A cleaning device

Abstract

The utility model relates to the technical field of semiconductor substrate manufacturing, especially to a kind of cleaning device including soaking cylinder, rotating assembly and soaking assembly;The top surface of soaking cylinder is equipped with soaking pool;Rotating assembly includes fixed frame, guide cylinder, rotating plate and first rotation driver, guide cylinder is fixedly arranged in fixed frame, and it is located above soaking pool, rotating plate is rotatably arranged in fixed frame, rotating plate is equipped with first connecting through-hole, the outer side of guide cylinder is equipped with guide groove, guide groove includes low groove section and high groove section, and first rotation driver is connected to rotating plate;Soaking assembly includes sliding block, guide rod, connecting frame and adsorption platform, sliding block is arranged in the side of guide rod, connecting frame is arranged in the bottom end of guide rod, adsorption platform is arranged in connecting frame, guide rod is slidably connected in first connecting through-hole along up-down direction, and sliding block is slidably connected in guide groove.Summarizing above, the utility model discloses cleaning device can quickly and effectively remove the pollutants on substrate sheet, so that the next processing procedure can be carried out smoothly.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor substrate manufacturing technology, and in particular to a cleaning device. Background Technology

[0002] Currently, indium phosphide substrate is a semiconductor substrate with indium phosphide as its core material. It is one of the key basic materials for the manufacture of microelectronic and optoelectronic devices and is widely used in fields such as high-frequency and high-power devices, optical fiber communication, wireless transmission, and radio frequency devices in radio astronomy.

[0003] In the processing of indium phosphide substrates, cleaning is generally required after subtractive machining steps (such as slicing and grinding) to ensure the smooth progress of the next processing step. Typically, the cleaning apparatus includes an immersion tank where the substrate is cleaned by soaking it. However, the substrate surface may retain cutting debris and cutting fluid. These contaminants may be embedded in microcracks or scratches on the substrate surface, and may also be adhered with polishing paste. These contaminants are tightly bound to the substrate surface and may be distributed within the texture created by grinding. These residues are difficult to clean quickly and effectively using the aforementioned static immersion method, leaving contaminants on the substrate and thus affecting the smooth progress of the next processing step. Utility Model Content

[0004] The purpose of this invention is to provide a cleaning device to solve the technical problem that static soaking is difficult to quickly and effectively remove residues attached to the substrate, which may result in a large amount of contaminants remaining on the substrate and thus affecting the smooth progress of the next processing step.

[0005] To achieve the above objectives, this utility model provides a cleaning device, comprising:

[0006] A soaking cylinder, wherein the top surface of the soaking cylinder is provided with a soaking pool;

[0007] A rotating assembly includes a fixed frame, a guide cylinder, a rotating plate, and a first rotating driver. The guide cylinder is fixedly mounted on the fixed frame and located above the soaking tank. The rotating plate is rotatably mounted on the fixed frame and sleeved on the outside of the guide cylinder. The rotating plate has a first connecting through hole extending vertically. The outer side of the guide cylinder has a guide groove around its axis, the guide groove including a low groove section and a high groove section, the high groove section being higher than the low groove section. The first rotating driver is connected to the rotating plate and is used to drive the rotating plate to rotate. An soaking assembly includes a slider, a guide rod, a connecting frame, and an adsorption platform. The slider is located on the side of the guide rod, the connecting frame is located at the bottom end of the guide rod, and the adsorption platform is located on the connecting frame. The adsorption platform is used to connect a substrate sheet. The guide rod is slidably connected to the first connecting through hole in the vertical direction, and the slider is slidably connected to the guide groove.

[0008] When the slider is located in the lower section, the adsorption platform is located in the soaking tank.

[0009] Optionally, the guide groove further includes two transition groove sections, the top ends of which are respectively connected to the two ends of the high groove section, and the bottom ends of which are respectively connected to the two ends of the low groove section.

[0010] Optionally, the soaking assembly further includes a second rotation driver, which is mounted on the connecting frame and connected to the adsorption platform, and is capable of driving the adsorption platform to rotate.

[0011] Optionally, the connecting frame includes a connecting plate, a mounting plate, an extension plate, and a rotating platform connected in sequence. The bottom end of the guide rod is connected to the top end of the connecting plate. The connecting plate, the mounting plate, and the extension plate are arranged in sequence from top to bottom. The rotating platform is rotatably disposed on the side of the extension plate. The axis of the rotating platform is perpendicular to the circumference of the rotating plate. The adsorption platform is disposed on the top surface of the rotating platform.

