Excimer lamp
By placing the corner of the inner electrode inside the outer edge region of the inner electrode and using chamfering to form a straight line or arc, the problem of micro-cracks on the inner wall of the inner tube is solved, thus extending the service life of the excimer lamp.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- USHIO INC
- Filing Date
- 2025-07-24
- Publication Date
- 2026-07-28
AI Technical Summary
In excimer lamps with a double-tube structure, the inner wall of the inner tube is prone to microcracks due to friction during the insertion of the inner electrode, which may lead to cracking and other defects when the lamp is lit for a long time.
The corner of the inner electrode is located further inside than the outer edge of the inner electrode. It is chamfered to form a straight or arc-shaped chamfer to reduce contact with the inner wall of the inner tube and suppress the generation of microcracks.
It effectively suppressed micro-cracks on the inner wall of the inner tube, extended the service life of the excimer lamp, and reduced the occurrence of malfunctions.
Smart Images
Figure CN224570010U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to excimer lamps. Background Technology
[0002] Previously, ultraviolet light was used in the manufacturing processes of semiconductors and LCD panels, as well as in the generation of ozone for air purification. Excimer lamps are one of the sources that emit ultraviolet light. Excimer lamps emit light by applying a voltage to a pair of electrodes arranged on the wall of the light-emitting tube, which is located on the outside of the light-emitting tube, while the light-emitting gas is sealed inside the light-emitting tube made of dielectric material (hereinafter, sometimes referred to as the "light-emitting space").
[0003] The applicant has proposed an excimer lamp with a so-called double-tube structure, comprising an outer tube and an inner tube, for use with reference to Patent Document 1 below. As shown in Patent Document 1, in the double-tube excimer lamp, a voltage is applied to a luminescent gas sealed within a luminescent space enclosed by the outer and inner tubes via electrodes disposed on the outer wall of the outer tube and on the inner wall of the inner tube. The application of voltage generates a discharge (dielectric barrier discharge) within the luminescent space, which excites atoms or molecules contained in the luminescent gas, thereby causing the excimer lamp to emit light.
[0004] Existing technical documents
[0005] Patent documents
[0006] Patent Document 1: Japanese Patent Application Publication No. 8-96770 Utility Model Content
[0007] The problem to be solved by the utility model
[0008] In the process of advancing their research on excimer lamps with a double-layer tube structure, the inventors of this invention, in order to clean the dirt that had accidentally accumulated on the light-emitting tubes of the prototype excimer lamps, disassembled the lamps and immersed the light-emitting tubes in a cleaning solution for cleaning. At this time, the inventors of this invention noticed that the surface of the light-emitting tubes, after being removed from the cleaning solution, exhibited diffuse reflection of light.
[0009] Diffuse reflection of light was observed on the inner wall surface of the inner tube. It is believed that this diffuse reflection is due to minute scratches (hereinafter referred to as "microcracks") on the inner wall surface, which are not visible to the naked eye. The inventors of this invention speculate that these microcracks are generated when electrodes are disposed on the inner wall surface. Hereinafter, the electrodes disposed on the inner wall surface of the inner tube will be referred to as "inner electrodes".
[0010] However, as also mentioned in Patent Document 1, from the viewpoint of minimizing damage to the inner wall surface of the inner tube, the inventors of this invention used aluminum, a relatively soft metal, to construct the inner electrode. However, based on the above-described process, the inventors of this invention discovered that even when the inner electrode is constructed of aluminum, microcracks still occur on the inner wall surface of the inner tube where the inner electrode is disposed.
[0011] Since microcracks are very small scratches, it is assumed that they will not have a significant impact on the normal operation of the excimer lamp. However, if a microcrack exists on the inner wall of the inner tube, and the total lighting time of the excimer lamp becomes long (e.g., 1500 hours), it is easy for this microcrack to cause defects such as cracking in the light-emitting tube.
[0012] In view of the above, the purpose of this utility model is to provide an excimer lamp that suppresses the generation of microcracks on the inner wall surface of the inner tube.
