Annealing furnace temperature uniformity control device

Abstract

This utility model relates to the field of annealing furnace technology, specifically to an annealing furnace temperature uniformity control device. The device includes an annealing furnace body with multiple interconnected partitioned chambers inside. Temperature-controlled electric heating tubes are fixedly installed on the walls of each partitioned chamber. A temperature distribution assembly is also provided on the furnace body. This assembly includes an insulated air inlet pipe fixedly installed on one side of the furnace body and an insulated air outlet pipe fixedly installed on the other side. The outlet end of the insulated air outlet pipe extends into the furnace body and is fixedly connected to a vertical pipe. Multiple distribution pipes are fixedly installed on the vertical pipe. A centrifugal fan housing is fixedly installed between the insulated air inlet pipe and the insulated air outlet pipe. Centrifugal fan blades are rotatably connected inside the centrifugal fan housing. The drive shaft of the centrifugal fan blades is connected to a drive motor via a heat-insulated transmission rod. This utility model facilitates temperature uniformity and is beneficial for metal annealing operations.

Description

Technical Field

[0001] This utility model relates to the field of annealing furnace technology, and more specifically, to a device for controlling the temperature uniformity of an annealing furnace. Background Technology

[0002] Annealing is a crucial step in the processing of metal materials. By heating, holding, and cooling the metal, its microstructure and properties can be effectively improved. During annealing, the uniformity of temperature within the annealing furnace plays a decisive role in the annealing quality. Uneven temperature distribution within the furnace leads to inconsistent microstructural transformations in different parts of the metal, resulting in uneven hardness, unstable properties, and other problems that severely impact product quality.

[0003] The invention patent with authorization announcement number CN117448968B discloses a precision temperature-controlled semiconductor wafer annealing furnace, including a furnace body and a furnace door hinged to the furnace body. The furnace body houses a quartz chamber, a heating unit, a wafer stage, and a gas supply unit. A temperature detection device is installed at the furnace door. This annealing furnace features a pyrometer that can detect the internal temperature of the furnace body during wafer annealing. Each heating lamp can be individually adjusted, thereby achieving better control over the uniformity of internal heating temperature. The temperature detection device uses thermocouples for more accurate temperature detection. It can be used to calibrate and adjust the heating lamps, as well as to calibrate the pyrometer. The temperature detection device has two operating states: the first state serves as auxiliary temperature control, and the second state effectively monitors the temperature throughout the annealing process using multiple temperature sensors, thereby better adjusting the heating lamp power as needed.

[0004] While this technical solution offers the advantage of better adjusting the heating lamp power when needed, existing annealing furnaces still have some shortcomings in temperature uniformity control. Some annealing furnaces use traditional heating methods, such as resistance wire heating, which has low heat transfer efficiency and easily causes localized excessively high or low temperatures within the furnace. Furthermore, the airflow circulation system within the furnace is poorly designed, resulting in insufficient and uneven distribution of hot air within the furnace, leading to significant temperature differences between different areas. For example, in the annealing process of some large metal sheets, the uneven temperature in the annealing furnace results in significant differences in annealing effects between the edges and the center of the sheet, leading to a high scrap rate, increased production costs, and reduced production efficiency. Therefore, developing a control device that can effectively improve the temperature uniformity of annealing furnaces is of significant practical importance. Utility Model Content

[0005] The purpose of this invention is to provide a device for controlling the temperature uniformity of an annealing furnace, so as to solve the defects mentioned in the background art.

[0006] To achieve the above objectives, this utility model provides the following technical solution:

[0007] An annealing furnace temperature uniformity control device includes an annealing furnace body. The annealing furnace body has multiple interconnected partitioned chambers inside. Temperature-controlled electric heating tubes are fixedly installed on the walls of each partitioned chamber. The annealing furnace body also has a temperature distribution assembly, which includes an insulated air inlet pipe fixedly installed on one side of the annealing furnace body and an insulated air outlet pipe fixedly installed on the other side of the annealing furnace body. The outlet end of the insulated air outlet pipe extends into the annealing furnace body and is fixedly installed with a vertical pipe. Multiple distribution pipes are fixedly installed on the vertical pipe. A centrifugal fan housing is fixedly installed between the insulated air inlet pipe and the insulated air outlet pipe. Centrifugal fan blades are rotatably connected inside the centrifugal fan housing. The drive shaft of the centrifugal fan blades is connected to a drive motor via a heat-insulated transmission rod.

[0008] Preferably, the end of the insulated air inlet pipe is fixedly installed at the air inlet end of the centrifugal fan housing, and the insulated air outlet pipe is fixedly installed at the air outlet end of the centrifugal fan housing.

