A cleaning device

Abstract

The utility model relates to the technical field of semiconductor substrate manufacturing, especially to a kind of cleaning device, including fixed bracket, movable rod, pitch driver, adsorption platform and spray head, the movable rod is along the first direction extension arrangement, and rotationally connected in the fixed bracket, the adsorption platform is located in the top surface of movable rod, the adsorption platform is used to fixedly connect substrate sheet, the spray head is set in the above of adsorption platform, the pitch driver is connected in the movable rod, the pitch driver is used to drive the movable rod rotation, to change the pitch angle of adsorption platform. In conclusion, the utility model cleaning device can change the pitch angle of adsorption platform, to effectively clean the side of substrate sheet, and then reduce the probability that the edge position of substrate sheet remains particle and impurity, ensure that subsequent processing procedure can be smoothly completed.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor substrate manufacturing technology, and in particular to a cleaning device. Background Technology

[0002] Indium phosphide substrate is a semiconductor substrate with indium phosphide as its core material. It is one of the key basic materials for the manufacture of microelectronic and optoelectronic devices and is widely used in fields such as high-frequency and high-power devices, optical fiber communication, wireless transmission, and radio frequency devices in radio astronomy.

[0003] In the processing of indium phosphide substrates, cleaning is generally required after subtractive processing steps (such as slicing and chamfering) to ensure the smooth progress of the next processing step. Typically, the cleaning device is equipped with a nozzle that sprays a solution directly onto the end face of the substrate to clean it. While this effectively cleans the end face, the direction of the sprayed solution is parallel to the side of the substrate, failing to effectively clean the edges. This results in particles and impurities remaining at the edges, which can then affect the next processing step. Utility Model Content

[0004] The purpose of this invention is to provide a cleaning device to solve the technical problem that general substrate cleaning devices cannot effectively clean the edge areas of the substrate, resulting in particles and impurities remaining at the edge areas of the substrate, which in turn affects the next processing step.

[0005] To achieve the above objectives, this utility model provides a cleaning device, including a fixed frame, a movable rod, a pitch driver, an adsorption platform, and a nozzle. The movable rod extends along a first direction and is rotatably connected to the fixed frame. The adsorption platform is located on the top surface of the movable rod and is used to fix a substrate sheet. The nozzle is positioned downwards above the adsorption platform. The pitch driver is connected to the movable rod and is used to drive the movable rod to rotate, thereby changing the pitch angle of the adsorption platform.

[0006] Optionally, it also includes a transmission mechanism, which includes a guide rail, a connecting block, and a transmission rod. The guide rail is fixedly mounted on the fixed frame in the vertical direction. The connecting block is slidably connected to the guide rail in the vertical direction. The pitch driver is connected to one end of the connecting block. The other end of the connecting block is provided with a protrusion extending in a first direction. One end of the transmission rod is connected to the movable rod. The side of the transmission rod relative to the first direction is provided with a through-hole. The through-hole extends along the length direction of the transmission rod. The protrusion passes through the through-hole and is slidably connected to the through-hole.

[0007] The pitch driver can drive the bump to move upward above the movable rod, and / or the pitch driver can drive the bump to move downward below the movable rod.

[0008] Optionally, it includes a first link and a second link, one end of the first link is located below the guide rail and connected to the pitch driver, the other end of the first link is connected to one end of the second link, and the other end of the second link is rotatably connected to one end of the connecting block.

[0009] Optionally, the system may also include two movable rods, which are respectively located on both sides of the guide rail along the second direction. The transmission mechanism includes two transmission rods that correspond one-to-one with the movable rods, and the two transmission rods are correspondingly connected to the movable rods.

[0010] Optionally, it may also include a plurality of nozzles, which are spaced apart along the rotation axis of the movable rod and are respectively positioned above one of the adsorption platforms.

[0011] Optionally, it may also include multiple nozzles, and the multiple adsorption platforms are spaced apart along the first direction on the top surface of the movable rod, with each adsorption platform corresponding to at least one nozzle.

[0012] Optionally, one of the movable rods is provided with three of the adsorption platforms.

[0013] Optionally, it also includes a rotation driver, which is disposed on the bottom surface of the movable rod and connected to the adsorption platform. The rotation driver is used to drive the adsorption platform to rotate.

