Low leakage cantilever probe card

Abstract

The utility model discloses a kind of low leakage cantilever probe card, it is related to the technical field of semiconductor testing device, including bottom plate, probe seat, probe support, cantilever probe and limiting component, bottom plate is opened with through slot, probe seat is fixedly arranged in through slot, probe support is provided with two groups and symmetrically arranged in the bottom of probe seat, probe support is opened with several equidistant interval arranged positioning slot, cantilever probe is provided with several and respectively embedded in corresponding positioning slot, limiting component includes cover and pressing block, cover is covered in the bottom of probe seat, pressing block is fixedly connected with cover, pressing block is provided with several and with corresponding positioning slot sliding fit connection. By the sliding fit of pressing block and positioning slot, single cantilever probe replacement does not need to remove multilayer structure, also unnecessary to damage weld point or fixed plate, shorten operating time, and avoid repeatedly disassembling to the damage of surrounding cantilever probe and insulating layer, effectively maintain overall structure precision, significantly reduce maintenance cost.

Description

Technical Field

[0001] This utility model relates to the technical field of semiconductor testing devices, specifically to a low-leakage cantilever probe card. Background Technology

[0002] Cantilever probe cards are key components in semiconductor chip testing, used to achieve electrical connections between wafers and testing equipment. During testing, the cantilever probe card is fixed to a cantilever probe stage via a clamping mechanism. The cantilever probe stage drives the card body to move, precisely aligning the probe tip with the target test point on the wafer. Electrical signals generated by external testing equipment are transmitted to the cantilever probe via the probe card's signal transmission layer (such as pads and wires), and then input to the chip through the ohmic contact between the probe tip and the pad. The chip's response signal then returns along the same path to the testing equipment, completing the measurement of electrical performance parameters such as voltage, current, and resistance.

[0003] In the existing technical solutions, Chinese patent with authorization announcement number CN215728261U discloses a low leakage cantilever probe card. Each cantilever probe is fixed to a ceramic ring with an independent epoxy resin fixing plate. The epoxy resin fixing plates between the cantilever probes are not connected, thereby effectively avoiding leakage between the cantilever probes. The ceramic ring has good insulation properties, thereby avoiding leakage between the cantilever probes and the mounting plate, and reducing the leakage value of the probe card.

[0004] The shortcomings of the existing technical solutions are as follows: because the cantilever probe is welded and fixed to the pads, and the epoxy resin fixing plate and the ceramic ring are rigidly connected, replacing a single damaged cantilever probe requires first removing multiple layers of structure such as the fixing seat and reinforcing plate, and then damaging the epoxy resin fixing plate or the solder joints of the pads. This process can easily damage the insulation layer of surrounding cantilever probes or the ceramic ring. This destructive maintenance method is not only time-consuming, but may also lead to a decrease in the overall structural accuracy due to repeated disassembly and assembly, indirectly increasing the cost of use. Utility Model Content

[0005] This invention provides a low-leakage cantilever probe card, which solves the problem in the prior art where the cantilever probe is welded and fixed to the pad and the epoxy resin fixing plate and ceramic ring are rigidly connected. This results in the need to dismantle multiple layers of structure and damage related components when replacing a single damaged cantilever probe. This destructive maintenance is not only time-consuming, but also easily damages surrounding components, reduces the overall structural precision, and indirectly increases the cost of use.

[0006] A low-leakage cantilever probe holder includes a base plate, a probe holder, a probe support, cantilever probes, and a limiting assembly. The base plate has a through slot, and the probe holder is fixedly disposed within the through slot. Two sets of probe supports are symmetrically arranged at the bottom of the probe holders, each with several equally spaced positioning slots. Several cantilever probes are disposed and embedded in their respective positioning slots. The base plate has multiple solder pads, and one end of each cantilever probe is soldered to a corresponding solder pad. The limiting assembly includes a cover plate and pressure blocks. The cover plate covers the bottom of the probe holder, and the pressure blocks are fixedly connected to the cover plate. Several pressure blocks are provided and slidably engaged with their respective positioning slots. The limiting assembly also includes a slider. The bottom of the probe holder has a sliding groove, and the slider is slidably disposed within the sliding groove. A locking block is fixedly disposed at the bottom of the slider, and a locking groove that engages with the locking block is formed at the top of the cover plate.

