A cleaning device
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- VITAL MICRO-ELECTRONICS TECH CO LTD
- Filing Date
- 2025-08-15
- Publication Date
- 2026-07-24
Smart Images
Figure CN224556209U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of semiconductor substrate manufacturing technology, and in particular to a cleaning device. Background Technology
[0002] Indium phosphide substrate is a semiconductor substrate with indium phosphide as its core material. It is one of the key basic materials for the manufacture of microelectronic and optoelectronic devices and is widely used in fields such as high-frequency and high-power devices, optical fiber communication, wireless transmission, and radio frequency devices in radio astronomy.
[0003] In the indium phosphide substrate processing, before or after certain steps (such as after polishing, before photolithography, and before epitaxial growth), it is necessary to use various cleaning solutions to clean the substrate to remove various physical residues (such as abrasive particles and polishing pad debris) and chemical residues (such as organic binders and metal ions) on the substrate, so as to ensure that the subsequent process can proceed smoothly. Generally, this multi-stage cleaning process usually requires the use of multiple cleaning devices. The cleaning process is completed after the substrate has undergone multiple loading, cleaning, and unloading. Alternatively, a single cleaning device can be used, and the cleaning process is completed after the substrate has undergone loading, multiple cleaning, multiple handling, and unloading. In both of these cleaning methods, after the substrate has been cleaned in any cleaning chamber with any cleaning solution, the suction cups attached to the substrate will release the substrate. Then, the substrate in the cleaning chamber will be transferred to the unloading position by the handling mechanism, and then loaded to other cleaning devices for cleaning, or the substrate in the cleaning chamber will be transferred to other chambers for cleaning by the handling mechanism. Both of these cleaning methods involve a lot of substrate handling, making the cleaning process relatively long and thus resulting in low cleaning efficiency. Utility Model Content
[0004] The purpose of this invention is to provide a cleaning device to solve the technical problem that the process of cleaning substrates sequentially with multiple cleaning solutions involves a large number of substrate transfers, making the cleaning process lengthy and resulting in low cleaning efficiency.
[0005] To achieve the above objectives, this utility model provides a cleaning device, comprising:
[0006] A rotating assembly includes a base, a connecting seat, a rotating block, and a rotating driver. The rotating block is rotatably mounted on the base, the connecting seat is mounted on the rotating block, and the rotating driver is connected to the rotating block. The rotating driver is used to drive the rotating block to rotate.
[0007] A connecting assembly includes a guide rod, a connecting frame, an adsorption platform, and a rotation actuator. The guide rod is connected to the connecting seat and has a first end and a second end. The first end is located on the rotating assembly, and the second end extends away from the rotating assembly. The connecting frame is located at the second end, and the adsorption platform is located on the top surface of the connecting frame. The adsorption platform is used to connect to a substrate. The rotation actuator is connected to the adsorption platform and is used to drive the adsorption platform to rotate.
[0008] Multiple cleaning components are arranged around the rotating component. Each cleaning component includes a cleaning container and a nozzle. The cleaning container has a cleaning chamber inside and a through-hole is provided on the side of the cleaning container opposite to the rotating component, extending through the cleaning chamber. The nozzle is mounted on the cleaning container and faces downward. The nozzle is used to spray cleaning liquid into the cleaning chamber to clean the substrate located in the cleaning chamber. The rotation of the rotating block can drive the connecting component to rotate around the rotating component, so that the connecting component passes through the through-hole, thereby allowing the adsorption platform to move into each of the cleaning chambers.
[0009] Optionally, the base includes a guide block, the top surface of which has a guide groove around its axis, the rotating block is sleeved on the outside of the guide block, the connecting seat is installed on the top surface of the rotating block, the connecting seat has a connecting through hole, the connecting through hole extends radially through the connecting seat along the rotating block, the guide rod passes through the connecting through hole and is slidably connected to the connecting through hole, and the bottom surface of the first end has a slider, the slider being slidably connected to the guide groove.
[0010] Optionally, the guide groove includes multiple sub-segments corresponding one-to-one with the cleaning component, the sub-segments being interconnected, each sub-segment including an outer sub-segment and two inner sub-segments, the two inner sub-segments being located on both sides of the outer sub-segment, the distance between the axis of the outer sub-segment and the guide block being greater than the distance between the axis of the inner sub-segment and the guide block, the inner sub-segments being provided on both sides of the passage gap, and the outer sub-segment being provided in the middle of the passage gap.
[0011] Optionally, the slider includes a connecting part and a contact part. The top end of the connecting part is connected to the bottom surface of the first end. The contact part is sleeved on the outside of the connecting part and rotatably connected to the connecting part. The contact part is located in the guide groove, and the outer side of the contact part is used to abut against the groove wall of the guide groove.