[0013] Technical solutions for solving the problem
[0014] The excimer lamp involved in this utility model is characterized by having:
[0015] A light-emitting tube includes an outer tube extending in the tube axis direction and an inner tube extending in the tube axis direction and disposed within the outer tube, wherein the ends of the outer tube and the inner tube in the tube axis direction are sealed.
[0016] The luminescent gas is sealed into the luminescent space sandwiched between the outer tube and the inner tube;
[0017] The outer electrodes are disposed on the outer wall surface of the outer tube and are in a mesh or wire shape; and
[0018] The inner electrode is disposed on the inner wall surface of the inner tube and extends circumferentially from one end to the other.
[0019] At the end of the inner electrode in the tube axis direction, the corner of the circumferential end is located inside the outer edge region formed by imaginarily extending both the side of the inner electrode extending in the tube axis direction and the side of the inner electrode extending in the circumferential direction.
[0020] It is speculated that the microcracks on the inner wall surface of the inner tube are generated when the inner electrode is inserted relative to the inner tube. The inventors of this invention speculate that when the inner electrode is inserted relative to the inner tube along the tube axis, especially at the end of the inner electrode in the tube axis direction, microcracks may easily be generated due to friction between the corner of the circumferential end and the inner wall surface of the inner tube.
[0021] While details will be described later in the "Specific Embodiments" section, it can be stated that the corner of the inner electrode is positioned so that it easily contacts the inner wall surface of the inner tube when the inner electrode is inserted into the inner tube. In contrast, in the above structure, since the corner is located further inward than the outer edge region of the inner electrode, it is less likely to contact the inner wall surface of the inner tube when the inner electrode is inserted into the inner tube. Therefore, the generation of microcracks on the inner wall surface of the inner tube is suppressed when the inner electrode is inserted relative to the inner tube.
[0022] That is, when comparing the case where the corner of the inner electrode is located inside the outer edge region with the case where the corner has the same shape as the outer edge region, in the former case, the corner is less likely to contact the inner wall surface of the inner tube, and the number of microcracks generated on the inner wall surface of the inner tube is reduced.
[0023] As described above, even when the inner electrode is made of relatively soft aluminum, microcracks were found on the inner wall surface of the inner tube. However, surprisingly, by performing a simple process, such as chamfering, to position the corner of the inner electrode further inward than the outer edge region, microcracks generated in the inner tube could be suppressed. It should be noted that the method for forming the corner described above is not limited to chamfering. Specific examples of corners will be described later.
[0024] Among the excimer lamps mentioned above, it is also possible to have:
[0025] The inner electrodes are arranged in multiple regions on the circumferential direction of the inner wall surface of the inner tube.
[0026] When multiple inner electrodes are inserted relative to the inner tube, the number of points where the inner electrodes come into contact with the corners of the inner electrodes on the inner wall surface of the inner tube increases, making it easier for microcracks to form. In contrast, according to the above structure, the corners of the inner electrodes are located further inward than the outer edge region of the inner electrodes, thus making it less likely for the corners to come into contact with the inner wall surface of the inner tube. Therefore, the above structure is preferred in that it can suppress the formation of microcracks even when multiple inner electrodes are inserted relative to the inner tube.
[0027] Among the excimer lamps mentioned above, it is also possible to have:
[0028] The corner of the inner electrode has a straight chamfered shape.
[0029] Alternatively, among the excimer lamps mentioned above, it could also be...
[0030] The corners of the inner electrode are rounded and chamfered.
[0031] Furthermore, among the aforementioned excimer lamps, it is also possible to be...
[0032] The corner of the inner electrode is shaped to separate from the inner wall surface of the inner tube.
[0033] As described above, by using aluminum for the inner electrode, the inner wall surface of the inner tube is less likely to be damaged. Furthermore, given that microcracks are suppressed by positioning the corner of the inner electrode inside the outer edge region, it can be said that in the above structure, compared to conventional excimer lamps represented by Patent Document 1, the inner wall surface of the inner tube is less likely to be damaged. That is, this invention is not limited to the inner electrode being made of aluminum. It should be noted that, from the viewpoint of being less likely to damage the inner wall surface of the inner tube, the inner electrode can also be made of aluminum.
