A substrate sheet cassettes

Abstract

The substrate piece loading box provided by the embodiment of the present application relates to the technical field of semiconductor substrate material manufacturing, and comprises: a box body having at least one placing groove, wherein the bottom of the placing groove is provided with a hollow area; a lifting mechanism comprising a movable seat, a rocker, an identification rod and a driving assembly, the rocker is rotatably installed on the movable seat, one end of the identification rod is connected with the movable seat, the other end of the identification rod is a free end and extends to one side of the placing groove, and the driving assembly is used to drive the movable seat to move so that the rocker is aligned with the placing groove, and the driving assembly is also used to drive the rocker to rotate so that the rocker passes through the hollow area and lifts the substrate piece in the placing groove. In the substrate piece loading box provided by the embodiment of the present application, the lifted substrate piece can be conveniently picked up; the identification rod moves synchronously with the movable seat, can be used to show the current position of the rocker, and can provide a reference for aligning the rocker with the substrate piece in the placing groove.

Description

Technical Field

[0001] This application relates to the field of semiconductor substrate material manufacturing technology, and in particular to a substrate wafer cassette. Background Technology

[0002] In related technologies, indium phosphide (IP) substrates have an application market in the manufacture of high-frequency, high-power devices, fiber optic communications, wireless transmission, radio astronomy, and other radio frequency (RF) devices. RF devices manufactured using IPP substrates have demonstrated excellent performance in applications such as satellites and radar. They are highly competitive in the RF front-end of radar and communication systems and in analog / mixed-signal wide-bandwidth circuits, making them suitable for applications such as high-speed data processing and high-precision wide-bandwidth A / D conversion. Furthermore, related devices based on IPP RF technology, such as low-noise amplifiers, modules, and receivers, are widely used in satellite communications, millimeter-wave radar, and active and passive millimeter-wave imaging equipment. At bandwidth levels above 100 GHz, IPP-based RF devices have significant advantages in backhaul networks and point-to-point communication networks for wireless transmission. In the future, IPP substrates are expected to become the mainstream substrate material for RF devices in 6G and even 7G wireless transmission networks.

[0003] In the process of manufacturing substrate wafers, substrate wafer storage boxes are required. Existing solutions typically include a box body and a lifting component; the box body has a storage cavity; the storage cavity has at least one set of slots; the slot set includes two substrate slots; the two substrate slots are formed on two opposing walls within the storage cavity for inserting substrate wafers; the bottom of the storage cavity has a lifting slot coplanar with the slot set; the lifting component is slidably mounted on the lifting slot, with one end extending out of the box body; the lifting component has a lifting part; the lifting part can contact the edge of the substrate wafer inserted into the slot set; when the lifting part moves towards the center of the slot set under the action of the lifting component, it can undergo relative displacement with the substrate wafer to lift it. However, this type of substrate box has a complex structure and high cost. Utility Model Content

[0004] This application aims to address at least one of the technical problems existing in the prior art. To this end, this application proposes a substrate cassette that can easily lift the substrate.

[0005] Embodiments of this application provide a substrate wafer cassette, comprising:

[0006] The box body has at least one placement slot, and the bottom of the placement slot is provided with a hollow area;

[0007] The lifting mechanism includes a movable base, a rocker arm, an indicator rod, and a drive assembly. The rocker arm is rotatably mounted on the movable base. One end of the indicator rod is connected to the movable base, and the other end of the indicator rod is a free end that extends to one side of the placement slot. The drive assembly is used to drive the movable base to move so that the rocker arm is aligned with the placement slot. The drive assembly is also used to drive the rocker arm to rotate so that the rocker arm passes through the cutout area and lifts the substrate sheet located in the placement slot.

[0008] Furthermore, the free end of the marker rod extends to a position flush with the top of the box.

[0009] Furthermore, the marker rod includes an indicator portion located on the side of the marker rod closer to the box body, and the minimum thickness of the indicator portion is less than or equal to the width of the placement slot.

[0010] Furthermore, the placement slots are multiple, and the multiple placement slots are spaced apart along the first direction.

[0011] Furthermore, the drive assembly includes a lead screw, a guide rod, and a gear shaft. The lead screw is arranged parallel to the first direction and threadedly connected to the movable seat. The movable seat is provided with a connecting hole that slides with the guide rod. The gear shaft is located on one side of the movable seat. The rocker arm has a toothed portion that meshes with the gear shaft.

[0012] Furthermore, the drive assembly includes a first drive mechanism located on the outside of the housing, the first drive mechanism being used to drive the lead screw to rotate.

[0013] Furthermore, the drive assembly includes a second drive mechanism connected to the gear shaft, the second drive mechanism being used to drive the gear shaft to rotate.