[0012] Optionally, the second rotation driver is a rotation motor, and the soaking assembly further includes a first transmission wheel, a second transmission wheel, and a transmission belt. The second rotation driver and the first transmission wheel are respectively mounted on two opposite sides of the mounting plate. The second rotation driver is connected to the first transmission wheel. The rotating platform and the second transmission wheel are respectively mounted on two opposite sides of the extension plate. The rotating platform is connected to the second transmission wheel. The first transmission wheel and the second transmission wheel are located on the same side, and the transmission belt is wound around the first transmission wheel and the second transmission wheel.

[0013] Optionally, the slider includes a connecting part and a contact part. One end of the connecting part is connected to the side of the guide rod, and the other end is located in the guide groove. The contact part is sleeved on the outside of the connecting part and rotatably connected to the connecting part. The contact part is located in the guide groove, and the outer side of the contact part is used to abut against the groove wall of the guide groove.

[0014] Optionally, the fixing frame includes a first fixing plate, a second fixing plate, a plurality of first columns, a plurality of second columns, and a plurality of third columns. The first fixing plate is disposed above the soaking cylinder, and the plurality of first columns are disposed on the bottom surface of the first fixing plate and arranged around the soaking cylinder. The first fixing plate has a through hole extending vertically, and the first connecting through hole and the guide cylinder are disposed corresponding to the through hole. The top surface of the first fixing plate is provided with a mounting groove circumferentially around the mounting through hole, and the rotating plate is rotatably disposed in the mounting groove. The second fixing plate is disposed above the first fixing plate and above the guide cylinder, and the plurality of second columns are arranged around the guide cylinder. The two ends of the second columns are respectively connected to the top surface of the first fixing plate and the bottom surface of the second fixing plate. The plurality of third columns are disposed between the second fixing plate and the guide cylinder, and the two ends of the third columns are respectively connected to the bottom surface of the second fixing plate and the top surface of the guide cylinder.

[0015] Optionally, the rotating assembly further includes a gear, the first rotating driver is a rotating motor, the first rotating driver is mounted on the top surface of the first fixed plate and is positioned towards the guide cylinder, the gear is sleeved on the motor shaft of the first rotating driver, and a rack is circumferentially provided on the top surface of the rotating plate corresponding to the mounting groove, and the gear is drivenly connected to the rack.

[0016] Optionally, the rotating assembly further includes a connecting seat, which is mounted on the top surface of the rotating plate. The connecting seat has a second connecting through hole that extends in the vertical direction. The second connecting through hole corresponds to the first connecting through hole. The guide rod passes through the second connecting through hole and is slidably connected to the second connecting through hole in the vertical direction.

[0017] Optionally, the system may also include a plurality of the soaking components, which are evenly distributed around the guide cylinder.

[0018] Compared with the prior art, the cleaning device implemented in this utility model has the following advantages:

[0019] In this cleaning device, the soaking tank of the soaking cylinder is used to hold the cleaning solution. The substrate sheet can be soaked in the soaking tank for cleaning. The guide cylinder is located above the soaking tank and has a guide groove on its outer side. It cooperates with the rotating plate, which is sleeved on the outside of the guide cylinder and rotatably mounted on the fixed frame, to guide the soaking assembly. Specifically, the guide rod is slidably connected to the first connecting through hole of the rotating plate in the vertical direction, and the slider of the guide rod is slidably connected to the guide groove on the outer side of the guide cylinder. When the first rotating driver drives the rotating plate to rotate around the guide cylinder, the rotating plate can drive the soaking assembly to rotate around the guide cylinder. At the same time, since the guide groove includes grooves of different heights, the soaking assembly will also move in the vertical direction, so that the substrate sheet installed on the soaking assembly will also move with the soaking assembly. At this time, the cleaning solution in the soaking tank is agitated by the soaking assembly and the substrate sheet, forming a rotating water flow. Meanwhile, the soaking assembly repeatedly pulls the substrate sheet out of the cleaning solution and immerses the substrate sheet in the cleaning solution, so that the substrate sheet is not only dynamically immersed in the cleaning solution, but also rinsed by the rinsing solution to quickly and effectively remove contaminants from the substrate sheet, so that the next processing step can proceed smoothly. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the cleaning device of this utility model equipped with a substrate.