[0012] Optionally, the connecting assembly further includes a guide plate, which is arranged parallel to the guide rod. One of the connecting frame and the connecting seat is fixedly connected to one end of the guide plate, and the other is slidably connected to the other end of the guide plate.
[0013] Optionally, the rotating assembly further includes a gear, and the base further includes a base plate. The base plate is disposed on the bottom surface of the guide block, and the rotating driver is disposed on the top surface of the base plate facing upward. The rotating driver is a rotating motor, and the gear is mounted on the motor shaft of the rotating driver. The outer side of the rotating block is provided with multiple transmission teeth around its axis, and the gear is connected to the transmission teeth.
[0014] Optionally, the top surface of the cleaning container is provided with a top hole that extends through to the cleaning chamber. The cleaning assembly also includes a cleaning frame, which includes a vertical rod and a horizontal rod. The horizontal rod is located at the top of the vertical rod, the vertical rod is installed on the outer side of the cleaning container, the horizontal rod is located above the top hole, and the nozzle is installed on the horizontal rod and is positioned corresponding to the top hole.
[0015] Optionally, the self-rotating drive is a rotating motor, so the connecting assembly further includes a first transmission wheel, a second transmission wheel, and a transmission belt. The connecting frame includes a connecting plate, a mounting plate, and an extension plate connected in sequence. The connecting plate, the mounting plate, and the extension plate are arranged in sequence in a direction away from the connecting seat. The side of the connecting plate is connected to the second end. The self-rotating drive is mounted on the top surface of the mounting plate. The adsorption platform is rotatably disposed on the top surface of the extension plate at the end away from the mounting plate. The first transmission wheel is disposed on the bottom surface of the mounting plate. The second transmission wheel is disposed on the bottom surface of the extension plate at the end away from the mounting plate. The transmission belt is wound around the first transmission wheel and the second transmission wheel. Therefore, the self-rotating drive is connected to the first transmission wheel, and the adsorption platform is connected to the second transmission wheel.
[0016] Optionally, it also includes a plurality of the connecting components, the rotating component including a plurality of the connecting seats, the number of the connecting seats, the connecting components and the cleaning components are equal, the connecting seats and the connecting components are connected in a one-to-one correspondence, the cleaning components are evenly distributed around the rotating component, and the connecting components are evenly distributed around the rotating component.
[0017] Optionally, the number of both the connecting components and the cleaning components is 4.
[0018] Compared with the prior art, the cleaning device implemented in this utility model has the following advantages:
[0019] In this cleaning device, a rotating assembly is located at the center of the device. A connecting seat is mounted on the rotating block, and the mounting seat is used to connect other components. A rotating driver can drive the rotating block to rotate, thereby causing the components mounted on the rotating block to rotate. One end of the connecting assembly is connected to the rotating assembly; specifically, a guide rod is connected to the rotating block. The other end of the connecting assembly is used to connect to the substrate and enables the substrate to rotate, so that the substrate can be cleaned evenly and thoroughly. Specifically, the second end of the guide rod is connected to the connecting frame. A rotation driver and an adsorption platform are set on the connecting frame. The adsorption platform is used to connect to the substrate, and the rotation driver is used to drive the adsorption platform to rotate, thereby causing the substrate to rotate. Multiple cleaning... The assembly can clean the substrate using different cleaning solutions. Its cleaning container has cleaning chambers that can accommodate the adsorption platform and the substrate. A nozzle is installed in the cleaning container to spray cleaning solution onto the substrate within the cleaning chambers. Furthermore, the cleaning container has a through-hole on its side facing the rotating assembly, allowing the connecting assembly to pass through the through-hole radially along the rotating assembly. This allows the adsorption platform and substrate to be cleaned within the cleaning chambers. Multiple cleaning components are arranged around the rotating assembly, so that when the rotating block rotates, it can drive the connecting assembly to pass through the through-hole circumferentially along the rotating assembly, allowing the adsorption platform and the substrate on it to move into each of the cleaning chambers for cleaning. The specific cleaning process of this device is as follows: first, the substrate is loaded onto the adsorption platform; then, the adsorption platform firmly adheres to the substrate; then, the substrate is moved sequentially to each cleaning chamber for cleaning with different cleaning solutions; next, the adsorption platform releases the substrate; and finally, the substrate is removed from the adsorption platform. The specific process of moving the substrate into the cleaning chamber for cleaning with cleaning fluid is as follows: The connecting assembly rotates around the rotating assembly, causing the substrate to pass through the through-hole and move into the cleaning chamber. The adsorption platform rotates, causing the substrate to rotate simultaneously. At the same time, the nozzle corresponding to the cleaning chamber sprays cleaning fluid onto the top surface of the substrate. The connecting assembly rotates around the rotating assembly to adjust the position of the nozzle relative to the substrate. After completing the cleaning work in the cleaning chamber, the connecting assembly rotates around the rotating assembly, causing the substrate to pass through the through-hole and move out of the cleaning chamber. In summary, this cleaning device eliminates the need for repeated suction, release, and handling of the substrate during the cleaning process with various cleaning fluids, reducing unnecessary steps and resulting in higher cleaning efficiency. Attached Figure Description
[0020] Figure 1 This is a schematic diagram of the cleaning device of this utility model.
