A substrate sheet soaking box

Abstract

The substrate piece bubble water box provided by the embodiment of the present application relates to the technical field of semiconductor substrate material manufacturing, and the substrate piece bubble water box comprises a box body structure, a lifting assembly and a supporting structure. The box body structure comprises a box body, and the box body has a liquid containing cavity. The lifting assembly comprises a lifting driving mechanism and the supporting structure. The lifting driving mechanism is arranged outside the liquid containing cavity. The supporting structure comprises a first connecting part and a supporting plate. The projection of the first connecting part in a first direction is located in the liquid containing cavity. The lifting driving mechanism is connected with the upper end of the first connecting part. The supporting plate is connected with the lower end of the first connecting part. The lifting driving mechanism is used for driving the first connecting part to lift. In the embodiment of the present application, the lifting driving mechanism does not extend into the liquid containing cavity during the lifting of the supporting plate, which can reduce the pollution of the liquid in the liquid containing cavity by the lifting driving mechanism, and helps to ensure the cleanliness of the liquid in the liquid containing cavity.

Description

Technical Field

[0001] This application relates to the field of semiconductor substrate material manufacturing technology, and in particular to a substrate soaking box. Background Technology

[0002] In related technologies, indium phosphide (IP) substrates have applications in the manufacture of high-frequency, high-power devices, fiber optic communications, wireless transmission, and radio astronomy. They are highly competitive in the RF front-end of radar and communication systems, and in analog / mixed-signal wide-bandwidth circuits, making them suitable for high-speed data processing and high-precision wide-bandwidth A / D conversion applications. Furthermore, IPP-based RF devices, such as low-noise amplifiers, modules, and receivers, are widely used in satellite communications, millimeter-wave radar, and active and passive millimeter-wave imaging equipment. At bandwidth levels above 100 GHz, IPP-based RF devices offer significant advantages in backhaul networks and point-to-point communication networks. In the future, IPP substrates are expected to become the mainstream substrate material for RF devices in 6G and even 7G wireless transmission networks. During the substrate manufacturing process, the substrate needs to be immersed in a water bath for cleaning. However, in existing water baths, the lifting mechanism descends into the water bath along with the workpiece, easily contaminating the liquid and consequently contaminating the substrate. Utility Model Content

[0003] This application aims to at least solve one of the technical problems existing in the prior art. To this end, this application proposes a substrate soaking box that can reduce the probability of liquid contamination in the substrate soaking box.

[0004] Embodiments of this application provide a substrate soaking box, comprising:

[0005] The box structure includes a box body, the box body having a liquid containing cavity;

[0006] A lifting assembly includes a lifting drive mechanism and a supporting structure. The lifting drive mechanism is disposed outside the liquid containing cavity. The supporting structure includes a first connecting part and a supporting plate. The projection of the first connecting part along a first direction is located inside the liquid containing cavity. The lifting drive mechanism is connected to the upper end of the first connecting part, and the supporting plate is connected to the lower end of the first connecting part. The lifting drive mechanism is used to drive the first connecting part to move up and down.

[0007] Furthermore, the box body has an installation cavity, the box structure includes a partition, the liquid containing cavity and the installation cavity are separated by the partition, wherein the lifting drive mechanism is installed in the installation cavity.

[0008] Furthermore, the lifting drive mechanism includes a drive structure, a drive connecting plate, and a horizontal plate. The upper end of the drive connecting plate is connected to the upper end of the first connecting part through the horizontal plate. The drive structure is disposed in the mounting cavity and is used to drive the drive connecting plate to lift.

[0009] Furthermore, the driving structure includes a guide rod, a lead screw, a base plate, and a driving component. The base plate is connected to the lower end of the driving connecting plate. The base plate is provided with driving holes and through holes at intervals. The lead screw is connected to the driving holes, the guide rod is slidably connected to the through holes, and the driving component is connected to the lead screw. The driving component is used to drive the lead screw to rotate.

[0010] Furthermore, the drive component includes a handle and a turntable, the turntable being connected to the handle and the lead screw respectively, wherein the handle and the lead screw are eccentrically positioned.

[0011] Furthermore, the lifting assembly includes two first support seats, which are spaced apart. The lead screw is rotatably mounted on the two first support seats, and the second support seat can limit the position of the base plate.