[0034] Utility Model Effect
[0035] According to this invention, an excimer lamp can be provided that suppresses the generation of microcracks on the inner wall surface of the inner tube. Attached Figure Description
[0036] Figure 1 This is a cross-sectional view showing an example of the structure of the excimer lamp involved in this utility model.
[0037] Figure 2 Therefore with Figure 1 Sectional views after cutting with different planes.
[0038] Figure 3 It is a three-dimensional diagram schematically showing the insertion of the inner electrode into the light-emitting tube.
[0039] Figure 4 This is a schematic diagram showing the structure of the inner electrode.
[0040] Figure 5 It is Figure 4 A magnified view of a portion of the inner electrode.
[0041] Figure 6 It is an imitation Figure 3 A diagram showing another structural example of the inner electrode.
[0042] Figure 7 It is an imitation Figure 4 schematic representation Figure 7 A diagram showing the structure of the inner electrode.
[0043] Figure 8 It is Figure 7 A magnified view of a portion of the inner electrode.
[0044] Figure 9 Observed from the Y direction Figure 1 A top view of the excimer lamp.
[0045] Figure 10 It is an imitation Figure 9 A top view showing another structural example of the outer electrode.
[0046] Figure 11 It is an imitation Figure 3 A diagram showing another structural example of the inner electrode.
[0047] Figure 12 It is a schematic representation Figure 11 A diagram showing the structure of the inner electrode.
[0048] Figure 13 It is a schematic representation Figure 11 The diagram shows the state of the inner electrode being inserted into the inner tube.
[0049] Figure 14 It is an imitation Figure 1 A diagram showing another variation of the excimer lamp. Detailed Implementation
[0050] The embodiments of the excimer lamp according to this utility model will now be described with reference to the accompanying drawings. Please note that all the accompanying drawings are schematic illustrations, and the dimensions and numbers shown in the drawings may not necessarily match the actual dimensions and numbers.
[0051] [First Implementation Method]
[0052] Figure 1 and Figure 2 These are cross-sectional views illustrating an example of the structure of the excimer lamp involved in this utility model. Each figure corresponds to a cross-sectional view cut along a different plane. For example... Figure 1 and Figure 2 As shown, the excimer lamp 1 has a light-emitting tube 3, an inner electrode 5 and an outer electrode 7.
[0053] In the following description, the XYZ coordinate system is used, where the axis of the LED 3 is defined as the X-direction, and the plane orthogonal to the X-direction is defined as the YZ plane. If this definition is used for explanation, then... Figure 1 A cross-sectional view corresponding to the YZ plane of excimer lamp 1. Figure 2 A cross-sectional view corresponding to the XZ plane of excimer lamp 1.
[0054] In the following explanation, for example, when indicating direction, if a positive or negative orientation is distinguished, it will be written with a positive or negative symbol, such as "+X direction" or "-X direction". Otherwise, if a direction is not distinguished by positive or negative, it will only be written as "X direction". That is, in this specification, the use of "X direction" includes both "+X direction" and "-X direction". The same applies to the Y and Z directions.
[0055] like Figure 1 and Figure 2 As shown, the light-emitting tube 3 includes an outer tube 11 and an inner tube 12, forming a double-layer tube structure. Figure 1 As shown, the inner tube 12 is disposed within the outer tube 11, and the outer tube 11 surrounds the inner tube 12. Typically, the outer tube 11 and the inner tube 12 are arranged coaxially. Both the outer tube 11 and the inner tube 12 are sealed at their ends in the X direction, where a base (not shown) is disposed. A prescribed luminescent gas is sealed into the space between the outer tube 11 and the inner tube 12 (hereinafter referred to as the "luminescent space 20") at a pressure of, for example, 10 kPa to 100 kPa.
[0056] As an example, the outer tube 11 and the inner tube 12 are made of dielectric materials such as quartz glass.
[0057] For example, the outer diameter of the outer tube 11 is 25mm to 40mm, and the outer diameter of the inner tube 12 is 10mm to 26mm. Furthermore, their lengths in the X direction are 100mm to 1600mm. As an example, the outer diameter of the outer tube 11 is 40mm, the outer diameter of the inner tube 12 is 16mm, and their lengths in the X direction are 1200mm. Additionally, as an example, the thickness of the outer tube 11 is 2mm, and the thickness of the inner tube 12 is 1mm. In this case, the radial width of the annular light-emitting space 20 is 11mm.
