Environment-friendly waste gas treatment device for wafer manufacturing

Abstract

The utility model discloses an environmental protection type waste gas treatment device for wafer manufacturing, including the bottom plate, the top of bottom plate is mounted with the processing box, the left side intercommunication of processing box has the air inlet pipe, the right side intercommunication of processing box has the pipe, the left side of processing box inner chamber bottom is provided with the collection drawer, the front of collection drawer is installed with the mounting block, the front of mounting block penetrates the front of processing box and is installed with the pull -out board, the back of pull -out board and the left side contact of processing box front, the inner chamber of processing box and located the right side vertical of collection drawer is provided with the glass fiber filter plate. The utility model, through setting up the guide slot and the guide block, to the collection drawer has played the stable effect of moving, solved the problem that the collection drawer appears to shake when moving, through setting up the support column and the antiskid pad, increased the friction between processing box and ground, avoided the phenomenon that processing box appeared to slip, increased the stability of processing box.

Description

Technical Field

[0001] This utility model relates to the technical field of environmentally friendly waste gas treatment devices for wafer manufacturing, specifically an environmentally friendly waste gas treatment device for wafer manufacturing. Background Technology

[0002] Waste gas treatment equipment mainly refers to environmental protection equipment that uses different process technologies to recover or remove or reduce harmful components in exhaust gases, thereby protecting the environment and purifying the air, so that our environment is not polluted. Wafer manufacturing generates a lot of waste gas, and direct emission of waste gas will affect the surrounding environment, so waste gas treatment devices are needed.

[0003] Current environmentally friendly waste gas treatment devices for wafer manufacturing have poor processing performance and are difficult to clean, which affects the filtration effect of waste gas, resulting in incomplete waste gas treatment and direct discharge that will affect the surrounding environment. Utility Model Content

[0004] The purpose of this utility model is to provide an environmentally friendly waste gas treatment device for wafer manufacturing, which solves the problems mentioned in the background art, such as poor treatment effect and poor waste gas filtration performance of environmentally friendly waste gas treatment devices for wafer manufacturing, which will affect the filtration effect of waste gas and make it difficult to clean, thus affecting the subsequent waste gas treatment effect.

[0005] To achieve the above objectives, this utility model provides the following technical solution: an environmentally friendly waste gas treatment device for wafer manufacturing, comprising a base plate, a treatment box mounted on the top of the base plate, an air inlet pipe connected to the left side of the treatment box, a conduit connected to the right side of the treatment box, a collection drawer provided on the left side of the bottom of the treatment box cavity, an mounting block mounted on the front of the collection drawer, a pull plate mounted on the front of the mounting block penetrating the front of the treatment box, the back of the pull plate contacting the left side of the front of the treatment box cavity, a glass fiber filter plate vertically arranged in the inner cavity of the treatment box and located on the right side of the collection drawer, a HEPA filter element plate vertically arranged on the right side of the glass fiber filter plate, and a honeycomb ceramic filter plate vertically arranged on the right side of the HEPA filter element plate.

[0006] Preferably, guide grooves are provided on both sides of the bottom of the collection drawer, and guide blocks are slidably connected to the front and rear sides of the inner cavity of the guide grooves, and the bottom of the guide blocks is fixed to the left side of the bottom of the inner cavity of the processing box.

[0007] Preferably, the bottom of the glass fiber filter plate, HEPA filter plate and honeycomb ceramic filter plate is in contact with the bottom of the inner cavity of the treatment chamber.

[0008] Preferably, the glass fiber filter plate, HEPA filter plate and honeycomb ceramic filter plate are provided with positioning grooves on the front and rear sides of the top, and positioning blocks are provided in the inner cavity of the positioning grooves.

[0009] Preferably, the top of the positioning block extends through the top of the processing box, and a maintenance cover is installed on the top of the positioning block. The bottom of the maintenance cover contacts the top of the processing box, and handles are installed on both the front and rear sides of the top of the maintenance cover.