[0007] According to one embodiment of the present invention, the limiting component further includes a guide post, which is fixedly disposed horizontally in the slide groove, and the slider has a sliding hole that slides with the guide post.

[0008] According to one embodiment of the present invention, the limiting component further includes an anti-detachment ring, which is fixedly disposed at one end of the guide post, and the outer diameter of the anti-detachment ring is larger than the inner diameter of the sliding hole.

[0009] According to one embodiment of the present invention, the limiting component further includes an elastic element, which is disposed in the slide groove. One end of the elastic element is fixedly connected to the slider, and the other end of the elastic element abuts against the slide groove.

[0010] According to one embodiment of the present invention, the top of the card block is provided with an inclined guide surface.

[0011] According to one embodiment of the present invention, the bottom of the probe holder is fixedly provided with a plurality of limiting posts arranged in a rectangular array, and the cover plate is provided with a plurality of limiting holes that slide in cooperation with the corresponding limiting posts.

[0012] According to one embodiment of the present invention, both the probe holder and the pressure block are made of insulating material.

[0013] According to one embodiment of the present invention, both the probe holder and the cover plate are provided with interconnected observation slots.

[0014] According to one embodiment of the present invention, a handle is fixedly provided on the top of the base plate, and the handle is a U-shaped structure.

[0015] The advantages of this utility model compared to the prior art are:

[0016] The sliding fit between the pressure block and the positioning groove allows for the replacement of a single cantilever probe without disassembling multiple layers of structure or damaging solder joints or fixing plates. This shortens operation time and avoids damage to surrounding cantilever probes and insulation layers caused by repeated disassembly and assembly, effectively maintaining the overall structural accuracy and significantly reducing maintenance costs.

[0017] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0018] The above and / or additional aspects and advantages of this utility model will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which:

[0019] Figure 1 This is a schematic diagram of the three-dimensional structure of a low-leakage cantilever probe card.

[0020] Figure 2 This is a three-dimensional structural diagram of the base plate of this utility model.

[0021] Figure 3 This is a three-dimensional structural diagram of the probe holder in this utility model.

[0022] Figure 4 This is a three-dimensional structural diagram of the limiting component in this utility model.

[0023] Figure 5 This is a three-dimensional structural cross-sectional view of the probe holder in this utility model.

[0024] The reference numerals in the figures include:

[0025] 1. Base plate; 2. Probe holder; 3. Probe bracket; 4. Cantilever probe; 5. Limiting assembly; 6. Positioning groove; 7. Solder pad; 8. Cover plate; 9. Pressure block; 10. Slider; 11. Slide groove; 12. Locking block; 13. Locking slot; 14. Guide post; 15. Sliding hole; 16. Anti-detachment ring; 17. Elastic element; 18. Guide surface; 19. Limiting post; 20. Limiting hole; 21. Observation groove; 22. Handle. Detailed Implementation

[0026] The specific embodiments of this utility model are described in detail below, but it should be understood that the protection scope of this utility model is not limited to the specific embodiments.

[0027] like Figures 1 to 5As shown, a low-leakage cantilever probe clip includes a base plate 1, a probe holder 2, a probe support 3, cantilever probes 4, and a limiting component 5. The base plate 1 has a through groove, and the probe holder 2 is fixedly installed in the through groove. Two sets of probe supports 3 are arranged symmetrically at the bottom of the probe holder 2. The probe supports 3 have several positioning grooves 6 arranged at equal intervals. Several cantilever probes 4 are provided and are respectively embedded in the corresponding positioning grooves 6. The base plate 1 has multiple pads 7, and one end of each cantilever probe 4 is welded to the corresponding pad 7. The limiting component 5 includes a cover plate 8 and a pressure block 9. The cover plate 8 covers the bottom of the probe holder 2, and the pressure block 9 is fixedly connected to the cover plate 8. Several pressure blocks 9 are provided and are slidably connected to the corresponding positioning grooves 6. The limiting component 5 also includes a slider 10. The bottom of the probe base 2 is provided with a sliding groove 11. The slider 10 is slidably disposed in the sliding groove 11. The bottom of the slider 10 is fixedly provided with a locking block 12. The top of the cover plate 8 is provided with a locking groove 13 that cooperates with the locking block 12.