[0012] Furthermore, the lifting assembly includes two second support seats, and the guide rod is rotatably mounted on the two second support seats, which can limit the position of the base plate.

[0013] Furthermore, the driving component includes a motor, the output end of which is connected to the lead screw via a transmission assembly.

[0014] Furthermore, the first connecting part, the supporting plate, the horizontal plate, and the driving connecting plate are an integral structure.

[0015] Furthermore, the support plate is arranged perpendicular to the first connecting portion.

[0016] Furthermore, the housing structure includes a receiving cavity located on one side of the liquid receiving cavity.

[0017] As can be seen from the above technical solutions, the embodiments of this application have at least the following beneficial effects:

[0018] In the substrate soaking box provided in this embodiment, the lifting drive mechanism is located outside the liquid containing cavity. The lifting drive mechanism drives the first connecting part and the support plate to move up and down in a first direction, immersing the workpiece placed on the support plate into the liquid in the liquid containing cavity, or lifting the workpiece immersed in the liquid containing cavity. During the lifting and lowering of the support plate, the lifting drive mechanism does not extend into the liquid containing cavity, thus avoiding contamination of the liquid in the containing cavity by the lifting drive mechanism and helping to reduce workpiece contamination. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of the structure of a substrate soaking box provided in one embodiment of this application;

[0021] Figure 2 This is a schematic diagram illustrating the working relationship between the substrate soaking box and the workpiece according to one embodiment of this application;

[0022] Figure 3 This is a top view schematic diagram of the substrate soaking box and the workpiece in one embodiment of this application;

[0023] Figure 4 for Figure 3 A schematic diagram of the cross-sectional structure at position AA in the middle.

[0024] Figure label:

[0025] 1. Workpiece;

[0026] 110. Box body; 111. Liquid containing cavity; 112. Mounting cavity; 113. Containing cavity; 120. Partition;

[0027] 210. Lifting drive mechanism; 2111. Guide rod; 2112. Lead screw; 2113. Base plate; 2114. Handle; 2115. Turntable; 212. Drive connecting plate; 213. Horizontal plate; 220. Support structure; 221. First connecting part; 222. Support plate; 230. First support seat; 240. Second support seat. Detailed Implementation

[0028] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0029] See Figures 1 to 4 As shown, an embodiment of the first aspect of this application discloses a substrate soaking box, including a box structure and a lifting assembly.

[0030] Specifically, the box structure includes a box body 110, which has a liquid containing cavity 111; the lifting assembly includes a lifting drive mechanism 210 and a supporting structure 220. The lifting drive mechanism 210 is located outside the liquid containing cavity 111, and the supporting structure 220 includes a first connecting part 221 and a supporting plate 222. The projection of the first connecting part 221 along a first direction is located inside the liquid containing cavity 111. The lifting drive mechanism 210 is connected to the upper end of the first connecting part 221, and the supporting plate 222 is connected to the lower end of the first connecting part 221. The supporting plate 222 is used to support the workpiece 1 to be soaked, and the lifting drive mechanism 210 is used to drive the first connecting part 221 to lift.

[0031] The first direction is Figure 1 , Figure 2 or Figure 4 The Z-direction. In practical applications, the Z-direction is the vertical direction.

[0032] In the substrate soaking box disclosed in this application embodiment, the lifting drive mechanism 210 is disposed outside the liquid containing cavity 111. The lifting drive mechanism 210 drives the first connecting part 221 and the support plate 222 to move up and down in the first direction, so that the workpiece 1 placed on the support plate 222 can be immersed in the liquid in the liquid containing cavity 111, or the workpiece 1 immersed in the liquid containing cavity 111 can be lifted up.

[0033] In this embodiment, during the lifting and lowering process of the support plate 222, the lifting drive mechanism 210 does not extend into the liquid receiving cavity 111, which can reduce the possibility of the liquid in the liquid receiving cavity 111 being contaminated by the lifting drive mechanism 210 and help ensure the cleanliness of the liquid in the liquid receiving cavity 111.