[0009] Preferably, the drive shaft of the centrifugal fan blades is detachably connected to the heat-insulating drive rod, and the end of the heat-insulating drive rod is detachably connected to the output shaft of the drive motor.

[0010] This feature facilitates the fixing, installation, disassembly, and replacement of the thermal insulation transmission rod.

[0011] Preferably, the feeding end of the annealing furnace body is hinged with a furnace door, and the vertical pipe is located on the side away from the furnace door.

[0012] Preferably, a support beam is fixedly installed on the drive motor, and the support beam is fixedly installed on the outer frame.

[0013] Preferably, a plurality of support blocks are fixedly installed at the bottom of the annealing furnace body, and the height of the support blocks is between 5cm and 8cm.

[0014] Preferably, a high-precision temperature sensor is fixedly installed at a corresponding position inside the annealing furnace body, and the high-precision temperature sensor is used for temperature detection.

[0015] Preferably, a control host is provided on the outside of the annealing furnace body, and a fixed base is fixedly installed on the bottom of the control host, and the fixed base is fixedly installed on the external frame.

[0016] Compared with the prior art, the beneficial effects of this utility model are:

[0017] 1. This utility model improves heat transfer efficiency by setting up multiple interconnected partitioned chambers and installing multiple temperature-controlled electric heating tubes on the chamber walls. This enables independent and precise temperature control of different areas within the annealing furnace, allowing for rapid and uniform heating of each partition and preventing local overheating or undercooling, thus effectively improving the overall temperature uniformity within the annealing furnace.

[0018] 2. This utility model utilizes the insulated air inlet pipe, insulated air outlet pipe, centrifugal fan housing, and centrifugal fan blades in the temperature distribution assembly. The rotation of the centrifugal fan blades draws hot air in through the insulated air inlet pipe and delivers it evenly to the interior of the annealing furnace body through the insulated air outlet pipe and the distribution pipe. This achieves efficient circulation and uniform distribution of hot air inside the furnace, ensuring that the hot air is in full contact with the metal material, improving heat transfer efficiency, and further enhancing the temperature uniformity of the annealing furnace.

[0019] 3. This utility model makes the drive shaft of the centrifugal fan blades, the heat-insulating transmission rod, and the drive motor detachably connected. The heat-insulating transmission rod can isolate the drive motor from temperature damage and is also easy to install and replace. In addition, the high-precision temperature sensor detects the temperature in real time. Together with the control host, it realizes the stable operation of the temperature uniformity control device and the real-time monitoring and adjustment of the temperature. This achieves the effects of convenient equipment maintenance, ensuring stable and uniform temperature during the annealing process, and improving the annealing quality and production efficiency of the products. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0021] Figure 2 This is a schematic diagram of the temperature distribution component of this utility model;

[0022] Figure 3 This utility model Figure 2 Enlarged view of point A in the middle;

[0023] The meanings of the labels in the diagram are as follows:

[0024] 1. Annealing furnace body; 10. Furnace door; 11. Support pad; 12. Zoned chamber; 13. Temperature-controlled electric heating element; 14. High-precision temperature sensor;

[0025] 2. Control unit; 20. Mounting bracket;

[0026] 3. Temperature distribution assembly; 30. Insulated air inlet pipe; 31. Centrifugal fan housing; 32. Centrifugal fan blades; 33. Insulated transmission rod; 34. Drive motor; 35. Support beam; 36. Insulated air outlet pipe; 37. Vertical pipe; 38. Distribution pipe. Detailed Implementation

[0027] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0028] Please see Figures 1-3 This utility model provides a technical solution: an annealing furnace temperature uniformity control device, including an annealing furnace body 1, the annealing furnace body 1 having multiple interconnected partitioned chambers 12 inside, and temperature-controlled electric heating tubes 13 fixedly installed on the walls of the partitioned chambers 12, enabling the annealing furnace to achieve independent temperature control of different areas, and flexibly adjust the heating power of each partition according to the annealing requirements of the metal material, avoiding local temperature abnormalities, thereby effectively improving the temperature uniformity inside the furnace and ensuring that the annealing effect of all parts of the metal material is consistent.