[0014] Optionally, the fixing frame includes two side plates and a fixing frame. The fixing frame includes a fixing rod and two columns. The two columns are spaced apart along a first direction. The two side plates are located between the two columns. The fixing rod extends along the first direction. Both ends of the fixing rod are respectively connected to the top ends of the two columns. The nozzle is fixedly mounted on the fixing rod. The two side plates are spaced apart along the first direction. The movable rod is located between the two side plates. Both ends of the movable rod are rotatably connected to the two side plates.

[0015] Optionally, one of the side plates has a mounting groove on its side away from the other side plate, the mounting groove being used to mount a guide rail.

[0016] Compared with the prior art, the cleaning device implemented in this utility model has the following advantages:

[0017] In this cleaning device, an adsorption platform is fixedly connected to a substrate sheet. A nozzle is mounted downwards on a fixed frame and positioned above the adsorption platform, allowing the nozzle to spray cleaning fluid downwards to clean the substrate sheet fixed to the adsorption platform. The adsorption platform is mounted on a movable rod, which is rotatably connected to the fixed frame. A pitch driver is connected to the movable rod, enabling the pitch driver to drive the movable rod to rotate, thereby causing the adsorption platform to pitch. When the adsorption platform pitches, the pitch angle changes, and the spray direction of the nozzle is no longer perpendicular to the end face of the substrate sheet, but forms an angle of less than 0°. The spray direction of the nozzle is no longer parallel to the side surface of the substrate sheet, but forms an angle of greater than 0°, allowing the cleaning fluid sprayed from the nozzle to effectively clean the side surface of the substrate sheet. In summary, this cleaning device can change the pitch angle of the adsorption platform to effectively clean the side surface of the substrate sheet, thereby reducing the probability of residual particles and impurities at the edges of the substrate sheet and ensuring the smooth completion of subsequent processing steps. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the cleaning device of this utility model equipped with a substrate.

[0019] Figure 2 for Figure 1 A magnified view of part A in the middle.

[0020] Figure 3 This is a front view of the cleaning device of this utility model equipped with a substrate.

[0021] Figure 4 The left view shows the cleaning device of this utility model equipped with a substrate.

[0022] Figure 5 This is a top view of the cleaning device of this utility model equipped with a substrate.

[0023] Figure 6 for Figure 5 Cross-sectional view of BB (rotated 90° counterclockwise).

[0024] Reference numerals: 1. Fixing frame; 11. Fixing frame; 111. Column; 112. Fixing rod; 12. Side plate; 121. Mounting slot; 2. Movable rod; 3. Pitch actuator; 4. Adsorption platform; 5. Nozzle; 6. Transmission mechanism; 61. Guide rail; 62. Connecting block; 63. Transmission rod; 631. Elongated hole; 64. Protrusion; 65. First connecting rod; 66. Second connecting rod; 7. Substrate. Detailed Implementation

[0025] The specific embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this utility model, but are not intended to limit its scope.

[0026] In the description of this utility model, it should be understood that the terms "top", "bottom", "inner", "outer", "circumferential", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0027] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0028] like Figures 1 to 6 As shown, a cleaning device of this utility model includes a fixed frame 1, a movable rod 2, a pitch driver 3, an adsorption platform 4, and a nozzle 5. The movable rod 2 extends along a first direction and is rotatably connected to the fixed frame 1. The adsorption platform 4 is located on the top surface of the movable rod 2 and is used to fix and connect a substrate sheet 7. The nozzle 5 is positioned downwards above the adsorption platform 4. The pitch driver 3 is connected to the movable rod 2 and is used to drive the movable rod 2 to rotate, thereby changing the pitch angle of the adsorption platform 4.