[0021] Figure 2 This is a schematic diagram of the cleaning device of this utility model, ignoring the third fixing plate and the soaking cylinder.

[0022] Figure 3 for Figure 2 A magnified view of part A in the middle.

[0023] Figure 4 for Figure 2 A magnified view of part B in the middle.

[0024] Figure 5 This is a schematic diagram of the structure of the guide cylinder of this utility model.

[0025] Reference numerals: 1. Immersion cylinder; 11. Immersion tank; 2. Rotating assembly; 21. Fixing frame; 211. First fixing plate; 212. Second fixing plate; 213. First column; 214. Second column; 215. Third column; 22. Guide cylinder; 221. Guide groove; 2211. High groove section; 2212. Low groove section; 2213. Transition groove section; 23. Rotating plate; 231. Rack; 24. First rotation driver; 25. Connecting seat; 3. Immersion assembly; 31. Slider; 311. Connecting part; 312. Contact part; 32. Guide rod; 33. Connecting frame; 331. Connecting plate; 332. Mounting plate; 333. Extension plate; 334. Rotating platform; 34. Adsorption platform; 35. Second rotation driver; 36. First transmission wheel; 37. Second transmission wheel; 38. Transmission belt; 4. Substrate sheet. Detailed Implementation

[0026] The specific embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this utility model, but are not intended to limit its scope.

[0027] In the description of this utility model, it should be understood that the terms "top", "bottom", "inner", "outer", "circumferential", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0028] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0029] like Figures 1 to 5 As shown, a cleaning device of this utility model includes a soaking cylinder 1, a rotating assembly 2, and a soaking component 3. The top surface of the soaking cylinder 1 is provided with a soaking pool 11. The rotating assembly 2 includes a fixed frame 21, a guide cylinder 22, a rotating plate 23, and a first rotating driver 24. The guide cylinder 22 is fixedly mounted on the fixed frame 21 and located above the soaking pool 11. The rotating plate 23 is rotatably mounted on the fixed frame 21 and sleeved on the outside of the guide cylinder 22. The rotating plate 23 has a first connecting through hole extending vertically. The outer surface of the guide cylinder 22 has a guide groove 221 around its axis. The guide groove 221 includes a low groove section 2212 and a high groove section 2211, the high groove section 2211 being higher than the bottom surface of the soaking pool 11. The lower tank section 2212 is described above. The first rotation driver 24 is connected to the rotating plate 23 and is used to drive the rotating plate 23 to rotate. The immersion assembly 3 includes a slider 31, a guide rod 32, a connecting frame 33, and an adsorption platform 34. The slider 31 is located on the side of the guide rod 32, the connecting frame 33 is located at the bottom end of the guide rod 32, and the adsorption platform 34 is located on the connecting frame 33. The adsorption platform 34 is used to connect the substrate sheet 4. The guide rod 32 is slidably connected to the first connecting through hole in the vertical direction, and the slider 31 is slidably connected to the guide groove 221. When the slider 31 is located in the lower tank section 2212, the adsorption platform 34 is located in the immersion tank 11.

[0030] In the above technical solution, the soaking tank 11 of the soaking cylinder 1 is used to hold the cleaning solution, and the substrate 4 can be soaked in the soaking tank 11 for cleaning. The guide cylinder 22 is located above the soaking tank 11, and its outer side is provided with a guide groove 221. It cooperates with the rotating plate 23, which is sleeved on the outside of the guide cylinder 22 and rotatably set on the fixed frame 21, to guide the soaking assembly 3. Specifically, the guide rod 32 is slidably connected to the first connecting through hole of the rotating plate 23 in the up and down direction, and the slider 31 of the guide rod 32 is slidably connected to the guide groove 221 on the outer side of the guide cylinder 22. When the first rotation driver 24 drives the rotating plate 23 to rotate around the guide cylinder 22, the rotating plate 22... The immersion assembly 3 can rotate around the guide cylinder 22. At the same time, since the guide groove 221 includes grooves of different heights, the immersion assembly 3 will also move in the vertical direction, so that the substrate 4 installed on the immersion assembly 3 will also move with the immersion assembly 3. At this time, the cleaning liquid in the immersion tank 11 is stirred by the immersion assembly 3 and the substrate 4, forming a rotating water flow. Meanwhile, the immersion assembly 3 repeatedly pulls the substrate 4 out of the cleaning liquid and immerses the substrate 4 into the cleaning liquid, so that the substrate 4 is not only dynamically immersed in the cleaning liquid, but also rinsed by the rinsing liquid, so as to quickly and effectively remove the contaminants on the substrate 4, so that the next processing step can proceed smoothly.