[0010] Preferably, support columns are installed around the bottom of the processing box, anti-slip pads are installed at the bottom of the support columns, and reinforcing rods are installed at the bottom of the inner side of the support columns.

[0011] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0012] 1. This utility model, by setting guide grooves and guide blocks, plays a role in stabilizing the movement of the collection drawer, solving the problem of shaking when the collection drawer is moved. By setting support columns and anti-slip pads, the friction between the processing box and the ground is increased, preventing the processing box from slipping and increasing the stability of the processing box.

[0013] 2. This utility model uses positioning grooves and positioning blocks to fix the glass fiber filter plate, HEPA filter element plate and honeycomb ceramic filter plate, thereby increasing the stability of the glass fiber filter plate, HEPA filter element plate and honeycomb ceramic filter plate during use. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the structure of this utility model;

[0015] Figure 2 This is a top view of the right side of the processing box and inspection plate cover structure of this utility model;

[0016] Figure 3 This is a left-side view of the processing box and collection drawer structure of this utility model;

[0017] Figure 4 This is a bottom view of the processing box and collection drawer structure of this utility model;

[0018] Figure 5 This is a structural diagram of the glass fiber filter plate and inspection plate cover of this utility model.

[0019] In the diagram: 1. Base plate; 2. Processing box; 3. Inlet pipe; 4. Tube; 5. Collection drawer; 6. Mounting block; 7. Pull plate; 8. Glass fiber filter plate; 9. HEPA filter plate; 10. Honeycomb ceramic filter plate; 11. Guide groove; 12. Positioning groove; 13. Positioning block; 14. Inspection plate cover; 15. Support column. Detailed Implementation

[0020] To enable those skilled in the art to better understand the technical solution of this utility model, the present utility model will be described in detail below with reference to the accompanying drawings. The description in this part is only exemplary and explanatory, and should not be used to limit the scope of protection of this utility model in any way.

[0021] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0022] It should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product is in use. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention. In addition, the terms "first," "second," and "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0023] Furthermore, terms such as "horizontal," "vertical," and "sag" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal relative to "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0024] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0025] Please see Figure 1-5An environmentally friendly waste gas treatment device for wafer manufacturing includes a base plate 1, a treatment box 2 installed on the top of the base plate 1, an air inlet pipe 3 connected to the left side of the treatment box 2, a conduit 4 connected to the right side of the treatment box 2, a collection drawer 5 provided on the left side of the bottom of the inner cavity of the treatment box 2, an installation block 6 installed on the front of the collection drawer 5, a pull plate 7 installed through the front of the installation block 6 through the front of the treatment box 2, the back of the pull plate 7 contacting the left side of the front of the treatment box 2, a glass fiber filter plate 8 vertically arranged in the inner cavity of the treatment box 2 and located on the right side of the collection drawer 5, a HEPA filter element plate 9 vertically arranged on the right side of the glass fiber filter plate 8, and a honeycomb ceramic filter plate 10 vertically arranged on the right side of the HEPA filter element plate 9.

[0026] Guide grooves 11 are provided on both sides of the bottom of the collection drawer 5. Guide blocks are slidably connected to the front and rear sides of the inner cavity of the guide grooves 11, and the bottom of the guide blocks is fixed to the left side of the bottom of the inner cavity of the processing box 2. First, the air inlet pipe 3 is connected to the waste gas pipe generated during wafer manufacturing. The waste gas is transported to the processing box 2 through the air inlet pipe 3. The waste gas is filtered through the glass fiber filter plate 8. Impurities in the waste gas are blocked by the glass fiber filter plate 8 and fall into the collection drawer 5.

[0027] The bottom of the glass fiber filter plate 8, HEPA filter element plate 9 and honeycomb ceramic filter plate 10 are in contact with the bottom of the inner cavity of the treatment box 2. The glass fiber filter plate 8 can effectively block dust and particulate matter in the exhaust gas and prevent them from entering the subsequent treatment equipment. Its multi-layer structure design makes the filtration effect more significant. It can block, impact, diffuse and absorb fine particulate matter and has high temperature resistance and corrosion resistance.