[0014] Furthermore, the gear shaft is a spur gear shaft, and the meshing portion matches the gear shaft.

[0015] Furthermore, the thickness of the rocker arm is less than or equal to the interval between two adjacent placement slots.

[0016] Furthermore, the box body includes a support portion and a receiving portion, the support portion is installed at the bottom of the receiving portion, the movable seat, the rocker arm and the drive assembly are disposed below the receiving portion, and the placement groove is formed on the receiving portion.

[0017] As can be seen from the above technical solutions, the embodiments of this application have at least the following beneficial effects:

[0018] In the substrate cassette provided in this application embodiment, the driving component can move the movable seat to drive the rocker arm, thereby aligning the rocker arm with substrates in different placement slots. Subsequently, the driving component drives the rocker arm to rotate, causing the rocker arm to lift a substrate coplanar with it, thus misaligning the lifted substrate with its adjacent substrate, thereby facilitating the removal of the lifted substrate. In this application, the indicator rod moves synchronously with the movable seat, and the indicator rod can be used to indicate the current position of the rocker arm, providing a reference for aligning the rocker arm with the substrate in the placement slot, which helps to improve the efficiency of the rocker arm lifting the substrate. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of the operation of a substrate wafer cassette provided in one embodiment of this application;

[0021] Figure 2 This is another schematic diagram of the substrate wafer cassette provided in one embodiment of this application;

[0022] Figure 3 for Figure 2 A magnified schematic diagram of part A in the middle section;

[0023] Figure 4 This is a top view schematic diagram of a substrate wafer cassette provided in one embodiment of this application;

[0024] Figure 5 for Figure 4 Schematic diagram of the cross-sectional structure of BB.

[0025] Figure label:

[0026] 1. Substrate;

[0027] 100. Box body; 110. Support part; 120. Receiving part; 121. Placement slot; 122. Cutout area;

[0028] 210. Movable seat; 220. Rocker arm; 221. Gear part; 230. Marker rod; 231. Indicator part; 240. Lead screw; 250. Gear shaft; 260. First drive mechanism; 270. Second drive mechanism; 280. Guide rod. Detailed Implementation

[0029] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0030] See Figures 1 to 5 As shown, an embodiment of this application discloses a substrate wafer cassette, including a cassette body 100 and a lifting mechanism.

[0031] Specifically, the housing 100 has at least one placement slot 121, and the bottom of the placement slot 121 is provided with a hollow area 122; the lifting mechanism includes a movable base 210, a rocker arm 220, an indicator rod 230 and a drive assembly. The rocker arm 220 is rotatably mounted on the movable base 210. One end of the indicator rod 230 is connected to the movable base 210, and the other end of the indicator rod 230 is a free end that extends to one side of the placement slot 121. The drive assembly is used to drive the movable base 210 to move so that the rocker arm 220 is aligned with the placement slot 121, thereby facilitating the lifting of the substrate sheet in the placement slot 121; the drive assembly is also used to drive the rocker arm 220 to rotate so that the rocker arm 220 can pass through the hollow area 122 and lift the substrate sheet 1 located in the placement slot 121.

[0032] The marker rod 230 and the rocker arm 220 are coplanar, so the relative position of the rocker arm 220 and the box body 100 can be determined based on the relative position of the marker rod 230 and the box body 100.

[0033] In this embodiment, there are multiple placement slots 121, which are spaced apart along a first direction. Figure 1 or Figure 2 The X direction is shown.

[0034] In this embodiment, see Figures 1 to 3 The movable base 210 is positioned below the placement slot 121, and the rocker arm 220 is rotatably mounted on the movable base 210. In other words, the rocker arm 220 is positioned below the placement slot 121. The drive assembly can drive the movable base 210 to move along the X direction, aligning the rocker arm 220 with different positions of the placement slot 121. Thus, the rocker arm 220 can be moved and rotated by the drive assembly, achieving the purpose of lifting the substrate 1 in different placement slots 121 with a single rocker arm 220. This simplifies the lifting structure and saves equipment costs.

[0035] In the substrate cassette provided in this embodiment, the driving assembly moves the movable seat 210, which in turn moves the rocker arm 220 in the X direction, allowing the rocker arm 220 to align with substrates 1 in different placement slots 121. Subsequently, the driving assembly rotates the rocker arm 220, which lifts the substrate 1 in the placement slot 121 coplanar with the rocker arm 220, causing the lifted substrate 1 to be misaligned with other adjacent substrates 1, thus facilitating the pickup of the lifted substrate 1. In this application, the indicator rod 230 moves synchronously with the movable seat 210, indicating the current position of the rocker arm 220 and providing a reference for aligning the rocker arm 220 with the substrates 1 in the placement slots 121, thereby improving the efficiency of the rocker arm 220 in lifting the substrates 1.