[0021] Figure 2 for Figure 1 A magnified view of part A in the middle.
[0022] Figure 3 for Figure 1 A magnified view of part B in the middle.
[0023] Figure 4 for Figure 1 A magnified view of part C in the middle.
[0024] Figure 5 This is a front view of the cleaning device of this utility model.
[0025] Figure 6 This is a top view of the cleaning device of this utility model.
[0026] Figure 7 for Figure 6 A sectional view of DD.
[0027] Reference numerals: 1. Rotating assembly; 11. Base; 111. Guide block; 1111. Guide groove; 11111. Slotted section; 111111. Inner slotted section; 111112. Outer slotted section; 112. Base plate; 12. Connecting seat; 121. Connecting through hole; 13. Rotating block; 131. Transmission gear; 14. Rotating driver; 15. Gear; 2. Connecting assembly; 21. Guide rod; 211. First end; 212. Second end; 22. Connecting frame; 221. Connecting... 222. Mounting plate; 223. Extension plate; 23. Adsorption platform; 24. Rotation driver; 25. Slider; 251. Connecting part; 252. Contact part; 26. Guide plate; 27. First transmission wheel; 28. Second transmission wheel; 29. Transmission belt; 3. Cleaning assembly; 31. Cleaning container; 311. Cleaning chamber; 312. Through-hole; 313. Top hole; 32. Nozzle; 33. Cleaning frame; 331. Vertical bar; 332. Horizontal bar; 4. Substrate sheet. Detailed Implementation
[0028] The specific embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this utility model, but are not intended to limit its scope.
[0029] In the description of this utility model, it should be understood that the terms "top", "bottom", "inner", "outer", "circumferential", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.
[0030] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.
[0031] like Figures 1 to 7 As shown, a cleaning device of this utility model includes a rotating assembly 1, a connecting assembly 2, and multiple cleaning assemblies 3. The rotating assembly 1 includes a base 11, a connecting seat 12, a rotating block 13, and a rotating driver 14. The rotating block 13 is rotatably mounted on the base 11, the connecting seat 12 is mounted on the rotating block 13, and the rotating driver 14 is connected to the rotating block 13 and drives the rotating block 13 to rotate. The connecting assembly 2 includes a guide rod 21, a connecting frame 22, an adsorption platform 23, and a self-rotating driver 24. The guide rod 21 is connected to the connecting seat 12 and has a first end 211 and a second end 212. The first end 211 is located on the rotating assembly 1, and the second end 212 extends away from the rotating assembly 1. The connecting frame 22 is located at the second end 212, and the adsorption platform 23 is located on the top surface of the connecting frame 22. An adsorption platform 23 is connected to a substrate 4. A rotation actuator 24 is connected to the adsorption platform 23 and drives the adsorption platform 23 to rotate. Multiple cleaning components 3 are arranged around the rotating component 1. Each cleaning component 3 includes a cleaning container 31 and a nozzle 32. The cleaning container 31 has a cleaning chamber 311. The cleaning container 31 has a through-hole 312 on its side relative to the rotating component 1, which extends into the cleaning chamber 311. The nozzle 32 is installed in the cleaning container 31 and faces downward. The nozzle 32 sprays cleaning liquid into the cleaning chamber 311 to clean the substrate 4 located in the cleaning chamber 311. The rotation of the rotating block 13 can drive the connecting component 2 to rotate around the rotating component 1, so that the connecting component 2 passes through the through-hole 312, thereby allowing the adsorption platform 23 to move into each of the cleaning chambers 311.