[0031] Specifically, when the slider 31 is located in the high tank section 2211, the adsorption platform 34 should be located above the cleaning liquid in the soaking tank 11. The adsorption platform 34 can be located above the soaking tank 11 or inside the soaking tank 11. When the slider 31 is located in the low tank section 2212, the adsorption platform 34 should be located inside the cleaning liquid in the soaking tank 11. The adsorption platform 34 should be located at least inside the soaking tank 11.

[0032] The adsorption platform 34 may be equipped with an electric suction cup, which can adsorb the substrate 4 at any time according to an electrical signal, and can also release the substrate 4 at any time according to an electrical signal.

[0033] Furthermore, the guide groove 221 also includes two transition groove sections 2213, the top ends of the two transition groove sections 2213 are respectively connected to the two ends of the high groove section 2211, and the bottom ends of the two transition groove sections 2213 are respectively connected to the two ends of the low groove section 2212.

[0034] Among them, the high tank section 2211 and the bottom tank section are tank sections set in the horizontal direction, and the transition tank section 2213 is a tank section set in the oblique direction. When the slider 31 moves along the transition tank section 2213, the substrate 4 is pulled up from the cleaning solution or immersed in the cleaning solution.

[0035] Furthermore, the soaking assembly 3 also includes a second rotation driver 35, which is mounted on the connecting frame 33 and connected to the adsorption platform 34. The second rotation driver 35 is capable of driving the adsorption platform 34 to rotate.

[0036] The second rotary actuator 35 drives the adsorption platform 34 to rotate, so that the substrate 4 and the cleaning solution can be in more thorough contact, thereby improving the cleaning effect of the substrate 4.

[0037] Furthermore, the connecting frame 33 includes a connecting plate 331, a mounting plate 332, an extension plate 333, and a rotating platform 334 connected in sequence. The bottom end of the guide rod 32 is connected to the top end of the connecting plate 331. The connecting plate 331, the mounting plate 332, and the extension plate 333 are arranged in sequence from top to bottom. The rotating platform 334 is rotatably disposed on the side of the extension plate 333. The axis of the rotating platform 334 is perpendicular to the circumference of the rotating plate 23. The adsorption platform 34 is disposed on the top surface of the rotating platform 334.

[0038] The second rotary driver 35 can drive the rotating platform 334 to rotate, so that the adsorption platform 34 and the substrate 4 can pitch along the circumference of the rotating plate 23, so that the substrate 4 and the cleaning solution can be in more sufficient contact, thereby improving the cleaning effect of the substrate 4.

[0039] Furthermore, the second rotation driver 35 is a rotation motor, and the soaking assembly 3 also includes a first transmission wheel 36, a second transmission wheel 37, and a transmission belt 38. The second rotation driver 35 and the first transmission wheel 36 are respectively mounted on two opposite sides of the mounting plate 332. The second rotation driver 35 is connected to the first transmission wheel 36. The rotating platform 334 and the second transmission wheel 37 are respectively mounted on two opposite sides of the extension plate 333. The rotating platform 334 is connected to the second transmission wheel 37. The first transmission wheel 36 and the second transmission wheel 37 are located on the same side, and the transmission belt 38 is wound around the first transmission wheel 36 and the second transmission wheel 37.

[0040] The second rotary actuator 35 and the adsorption platform 34 are respectively installed at a higher position and a lower position in the connecting frame 33 to avoid the second rotary actuator 35 being immersed in the cleaning solution and to allow the adsorption platform 34 to be intermittently immersed in the cleaning solution. The second rotary actuator 35 is connected to the rotating platform 334 through the first transmission wheel 36, the second transmission wheel 37 and the transmission belt 38. The second rotary actuator 35 drives the rotating platform 334 to rotate, thereby causing the adsorption platform 34 to rotate (oscillate) around the axis of the rotating platform 334.