[0036] In some embodiments of this application, see Figure 1 and Figure 2 The free end of the marker rod 230 extends to a position flush with the top of the box 100. Thus, during the movement of the movable seat 210, the current position of the rocker arm 220 can be determined by the position of the free end of the marker rod 230, facilitating alignment of the rocker arm 220 with the placement slot 121. In this embodiment, by making the free end of the marker rod 230 flush with the top of the box 100, it is possible to easily observe whether the marker rod 230 is aligned with the placement slot 121.

[0037] In this embodiment, see Figure 1 and Figure 2 The box body 100 includes a support portion 110 and a receiving portion 120, the top of which is an open structure. The top surface of the marker rod 230 is flush with the top surface of the receiving portion 120.

[0038] It is worth understanding that in some other embodiments, the free end of the marker rod 230 may also be configured to extend to one side of the placement slot 121 and point towards the placement slot 121, so as to facilitate the determination of the relative position of the marker rod 230 and the placement slot 121.

[0039] In some embodiments of this application, see Figure 4 The marker rod 230 includes an indicator portion 231, which is located on the side of the marker rod 230 closest to the housing 100. The minimum thickness of the indicator portion 231 is less than or equal to the width of the placement groove 121. This allows for more accurate determination of whether the marker rod 230 is aligned with the placement groove 121, which helps improve the alignment effect between the rocker arm 220 and the substrate 1.

[0040] In some embodiments of this application, see Figures 1 to 5The drive assembly includes a lead screw 240, a guide rod 280, and a gear shaft 250. The lead screw 240 is arranged parallel to the first direction (i.e., the X direction) and threadedly connected to the movable seat 210. The movable seat 210 is provided with a connecting hole that slides with the guide rod 280. The gear shaft 250 is located on one side of the movable seat 210. The rocker arm 220 has a toothed portion 221 that meshes with the gear shaft 250.

[0041] The lead screw 240, guide rod 280, and gear shaft 250 are all arranged parallel to the X direction. The guide rod 280 is slidably connected to the connecting hole of the movable seat 210. The movable seat 210 is provided with a threaded hole that mates with the lead screw 240. By driving the lead screw 240 to rotate, the movable seat 210 can be moved along the X direction, thereby moving the rocker arm 220 to the bottom of different placement slots 121. The gear shaft 250 is located on one side of the movable seat 210 and meshes with the meshing part 221 of the rocker arm 220. By driving the gear shaft 250 to rotate, the rocker arm 220 can be rotated. Thus, when the rocker arm 220 is aligned with the substrate 1 in the placement slot 121, the rocker arm 220 can lift the substrate 1 to facilitate picking up the substrate 1.

[0042] In some embodiments of this application, see Figure 2 and Figure 4 The driving assembly includes a first driving mechanism 260, which is located on the outside of the housing 100. The first driving mechanism 260 is used to drive the lead screw 240 to rotate. The lead screw 240 is arranged parallel to the X direction. By driving the lead screw 240 to rotate, the first driving mechanism 260 can drive the movable seat 210 to move along the X direction.

[0043] In one possible implementation, the first drive mechanism 260 is a lead screw handle, which can drive the lead screw 240 to rotate by manually driving the lead screw handle to rotate.

[0044] It is worth understanding that in some other embodiments, the first drive mechanism 260 can be configured as a motor, which drives the lead screw 240 to rotate, thereby causing the rocker arm 220 to move in the X direction, so that the rocker arm 220 is aligned with different placement slots 121.

[0045] In some embodiments of this application, see Figure 2 and Figure 4 The driving assembly includes a second driving mechanism 270, which is connected to the gear shaft 250 and is used to drive the gear shaft 250 to rotate. Specifically, the gear shaft 250 is arranged parallel to the X direction. By driving the gear shaft 250 to rotate, the second driving mechanism 270 can drive the rocker arm 220 to rotate, so that the rocker arm 220 can lift the substrate 1 located above it.

[0046] In one possible implementation, the second drive mechanism 270 is a gear shaft handle, which can drive the gear shaft 250 to rotate by manually driving the gear handle to rotate.

[0047] It is worth understanding that in some other embodiments, the second drive mechanism 270 can be configured as a motor, which drives the gear shaft 250 to rotate, thereby driving the rocker arm 220 to rotate, so that the rocker arm 220 can lift the substrate 1 in the placement groove 121 that is coplanar with it.