[0032] In the above technical solution, the rotating assembly 1 is located at the center of the device, the connecting seat 12 is installed on the rotating block 13, the mounting seat is used to connect other components, and the rotating driver 14 can drive the rotating block 13 to rotate, thereby causing the components installed on the rotating block 13 to rotate; one end of the connecting assembly 2 is connected to the rotating assembly 1, specifically, the guide rod 21 is connected to the rotating block 13, and the other end of the connecting assembly 2 is used to connect to the substrate 4, and can cause the substrate 4 to rotate, so that the substrate 4 can be cleaned evenly and thoroughly. Specifically, the second end 212 of the guide rod 21 is connected to the connecting frame 22, the rotation driver 24 and the adsorption platform 23 are set on the connecting frame 22, the adsorption platform 23 is used to connect to the substrate 4, and the rotation driver 24 is used to drive the adsorption platform 23 to rotate, thereby causing the substrate 4 to rotate; multiple cleaning assemblies 3 can Different cleaning solutions are used to clean the substrate 4. The cleaning container 31 is provided with a cleaning chamber 311 that can accommodate the adsorption platform 23 and the substrate 4. The nozzle 32 is installed in the cleaning container 31 to spray the cleaning solution onto the substrate 4 in the cleaning chamber 311. Furthermore, the cleaning container 31 has a through-hole 312 on the side facing the rotating component 1, so that the connecting component 2 can pass through the through-hole 312 radially along the rotating component 1, so that the adsorption platform 23 and the substrate 4 are located in the cleaning chamber 311 for cleaning. In addition, multiple cleaning components 3 are arranged around the rotating component 1, so that when the rotating block 13 rotates, it can drive the connecting component 2 to pass through the through-hole 312 circumferentially along the rotating component 1, so that the adsorption platform 23 and the substrate 4 on it can move into each of the cleaning chambers 311 for cleaning. The specific cleaning process of the device is as follows: First, the substrate 4 is loaded onto the adsorption platform 23. Then, the adsorption platform 23 firmly adheres to the substrate 4. Next, the substrate 4 is moved sequentially to each cleaning chamber 311 for cleaning with different cleaning solutions. Then, the adsorption platform 23 releases the substrate 4, and the substrate 4 is removed from the adsorption platform 23. The specific process of moving the substrate 4 to the cleaning chamber 311 for cleaning with cleaning solution is as follows: The connecting component 2 rotates around the rotating component 1, causing the substrate 4 to pass through the through-hole 312 and move into the cleaning chamber 311. The adsorption platform 23 rotates, causing the substrate 4 to rotate. At the same time, the nozzle 32 corresponding to the cleaning chamber 311 sprays cleaning solution onto the top surface of the substrate 4. By rotating the connecting component 2 around the rotating component 1, the position of the nozzle 32 spraying onto the substrate 4 is adjusted. After the cleaning work of the cleaning chamber 311 is completed, the connecting component 2 rotates around the rotating component 1, causing the substrate 4 to pass through the through-hole 312 and move out of the cleaning chamber 311. In summary, the cleaning device of this invention eliminates the need for repeated suction, release, and handling of the substrate 4 during the cleaning process using various cleaning solutions, reducing unnecessary steps and resulting in higher cleaning efficiency. Furthermore, the through-hole 312 can expand to both sides of the cleaning container 31 to prevent the cleaning container 31 from obstructing the substrate 4.
[0033] The loading of the substrate 4 onto the adsorption platform 23 and the removal of the substrate 4 from the adsorption platform 23 can be performed using a robotic arm or a handling assembly equipped with suction cups.
[0034] The adsorption platform 23 is equipped with an electric suction cup, which can adsorb the substrate 4 at any time according to the electrical signal, and can also release the substrate 4 at any time according to the electrical signal.
[0035] In addition, if both ends of the substrate 4 need to be cleaned, the device needs to be used to clean the substrate 4 twice.
[0036] Furthermore, the base 11 includes a guide block 111, the top surface of the guide block 111 is provided with a guide groove 1111 around its axis, the rotating block 13 is sleeved on the outside of the guide block 111, the connecting seat 12 is installed on the top surface of the rotating block 13, the connecting seat 12 is provided with a connecting through hole 121, the connecting through hole 121 passes through the connecting seat 12 along the radial direction of the rotating block 13, the guide rod 21 is provided through the connecting through hole 121 and is slidably connected to the connecting through hole 121, and the bottom surface of the first end 211 is provided with a slider 25, the slider 25 is slidably connected to the guide groove 1111.