[0029] In this embodiment, a temperature distribution assembly 3 is also provided on the annealing furnace body 1. The temperature distribution assembly 3 includes an insulated air inlet pipe 30 fixedly installed on one side of the annealing furnace body 1 and an insulated air outlet pipe 36 fixedly installed on the other side of the annealing furnace body 1. The outlet end of the insulated air outlet pipe 36 extends into the annealing furnace body 1 and is fixedly installed with a vertical pipe 37. Multiple distribution pipes 38 are fixedly installed on the vertical pipe 37. A centrifugal fan housing 31 is fixedly installed between the insulated air inlet pipe 30 and the insulated air outlet pipe 36. A centrifugal fan is rotatably connected inside the centrifugal fan housing 31. The centrifugal fan blade 32 is connected to a drive motor 34 via a heat-insulating transmission rod 33. The end of the heat-insulating air inlet pipe 30 is fixedly installed at the air inlet end of the centrifugal fan housing 31, and the heat-insulating air outlet pipe 36 is fixedly installed at the air outlet end of the centrifugal fan housing 31. When the centrifugal fan blade 32 rotates, it can draw air from the furnace through the heat-insulating air inlet pipe 30 and blow it evenly to all parts of the furnace through the heat-insulating air outlet pipe 36, the vertical pipe 37, and the uniform distribution pipe 38, thereby promoting hot air circulation, enhancing heat transfer, making the temperature distribution in the furnace more uniform, and further improving the annealing quality.

[0030] like Figure 3As shown, the drive shaft of the centrifugal fan blade 32 is detachably connected to the heat-insulating transmission rod 33 via a flange, and the end of the heat-insulating transmission rod 33 is detachably connected to the output shaft of the drive motor 34 via a flange. This allows the heat-insulating transmission rod 33 to be easily disassembled and replaced when damaged or requiring maintenance, reducing equipment maintenance difficulty and time costs, and ensuring the continuous and stable operation of the temperature distribution component 3. The heat-insulating transmission rod 33 can prevent damage to the drive motor 34 caused by temperature transmission. Furthermore, the heat-insulating transmission rod 33 can be made of ceramic matrix composite material, such as silicon carbide (SiC) ceramic matrix composite material, which has extremely low thermal conductivity and can effectively block the high temperature in the annealing furnace from being transmitted to the drive motor 34, providing excellent heat insulation. At the same time, it has high hardness and high compressive strength, making it less prone to deformation or breakage when transmitting the rotational torque of the centrifugal fan blade 32, ensuring transmission stability. In addition, it also has good chemical stability and can be used for a long time in harsh environments such as high temperature and oxidation.

[0031] like Figure 1 As shown, the feeding end of the annealing furnace body 1 is hinged with a furnace door 10, which is used for material loading and unloading operations. The vertical pipe 37 is located on the side away from the furnace door 10, which facilitates airflow.

[0032] like Figure 3 As shown, a support beam 35 is fixedly installed on the drive motor 34. The support beam 35 is fixedly installed on the outer frame of the unit, so that the drive motor 34 is stably supported, and the vibration of the motor during operation is prevented from affecting the rotational stability of the centrifugal fan blades 32, thus ensuring the stable operation of the airflow circulation system.

[0033] like Figure 1 As shown, multiple support blocks 11 are fixedly installed at the bottom of the annealing furnace body 1. The height of the support blocks 11 is between 5cm and 8cm, so as to achieve stable support for the annealing furnace body 1.

[0034] It is worth noting that a high-precision temperature sensor 14 is fixedly installed at a corresponding position inside the annealing furnace body 1. The high-precision temperature sensor 14 is used for temperature detection, enabling the furnace temperature to be monitored in real time and accurately, and transmitting the data to the control host 2. The control host 2 is set outside the annealing furnace body 1, and a fixing base 20 is fixedly installed at the bottom of the control host 2. The fixing base 20 is fixedly installed on the external frame. Based on the data fed back by the high-precision temperature sensor 14, the temperature-controlled electric heating tube 13 and the temperature distribution component 3 are intelligently regulated to achieve closed-loop control of the annealing furnace temperature, further improving the accuracy and reliability of temperature uniformity control.

[0035] It is worth noting that the high-precision temperature sensors 14 are evenly distributed in key locations within the annealing furnace body 1, including the furnace center, corners, and key areas near the heating source and air outlet. These sensors continuously collect temperature data from various areas within the furnace in real time and transmit this data as electrical signals to the control host 2 quickly and stably via a specific data transmission line. Upon receiving the data from the high-precision temperature sensors 14, the control host 2 first analyzes and processes the data. The built-in program in the control host 2 compares the received actual temperature data with the pre-set annealing process temperature parameters, calculating the deviation between the actual temperature and the set temperature for each area. Then, based on the deviation, the control host 2 uses preset control algorithms such as PID control and fuzzy control algorithms to generate corresponding control commands after logical operations. When the temperature in a certain area is lower than the set value, the control host 2 will issue a command to increase the heating power of the temperature-controlled electric heating tube 13 in that area; conversely, when the temperature in a certain area is higher than the set value, the heating power of the temperature-controlled electric heating tube 13 in that area will be reduced. These commands are transmitted to the temperature regulation device of the temperature-controlled electric heating tube 13 through the control circuit. After receiving the command from the control host 2, the independent temperature regulation device of the temperature-controlled electric heating tube 13 responds quickly, precisely changing the heating power of the temperature-controlled electric heating tube 13 by adjusting the current, thereby regulating the temperature of the corresponding area in the annealing furnace and making the temperature change towards the set value. During the temperature regulation process of the temperature-controlled electric heating tube 13, the high-precision temperature sensor 14 continuously monitors the temperature change in the furnace and feeds back the new temperature data to the control host 2. The control host 2 re-analyzes and judges the new data, continuously adjusting the working state of the temperature-controlled electric heating tube 13, forming a dynamic closed-loop control process to ensure that the temperature in the annealing furnace is always kept within the set range, achieving temperature uniformity and stability control.

