Curved surface grinding brush

Abstract

The utility model relates to the technical field of grinding brush, concretely to a curved surface grinding brush, include: rotary axle, the outer wall of rotary axle is provided with octagonal sleeve, the surface of octagonal sleeve is opened has the sliding slot, the outside of octagonal sleeve is equipped with octagonal cylinder, the outer wall of octagonal cylinder is provided with brush body, the inside of rotary axle is installed with connecting structure, the connecting structure includes fixed block, the inside of rotary axle is fixedly installed with fixed block, the middle part of fixed block is swingly installed with hand screw rod through bearing, the both ends of hand screw rod are connected with sliding block in screw, the upper and lower ends of sliding block are opened has the clamping slot, the utility model discloses through setting up hand screw rod, can drive the sliding block and push block of both sides to be close to each other through rotating hand screw rod, can promote octagonal cylinder to remove, makes octagonal cylinder in octagonal sleeve outside centring, can guarantee the brush body before and after position fixed, guarantee the brush body's replacement convenience while, improved the practicality of device.

Description

Technical Field

[0001] This utility model relates to the field of grinding brush technology, specifically a curved surface grinding brush. Background Technology

[0002] In the chemical mechanical polishing process, the wafer is mostly polished by a polishing brush. Under certain pressure and with the help of polishing fluid, the material is peeled off from the wafer surface layer by layer to achieve the desired effect. Most existing polishing brushes are mounted on a rotating shaft, and the rotation of the shaft drives the polishing brush to rotate. After the polishing brush wears out, it needs to be replaced. For curved polishing brushes, due to the curvature of their surface, in order to ensure that the curvature is consistent with the processing position of the wafer, the polishing brush must be kept in a fixed position before and after replacement. However, most existing polishing brushes are positioned by markings on the surface of the rotating shaft, which is greatly affected by visual factors and is prone to positional deviation, thus affecting the quality of wafer processing.

[0003] Therefore, in order to solve the above problems, a curved surface grinding brush is proposed. Utility Model Content

[0004] The purpose of this invention is to provide a curved surface grinding brush to solve the problem mentioned in the background art that most existing grinding brushes are positioned by markings on the surface of a rotating shaft, which is greatly affected by visual factors and can easily lead to positional deviation, thus affecting the quality of wafer processing.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a curved surface grinding brush, comprising: a rotating shaft; An octagonal sleeve is provided on the outer wall of the rotating shaft, and a sliding groove is provided on the surface of the octagonal sleeve. An octagonal cylinder is fitted on the outer side of the octagonal sleeve, and a brush body is provided on the outer wall of the octagonal cylinder. A connecting structure is installed on the inner side of the rotating shaft. The connecting structure includes a fixing block, which is fixedly installed on the inner side of the rotating shaft. A hand-operated screw is movably installed in the middle of the fixing block through a bearing. The two ends of the hand-operated screw are threaded to sliders. The upper and lower ends of the sliders are provided with slots. Two sets of push blocks are installed on the outer side of the sliders. The inner side of the push blocks is provided with a sleeve groove. Magnetic blocks are glued to both ends of the push blocks. A locking block is integrally formed on the inner side of the push blocks.

[0006] Preferably, the slider is slidably mounted inside the groove, and the end of the slider is flush with the surface of the octagonal sleeve.

[0007] Preferably, the two sets of push blocks are magnetically connected by magnetic blocks, and the push blocks are sleeved on the outside of the octagonal sleeve through a groove, and the push blocks are in contact with the side wall of the octagonal cylinder.

[0008] Preferably, both the card block and the card slot are L-shaped, with the card block being engaged inside the card slot.

[0009] Compared with the prior art, the beneficial effects of this utility model are as follows: By setting a hand-rotating screw, the sliders and push blocks on both sides can be driven to move closer to each other by rotating the hand-rotating screw, which can push the octagonal cylinder to move, so that the octagonal cylinder is centered on the outside of the octagonal sleeve. This can ensure that the brush body is fixed in position before and after replacement, ensuring the convenience of brush body replacement while improving the practicality of the device.