[0041] Furthermore, the slider 31 includes a connecting part 311 and a contact part 312. One end of the connecting part 311 is connected to the side of the guide rod 32, and the other end is located in the guide groove 221. The contact part 312 is sleeved on the outside of the connecting part 311 and rotatably connected to the connecting part 311. The contact part 312 is located in the guide groove 221, and the outer side of the contact part 312 is used to abut against the groove wall of the guide groove 221.

[0042] The contact portion 312 is sleeved on the outside of the connecting portion 311 and rotatably connected to the connecting portion 311, so that the contact portion 312 can roll contact with the guide groove 221 to reduce the friction between the two, thereby making the soaking assembly 3 move more smoothly in the up and down direction; in addition, the connecting portion 311 can be a columnar component and the contact portion 312 can be a sleeve-shaped component.

[0043] Furthermore, the fixing frame 21 includes a first fixing plate 211, a second fixing plate 212, a plurality of first columns 213, a plurality of second columns 214, and a plurality of third columns 215. The first fixing plate 211 is disposed above the soaking cylinder 1, and the plurality of first columns 213 are disposed on the bottom surface of the first fixing plate 211 and arranged around the soaking cylinder 1. The first fixing plate 211 has a through hole extending vertically, and the first connecting through hole and the guide cylinder 22 are disposed corresponding to the through hole. The top surface of the first fixing plate 211 is circumferentially arranged around the position corresponding to the through hole. The device has an installation groove, and the rotating plate 23 is rotatably mounted in the installation groove. The second fixing plate 212 is located above the first fixing plate 211 and above the guide cylinder 22. A plurality of second columns 214 are arranged around the guide cylinder 22, and the two ends of the second columns 214 are respectively connected to the top surface of the first fixing plate 211 and the bottom surface of the second fixing plate 212. A plurality of third columns 215 are located between the second fixing plate 212 and the guide cylinder 22, and the two ends of the third columns 215 are respectively connected to the bottom surface of the second fixing plate 212 and the top surface of the guide cylinder 22.

[0044] The bottom end of the first column 213 is used to abut against the bottom surface, and the top end is used to support the first fixing plate 211. The first fixing plate 211 is used to install the rotating plate 23 and supports the second fixing plate 212 through the second column 214. The second fixing plate 212 is used to suspend the guide cylinder 22 through the third column 215. In addition, the mounting groove can be rotatably connected to the rotating plate 23 by means of cylindrical rollers provided at the bottom or wall of the groove, or it can be rotatably connected to the rotating plate 23 by means of bearings provided at the bottom or wall of the groove.

[0045] Furthermore, the rotating assembly 2 also includes a gear, the first rotating driver 24 is a rotating motor, the first rotating driver 24 is mounted on the top surface of the first fixed plate 211 and is positioned towards the guide cylinder 22, the gear is sleeved on the motor shaft of the first rotating driver 24, and a rack 231 is circumferentially provided on the top surface of the rotating plate 23 corresponding to the position of the mounting groove, and the gear is connected to the rack 231 for transmission.

[0046] The first rotary driver 24 and the rotating plate 23 are connected by gear transmission to ensure the accuracy and smoothness of the transmission.

[0047] Furthermore, the rotating assembly 2 also includes a connecting seat 25, which is mounted on the top surface of the rotating plate 23. The connecting seat 25 has a second connecting through hole that extends in the vertical direction. The second connecting through hole corresponds to the first connecting through hole. The guide rod 32 passes through the second connecting through hole and is slidably connected to the second connecting through hole in the vertical direction.

[0048] The guide rod 32 is slidably connected to the first connecting through hole and the second connecting through hole in the up-down direction. When the rotating plate 23 rotates, the hole wall of the first connecting through hole and the hole wall of the second connecting through hole simultaneously abut against the outer side of the guide rod 32, so as to improve the stability of the movement of the soaking assembly 3 by increasing the contact area between the outer side of the guide rod 32 and the hole wall.

[0049] Furthermore, it also includes multiple soaking components 3, which are evenly distributed around the guide cylinder 22 to facilitate the simultaneous cleaning of multiple substrate sheets 4, thereby improving cleaning efficiency.