[0034] In some embodiments of this application, see Figures 1 to 4The housing body 110 has a mounting cavity 112. The housing structure includes a partition 120, and the liquid containing cavity 111 and the mounting cavity 112 are separated by the partition 120. The lifting drive mechanism 210 is installed in the mounting cavity 112. The lifting drive mechanism 210 installed in the mounting cavity 112 can effectively avoid external interference and ensure the normal lifting and lowering of the lifting drive mechanism 210. At the same time, the lifting drive mechanism 210 is installed in the mounting cavity 112, and the mounting cavity 112 is flush with the liquid containing cavity 111. The bottom of the mounting cavity 112 and the partition 120 can provide support for the installation of the lifting drive mechanism 210, which helps to simplify the installation structure of the lifting drive mechanism 210, ensures the stability of the lifting drive mechanism 210, and improves the ease of installation of the lifting drive mechanism 210.

[0035] In some embodiments of this application, please refer to... Figures 1 to 4 The lifting drive mechanism 210 includes a drive structure, a drive connecting plate 212, and a horizontal plate 213. The upper end of the drive connecting plate 212 is connected to the upper end of the first connecting part 221 via the horizontal plate 213. The drive structure is disposed within the mounting cavity 112 and is used to drive the drive connecting plate 212 to move up and down. The drive connecting plate 212, the horizontal plate 213, and the first connecting part 221 define a clearance space, and the partition plate 120 is clearance-fitted with this clearance space. The clearance space facilitates the first connecting part 221 to extend into the liquid receiving cavity 111.

[0036] In some embodiments of this application, see Figure 2 and Figure 4 The driving structure includes a guide rod 2111, a lead screw 2112, a base plate 2113, and a driving component. The base plate 2113 is connected to the lower end of the driving connecting plate 212. The base plate 2113 has driving holes and through holes spaced apart. The lead screw 2112 is connected to the driving holes, and the guide rod 2111 is slidably connected to the through holes. The driving component is connected to the lead screw 2112 and is used to drive the lead screw 2112 to rotate. The guide rod 2111 and the lead screw 2112 are arranged parallel to each other, and both are parallel to the Z-direction, which is the vertical direction.

[0037] In the above embodiment, the driving member rotates the lead screw 2112, which can drive the base plate 2113 that cooperates with the lead screw 2112 to move in the Z direction. The base plate 2113 is connected to the driving connecting plate 212. Therefore, it can drive the first connecting part 221 and the support plate 222 connected to it to move in the Z direction, so that the workpiece 1 placed in the support plate 222 is immersed in the liquid in the liquid receiving cavity 111 along with the support plate 222, or the workpiece 1 immersed in the liquid in the liquid receiving cavity 111 is moved out of the liquid receiving cavity 111.

[0038] In one possible implementation, see Figures 2 to 4The driving component includes a handle 2114 and a turntable 2115. The turntable 2115 is connected to both the handle 2114 and the lead screw 2112, with the handle 2114 and the lead screw 2112 being eccentrically positioned. Thus, by driving the handle 2114 to rotate around the lead screw 2112, the turntable 2115 can be driven to rotate, thereby causing the lead screw 2112 connected to the turntable 2115 to rotate.

[0039] In this embodiment, the lifting drive mechanism 210 is set in the mounting cavity 112, which can reduce the installation height of the lead screw 2112, thereby making it easier for the operator to operate the handle 2114.

[0040] In some other embodiments, the drive component includes a motor, the output of which is connected to the lead screw 2112 via a transmission assembly. Thus, the support plate 222 can be raised or lowered by controlling the rotation of the motor.

[0041] In some embodiments of this application, the guide rod 2111 can be set as one or more as needed to ensure the stability of the base plate 2113 during movement.

[0042] In some embodiments of this application, see Figures 2 to 4 The lifting assembly includes two first support seats 230, which are spaced apart. A lead screw 2112 is rotatably mounted on the two first support seats 230. A second support seat 240 can limit the position of the base plate 2113. In this way, the base plate 2113 can be prevented from disengaging from the lead screw 2112, thus improving the safety of the lifting drive mechanism 210.

[0043] In some embodiments of this application, see Figures 2 to 4 The lifting assembly includes two second support seats 240, and the guide rod 2111 is rotatably mounted on the two second support seats 240. The second support seats 240 can limit the bottom plate 2113. In this way, the bottom plate 2113 can be prevented from disengaging from the lead screw 2112, thus improving the safety of the lifting drive mechanism 210.

[0044] In some embodiments of this application, the first connecting part 221, the support plate 222, the cross plate 213 and the drive connecting plate 212 are integrated into one structure to simplify their structural connection and reduce the weight of the device.