[0010] This utility model features a connecting structure. When the brush body needs to be replaced, the hand-operated screw is rotated. The hand-operated screw is threadedly connected to the slider, and the rotation of the hand-operated screw causes the slider to slide within the groove, moving the two sets of sliders away from each other. The sliders then move the push block away from the octagonal cylinder, releasing the restriction on the brush body. Pulling the push block moves it to the opening end of the slot. Pulling the two sets of push blocks up and down removes them from the outside of the octagonal sleeve, making the surfaces of the octagonal sleeve and the rotating shaft flat, allowing for easy removal of the brush body. The new brush body is then placed on the outside of the octagonal sleeve through the octagonal cylinder, positioning the brush body between the two sets of sliders. The two sets of push blocks are then... The blocks are fitted onto the outside of the slider from the top and bottom sides. The locking blocks are inserted into the slots, and the two sets of push blocks are magnetically fixed by magnetic blocks. Rotating the hand screw in opposite directions causes the two sets of sliders to move closer to each other. The sliders then move the push blocks from the left and right sides towards the octagonal cylinder. When the push blocks contact the octagonal cylinder, continuing to rotate the hand screw causes the sliders to move relative to the push blocks, allowing the locking blocks to be locked deep in the slots. This ensures the pushing effect of the push blocks on the octagonal cylinder, keeping the octagonal cylinder centered outside the octagonal sleeve. This ensures the brush body is fixed in position before and after replacement, making brush replacement convenient and improving the practicality of the device. Attached Figure Description

[0011] Figure 1 This is a front view schematic diagram of the structure of this utility model; Figure 2 This is an exploded view of the structure of this utility model; Figure 3 This is a top view schematic diagram of the structure of the magnetic block of this utility model; Figure 4 This is a front sectional view of the structure of the rotating shaft, slider, and hand-rotating screw of this utility model.

[0012] In the diagram: 1. Rotating shaft; 11. Octagonal sleeve; 12. Slide groove; 13. Octagonal cylinder; 14. Brush body; 2. Connecting structure; 21. Fixing block; 22. Hand-operated screw; 23. Slider; 24. Slot; 25. Push block; 26. Slot; 27. Magnetic block; 28. Locking block. Detailed Implementation

[0013] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0014] Please see Figures 1-4 An embodiment of a curved surface grinding brush provided by this utility model: The rotating shaft 1 and brush body 14 used in this application are products that can be purchased directly from the market. Their principles and connection methods are existing technologies well known to those skilled in the art, so they will not be described in detail here.

[0015] A curved surface grinding brush includes: a rotating shaft 1; An octagonal sleeve 11 is provided on the outer wall of the rotating shaft 1. A groove 12 is provided on the surface of the octagonal sleeve 11. An octagonal cylinder 13 is fitted on the outer side of the octagonal sleeve 11. A brush body 14 is provided on the outer wall of the octagonal cylinder 13. A connecting structure 2 is installed on the inner side of the rotating shaft 1. The connecting structure 2 includes a fixing block 21, which is fixedly installed on the inner side of the rotating shaft 1. A hand-operated screw 22 is movably installed in the middle of the fixing block 21 via a bearing. The two ends of the hand-operated screw 22 are threadedly connected to sliders 23. The upper and lower ends of the sliders 23 are provided with slots 24. Two sets of push blocks 25 are installed on the outer side of the sliders 23. The inner side of the push blocks 25 is provided with a sleeve groove 26. Magnetic blocks 27 are bonded to both ends of the push blocks 25. A locking block 28 is integrally formed on the inner side of the push blocks 25. Rotating the hand-operated screw 22 causes the sliders 23 and push blocks 25 on both sides to move closer to each other, which can push the octagonal cylinder 13 to move, so that the octagonal cylinder 13 is centered outside the octagonal sleeve 11. This ensures that the brush body 14 is fixed in position before and after replacement, ensuring the convenience of replacing the brush body 14 and improving the practicality of the device. Furthermore, the slider 23 is slidably installed inside the slide groove 12, with the end of the slider 23 flush with the surface of the octagonal sleeve 11. The slide groove 12 provides a limit for the movement of the slider 23 and provides space for the connection between the push block 25 and the slider 23.

[0016] Furthermore, the two sets of push blocks 25 are magnetically connected by magnetic blocks 27. The push blocks 25 are sleeved on the outside of the octagonal sleeve 11 through the sleeve groove 26. The push blocks 25 are in contact with the side wall of the octagonal cylinder 13. The push blocks 25 can slide stably on the outside of the octagonal sleeve 11 and can push the octagonal cylinder 13 to move on the outside of the octagonal sleeve 11.

