A furnace tube turnover fixture

Abstract

This utility model discloses a furnace tube turnover fixture, including a fixture body, a turnover trolley groove, a V-shaped groove, a limiting baffle, a drain outlet, and a support frame. The turnover trolley groove is formed on the inner side of the fixture body, and the V-shaped groove is formed on the bottom of the fixture body. The limiting baffle is welded to the left and right sides of the fixture body. The V-shaped groove of this furnace tube turnover fixture provides a self-centering function, adapts to furnace tubes of different diameters, prevents rolling deviation, and achieves a positioning accuracy of ±1mm. The three sets of support frames are evenly distributed to form a uniform force structure, increasing the load-bearing capacity by more than 50% and avoiding deformation of long tubes. The rigid fixing of the limiting baffle eliminates the risk of lateral displacement during transportation, making it particularly suitable for rugged roads or high-speed transportation scenarios. The double 10mm drain outlets and V-shaped grooves form a rapid drainage channel, allowing residual liquids (such as cooling water and cleaning agents) to be drained within 30 seconds, reducing tube wall corrosion. The open structure design avoids dead corners for liquid accumulation, making it suitable for humid environments or conditions requiring frequent cleaning.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, specifically to a furnace tube turnover fixture. Background Technology

[0002] Diffusion is one of the key steps in the fabrication of semiconductor devices, mainly used to form PN junctions and various doped regions. The basic principle of diffusion is to utilize the diffusion of impurity atoms from a high-concentration source to a low-concentration region at high temperatures. This process includes two main steps: initial deposition and subsequent propagation. In the deposition stage, impurity atoms are introduced into the semiconductor surface. In the propagation stage, heating is used to further diffuse the impurity atoms to the desired depth, forming the doped region.

[0003] Furnace tubes are one of the important components in the diffusion process, and furnace tube cleaning is an essential part of the diffusion process. Turnover fixtures play a role in the turnover and transportation of the furnace tubes during the entire cleaning process. However, existing turnover fixtures pose a risk of furnace tube tipping over and breaking due to uneven ground during turnover.

[0004] To address the aforementioned issues, we have made innovative designs based on the existing furnace tube turnover fixture structure. Utility Model Content

[0005] The purpose of this utility model is to provide a furnace tube turnover fixture to solve the problem mentioned in the background art that the furnace tube is one of the important components in the diffusion process, and furnace tube cleaning is an essential part of the diffusion process. The turnover fixture plays a role in turnover and transportation throughout the cleaning process. However, the existing turnover fixture has the risk of furnace tube tipping over and breaking due to uneven ground during turnover.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a furnace tube turnover fixture, comprising a fixture body, a turnover trough, a V-shaped groove, a limiting baffle, a drain outlet, and a support frame. The turnover trough is provided inside the fixture body, and a V-shaped groove is provided at the bottom of the fixture body. Limiting baffles are welded to the left and right sides of the fixture body, and a drain outlet is provided inside the limiting baffles. A support frame is welded to the bottom of the fixture body.

[0007] Preferably, the support frame is arranged in three sets at equal intervals, and the total span between the three sets of support frames is 880mm, forming a stable triangular support.

[0008] By adopting the above technical solution, three sets of equidistantly distributed support frames can provide stable support for the fixture body, thereby achieving the effect of preventing tipping.

[0009] Preferably, the support frame is positioned outside the turnover vehicle groove, and the support frame is narrower at the top and wider at the bottom, with an opening angle of 160°.

[0010] By adopting the above technical solution, the center of gravity can be lowered and the anti-tipping ability of the furnace tube can be enhanced through the design of the support frame being narrower at the top and wider at the bottom.

[0011] Preferably, the support frame has a bottom width of 620mm, is secured to both sides of the turnover cart, and has no room for lateral movement.

[0012] By adopting the above technical solution, the fixture body can be fixed on the upper end of the turnover cart through the connection between the support frame and the turnover cart.

[0013] Preferably, the V-groove opening is 350mm wide and the angle is 100°, which is suitable for self-centering of different pipe diameters.