[0048] Furthermore, the gear shaft 250 is a spur gear shaft, and the meshing portion 221 matches the gear shaft 250. That is, the meshing portion 221 of the rocker arm 220 can move axially relative to the gear shaft 250. Thus, when the rocker arm 220 moves along the X direction to below the next placement slot 121, the rocker arm 220 can move relative to the gear shaft 250, thereby realizing the position adjustment of the rocker arm 220 in the X direction.

[0049] It is understood that in the embodiments of this application, the thickness of the rocker arm 220 is less than or equal to the interval between two adjacent placement slots 121. Thus, by changing the relative position of the rocker arm 220 in the X direction, the rocker arm 220 can be aligned with only one substrate 1 in one placement slot 121 at a time, thereby achieving the purpose of lifting only one substrate 1 at a time. By limiting the thickness of the rocker arm 220, it is possible to prevent the rocker arm 220 from lifting substrates 1 in adjacent placement slots 121.

[0050] It should be noted that the thickness of the joystick 220 refers to the width of the joystick 220 in the X direction.

[0051] In some embodiments of this application, see Figure 1 and Figure 2 The box body 100 includes a support part 110 and a receiving part 120. The support part 110 is installed at the bottom of the receiving part 120. The movable seat 210, the rocker arm 220 and the drive assembly are disposed below the receiving part 120. The placement groove 121 is formed in the receiving part 120.

[0052] In the description of this application, it should be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0053] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, unless otherwise stated, "a plurality of" means two or more.

[0054] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0055] In the description of this specification, specific features, structures, materials, or characteristics may be combined in any suitable manner in one or more embodiments or examples.

[0056] It should be understood that although the steps in the flowcharts of the accompanying figures are shown sequentially as indicated by the arrows, these steps are not necessarily executed in the order indicated by the arrows. Unless explicitly stated herein, there is no strict order restriction on the execution of these steps, and they can be executed in other orders. Moreover, at least some steps in the flowcharts of the accompanying figures may include multiple sub-steps or multiple stages. These sub-steps or stages are not necessarily completed at the same time, but can be executed at different times, and their execution order is not necessarily sequential, but can be performed alternately or in turn with other steps or at least some of the sub-steps or stages of other steps.

Claims

1. A substrate wafer cassette, characterized in that, include: The box body has at least one placement slot, and the bottom of the placement slot is provided with a hollow area; The lifting mechanism includes a movable base, a rocker arm, an indicator rod, and a drive assembly. The rocker arm is rotatably mounted on the movable base. One end of the indicator rod is connected to the movable base, and the other end of the indicator rod is a free end that extends to one side of the placement slot. The drive assembly is used to drive the movable base to move so that the rocker arm is aligned with the placement slot. The drive assembly is also used to drive the rocker arm to rotate so that the rocker arm passes through the cutout area and lifts the substrate sheet located in the placement slot.

2. The substrate wafer cassette according to claim 1, characterized in that, The free end of the marker pole extends to a position flush with the top of the box.

3. The substrate wafer cassette according to claim 2, characterized in that, The signpost includes an indicator portion located on the side of the signpost closer to the box body, and the minimum thickness of the indicator portion is less than or equal to the width of the placement slot.

4. The substrate wafer cassette according to any one of claims 1 to 3, characterized in that, The placement slots are multiple, and the multiple placement slots are spaced apart along a first direction.

5. The substrate wafer cassette according to claim 4, characterized in that, The drive assembly includes a lead screw, a guide rod, and a gear shaft. The lead screw is arranged parallel to the first direction and threadedly connected to the movable seat. The movable seat is provided with a connecting hole that slides with the guide rod. The gear shaft is located on one side of the movable seat. The rocker arm has a toothed portion that meshes with the gear shaft.

6. The substrate wafer cassette according to claim 5, characterized in that, The drive assembly includes a first drive mechanism located on the outside of the housing, which is used to drive the lead screw to rotate.

7. The substrate wafer cassette according to claim 5, characterized in that, The drive assembly includes a second drive mechanism connected to the gear shaft, which drives the gear shaft to rotate.

8. The substrate wafer cassette according to claim 5, characterized in that, The gear shaft is a spur gear shaft, and the meshing part is matched with the gear shaft.

9. The substrate wafer cassette according to claim 1, characterized in that, The thickness of the rocker arm is less than or equal to the interval between two adjacent placement slots.

10. The substrate wafer cassette according to claim 1, characterized in that, The box body includes a support part and a receiving part. The support part is installed at the bottom of the receiving part, and the movable seat, the rocker arm and the drive assembly are disposed below the receiving part. The placement groove is formed on the receiving part.

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