 2 at different positions and avoiding detection blind spots. Through this circumferentially distributed pressure sensors 22, the pressure data of each part of the insulating sheet 2 can be accurately obtained. In this example, four pressure sensors 22 are evenly distributed circumferentially on the upper surface of the insulating sheet 2 (the side facing away from the fixing plate 1). When the probe card 4 is fixed on the insulating sheet 2, it will press on the pressure sensors 22. The pressure status of each part of the probe card 4 can be detected through the pressure sensors 22. If there is any imbalance, it can be detected in time and the probe card 4 can be reinstalled and adjusted.

[0064] By placing the pressure sensing element 22 between adjacent second mounting holes 21, the area of ​​the second mounting holes 21 and the surrounding movable fasteners 3 is avoided. This not only prevents installation interference but also avoids inaccurate pressure detection data from the pressure sensing element 22, thus improving the accuracy and reliability of pressure detection.

[0065] In the above embodiment, the pressure detection element 22 has an arc-shaped sheet structure, and the radial width of the pressure detection element 22 is less than or equal to the radial width of the insulating sheet 2. In this way, the pressure detection element 22 can be adapted to the annular structure of the insulating sheet 2, making full use of the circumferential space of the insulating sheet 2, ensuring that the insulating sheet 2 is installed while realizing the function of detecting the pressure status of the probe card 4.

[0066] This utility model also provides a wafer testing device, which includes the probe card holder as described above.

[0067] In summary, the probe card holder and wafer testing device provided by this utility model have the following unexpected effects: By setting a movable fastener 3 on the fixed plate 1, the movable fastener 3 can switch the state of its bending portion 32, allowing it to insert or retract the probe card 4 when the bending portion 32 is in a vertical state, and to press the probe card 4 tightly when the bending portion 32 is in a horizontal state. This avoids the slippage of screws that could affect the fixation of the probe card 4, as well as the potential impact of debris on the test. It also reduces the risk of damage to the product and the probe card 4, and improves the efficiency of engineers replacing the probe card 4. Furthermore, the movable fastener 3 can be directly installed on the machine tool without any modifications to the tool itself. Moreover, by setting a pressure detection element 22 on the insulating sheet 2, the overall pressure status of the probe card 4 can be monitored in real time, preventing damage to the probe card 4 or a reduction in its service life due to prolonged abnormal conditions, while also improving the efficiency of machine tool maintenance and inspection.

[0068] The above embodiments are merely illustrative of the principles and effects of this utility model and are not intended to limit the scope of this utility model. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of this utility model. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this utility model should still be covered by the claims of this utility model.

Claims

1. A probe card holder, characterized in that, include: A fixed plate, wherein the fixed plate has a positioning groove in the middle; An insulating sheet is installed in the positioning groove of the fixed plate; as well as A movable fastener is provided on the fixed plate to lock the probe card in the positioning groove and fit against the upper part of the insulating sheet. The movable fastener includes a fixing part and a bending part. The fixing part is connected to the fixed plate, and the bending part is rotatably connected to the fixing part. The bending part can rotate between a vertical state and a horizontal state. When the bending part is in a vertical state, it is coaxial with the fixing part to insert or withdraw the probe card. When the bending part is in a horizontal state, it presses the probe card.

2. The probe card holder according to claim 1, characterized in that, Multiple movable fasteners are provided circumferentially on the fixed plate.

3. The probe card holder according to claim 1 or 2, characterized in that, The fixed plate has a plurality of first mounting holes arranged circumferentially, and the fixing part of each of the movable fasteners is connected to each of the first mounting holes. At least one of the first mounting holes is close to the inner edge of the positioning groove, and at least one of the first mounting holes is close to the outer edge of the positioning groove.

4. The probe card holder according to claim 3, characterized in that, The first mounting hole has an internal thread, and the fixing part of the movable fastener has a threaded section, the outer periphery of which is provided with an external thread that mates with the internal thread.

5. The probe card holder according to claim 1, characterized in that, The fixed part of the movable fastener has a protrusion at the top and a groove at the bottom of the bent part. The opposite sides of the protrusion are flat, and the bottom edge of the groove is arc-shaped. The groove and the protrusion are engaged and rotatably connected by a fixing pin passing through the protrusion and the groove.

6. The probe card holder according to claim 1 or 5, characterized in that, The bent portion of the movable fastener includes a first connecting segment and a second connecting segment connected in sequence. The first connecting segment is a cone with a gradually increasing outer diameter and a spherical top, while the second connecting segment is cylindrical. The fixing portion of the movable fastener is at least partially a cylindrical segment, which has the same outer diameter as the second connecting segment.

7. The probe card holder according to claim 1, characterized in that, Two positioning planes are symmetrically arranged on the outer peripheral wall of the bent portion of the movable fastener. The positioning planes extend from the bottom end of the bent portion along the axis of the bent portion to the top end of the bent portion.

8. The probe card holder according to claim 1, characterized in that, The insulating sheet has a plurality of second mounting holes arranged circumferentially, and the side of the insulating sheet opposite to the fixed plate has a plurality of pressure detection elements arranged circumferentially, and the pressure detection elements are located between adjacent second mounting holes.

9. The probe card holder according to claim 8, characterized in that, The pressure detection element has an arc-shaped sheet structure, and the radial width of the pressure detection element is less than or equal to the radial width of the insulating sheet.

10. A wafer testing apparatus, characterized in that, Includes the probe card holder as described in any one of claims 1-9.

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