[0014] By adopting the above technical solution and through the design of the V-groove, two-point support can be formed by the contact of the inclined surfaces. When the furnace tube is placed in the V-groove 3, its gravity is decomposed into a component force perpendicular to the two inclined surfaces.

[0015] Preferably, each of the two limiting baffles of the fixture has a 10mm drainage port to facilitate drainage, forming a drainage channel with the V-shaped groove.

[0016] By adopting the above technical solution and through the design of the drain outlet, liquid (such as cooling water) can flow along the surface of the furnace tube to the lowest point of the V-shaped groove. Due to the inclination of the groove, it flows to both sides and is finally discharged through the 10mm drain hole on the limiting baffle.

[0017] Preferably, the overall length of the fixture body is 1800mm.

[0018] Compared with the prior art, the beneficial effects of this utility model are as follows: the diameter of a 300mm furnace tube is usually around 450mm, and the height is around 1500mm. Existing turnover fixtures place the furnace tube upright on a turnover cart, with a barrier typically between 400mm and 500mm high, leaving a 1000mm section of the tube suspended without protection. This poses a risk of tipping over and breaking the product during turnover. This utility model addresses this issue by designing a V-shaped fixture that secures the entire furnace tube in a V-groove, reducing the probability of breakage during turnover. This furnace tube turnover fixture includes:

[0019] 1. A structure that improves the stability of furnace tube turnover. This structure has a V-groove (100° included angle) that provides a self-centering function, adapting to furnace tubes of different diameters (such as Φ50~200mm), preventing rolling deviation, and achieving a positioning accuracy of ±1mm. Three sets of support frames are evenly distributed to form a uniform force structure, increasing the load-bearing capacity by more than 50%, avoiding deformation of long tubes, and the rigid fixing of the limit baffle eliminates the risk of lateral displacement during transportation. It is especially suitable for rugged roads or high-speed transportation scenarios.

[0020] 2. Drainage structure: This structure has 10mm drain outlets on both sides and V-shaped grooves to form a fast drainage channel, so that residual liquids (such as cooling water and cleaning agents) can be drained within 30 seconds, reducing pipe wall corrosion. The open structure design avoids dead corners for liquid accumulation, making it suitable for humid environments or working conditions that require frequent cleaning.

[0021] 3. The structure facilitates loading and unloading. The bottom of the support frame, with a width of 620mm, seamlessly engages with the standard turnover vehicle groove (without any movement gap), eliminating the risk of shaking during loading and unloading. The 160° upper narrow and lower wide support frame enhances the connection strength between the fixture and the transport vehicle, improving impact resistance by 60%. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the overall bottom view of the present invention;

[0023] Figure 2 This is a schematic diagram of the overall side view structure of this utility model;

[0024] Figure 3 This is a schematic diagram of the overall bottom view of the present invention;

[0025] Figure 4 This is a schematic diagram of the overall front view of the present invention;

[0026] Figure 5 This utility model Figure 1 Enlarged structural diagram at point A in the middle.

[0027] In the diagram: 1. Fixture body; 2. Turnover trolley trough; 3. V-groove; 4. Limiting baffle; 5. Drain outlet; 6. Support frame. Detailed Implementation

[0028] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0029] Please see Figures 1-5 This utility model provides a technical solution: a furnace tube turnover fixture, including: fixture body 1, turnover trough 2, V-groove 3, limiting baffle 4, drain outlet 5 and support frame 6. The turnover trough 2 is opened on the inner side of the fixture body 1, and the V-groove 3 is opened on the bottom of the fixture body 1. The limiting baffle 4 is welded to the left and right sides of the fixture body 1, and the drain outlet 5 is opened on the inner side of the limiting baffle 4. The support frame 6 is welded to the bottom of the fixture body 1.