[0028] Positioning grooves 12 are provided on the front and rear sides of the top of the glass fiber filter plate 8, HEPA filter plate 9, and honeycomb ceramic filter plate 10. Positioning blocks 13 are provided in the inner cavity of the positioning groove 12. Exhaust gas passes through the HEPA filter plate 9 and the honeycomb ceramic filter plate 10 in sequence. The HEPA filter plate 9 can effectively filter pollutants such as particles, bacteria, and viruses in the air. It intercepts fine particulate matter through a multi-layer fiber structure. The purification rate of 0.1 microns and 0.3 microns particles reaches 99.7%. The honeycomb ceramic filter plate 10 has a porous structure, which can filter out fine particulate matter in the exhaust gas. This structure can not only effectively remove particulate matter;

[0029] The top of the positioning block 13 extends through the top of the treatment box 2. A maintenance cover 14 is installed on the top of the positioning block 13. The bottom of the maintenance cover 14 contacts the top of the treatment box 2. Handles are installed on the front and rear sides of the top of the maintenance cover 14. The filtered gas is discharged through the conduit 4. The collection drawer 5 is moved out of the treatment box 2 by the pull plate 7 and the mounting block 6. The collection drawer 5 drives the guide block to slide in the inner cavity of the guide groove 11, which effectively prevents the collection drawer 5 from tilting or shaking when it moves, and facilitates the cleaning of the inside of the collection drawer 5.

[0030] Support columns 15 are installed around the bottom of the treatment box 2. Anti-slip pads are installed on the bottom of the support columns 15. Reinforcing rods are installed on the bottom of the inner side of the support columns 15. The inspection plate cover 14 is moved out of the treatment box 2 by the handle. The inspection plate cover 14 moves the positioning block 13 out of the glass fiber filter plate 8, HEPA filter element plate 9 and honeycomb ceramic filter plate 10, which facilitates the removal of the glass fiber filter plate 8, HEPA filter element plate 9 and honeycomb ceramic filter plate 10 from the treatment box 2 and cleaning of the glass fiber filter plate 8, HEPA filter element plate 9 and honeycomb ceramic filter plate 10.

[0031] In use, the inlet pipe 3 is first connected to the exhaust gas pipe generated during wafer manufacturing. The exhaust gas is then transported to the processing chamber 2 through the inlet pipe 3. The exhaust gas is filtered through the glass fiber filter plate 8, where impurities are blocked and fall into the collection drawer 5. The glass fiber filter plate 8 effectively blocks dust and particulate matter in the exhaust gas, preventing them from entering subsequent processing equipment. Its multi-layer structure design makes the filtration effect more significant, capable of blocking, impacting, diffusing, and absorbing fine particulate matter. It also has high temperature resistance and corrosion resistance. The exhaust gas then passes through the HEPA filter plate 9 and the honeycomb ceramic filter plate 10. The HEPA filter plate 9 effectively filters pollutants such as particles, bacteria, and viruses in the air. Through its multi-layer fiber structure, it intercepts fine particulate matter, achieving a purification rate of 99.7% for particles of 0.1 microns and 0.3 microns. The honeycomb ceramic filter plate 10... The ceramic filter plate 10 has a porous structure, which can filter out fine particulate matter in the exhaust gas. This structure can not only effectively remove particulate matter, but also discharge the filtered gas through the duct 4. The collection drawer 5 is moved out of the treatment box 2 by the pull plate 7 and the mounting block 6. The collection drawer 5 drives the guide block to slide in the inner cavity of the guide groove 11, which effectively prevents the collection drawer 5 from tilting or shaking when it moves, and facilitates the cleaning of the inside of the collection drawer 5. The maintenance cover 14 is moved out of the treatment box 2 by the handle. The maintenance cover 14 drives the positioning block 13 to move out of the glass fiber filter plate 8, HEPA filter element plate 9 and honeycomb ceramic filter plate 10, which facilitates the cleaning of the glass fiber filter plate 8, HEPA filter element plate 9 and honeycomb ceramic filter plate 10.