[0028] The through slot in the base plate 1 provides rigid support for the probe holder 2. Two sets of symmetrical probe supports 3 limit the cantilever probes 4 through the positioning slots 6. After each cantilever probe 4 is embedded in the corresponding positioning slot 6, the pressure block 9 of the limiting component 5 is placed on the bottom of the probe holder 2 along with the cover plate 8, slidingly engaging with the positioning slot 6 and pressing the cantilever probe 4 to ensure the stability of the probe tip position. One end of the cantilever probe 4 is soldered to the pad 7 on the base plate 1 to form a signal transmission path, and the other end contacts the wafer pad 7 during testing to complete the bidirectional transmission of electrical signals.

[0029] During maintenance, push the slider 10 at the bottom of the probe holder 2 to slide along the slide groove 11, so that the locking block 12 at the bottom of the slider 10 separates from the locking groove 13 at the top of the cover plate 8, and then the cover plate 8 can be removed; then slide the pressure block 9 away from the positioning groove 6, directly pull out the damaged cantilever probe 4 and replace it with a new probe, slide the pressure block 9 back into the positioning groove 6 to press it tight, and then drive the locking block 12 to engage with the locking groove 13 through the slider 10 to fix the cover plate 8, thus completing the maintenance.

[0030] The sliding fit between the pressure block 9 and the positioning groove 6 allows for the replacement of a single cantilever probe 4 without disassembling the multi-layer structure or damaging the solder joints or fixing plate. This shortens the operation time and avoids damage to the surrounding cantilever probes 4 and insulation layer caused by repeated disassembly and assembly, effectively maintaining the overall structural accuracy and significantly reducing maintenance costs.

[0031] According to one embodiment of the present invention, the limiting component 5 further includes a guide post 14, which is horizontally fixedly disposed within the slide groove 11. The slider 10 has a sliding hole 15 that slides with the guide post 14. The limiting component 5 also includes an anti-detachment ring 16, which is fixedly disposed at one end of the guide post 14, and the outer diameter of the anti-detachment ring 16 is larger than the inner diameter of the sliding hole 15. The guide post 14 is horizontally fixed within the slide groove 11, and the slider 10 slides with the guide post 14 through the sliding hole 15, allowing the slider 10 to move smoothly along the axis of the guide post 14, preventing deviation or jamming during sliding. The anti-detachment ring 16, fixed at one end of the guide post 14, has an outer diameter larger than the inner diameter of the sliding hole 15, which prevents the slider 10 from detaching from the end of the guide post 14, ensuring that the slider 10 always moves within the slide groove 11.

[0032] According to one embodiment of this utility model, the limiting component 5 further includes an elastic element 17, which is disposed within the slide groove 11. One end of the elastic element 17 is fixedly connected to the slider 10, and the other end of the elastic element 17 abuts against the slide groove 11. The elastic element 17 is a spring. When the slider 10 is pushed to separate the locking block 12 from the locking groove 13, the spring is compressed and stores elastic potential energy; after the slider 10 is released, the spring force pushes the slider 10 back to its original position, causing the locking block 12 to automatically engage with the locking groove 13, thereby achieving rapid fixation of the cover plate 8.

[0033] According to one embodiment of this utility model, the top of the locking block 12 is provided with an inclined guide surface 18. When the cover plate 8 is installed, the inclined guide surface 18 on the top of the locking block 12 can contact the edge of the locking groove 13 and provide a guiding effect. When the cover plate 8 is installed upward, the guide surface 18 slides against the wall of the locking groove 13, and the inclined force pushes the slider 10 to temporarily retract along the sliding groove 11 until the locking block 12 is fully inserted into the locking groove 13.

[0034] According to one embodiment of this utility model, a plurality of limiting posts 19 arranged in a rectangular array are fixedly provided at the bottom of the probe base 2, and the cover plate 8 has a plurality of limiting holes 20 that slide in cooperation with the corresponding limiting posts 19. The limiting posts 19 at the bottom of the probe base 2 slide in cooperation with the limiting holes 20 of the cover plate 8. When the cover plate 8 is in place, the limiting posts 19 are inserted into the limiting holes 20 and guide the cover plate 8 to move in the vertical direction, ensuring that the relative position of the cover plate 8 and the probe base 2 is accurate, so that the pressure block 9 can be accurately aligned with the positioning groove 6.