[0037] The guide rod 21, slidably connected to the connecting through hole 121, restricts the vertical movement of the connecting assembly 2 and allows it to move radially along the rotating block 13. This allows the connecting assembly 2 to approach the rotating block 13 when passing through both sides of the through-hole 312 and other corresponding equipment, ensuring that the substrate 4 and the adsorption platform 23 avoid the cleaning container 31 and other equipment. Furthermore, when the substrate 4 is being cleaned at the center of the through-hole 312, the connecting assembly 2 can move away from the rotating block. 13, so that the nozzle 32 can spray and wash the substrate 4; furthermore, the position of the connecting assembly 2 along the radial direction of the rotating block 13 can be controlled by the sliding connection between the slider 25 and the guide groove 1111. Specifically, when the guide groove 1111 is closer to the axis of the rotating block 13, the connecting assembly 2 is closer to the rotating block 13 when the slider 25 is located here, and when the guide groove 1111 is farther from the axis of the rotating block 13, the connecting assembly 2 is farther from the rotating block 13 when the slider 25 is located here.
[0038] Furthermore, the specific configuration of the guide groove 1111 can be as follows: the guide groove 1111 includes multiple groove segments 11111 corresponding one-to-one with the cleaning component 3, the groove segments 11111 are interconnected, each groove segment 11111 includes an outer groove segment 111112 and two inner groove segments 111111, the two inner groove segments 111111 are respectively located on both sides of the outer groove segment 111112, the distance between the axis of the outer groove segment 111112 and the axis of the guide block 111 is greater than the distance between the axis of the inner groove segment 111111 and the axis of the guide block 111, the inner groove segments 111111 are arranged on both sides of the passage gap 312, and the outer groove segment 111112 is arranged in the middle of the passage gap 312.
[0039] When the slider 25 is located in the inner tank section 111111, the connecting component 2 is closer to the rotating block 13, allowing the adsorption platform 23 and the substrate 4 to retract inward while passing through the through-hole 312. This allows the through-hole 312 to be designed to be smaller, without having to penetrate to both sides of the cleaning container 31, thereby reducing the range of the cleaning solution splashing outward when the nozzle 32 sprays the cleaning solution. When the slider 25 is located in the outer tank section 111112, the connecting component 2 is farther away from the rotating block 13, allowing the adsorption platform 23 to correspond to the nozzle 32, thereby enabling the nozzle 32 to clean the substrate 4 on the adsorption platform 23 normally.
[0040] Furthermore, the slider 25 includes a connecting portion 251 and a contact portion 252. The top end of the connecting portion 251 is connected to the bottom surface of the first end 211. The contact portion 252 is sleeved on the outside of the connecting portion 251 and rotatably connected to the connecting portion 251. The contact portion 252 is located inside the guide groove 1111, and the outer side of the contact portion 252 is used to abut against the groove wall of the guide groove 1111.
[0041] The contact portion 252 is sleeved on the outside of the connecting portion 251 and rotatably connected to the connecting portion 251, so that the contact portion 252 can roll contact with the guide groove 1111 to reduce the friction between the two, thereby making the connecting assembly 2 and the rotating block 13 rotate more smoothly; in addition, the connecting portion 251 can be a vertical columnar component, and the contact portion 252 can be a sleeve-shaped component.
[0042] Furthermore, the connecting assembly 2 also includes a guide plate 26, which is arranged parallel to the guide rod 21. One of the connecting frame 22 and the connecting seat 12 is fixedly connected to one end of the guide plate 26, and the other is slidably connected to the other end of the guide plate 26.
[0043] The guide plate 26 is used to improve the smoothness of the radial movement of the connecting assembly 2 along the rotating block 13.
[0044] In addition, the connecting component 2 may include two guide plates 26, which are respectively disposed on both sides of the connecting frame 22.
[0045] Furthermore, the rotating assembly 1 also includes a gear 15, and the base 11 also includes a base plate 112. The base plate 112 is disposed on the bottom surface of the guide block 111, and the rotating driver 14 is disposed on the top surface of the base plate 112 facing upward. The rotating driver 14 is a rotating motor, and the gear 15 is mounted on the motor shaft of the rotating driver 14. The outer side of the rotating block 13 is provided with a plurality of transmission teeth 131 around its axis, and the gear 15 is connected to the transmission teeth 131 in a driving manner.
[0046] The rotary driver 14 drives the gear 15 to rotate, which in turn drives the rotating block 13 and the connecting assembly 2 to rotate in sequence. In addition, the rotating block 13 can be rotatably connected to the base plate 112.
[0047] Furthermore, the top surface of the cleaning container 31 is provided with a top hole 313 extending into the cleaning chamber 311. The cleaning assembly 3 also includes a cleaning frame 33, which includes a vertical rod 331 and a horizontal rod 332. The horizontal rod 332 is located at the top of the vertical rod 331. The vertical rod 331 is installed on the outer side of the cleaning container 31. The horizontal rod 332 is located above the top hole 313. The nozzle 32 is installed on the horizontal rod 332 and is positioned corresponding to the top hole 313.