[0029] In the above technical solution, the adsorption platform 4 is fixedly connected to the substrate 7, and the nozzle 5 is mounted downwards on the fixing frame 1 and located above the adsorption platform 4, so that the nozzle 5 can spray cleaning liquid downwards to clean the substrate 7 fixed on the adsorption platform 4. The adsorption platform 4 is mounted on the movable rod 2, and the movable rod 2 is rotatably connected to the fixing frame 1. The pitch driver 3 is connected to the movable rod 2, so that the pitch driver 3 can drive the movable rod 2 to rotate, thereby causing the adsorption platform 4 to perform a pitching motion. When the adsorption platform 4 performs a pitching motion, the pitch angle of the adsorption platform 4 changes. The spray direction of the nozzle 5 is no longer perpendicular to the end face of the substrate 7, but has an angle of less than 0° between them. The spray direction of the nozzle 5 is no longer parallel to the side of the substrate 7, but has an angle of greater than 0°, so that the cleaning liquid sprayed by the nozzle 5 can effectively clean the side of the substrate 7. In summary, the cleaning device of this utility model can change the pitch angle of the adsorption platform 4 to effectively clean the side of the substrate 7, thereby reducing the probability of particles and impurities remaining at the edge of the substrate 7, and ensuring that subsequent processing steps can be completed smoothly.

[0030] The adsorption platform 4 can be a platform equipped with a suction cup, which can be an electric suction cup that can adsorb the substrate 7 at any time according to an electrical signal, and can also release the substrate 7 at any time according to an electrical signal. Since the substrate 7 is generally adsorbed and processed in the previous processing step, the adsorbed end face has fewer or even no particles and impurities. In the cleaning process, the end face of the substrate 7 can also be adsorbed and connected.

[0031] Furthermore, it also includes a transmission mechanism 6, which includes a guide rail 61, a connecting block 62, and a transmission rod 63. The guide rail 61 is fixedly mounted on the fixed frame 1 in the vertical direction. The connecting block 62 is slidably connected to the guide rail 61 in the vertical direction. The pitch driver 3 is connected to one end of the connecting block 62. The other end of the connecting block 62 is provided with a protrusion 64 extending in a first direction. One end of the transmission rod 63 is connected to the movable rod 2. The transmission rod 63 is provided with a through-hole 631 on its side relative to the first direction. The through-hole 631 extends along the length direction of the transmission rod 63. The protrusion 64 passes through the through-hole 631 and is slidably connected to the through-hole 631.

[0032] The pitch actuator 3 can drive the protrusion 64 to move upward above the movable rod 2, and / or the pitch actuator 3 can drive the protrusion 64 to move downward below the movable rod 2.

[0033] The pitch actuator 3 drives the connecting block 62 to move in the up and down direction, so that the outer side of the protrusion 64 abuts against the wall of the elongated hole 631, thereby pushing one end of the transmission rod 63 to rotate along the other end, realizing the function of rotating the movable rod 2; the pitch actuator 3 can be a piston cylinder (pneumatic cylinder, electric cylinder, and hydraulic cylinder).

[0034] Furthermore, it includes a first link 65 and a second link 66. One end of the first link 65 is located below the guide rail 61 and connected to the pitch driver 3. The other end of the first link 65 is connected to one end of the second link 66, and the other end of the second link 66 is rotatably connected to one end of the connecting block 62.

[0035] The pitch driver 3 drives the first link 65 to rotate and the second link 66 to swing, so as to convert the rotational motion of the pitch driver 3 into the linear motion of the connecting block 62. In this way, periodic reciprocating linear motion can be achieved through rotation, so that the adsorption platform 4 can periodically pitch back and forth to clean the adsorption platform 4 in multiple directions. The pitch driver 3 can be a rotary motor.

[0036] In addition, the adjustable pitch angle of the adsorption platform 4 in the attached figure is relatively small. The adjustable pitch angle can be increased by increasing the length of the first link 65, the second link 66 and the guide rail 61 in the transmission mechanism 6, thereby achieving a large pitch angle.

[0037] Furthermore, it also includes two movable rods 2, which are respectively disposed on both sides of the guide rail 61 along the second direction. The transmission mechanism 6 includes two transmission rods 63 that correspond one-to-one with the movable rods 2, and the two transmission rods 63 are correspondingly connected to the movable rods 2.

[0038] The transmission mechanism 6 can rotate the movable rods 2 on both sides at the same time to increase the number of substrates 7 that can be cleaned at the same time, thereby increasing the cleaning efficiency.

[0039] Furthermore, it also includes multiple nozzles 5, which are spaced apart along the rotation axis of the movable rod 2, and are respectively positioned above one of the adsorption platforms 4.