[0050] Furthermore, fixed setting and fixed connection refer to the fixed relative positional relationship of two components, including but not limited to fixing by connectors, fixing by welding, fixing by adhesive, fixing by integral molding, and fixing by snap-fit ​​connection.

[0051] Furthermore, sliding connection and sliding setting refer to the connection between two connected components, where one component can slide along a fixed trajectory on the other component, including but not limited to connection by sliding the slider 31 into the groove, or connection by inserting a slider rod into a hole whose size and profile match the slider rod.

[0052] Furthermore, rotatable connection and rotatable setting refer to the ability of two connected components to rotate, including but not limited to connections via bearings or clearance fits.

[0053] Furthermore, the connectors include, but are not limited to, fasteners, straps, ropes, pneumatic connectors, hydraulic connectors, flanges, Velcro, and buttons.

[0054] In summary, the present invention provides a cleaning device, the technical effects of which are as follows:

[0055] In this cleaning device, the soaking tank 11 of the soaking cylinder 1 is used to hold the cleaning solution. The substrate 4 can be soaked in the soaking tank 11 for cleaning. The guide cylinder 22 is located above the soaking tank 11, and its outer side is provided with a guide groove 221. It cooperates with the rotating plate 23, which is sleeved on the outside of the guide cylinder 22 and rotatably mounted on the fixed frame 21, to guide the soaking assembly 3. Specifically, the guide rod 32 is slidably connected to the first connecting through hole of the rotating plate 23 in the vertical direction, and the slider 31 of the guide rod 32 is slidably connected to the guide groove 221 on the outer side of the guide cylinder 22. When the first rotation driver 24 drives the rotating plate 23 to rotate around the guide cylinder 22, the rotating plate... 23 can drive the soaking component 3 to rotate around the guide cylinder 22. At the same time, since the guide groove 221 includes grooves of different heights, the soaking component 3 will also move in the up and down direction, so that the substrate 4 installed on the soaking component 3 will also move with the soaking component 3. At this time, the cleaning liquid in the soaking tank 11 is stirred by the soaking component 3 and the substrate 4, forming a rotating water flow. Meanwhile, the soaking component 3 repeatedly pulls the substrate 4 out of the cleaning liquid and immerses the substrate 4 into the cleaning liquid, so that the substrate 4 is not only dynamically immersed in the cleaning liquid, but also rinsed by the rinsing liquid, so as to quickly and effectively remove the contaminants on the substrate 4, so that the next processing step can proceed smoothly.

[0056] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements and substitutions can be made without departing from the technical principles of the present utility model, and these improvements and substitutions should also be considered within the protection scope of the present utility model.

Claims

1. A cleaning device, characterized in that, include, Soaking cylinder (1), the top surface of which is provided with a soaking pool (11); The rotating assembly (2) includes a fixed frame (21), a guide cylinder (22), a rotating plate (23), and a first rotating driver (24). The guide cylinder (22) is fixedly mounted on the fixed frame (21) and located above the soaking pool (11). The rotating plate (23) is rotatably mounted on the fixed frame (21) and sleeved on the outside of the guide cylinder (22). The rotating plate (23) has a first connecting through hole that runs through the vertical direction. The outer side of the guide cylinder (22) has a guide groove (221) around its axis. The guide groove (221) includes a low groove section (2212) and a high groove section (2211). The high groove section (2211) is higher than the low groove section (2212). The first rotating driver (24) is connected to the rotating plate (23) and is used to drive the rotating plate (23) to rotate. Immersion assembly (3), the immersion assembly (3) includes a slider (31), a guide rod (32), a connecting frame (33) and an adsorption platform (34). The slider (31) is disposed on the side of the guide rod (32), the connecting frame (33) is disposed at the bottom end of the guide rod (32), the adsorption platform (34) is disposed on the connecting frame (33), the adsorption platform (34) is used to connect the substrate (4), the guide rod (32) is slidably connected to the first connecting through hole in the up and down direction, and the slider (31) is slidably connected to the guide groove (221). When the slider (31) is located in the lower groove section (2212), the adsorption platform (34) is located in the soaking pool (11).

2. The cleaning device according to claim 1, characterized in that, The guide groove (221) further includes two transition groove sections (2213), the top ends of the two transition groove sections (2213) are respectively connected to the two ends of the high groove section (2211), and the bottom ends of the two transition groove sections (2213) are respectively connected to the two ends of the low groove section (2212).