[0048] The cleaning container 31 has a top hole 313 to facilitate the maintenance of the cleaning chamber 311 of the cleaning container 31, and the processes of loading and unloading the substrate 4 are also convenient to be performed when the substrate 4 is in the cleaning chamber 311.
[0049] Furthermore, the self-rotating drive 24 is a rotating motor, so the connecting assembly 2 also includes a first transmission wheel 27, a second transmission wheel 28, and a transmission belt 29. The connecting frame 22 includes a connecting plate 221, a mounting plate 222, and an extension plate 223 connected in sequence. The connecting plate 221, the mounting plate 222, and the extension plate 223 are arranged in sequence in a direction away from the connecting seat 12. The side of the connecting plate 221 is connected to the second end 212. The self-rotating drive 24 is mounted on the top surface of the mounting plate 222. The adsorption platform 23 is rotatably disposed on the top surface of the end of the extension plate 223 away from the mounting plate 222. The first transmission wheel 27 is disposed on the bottom surface of the mounting plate 222. The second transmission wheel 28 is disposed on the bottom surface of the end of the extension plate 223 away from the mounting plate 222. The transmission belt 29 is wound around the first transmission wheel 27 and the second transmission wheel 28. Therefore, the self-rotating drive 24 is connected to the first transmission wheel 27, and the adsorption platform 23 is connected to the second transmission wheel 28.
[0050] The self-rotating drive 24 and the adsorption platform 23 are respectively arranged on both sides of the connecting frame 22 in the horizontal direction, so that the weight on the connecting frame 22 is more balanced, avoiding the weight from being concentrated on the end of the extension plate 223 away from the connecting seat 12, thereby reducing the degree of deformation of the guide rod 21 and the connecting frame 22.
[0051] Furthermore, it also includes multiple connecting components 2, and the rotating component 1 includes multiple connecting seats 12. The number of connecting seats 12, connecting components 2 and cleaning components 3 are equal. The connecting seats 12 and connecting components 2 are connected in a one-to-one correspondence. The cleaning components 3 are evenly distributed around the rotating component 1, and the connecting components 2 are evenly distributed around the rotating component 1.
[0052] The number of connecting components 2 and cleaning components 3 is the same, and they are evenly distributed, so that the rotating block 13 can rotate to the point where the connecting component 2 corresponds to the cleaning component 3. At this time, each cleaning chamber can accommodate one substrate 4, so that multiple substrates 4 can be cleaned at the same time, thereby improving the cleaning efficiency of the cleaning device.
[0053] Furthermore, the number of the connecting component 2 and the cleaning component 3 are both 4, wherein the 4 cleaning components 3 are cleaned using ultrapure water, alcohol, ammonia and ultrapure water respectively.
[0054] Furthermore, fixed setting and fixed connection refer to the fixed relative positional relationship of two components, including but not limited to fixing by connectors, fixing by welding, fixing by adhesive, fixing by integral molding, and fixing by snap-fit connection.
[0055] Furthermore, sliding connection and sliding setting refer to the connection between two connected components, where one component can slide along a fixed trajectory on the other component, including but not limited to connection by sliding the slider 25 into the groove, or connection by inserting a slider rod into a hole whose size and profile match the slider rod.
[0056] Furthermore, rotatable connection and rotatable setting refer to the ability of two connected components to rotate, including but not limited to connections via bearings or clearance fits.
[0057] Furthermore, the connectors include, but are not limited to, fasteners, straps, ropes, pneumatic connectors, hydraulic connectors, flanges, Velcro, and buttons.