[0030] Three sets of support frames 6 are equidistantly arranged, with a total span of 880mm between the three sets of support frames 6, forming a stable triangular support; the support frames 6 are locked outside the turnover cart slot 2, and the support frames 6 are narrower at the top and wider at the bottom, with an opening angle of 160°; the bottom width of the support frames 6 is 620mm, locked on both sides of the turnover cart, with no room for lateral movement; the V-groove 3 has an opening width of 350mm and an angle of 100°, adapting to self-centering for different pipe diameters; each of the two limit baffles 4 on both sides of the fixture has a 10mm drainage port for easy drainage, forming a drainage channel with the V-groove 3; the overall length of the fixture body 1 is 1800mm;

[0031] This structure allows for efficient transfer of the furnace tube. First, the entire furnace tube is placed flat within the V-groove 3 of the fixture body 1. The bottom V-groove 3 is designed with a 100° angle, utilizing the inclined surfaces to form two-point support. When the furnace tube is placed within the V-groove 3, its gravity is decomposed into components perpendicular to the two inclined surfaces. Trigonometric relationships ensure uniform pressure distribution, preventing localized stress concentration. Furthermore, due to the symmetrical structure of the V-groove 3, the centerline of furnace tubes of different diameters always coincides with the central axis of the fixture body 1, achieving a positioning accuracy of ±1mm without manual adjustment. The double-welded limiting baffles 4 form a semi-enclosed space with the V-groove 3. When the furnace tube is subjected to lateral inertial force during transport, the limiting baffles 4 react through a counterforce. Force counteracts displacement trends and prevents furnace tubes from rolling or slipping. Three sets of equidistant support frames 6 with a span of 880mm convert the weight of the furnace tubes into concentrated force at the support points. The top-narrow and bottom-wide (160° tilt angle) design lowers the center of gravity and enhances anti-overturning ability. The bottom 620mm width of the support frame 6 is interference-fitted with the turnover cart frame, and horizontal vibration is suppressed by the friction of the contact surface. Liquid (such as cooling water) flows along the surface of the furnace tube to the lowest point of the V-shaped groove 3. Due to the tilt of the groove, it flows to both sides and is finally discharged through the 10mm drainage hole 5 on the limiting baffle 4. The fixture body 1 achieves safe, efficient and low-maintenance operation of furnace tube turnover through the integrated design of mechanical constraints and fluid channels, and is suitable for high-frequency industrial application scenarios.

[0032] The contents not described in detail in this specification are existing technologies known to those skilled in the art.

[0033] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A furnace tube turnover fixture, comprising a fixture body (1), a turnover trough (2), a V-groove (3), a limiting baffle (4), a drain outlet (5), and a support frame (6), characterized in that, The fixture body (1) has a turnover trough (2) on its inner side and a V-shaped groove (3) on its bottom. Limiting baffles (4) are welded to the left and right sides of the fixture body (1), and drainage outlets (5) are opened on the inner side of the limiting baffles (4). A support frame (6) is welded to the bottom of the fixture body (1).

2. The furnace tube turnover fixture according to claim 1, characterized in that: The support frame (6) is arranged in three sets at equal intervals, and the total span between the three sets of support frames (6) is 880mm, forming a stable triangular support.

3. The furnace tube turnover fixture according to claim 1, characterized in that: The support frame (6) is inserted outside the turnover trough (2), and the support frame (6) is narrower at the top and wider at the bottom, with an opening angle of 160°.

4. The furnace tube turnover fixture according to claim 1, characterized in that: The support frame (6) has a bottom width of 620mm and is fixed on both sides of the turnover cart, with no room for left or right movement.

5. A furnace tube turnover fixture according to claim 1, characterized in that: The V-groove (3) has an opening width of 350mm and an angle of 100°, which is suitable for self-centering of different pipe diameters.

6. A furnace tube turnover fixture according to claim 1, characterized in that: The fixture has a 10mm drainage port on each of the two limiting baffles (4) to facilitate drainage, forming a drainage channel with the V-shaped groove (3).

7. A furnace tube turnover fixture according to claim 1, characterized in that: The fixture body (1) has an overall length of 1800mm.

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