[0045] In some embodiments of this application, the support plate 222 is disposed perpendicular to the first connecting portion 221. When the first connecting surface coincides with the vertical plane, the support plate 222 can be placed horizontally, thus facilitating the support of the workpiece 1.

[0046] In some embodiments of this application, the housing structure includes a receiving cavity 113, which is located on one side of the liquid receiving cavity 111.

[0047] In one possible application scenario, workpiece 1 is specifically a wafer storage box containing substrate wafers. In actual application, ultrapure water is added to the liquid containing cavity 111. Then, the handle 2114 is manually cranked to rotate the lead screw 2112, thereby lifting the support plate 222 and placing the wafer storage box containing the substrate wafers on the support plate 222. The handle 2114 is then manually cranked to rotate the lead screw 2112, causing the support plate 222 to sink into the liquid containing cavity 111. At this time, the substrate wafers and the wafer storage box are immersed in ultrapure water.

[0048] In the description of this application, it should be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0049] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, unless otherwise stated, "a plurality of" means two or more.

[0050] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0051] In the description of this specification, specific features, structures, materials, or characteristics may be combined in any suitable manner in one or more embodiments or examples.

[0052] It should be understood that although the steps in the flowcharts of the accompanying figures are shown sequentially as indicated by the arrows, these steps are not necessarily executed in the order indicated by the arrows. Unless explicitly stated herein, there is no strict order restriction on the execution of these steps, and they can be executed in other orders. Moreover, at least some steps in the flowcharts of the accompanying figures may include multiple sub-steps or multiple stages. These sub-steps or stages are not necessarily completed at the same time, but can be executed at different times, and their execution order is not necessarily sequential, but can be performed alternately or in turn with other steps or at least some of the sub-steps or stages of other steps.

Claims

1. A substrate soaking box, characterized in that, include: The box structure includes a box body, the box body having a liquid-containing cavity; A lifting assembly includes a lifting drive mechanism and a supporting structure. The lifting drive mechanism is disposed outside the liquid containing cavity. The supporting structure includes a first connecting part and a supporting plate. The projection of the first connecting part along a first direction is located inside the liquid containing cavity. The lifting drive mechanism is connected to the upper end of the first connecting part, and the supporting plate is connected to the lower end of the first connecting part. The lifting drive mechanism is used to drive the first connecting part to move up and down.

2. The substrate soaking box according to claim 1, characterized in that, The box body has an installation cavity, and the box structure includes a partition. The liquid containing cavity and the installation cavity are separated by the partition, wherein the lifting drive mechanism is installed in the installation cavity.

3. The substrate soaking box according to claim 1 or 2, characterized in that, The lifting drive mechanism includes a drive structure, a drive connecting plate, and a horizontal plate. The upper end of the drive connecting plate is connected to the upper end of the first connecting part through the horizontal plate. The drive structure is disposed in the mounting cavity and is used to drive the drive connecting plate to lift.

4. The substrate soaking box according to claim 3, characterized in that, The driving structure includes a guide rod, a lead screw, a base plate, and a driving component. The base plate is connected to the lower end of the driving connecting plate. The base plate is provided with driving holes and through holes at intervals. The lead screw is connected to the driving holes, and the guide rod is slidably connected to the through holes. The driving component is connected to the lead screw and is used to drive the lead screw to rotate.

5. The substrate soaking box according to claim 4, characterized in that, The drive unit includes a handle and a turntable, the turntable being connected to the handle and the lead screw respectively, wherein the handle and the lead screw are eccentrically positioned.

6. The substrate soaking box according to claim 4, characterized in that, The lifting assembly includes two first support seats, which are spaced apart. The lead screw is rotatably mounted on the two first support seats, and the second support seats can limit the position of the base plate; and / or, the lifting assembly includes two second support seats, and the guide rod is rotatably mounted on the two second support seats, and the second support seats can limit the position of the base plate.

7. The substrate soaking box according to claim 4, characterized in that, The driving component includes a motor, and the output end of the motor is connected to the lead screw via a transmission assembly.

8. The substrate soaking box according to claim 4, characterized in that, The first connecting part, the supporting plate, the horizontal plate and the driving connecting plate are an integral structure.

9. The substrate soaking box according to claim 1, characterized in that, The support plate is arranged perpendicular to the first connecting part.

10. The substrate soaking box according to claim 1, characterized in that, The housing structure includes a receiving cavity located on one side of the liquid receiving cavity.

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