[0040] Multiple nozzles 5 simultaneously spray cleaning fluid, forming a straight water flow to clean the substrate 7 over a wide area efficiently.

[0041] Among them, the self-rotation of the adsorption platform 4 enables more uniform and efficient cleaning.

[0042] Furthermore, it also includes multiple nozzles 5, and multiple adsorption platforms 4 are spaced apart on the top surface of the movable rod 2 along the first direction. Each adsorption platform 4 corresponds to at least one nozzle 5, so as to clean multiple substrate sheets 7 at the same time, thereby improving cleaning efficiency.

[0043] Furthermore, one of the movable rods 2 is provided with three adsorption platforms 4, which improves the cleaning efficiency and avoids the situation where too many adsorption platforms 4 are provided on one movable rod 2, causing the movable rod 2 to deform.

[0044] Furthermore, it also includes a rotation driver, which is located on the bottom surface of the movable rod 2 and connected to the adsorption platform 4. The rotation driver is used to drive the adsorption platform 4 to rotate.

[0045] Furthermore, the fixing frame 1 includes two side plates 12 and a fixing frame 11. The fixing frame 11 includes a fixing rod 112 and two columns 111. The two columns 111 are spaced apart along a first direction. The two side plates 12 are located between the two columns 111. The fixing rod 112 extends along the first direction. The two ends of the fixing rod 112 are respectively connected to the top ends of the two columns 111. The nozzle 5 is fixedly mounted on the fixing rod 112. The two side plates 12 are spaced apart along the first direction. The movable rod 2 is located between the two side plates 12. The two ends of the movable rod 2 are respectively rotatably connected to the two side plates 12.

[0046] The side plate 12 is used to connect the movable rod 2 and set the transmission mechanism 6, and the fixing hole is used to set the nozzle 5.

[0047] Additionally, the pitch driver 3 can be mounted on the side plate 12.

[0048] Furthermore, one of the side plates 12 is provided with a mounting groove 121 on the side away from the other side plate 12, the mounting groove 121 being used to mount the guide rail 61.

[0049] The mounting slot 121 is used to provide more space for the transmission mechanism 6.

[0050] Furthermore, each actuator can be an electric motor or a piston cylinder (pneumatic cylinder, electric cylinder, and hydraulic cylinder).

[0051] Furthermore, fixed setting and fixed connection refer to the fixed relative positional relationship of two components, including but not limited to fixing by connectors, fixing by welding, fixing by adhesive, fixing by integral molding, and fixing by snap-fit ​​connection.

[0052] Furthermore, sliding connection and sliding setting refer to the connection between two connected components, where one component can slide along a fixed trajectory on the other component, including but not limited to connection by sliding a slider into a groove or connection by inserting a slider into a hole whose size and profile match the slider.

[0053] Furthermore, rotatable connection and rotatable setting refer to the fact that the two connected components can rotate, including but not limited to connection through bearings and connection through clearance fit.

[0054] Furthermore, the connectors include, but are not limited to, fasteners, straps, ropes, pneumatic connectors, hydraulic connectors, flanges, Velcro, and buttons.

[0055] In summary, the present invention provides a cleaning device, the technical effects of which are as follows:

[0056] In this cleaning device, an adsorption platform 4 is fixedly connected to a substrate 7. A nozzle 5 is mounted downwards on a fixed frame 1 and positioned above the adsorption platform 4, allowing the nozzle 5 to spray cleaning liquid downwards to clean the substrate 7 fixed to the adsorption platform 4. The adsorption platform 4 is mounted on a movable rod 2, which is rotatably connected to the fixed frame 1. A pitch driver 3 is connected to the movable rod 2, enabling the pitch driver 3 to drive the movable rod 2 to rotate, thereby causing the adsorption platform 4 to perform a pitching motion. When the adsorption platform 4 performs a pitching motion, the pitch angle of the adsorption platform 4 changes. When the angle changes, the spray direction of the nozzle 5 and the end face of the substrate 7 are no longer perpendicular, but have an angle of less than 0°. The spray direction of the nozzle 5 and the side of the substrate 7 are no longer parallel, but have an angle of greater than 0°, so that the cleaning liquid sprayed by the nozzle 5 can effectively clean the side of the substrate 7. In summary, the cleaning device of this utility model can change the pitch angle of the adsorption platform 4 to effectively clean the side of the substrate 7, thereby reducing the probability of particles and impurities remaining at the edge of the substrate 7 and ensuring that subsequent processing steps can be completed smoothly.