[0058] In summary, the present invention provides a cleaning device, the technical effects of which are as follows:
[0059] The rotating assembly 1 is located at the center of the device. The rotating driver 14 can drive the rotating block 13 to rotate, thereby causing the components mounted on the rotating block 13 to rotate. One end of the connecting assembly 2 is connected to the rotating assembly 1, specifically, the connecting seat 12 is mounted on the rotating block 13, and the guide rod 21 is connected to the rotating block 13. The other end of the connecting assembly 2 is used to connect to the substrate 4 and can cause the substrate 4 to rotate, so that the substrate 4 can be cleaned evenly and thoroughly. Specifically, the second end 212 of the guide rod 21 is connected to the connecting frame 22. The rotation driver 24 and the adsorption platform 23 are set on the connecting frame 22. The adsorption platform 23 is used to connect to the substrate 4, and the rotation driver 24 is used to drive the adsorption platform 23 to rotate, thereby causing the substrate 4 to rotate. Multiple cleaning assemblies 3 can use different cleaning solutions to clean the substrate 4. The substrate 4 is cleaned. The cleaning container 31 has a cleaning chamber 311 that can accommodate the adsorption platform 23 and the substrate 4. The nozzle 32 is installed in the cleaning container 31 to spray cleaning liquid onto the substrate 4 in the cleaning chamber 311. Furthermore, the cleaning container 31 has a through-hole 312 on the side facing the rotating component 1, so that the connecting component 2 can pass through the through-hole 312 radially along the rotating component 1, so that the adsorption platform 23 and the substrate 4 are cleaned in the cleaning chamber 311. In addition, multiple cleaning components 3 are arranged around the rotating component 1, so that when the rotating block 13 rotates, it can drive the connecting component 2 to pass through the through-hole 312 circumferentially along the rotating component 1, so that the adsorption platform 23 and the substrate 4 on it can move into each of the cleaning chambers 311 for cleaning. The specific cleaning process of the device is as follows: First, the substrate 4 is loaded onto the adsorption platform 23. Then, the adsorption platform 23 firmly adheres to the substrate 4. Next, the substrate 4 is moved sequentially to each cleaning chamber 311 for cleaning with different cleaning solutions. Then, the adsorption platform 23 releases the substrate 4, and the substrate 4 is removed from the adsorption platform 23. The specific process of moving the substrate 4 to the cleaning chamber 311 for cleaning with cleaning solution is as follows: The connecting component 2 rotates around the rotating component 1, causing the substrate 4 to pass through the through-hole 312 and move into the cleaning chamber 311. The adsorption platform 23 rotates, causing the substrate 4 to rotate. At the same time, the nozzle 32 corresponding to the cleaning chamber 311 sprays cleaning solution onto the top surface of the substrate 4. By rotating the connecting component 2 around the rotating component 1, the position of the nozzle 32 spraying onto the substrate 4 is adjusted. After the cleaning work of the cleaning chamber 311 is completed, the connecting component 2 rotates around the rotating component 1, causing the substrate 4 to pass through the through-hole 312 and move out of the cleaning chamber 311. In summary, the cleaning device of this invention eliminates the need for repeated suction, release, and handling of the substrate 4 during the cleaning process using various cleaning solutions, reducing unnecessary steps in the cleaning process and resulting in higher cleaning efficiency.
[0060] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements and substitutions can be made without departing from the technical principles of the present utility model, and these improvements and substitutions should also be considered within the protection scope of the present utility model.
Claims
1. A cleaning device, characterized in that, include, A rotating assembly (1) includes a base (11), a connecting seat (12), a rotating block (13), and a rotating driver (14). The rotating block (13) is rotatably mounted on the base (11), the connecting seat (12) is mounted on the rotating block (13), and the rotating driver (14) is connected to the rotating block (13). The rotating driver (14) is used to drive the rotating block (13) to rotate. A connecting component (2) is provided, comprising a guide rod (21), a connecting frame (22), an adsorption platform (23), and a rotation driver (24). The guide rod (21) is connected to the connecting seat (12). The guide rod (21) has a first end (211) and a second end (212). The first end (211) is located on the rotating component (1), and the second end (212) extends away from the rotating component (1). The connecting frame (22) is located on the second end (212). The adsorption platform (23) is located on the top surface of the connecting frame (22). The adsorption platform (23) is used to connect to the substrate (4). The rotation driver (24) is connected to the adsorption platform (23) and is used to drive the adsorption platform (23) to rotate. Multiple cleaning components (3) are arranged around the rotating component (1). Each cleaning component (3) includes a cleaning container (31) and a nozzle (32). The cleaning container (31) has a cleaning chamber (311) inside. The cleaning container (31) has a through-hole (312) on its side relative to the rotating component (1). The through-hole (312) extends into the cleaning chamber (311). The nozzle (32) is installed in the cleaning container (31) and is arranged downward. The nozzle (32) is used to spray cleaning liquid into the cleaning chamber (311) to clean the substrate (4) located in the cleaning chamber (311). The rotation of the rotating block (13) can drive the connecting component (2) to rotate around the rotating component (1) so that the connecting component (2) passes through the through-hole (312), thereby enabling the adsorption platform (23) to move into each of the cleaning chambers (311).