[0058] exist Figure 2 The diagram schematically illustrates the travel of ultraviolet light L1 emitted by excimer lamp 1. For example... Figure 2 As shown, ultraviolet light L1 is extracted to the outside of the excimer lamp 1 via the outer tube 11. Therefore, from the viewpoint of reducing the attenuation of ultraviolet light L1 caused by absorption by the material constituting the outer tube 11 (typically quartz glass), the thickness of the outer tube 11 is preferably 2 mm or less. On the other hand, from the viewpoint of ensuring resistance to the pressure of the enclosed luminescent gas, the thickness of the outer tube 11 is preferably 1 mm or more. The thickness of the inner tube 12 is also preferably 1 mm or more, similar to the thickness of the outer tube 11.
[0059] like Figure 1 As shown, the inner electrode 5 is disposed on the inner wall surface 12a of the inner tube 12. Additionally, as... Figure 1 As shown, the inner electrode 5 extends circumferentially from one end 5a towards the other end 5b in the inner tube 12. In this embodiment, as... Figure 1 As shown, the inner electrodes 5 are arranged in multiple regions along the circumferential direction of the inner wall surface 12a of the inner tube 12. That is, the excimer lamp 1 according to this embodiment has multiple inner electrodes 5.
[0060] From the viewpoint of improving the light extraction efficiency of the excimer lamp 1, the inner electrode 5 is preferably made of a material that exhibits reflectivity to ultraviolet light L1. As an example, the inner electrode 5 is a plate-shaped member made of aluminum. It should be noted that the inner electrode 5 may also be made of metallic materials such as titanium or stainless steel. The thickness of the inner electrode 5 is, for example, 0.2 mm to 1.0 mm, and as an example, 0.5 mm. The plate-shaped member constituting the inner electrode 5 is elastically deformable.
[0061] Figure 3 This is a three-dimensional diagram schematically showing the insertion of the inner electrode 5 into the light-emitting tube 3. For example... Figure 3 As shown, the inner electrode 5 is inserted relative to the light-emitting diode 3 in the X direction. Additionally, Figure 4 This is a schematic diagram showing the structure of the inner electrode 5. Figure 4 For ease of illustration, the structure of the inner electrode 5 is shown in a top view. Figure 3 and Figure 4 As shown, the inner electrode 5 has a corner 6 located at the circumferential end in the X direction at its end.
[0062] When inserting the inner electrode 5 relative to the light-emitting tube 3 (refer to...) Figure 3 The inner electrode 5 is inserted relative to the light-emitting tube 3 in a state where it is elastically deformed and shaped along the inner wall surface 12a of the inner tube 12. Therefore, when the inner electrode 5 is inserted into the light-emitting tube 3, an elastic force is generated in the inner electrode 5 in the direction toward the inner wall surface 12a of the inner tube 12. That is, it can be said that the corner 6 of the inner electrode 5 is in a position that makes it easy to contact the inner wall surface 12a of the inner tube 12 when the inner electrode 5 is inserted into the light-emitting tube 3.
[0063] Here, as Figure 4 As shown, corner 6 is located inside the outer edge region A1 formed by imaginarily extending both the side 5x extending in the X direction and the side 5r extending in the circumferential direction of the inner electrode 5. Therefore, as Figure 3 As shown, when the inner electrode 5 is inserted relative to the light-emitting tube 3, the corner 6 is less likely to come into contact with the inner wall surface 12a. Therefore, when the inner electrode 5 is inserted relative to the light-emitting tube 3, the generation of microcracks on the inner wall surface 12a of the inner tube 12 is suppressed.
[0064] More specifically, by positioning the corner 6 of the inner electrode 5 further inward than the outer edge region A1, the corner 6 is less likely to contact the inner wall surface 12a compared to the case where the corner 6 has the same shape as the outer edge region A1. That is, when comparing the former with the latter, the former produces fewer microcracks on the inner wall surface 12a of the inner tube 12.