3. The cleaning device according to claim 1, characterized in that, The soaking assembly (3) further includes a second rotation driver (35), which is mounted on the connecting frame (33) and connected to the adsorption platform (34). The second rotation driver (35) can drive the adsorption platform (34) to rotate.

4. The cleaning device according to claim 3, characterized in that, The connecting frame (33) includes a connecting plate (331), a mounting plate (332), an extension plate (333), and a rotating platform (334) connected in sequence. The bottom end of the guide rod (32) is connected to the top end of the connecting plate (331). The connecting plate (331), the mounting plate (332), and the extension plate (333) are arranged in sequence from top to bottom. The rotating platform (334) is rotatably disposed on the side of the extension plate (333). The axis of the rotating platform (334) is perpendicular to the circumference of the rotating plate (23). The adsorption platform (34) is disposed on the top surface of the rotating platform (334).

5. The cleaning device according to claim 4, characterized in that, The second rotation driver (35) is a rotation motor. The soaking assembly (3) also includes a first transmission wheel (36), a second transmission wheel (37), and a transmission belt (38). The second rotation driver (35) and the first transmission wheel (36) are respectively mounted on two opposite sides of the mounting plate (332). The second rotation driver (35) is connected to the first transmission wheel (36). The rotating platform (334) and the second transmission wheel (37) are respectively mounted on two opposite sides of the extension plate (333). The rotating platform (334) is connected to the second transmission wheel (37). The first transmission wheel (36) and the second transmission wheel (37) are located on the same side. The transmission belt (38) is wound around the first transmission wheel (36) and the second transmission wheel (37).

6. The cleaning apparatus according to claim 1, characterized in that, The slider (31) includes a connecting part (311) and a contact part (312). One end of the connecting part (311) is connected to the side of the guide rod (32), and the other end is located in the guide groove (221). The contact part (312) is sleeved on the outside of the connecting part (311) and rotatably connected to the connecting part (311). The contact part (312) is located in the guide groove (221), and the outer side of the contact part (312) is used to abut against the groove wall of the guide groove (221).

7. The cleaning apparatus according to claim 1, characterized in that, The fixing frame (21) includes a first fixing plate (211), a second fixing plate (212), a plurality of first columns (213), a plurality of second columns (214), and a plurality of third columns (215). The first fixing plate (211) is located above the soaking cylinder (1), and the plurality of first columns (213) are located on the bottom surface of the first fixing plate (211) and arranged around the soaking cylinder (1). The first fixing plate (211) has a through hole extending vertically. The first connecting through hole and the guide cylinder (22) are arranged corresponding to the through hole. The top surface of the first fixing plate (211) is provided with a mounting groove circumferentially around the position corresponding to the through hole. The rotating plate (23) is rotatably mounted in the mounting groove. The second fixing plate (212) is located above the first fixing plate (211) and above the guide cylinder (22). A plurality of second columns (214) are arranged around the guide cylinder (22). The two ends of the second columns (214) are respectively connected to the top surface of the first fixing plate (211) and the bottom surface of the second fixing plate (212). A plurality of third columns (215) are located between the second fixing plate (212) and the guide cylinder (22). The two ends of the third columns (215) are respectively connected to the bottom surface of the second fixing plate (212) and the top surface of the guide cylinder (22).

8. The cleaning apparatus according to claim 7, characterized in that, The rotating assembly (2) further includes a gear. The first rotating driver (24) is a rotating motor. The first rotating driver (24) is mounted on the top surface of the first fixed plate (211) and is positioned towards the guide cylinder (22). The gear is sleeved on the motor shaft of the first rotating driver (24). The top surface of the rotating plate (23) is provided with a rack (231) corresponding to the position of the mounting groove. The gear is connected to the rack (231) for transmission.

9. The cleaning apparatus according to claim 1, characterized in that, The rotating assembly (2) further includes a connecting seat (25), which is installed on the top surface of the rotating plate (23). The connecting seat (25) has a second connecting through hole that runs through the vertical direction. The second connecting through hole corresponds to the first connecting through hole. The guide rod (32) passes through the second connecting through hole and is slidably connected to the second connecting through hole in the vertical direction.

10. The cleaning apparatus according to claim 1, characterized in that, It also includes a plurality of the soaking components (3), which are evenly distributed around the guide cylinder (22).

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