[0032] All standard parts used in this application can be purchased from the market, and can be customized according to the description and drawings. The specific connection methods of each part adopt conventional methods such as bolts, rivets, and welding that are mature in the prior art. The machinery, parts and equipment adopt conventional models in the prior art. The control method is automatic control through a controller. The control circuit of the controller can be implemented by simple programming by those skilled in the art and is common knowledge in the field. Since this utility model is mainly used to protect mechanical devices, this utility model will not explain the control method and circuit connection in detail. The external controller mentioned in the specification can play a control role for the electrical components mentioned in this article, and the external controller is a conventional known device.

[0033] It should be noted that, in this document, the terms “comprising,” “including,” or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0034] This article uses specific examples to illustrate the principles and implementation methods of this utility model. The above examples are only for the purpose of helping to understand the method and core ideas of this utility model. The above are only preferred embodiments of this utility model. It should be noted that due to the limitations of textual expression, while there are objectively infinite specific structures, those skilled in the art can make several improvements, modifications, or changes without departing from the principles of this utility model, and can also combine the above technical features in an appropriate manner. These improvements, modifications, changes, or combinations, or the direct application of the concept and technical solution of the utility model to other occasions without modification, should all be considered within the protection scope of this utility model.

Claims

1. An environmentally friendly waste gas treatment device for wafer manufacturing, comprising a base plate (1), characterized in that: A processing box (2) is installed on the top of the base plate (1). An air inlet pipe (3) is connected to the left side of the processing box (2). A conduit (4) is connected to the right side of the processing box (2). A collection drawer (5) is provided on the left side of the bottom of the inner cavity of the processing box (2). An installation block (6) is installed on the front of the collection drawer (5). A pull plate (7) is installed through the front of the installation block (6) and penetrates the front of the processing box (2). The back of the pull plate (7) contacts the left side of the front of the processing box (2). A glass fiber filter plate (8) is vertically arranged in the inner cavity of the processing box (2) and on the right side of the collection drawer (5). A HEPA filter plate (9) is vertically arranged on the right side of the glass fiber filter plate (8). A honeycomb ceramic filter plate (10) is vertically arranged on the right side of the HEPA filter plate (9).

2. The environmentally friendly waste gas treatment device for wafer manufacturing according to claim 1, characterized in that: The bottom of the collection drawer (5) is provided with guide grooves (11) on both sides. The front and rear sides of the inner cavity of the guide groove (11) are slidably connected with guide blocks, and the bottom of the guide blocks is fixed to the left side of the bottom of the inner cavity of the processing box (2).

3. The environmentally friendly waste gas treatment device for wafer manufacturing according to claim 1, characterized in that: The bottoms of the glass fiber filter plate (8), HEPA filter plate (9) and honeycomb ceramic filter plate (10) are in contact with the bottom of the inner cavity of the treatment box (2).

4. The environmentally friendly waste gas treatment device for wafer manufacturing according to claim 1, characterized in that: The glass fiber filter plate (8), HEPA filter plate (9) and honeycomb ceramic filter plate (10) are provided with positioning grooves (12) on the front and rear sides of the top, and positioning blocks (13) are provided in the inner cavity of the positioning grooves (12).

5. The environmentally friendly waste gas treatment device for wafer manufacturing according to claim 4, characterized in that: The top of the positioning block (13) extends through the top of the processing box (2). A maintenance cover (14) is installed on the top of the positioning block (13). The bottom of the maintenance cover (14) contacts the top of the processing box (2). Handles are installed on the front and rear sides of the top of the maintenance cover (14).

6. The environmentally friendly waste gas treatment device for wafer manufacturing according to claim 1, characterized in that: Support columns (15) are installed around the bottom of the processing box (2). Anti-slip pads are installed at the bottom of the support columns (15), and reinforcing rods are installed at the bottom inside the support columns (15).

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