[0057] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements and substitutions can be made without departing from the technical principles of the present utility model, and these improvements and substitutions should also be considered within the protection scope of the present utility model.

Claims

1. A cleaning device, characterized in that, The device includes a fixed frame (1), a movable rod (2), a pitch driver (3), an adsorption platform (4), and a nozzle (5). The movable rod (2) extends along a first direction and is rotatably connected to the fixed frame (1). The adsorption platform (4) is located on the top surface of the movable rod (2) and is used to fix and connect a substrate sheet (7). The nozzle (5) is positioned downward above the adsorption platform (4). The pitch driver (3) is connected to the movable rod (2) and is used to drive the movable rod (2) to rotate, thereby changing the pitch angle of the adsorption platform (4).

2. The cleaning device according to claim 1, characterized in that, It also includes a transmission mechanism (6), which includes a guide rail (61), a connecting block (62) and a transmission rod (63). The guide rail (61) is fixedly mounted on the fixed frame (1) in the vertical direction. The connecting block (62) is slidably connected to the guide rail (61) in the vertical direction. The pitch driver (3) is connected to one end of the connecting block (62). The other end of the connecting block (62) is provided with a protrusion (64) extending in the first direction. One end of the transmission rod (63) is connected to the movable rod (2). The transmission rod (63) has a through hole (631) on its side relative to the first direction. The through hole (631) extends along the length direction of the transmission rod (63). The protrusion (64) passes through the through hole (631) and is slidably connected to the through hole (631). The pitch actuator (3) can drive the protrusion (64) to move upward above the movable rod (2), and / or the pitch actuator (3) can drive the protrusion (64) to move downward below the movable rod (2).

3. The cleaning device according to claim 2, characterized in that, It includes a first link (65) and a second link (66). One end of the first link (65) is located below the guide rail (61) and connected to the pitch driver (3). The other end of the first link (65) is connected to one end of the second link (66), and the other end of the second link (66) is rotatably connected to one end of the connecting block (62).

4. The cleaning device according to claim 2, characterized in that, It also includes two movable rods (2), which are respectively located on both sides of the guide rail (61) along the second direction. The transmission mechanism (6) includes two transmission rods (63) that correspond one-to-one with the movable rods (2), and the two transmission rods (63) are connected to the movable rods (2).

5. The cleaning device according to claim 1, characterized in that, It also includes multiple nozzles (5), which are spaced apart along the rotation axis of the movable rod (2) and are respectively positioned above one of the adsorption platforms (4).

6. The cleaning apparatus according to claim 1, characterized in that, It also includes multiple nozzles (5), and multiple adsorption platforms (4) are spaced apart on the top surface of the movable rod (2) along a first direction, with each adsorption platform (4) corresponding to at least one nozzle (5).

7. The cleaning apparatus according to claim 6, characterized in that, Three adsorption platforms (4) are provided on one of the movable rods (2).

8. The cleaning apparatus according to claim 1, characterized in that, It also includes a rotation driver, which is located on the bottom surface of the movable rod (2) and connected to the adsorption platform (4). The rotation driver is used to drive the adsorption platform (4) to rotate.

9. The cleaning apparatus according to claim 1, characterized in that, The fixing frame (1) includes two side plates (12) and a fixing frame (11). The fixing frame (11) includes a fixing rod (112) and two columns (111). The two columns (111) are spaced apart along a first direction. The two side plates (12) are located between the two columns (111). The fixing rod (112) extends along the first direction. The two ends of the fixing rod (112) are respectively connected to the top of the two columns (111). The nozzle (5) is fixedly mounted on the fixing rod (112). The two side plates (12) are spaced apart along the first direction. The movable rod (2) is located between the two side plates (12). The two ends of the movable rod (2) are respectively rotatably connected to the two side plates (12).

10. The cleaning apparatus according to claim 9, characterized in that, One of the side plates (12) has a mounting groove (121) on its side away from the other side plate (12), the mounting groove (121) being used to mount a guide rail (61).

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