[0065] Figure 5 It is Figure 4 A magnified view of a portion of the inner electrode 5. (See diagram.) Figure 5 As shown, in this embodiment, the corner 6 of the inner electrode 5 has a straight chamfered shape. More specifically, the corner 6 is configured to include a straight section 6a connecting the side 5x and the side 5r. The length of the straight section 6a is preferably 2 mm to 4 mm.
[0066] It should be noted that when the inner electrode 5 is inserted into the inner tube 12, the joint between the straight portion 6a and the edge 5x rubs against the inner wall surface 12a of the inner tube 12. Therefore, as... Figure 5 As shown, the angle θ1 formed by the straight portion 6a and the edge 5x is preferably an obtuse angle. As a specific example, angle θ1 is preferably 100° to 170°, more preferably 125° to 145°, and particularly preferably 135°. By setting angle θ1 to an obtuse angle, the generation of microcracks on the inner wall surface 12a of the inner tube 12 can be more appropriately suppressed compared to the case where the corner portion 6 has a shape consistent with the outer edge region A1. The same applies to the angle θ2 formed by the straight portion 6a and the edge 5x.
[0067] The junction of the straight section 6a and the edge 5x can also be arc-shaped. The same applies to the junction of the straight section 6a and the edge 5r.
[0068] in addition, Figure 6 It is an imitation Figure 3 The figure shows another structural example of the inner electrode 5. Figure 7 It is an imitation Figure 4 schematic representation Figure 7 A diagram showing the structure of the inner electrode 5. Additionally... Figure 8 It is Figure 7 A magnified view of a portion of the inner electrode 5. (See diagram.) Figures 6-8 As shown, corner 6 has a rounded chamfer shape, or it can be a shape with rounded corners.
[0069] exist Figure 8 In the inner electrode 5, as shown in the reference Figure 3 As described above, the corner 6 is located further inward than the outer edge region A1, so when the inner electrode 5 is inserted relative to the light-emitting tube 3, the corner 6 is less likely to come into contact with the inner wall surface 12a. Thus, when the inner electrode 5 is inserted relative to the light-emitting tube 3, the generation of microcracks on the inner wall surface 12a of the inner tube 12 is suppressed.
[0070] More specifically, such as Figure 8 As shown, the corner 6 is formed by an arc 6b connecting side 5x and side 5r. Preferably, the length d1 in the X direction of the region where the arc 6b is formed is preferably 2mm to 5mm.
[0071] The method for forming the corner 6 of the inner electrode 5 is not particularly limited; for example, it can be achieved using machining based on cutting or laser irradiation. It should be noted that in this specification, the term "beveled shape" means the shape of cutting the corner 6 and forming a new surface in the cut portion. However, as long as the corner 6 has the aforementioned beveled shape, the method for forming the corner 6 of the inner electrode 5 is not limited.
[0072] The inner electrode 5 can also be plated with metal materials such as zinc, chromium or nickel on its surface.
[0073] The inner electrode 5 is fixed by an elastic member (not shown) that presses the inner electrode 5 against the inner wall surface 12a of the inner tube 12. As the elastic member, a metal spring or the like can be used.
[0074] like Figure 1 and Figure 2 As shown, the outer electrode 7 is disposed on the outer wall surface 11a of the outer tube 11. Figure 9 Observed from the Y direction Figure 1 A top view of the excimer lamp at position 1. (See image below.) Figure 9 As shown, the outer electrode 7 can be in a mesh shape. By making the outer electrode 7 in a mesh shape, ultraviolet light L1 is extracted to the outside of the excimer lamp 1 through the gaps between the outer electrodes 7 (see also...). Figure 2 It should be noted that, in Figure 9 In the illustration, the linewidth constituting the outer electrode 7 appears relatively large compared to the size of the gap between adjacent electrode lines, but this is only based on the illustration. In reality, from the viewpoint of minimizing the degree to which ultraviolet light L1 is blocked, it is preferable to ensure the size of the gap between adjacent electrode lines as large as possible relative to the linewidth constituting the outer electrode 7.