[0017] Furthermore, both the locking block 28 and the slot 24 are L-shaped structures. The locking block 28 is locked inside the slot 24. When the push block 25 is in contact with the octagonal cylinder 13, rotating the hand screw 22 will cause the slider 23 to move relative to the push block 25, thereby allowing the locking block 28 to be locked deep in the slot 24, achieving a stable connection between the slider 23 and the push block 25, and improving the ease of use of the device.

[0018] Working principle: When the brush body 14 needs to be replaced, rotate the hand screw 22. The hand screw 22 is threadedly connected to the slider 23. The rotation of the hand screw 22 will drive the slider 23 to slide in the groove 12, so that the two sets of sliders 23 move away from each other. The slider 23 will then drive the push block 25 away from the octagonal cylinder 13, which can release the restriction on the brush body 14. Pull the push block 25 so that the push block 25 moves to the opening end of the slot 24. Pull the two sets of push blocks 25 up and down to remove the two sets of push blocks 25 from the outside of the octagonal sleeve 11, so that the surface of the octagonal sleeve 11 and the rotating shaft 1 are flat, and the brush body 14 can be easily removed. The new brush body 14 is fitted onto the outside of the octagonal sleeve 11 through the octagonal cylinder 13, so that the brush body 14 is located between the two sets of sliders 23. The two sets of push blocks 25 are fitted onto the outside of the sliders 23 from the top and bottom. The locking block 28 is inserted into the inside of the slot 24, and the two sets of push blocks 25 are magnetically fixed by the magnetic block 27. Rotating the hand screw 22 in the opposite direction will cause the two sets of sliders 23 to move closer to each other. The sliders 23 will then cause the push blocks 25 to move closer to the octagonal cylinder 13 from the left and right sides. When the push blocks 25 contact the octagonal cylinder 13, continue to rotate the hand screw 22, which will cause the sliders 23 to move relative to the push blocks 25, so that the locking block 28 can be locked deep in the slot 24. This ensures the pushing effect of the push blocks 25 on the octagonal cylinder 13, and keeps the octagonal cylinder 13 centered outside the octagonal sleeve 11. This ensures that the position of the brush body 14 is fixed before and after replacement, ensuring the convenience of replacing the brush body 14 and improving the practicality of the device.

[0019] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model in any way. Those skilled in the art can readily implement this utility model based on the accompanying drawings and the above description. However, any modifications, alterations, or equivalent variations made by those skilled in the art without departing from the scope of the utility model's technical solution, utilizing the disclosed technical content, are considered equivalent embodiments of this utility model. Furthermore, any equivalent changes, alterations, or variations made to the above embodiments based on the essential technology of this utility model are still within the protection scope of this utility model's technical solution.

Claims

1. A curved surface grinding brush, comprising: Rotation axis (1); Its features are: An octagonal sleeve (11) is provided on the outer wall of the rotating shaft (1), and a sliding groove (12) is provided on the surface of the octagonal sleeve (11). An octagonal cylinder (13) is fitted on the outer side of the octagonal sleeve (11), and a brush body (14) is provided on the outer wall of the octagonal cylinder (13). A connecting structure (2) is installed on the inner side of the rotating shaft (1). The connecting structure (2) includes a fixing block (21). The fixing block (21) is fixedly installed on the inner side of the rotating shaft (1). A hand screw (22) is movably installed in the middle of the fixing block (21) through a bearing. The two ends of the hand screw (22) are threadedly connected to sliders (23). The upper and lower ends of the slider (23) are provided with slots (24). Two sets of push blocks (25) are installed on the outer side of the slider (23). The inner side of the push block (25) is provided with a sleeve groove (26). The two ends of the push block (25) are bonded with magnetic blocks (27). The inner side of the push block (25) is integrally formed with a locking block (28).

2. The curved surface grinding brush according to claim 1, characterized in that: The slider (23) is slidably installed inside the groove (12), and the end of the slider (23) is flush with the surface of the octagonal sleeve (11).

3. A curved surface grinding brush according to claim 1, characterized in that: The two sets of push blocks (25) are magnetically connected by magnetic blocks (27). The push blocks (25) are fitted on the outside of the octagonal sleeve (11) through the sleeve groove (26). The push blocks (25) fit against the side wall of the octagonal cylinder (13).

4. A curved surface grinding brush according to claim 1, characterized in that: Both the card block (28) and the card slot (24) are "L" shaped structures, and the card block (28) is fitted inside the card slot (24).

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