2. The cleaning device according to claim 1, characterized in that, The base (11) includes a guide block (111), the top surface of the guide block (111) is provided with a guide groove (1111) around its axis, the rotating block (13) is sleeved on the outside of the guide block (111), the connecting seat (12) is installed on the top surface of the rotating block (13), the connecting seat (12) is provided with a connecting through hole (121), the connecting through hole (121) passes through the connecting through hole (121) along the radial direction of the rotating block (13), the guide rod (21) passes through the connecting through hole (121) and is slidably connected to the connecting through hole (121), the bottom surface of the first end (211) is provided with a slider (25), the slider (25) is slidably connected to the guide groove (1111).
3. The cleaning device according to claim 2, characterized in that, The guide groove (1111) includes multiple sub-slots (11111) corresponding one-to-one with the cleaning component (3). The sub-slots (11111) are interconnected. Each sub-slot (11111) includes an outer sub-slot (111112) and two inner sub-slots (111111). The two inner sub-slots (111111) are located on both sides of the outer sub-slot (111112). The distance between the axis of the outer sub-slot (111112) and the axis of the guide block (111) is greater than the distance between the axis of the inner sub-slot (111111) and the axis of the guide block (111). The inner sub-slots (111111) are arranged on both sides of the passage gap (312), and the outer sub-slot (111112) is arranged in the middle of the passage gap (312).
4. The cleaning device according to claim 2, characterized in that, The slider (25) includes a connecting part (251) and a contact part (252). The top end of the connecting part (251) is connected to the bottom surface of the first end (211). The contact part (252) is sleeved on the outside of the connecting part (251) and rotatably connected to the connecting part (251). The contact part (252) is located in the guide groove (1111). The outer side of the contact part (252) is used to abut against the groove wall of the guide groove (1111).
5. The cleaning device according to claim 2, characterized in that, The connecting assembly (2) further includes a guide plate (26), which is arranged parallel to the guide rod (21). One of the connecting frame (22) and the connecting seat (12) is fixedly connected to one end of the guide plate (26), and the other is slidably connected to the other end of the guide plate (26).
6. The cleaning device according to claim 2, characterized in that, The rotating assembly (1) further includes a gear (15), and the base (11) further includes a base plate (112). The base plate (112) is disposed on the bottom surface of the guide block (111). The rotating driver (14) is disposed on the top surface of the base plate (112) facing upward. The rotating driver (14) is a rotating motor. The gear (15) is mounted on the motor shaft of the rotating driver (14). The outer side of the rotating block (13) is provided with a plurality of transmission teeth (131) around its axis. The gear (15) is connected to the transmission teeth (131).
7. The cleaning device according to claim 1, characterized in that, The top surface of the cleaning container (31) is provided with a top hole (313) that extends through the cleaning chamber (311). The cleaning assembly (3) also includes a cleaning frame (33). The cleaning frame (33) includes a vertical rod (331) and a horizontal rod (332). The horizontal rod (332) is located at the top of the vertical rod (331). The vertical rod (331) is installed on the outer side of the cleaning container (31). The horizontal rod (332) is located above the top hole (313). The nozzle (32) is installed on the horizontal rod (332) and is set corresponding to the top hole (313).
8. The cleaning apparatus according to claim 1, characterized in that, The self-rotating drive (24) is a rotating motor, so the connecting assembly (2) also includes a first transmission wheel (27), a second transmission wheel (28), and a transmission belt (29). The connecting frame (22) includes a connecting plate (221), a mounting plate (222), and an extension plate (223) connected in sequence. The connecting plate (221), the mounting plate (222), and the extension plate (223) are arranged in sequence in a direction away from the connecting seat (12). The side of the connecting plate (221) is connected to the second end (212). The self-rotating drive (24) is mounted on the mounting plate (222). The top surface of the extension plate (223) is rotatably disposed on the top surface of the extension plate (223) away from the mounting plate (222). The first transmission wheel (27) is disposed on the bottom surface of the mounting plate (222), and the second transmission wheel (28) is disposed on the bottom surface of the extension plate (223) away from the mounting plate (222). The transmission belt (29) is wound around the first transmission wheel (27) and the second transmission wheel (28). Therefore, the self-rotation driver (24) is connected to the first transmission wheel (27), and the adsorption platform (23) is connected to the second transmission wheel (28).
9. The cleaning device according to claim 1, characterized in that, It also includes multiple connecting components (2), the rotating component (1) includes multiple connecting seats (12), the number of connecting seats (12), the connecting components (2) and the cleaning components (3) are equal, the connecting seats (12) and the connecting components (2) are connected in a one-to-one correspondence, the cleaning components (3) are evenly distributed around the rotating component (1), and the connecting components (2) are evenly distributed around the rotating component (1).
10. The cleaning apparatus according to claim 9, characterized in that, The number of the connecting component (2) and the cleaning component (3) is 4.