[0075] in addition, Figure 10 It is an imitation Figure 9 A top view showing another structural example of the outer electrode 7. (e.g.) Figure 10 As shown, the outer electrode 7 can also be linear. It should be noted that... Figure 10 In this example, the extension direction of the outer electrode 7 is set to intersect the X direction, but this extension direction is arbitrary. As another example, the outer electrode 7 can be a shape extending in the X direction or a spiral shape.
[0076] As an example, the outer electrode 7 is cylindrical when viewed along the X direction, and is disposed on the outer wall surface 11a of the outer tube 11 by inserting the light-emitting tube 3 along the X direction. In addition, as a method for forming the outer electrode 7, methods such as installing a structure in which metal wires are woven into a mesh, attaching a conductive strip to the outer wall surface 11a, or applying conductive paste to the outer wall surface 11a by screen printing and then firing are all possible methods.
[0077] like Figure 2 As shown, the inner electrode 5 and the outer electrode 7 are respectively connected to the power supply 40. As an example, the outer electrode 7 is connected to the power supply 40 via a base (not shown) made of conductive material disposed at both ends of the light-emitting diode 3. The inner electrode 5 is connected to the power supply 40 via a power supply line passing through a through-hole formed in the base. In this embodiment, the multiple inner electrodes 5 are at the same potential. When a high-frequency AC voltage of approximately 10kHz to 100kHz is applied from the power supply 40 between the inner electrode 5 and the outer electrode 7, ultraviolet light L1 is generated within the light-emitting space 20. As an example, the input power is 20W to 2000W, and the input voltage is approximately 5kV to 10kV.
[0078] The wavelength of ultraviolet light L1 is determined by the type of luminescent gas. For example, when the luminescent space 20 is filled with a luminescent gas containing Kr and Cl2, ultraviolet light L1 with a peak wavelength around 222 nm is obtained. However, this invention does not limit the type of luminescent gas filled into the luminescent space 20. For example, the luminescent gas may also contain Xe.
[0079] It should be noted that, given the aforementioned high voltage applied between the inner electrode 5 and the outer electrode 7, it is preferable that the outer electrode 7 is connected to the ground side of the power supply 40, and the inner electrode 5 has a potential with an absolute value higher than that of the outer electrode 7. This can suppress electric shock to operators or others located outside the excimer lamp 1, and prevent leakage to other objects.
[0080] The inventors of this utility model have constructed a configuration in which the corner 6 of the inner electrode 5 is located further inward than the outer edge region A1 of the inner electrode 5 (see reference). Figure 4 According to the excimer lamp 1 described in the above embodiments (etc.), it was confirmed that, compared to the case where the corner 6 has a shape consistent with the outer edge region A1, microcracks generated on the inner wall surface 12a of the inner tube 12 were suppressed. That is, it can be seen that in the excimer lamp 1 described in the above embodiments, microcracks on the inner wall surface 12a of the inner tube 12 were suppressed.
[0081] Furthermore, in view of this, as referenced Figure 8 As described above, it is speculated that even when the corner 6 has a rounded chamfer shape, the generation of microcracks on the inner wall surface 12a of the inner tube 12 can be suppressed.
[0082] Furthermore, the light-emitting tube 3 expands due to heat when the excimer lamp 1 is lit, and contracts when the excimer lamp 1 is turned off. The same applies to the inner electrode 5. Here, when the thermal expansion rates of the light-emitting tube 3 and the inner electrode 5 differ, if the light-emitting tube 3 expands or contracts, the inner electrode 5 moves relative to the light-emitting tube 3 in the X direction. That is, it is assumed that due to the difference in thermal expansion rates between the light-emitting tube 3 and the inner electrode 5, friction occurs between the inner wall surface 12a of the inner tube 12 and the inner electrode 5 during the lighting and extinguishing of the excimer lamp 1, albeit in a small area. In contrast, in the excimer lamp 1, the corner 6 of the inner electrode 5 is located further inward than the outer edge region A1 of the inner electrode 5, thus making it less likely for the corner 6 to contact the inner wall surface 12a of the inner tube 12. That is, by making the corner 6 into the above structure, it also has the effect of suppressing the generation of microcracks not only when the inner electrode 5 is inserted into the light-emitting tube 3, but also when using the excimer lamp 1.