[0035] According to one embodiment of this utility model, both the probe holder 3 and the pressure block 9 are made of insulating material. The use of insulating material (such as epoxy resin or ceramic) for the probe holder 3 and the pressure block 9 can block leakage paths between the cantilever probes 4 and between the cantilever probe 4 and the limiting component 5, thus avoiding signal crosstalk or increased leakage current due to component conductivity.

[0036] According to one embodiment of this utility model, both the probe holder 2 and the cover plate 8 are provided with interconnected observation slots 21. The interconnected observation slots 21 on the probe holder 2 and the cover plate 8 allow direct observation of the installation status and tip position of the cantilever probe 4 through optical equipment (such as a microscope), enabling routine inspections or troubleshooting without disassembling the cover plate 8.

[0037] According to one embodiment of this utility model, a handle 22 is fixedly provided on the top of the base plate 1, and the handle 22 has a U-shaped structure. The U-shaped handle 22 on the top of the base plate 1 provides a convenient gripping point for the handling and installation of the probe card, making it easy for operators to place and pick up the probe card.

[0038] The above-disclosed embodiments are only a few specific examples of the present utility model. However, the embodiments of the present utility model are not limited thereto. Any changes that can be conceived by those skilled in the art should fall within the protection scope of the present utility model.

Claims

1. A low-leakage cantilever probe card, characterized in that, The device includes a base plate (1), a probe holder (2), a probe bracket (3), a cantilever probe (4), and a limiting component (5). The base plate (1) has a through groove, and the probe holder (2) is fixedly installed in the through groove. Two sets of probe brackets (3) are arranged symmetrically at the bottom of the probe holder (2). The probe brackets (3) have several equidistant positioning grooves (6). Several cantilever probes (4) are installed and are respectively embedded in the corresponding positioning grooves (6). The base plate (1) has multiple pads (7), and one end of each cantilever probe (4) is welded to the corresponding pad (7). The limiting component (5) includes a cover plate (8) and a pressure block (9). The cover plate (8) covers the bottom of the probe holder (2), and the pressure block (9) is fixedly connected to the cover plate (8). Several pressure blocks (9) are installed and are slidably connected to the corresponding positioning grooves (6).

2. The low leakage current cantilever probe card as described in claim 1, characterized in that, The limiting component (5) also includes a slider (10). The bottom of the probe seat (2) is provided with a groove (11). The slider (10) is slidably disposed in the groove (11). The bottom of the slider (10) is fixedly provided with a locking block (12). The top of the cover plate (8) is provided with a locking groove (13) that cooperates with the locking block (12).

3. The low leakage current cantilever probe card as described in claim 2, characterized in that, The limiting component (5) also includes a guide post (14), which is fixedly arranged in a horizontal state in the slide groove (11), and the slider (10) has a sliding hole (15) that slides with the guide post (14).

4. A low-leakage cantilever probe card as described in claim 3, characterized in that, The limiting component (5) also includes an anti-detachment ring (16), which is fixedly disposed at one end of the guide post (14), and the outer diameter of the anti-detachment ring (16) is larger than the inner diameter of the sliding hole (15).

5. A low-leakage cantilever probe card as described in claim 2, characterized in that, The limiting component (5) also includes an elastic element (17), which is disposed in the slide groove (11). One end of the elastic element (17) is fixedly connected to the slider (10), and the other end of the elastic element (17) abuts against the slide groove (11).

6. A low-leakage cantilever probe card as described in claim 2, characterized in that, The top of the card block (12) is provided with an inclined guide surface (18).

7. A low-leakage cantilever probe card as described in claim 1, characterized in that, The probe base (2) is fixedly provided with a number of limiting posts (19) arranged in a rectangular array at its bottom, and the cover plate (8) is provided with a number of limiting holes (20) that slide with the corresponding limiting posts (19).

8. A low-leakage cantilever probe card as described in claim 1, characterized in that, Both the probe holder (3) and the pressure block (9) are made of insulating material.

9. A low-leakage cantilever probe card as described in claim 1, characterized in that, Both the probe holder (2) and the cover plate (8) are provided with interconnected observation slots (21).

10. A low-leakage cantilever probe card as described in claim 1, characterized in that, A handle (22) is fixedly provided on the top of the base plate (1), and the handle (22) is a U-shaped structure.

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