[0083] [Variation Example]
[0084] The following describes a modified example of the excimer lamp 1.
[0085] <1> Figure 11 It is an imitation Figure 3 The figure shows another structural example of the inner electrode 5. Figure 12 It is a schematic representation Figure 11 A diagram showing the structure of the inner electrode 5. (See diagram). Figure 11 and Figure 12 As shown, the corner 6 can also be formed by bending the inner electrode 5 inward.
[0086] in addition, Figure 13 It is a schematic representation Figure 11 The diagram shows the state in which the inner electrode 5 is inserted into the inner tube 12. Figure 13 The outer tube 11 is omitted from the illustration. In this modified example, as shown... Figure 13 As shown, the corner 6 of the inner electrode 5 is shaped to separate from the inner wall surface 12a of the inner tube 12.
[0087] In this modified example, it is also because corner 6 is located inside the outer edge region A1 (see reference). Figure 12 Therefore, when the inner electrode 5 is inserted relative to the light-emitting tube 3, the corner 6 is less likely to come into contact with the inner wall surface 12a. As a result, when the inner electrode 5 is inserted relative to the light-emitting tube 3, the generation of microcracks on the inner wall surface 12a of the inner tube 12 is suppressed.
[0088] <2> Figure 14 It is an imitation Figure 1The figure shows another modified example of the excimer lamp 1. In the above description, the case where the inner electrode 5 is arranged in multiple regions along the circumference of the inner tube 12 was explained. However, as... Figure 14 As shown, the inner electrode 5 can also be disposed in a region in the circumferential direction of the inner tube 12.
[0089] <3> In the above description, the case where all corners 6 of the inner electrode 5 are located inside the outer edge region A1 has been described. However, the present invention is not limited to this. For example, considering the case where the inner electrode 5 is inserted into the inner tube 12 from the end side in the +X direction (see...) Figure 3 Alternatively, the corner 6 of the inner electrode 5 located on the +X side can be located inside the outer edge region A1.
[0090] <4> The structure of the excimer lamp 1 involved in this utility model is not limited to the structure shown in the figure.
[0091] Label Explanation
[0092] 1: Excimer lamp;
[0093] 3: LED;
[0094] 5: Inner electrode;
[0095] 6: Corner;
[0096] 7: Outer electrode;
[0097] 11: Outer tube;
[0098] 11a: Outer wall surface;
[0099] 12: Inner tube;
[0100] 12a: Inner wall surface;
[0101] 20: Illuminated space;
[0102] 30: concave part;
[0103] 40: Power supply;
[0104] A1: Outer edge region.
Claims
1. An excimer lamp, characterized in that, have: A light-emitting tube includes an outer tube extending in the tube axis direction and an inner tube extending in the tube axis direction and disposed within the outer tube, wherein the ends of the outer tube and the inner tube in the tube axis direction are sealed. The luminescent gas is sealed into the luminescent space sandwiched between the outer tube and the inner tube; The outer electrodes are disposed on the outer wall surface of the outer tube and are in a mesh or wire shape; and The inner electrode is disposed on the inner wall surface of the inner tube and extends circumferentially from one end to the other. At the end of the inner electrode in the tube axis direction, the corner of the circumferential end is located inside the outer edge region formed by imaginarily extending both the side of the inner electrode extending in the tube axis direction and the side of the inner electrode extending in the circumferential direction.
2. The excimer lamp according to claim 1, characterized in that, The inner electrodes are arranged in multiple regions in the circumferential direction.
3. The excimer lamp according to claim 1 or 2, characterized in that, The corner of the inner electrode has a straight chamfered shape.
4. The excimer lamp according to claim 1 or 2, characterized in that, The corners of the inner electrode are rounded and chamfered.
5. The excimer lamp according to claim 1 or 2, characterized in that, The corner of the inner electrode is shaped to separate from the inner wall surface of the inner tube.
6. The excimer lamp according to claim 1 or 2, characterized in that, The inner electrode is made of aluminum.