[0036] Finally, it should be noted that the temperature-controlled electric heating tube 13, high-precision temperature sensor 14, control host 2, and drive motor 34 involved in this utility model are all general standard parts or parts known to those skilled in the art. Their structure and principle can be known to those skilled in the art through technical manuals or conventional experimental methods. In the idle space of this device, all the above-mentioned electrical components, which refer to power elements, electrical components, and the matching controller and power supply, are connected by wires. The specific connection method should refer to the working principle of this utility model. The electrical connections between each electrical component are completed in the order of operation. The detailed connection methods are all technologies known in the art.

[0037] When using the annealing furnace temperature uniformity control device of this utility model, according to the requirements of the metal material annealing process, the target temperature of each zone chamber 12 of the annealing furnace is set in the control host 2, the furnace door 10 is opened, the metal material to be annealed is placed in a suitable position in the main body 1 of the annealing furnace, and then the furnace door 10 is closed.

[0038] The device is started, and the temperature-controlled electric heating tube 13 begins to heat the zoned chamber 12. The high-precision temperature sensor 14 monitors the temperature of each zone in real time and transmits the data to the control host 2. The control host 2 intelligently adjusts the power of the temperature-controlled electric heating tube 13 based on the difference between the temperature data and the set value. Simultaneously, the drive motor 34 drives the centrifugal fan blades 32 to rotate. Air enters through the insulated air inlet pipe 30, is pressurized by the centrifugal fan housing 31, and is then evenly blown into the furnace through the insulated air outlet pipe 36, vertical pipe 37, and uniform distribution pipe 38, promoting hot air circulation. During the annealing process, the control host 2 continuously adjusts the power of the temperature-controlled electric heating tube 13 and the operating status of the temperature uniform distribution component 3 based on the data from the high-precision temperature sensor 14 to ensure uniform temperature within the furnace. After annealing, the equipment is shut down, and the furnace door 10 is opened to remove the metal material.

[0039] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely preferred examples and are not intended to limit the utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. An annealing furnace temperature uniformity control device, comprising an annealing furnace body (1), characterized in that: The annealing furnace body (1) has multiple interconnected partitioned chambers (12) inside. Temperature-controlled electric heating tubes (13) are fixedly installed on the walls of the partitioned chambers (12). The annealing furnace body (1) is also equipped with a temperature distribution assembly (3). The temperature distribution assembly (3) includes an insulated air inlet pipe (30) fixedly installed on one side of the annealing furnace body (1) and an insulated air outlet pipe (36) fixedly installed on the other side of the annealing furnace body (1). The outlet end of the pipe (36) extends into the body (1) of the annealing furnace and is fixedly installed with a vertical pipe (37). Multiple evenly distributed pipes (38) are fixedly installed on the vertical pipe (37). A centrifugal fan housing (31) is fixedly installed between the heat-insulating air inlet pipe (30) and the heat-insulating air outlet pipe (36). A centrifugal fan blade (32) is rotatably connected inside the centrifugal fan housing (31). The drive shaft of the centrifugal fan blade (32) is connected to a drive motor (34) through a heat-insulating drive rod (33).

2. The annealing furnace temperature uniformity control device according to claim 1, characterized in that: The end of the insulated air inlet pipe (30) is fixedly installed at the air inlet end of the centrifugal fan housing (31), and the insulated air outlet pipe (36) is fixedly installed at the air outlet end of the centrifugal fan housing (31).

3. The annealing furnace temperature uniformity control device according to claim 1, characterized in that: The drive shaft of the centrifugal fan blade (32) is detachably connected to the heat-insulating drive rod (33), and the end of the heat-insulating drive rod (33) is detachably connected to the output shaft of the drive motor (34).

4. The annealing furnace temperature uniformity control device according to claim 1, characterized in that: The annealing furnace body (1) has a furnace door (10) hinged to its feed end, and the vertical pipe (37) is located on the side away from the furnace door (10).

5. The annealing furnace temperature uniformity control device according to claim 1, characterized in that: A support beam (35) is fixedly installed on the drive motor (34), and the support beam (35) is fixedly installed on the outer frame.

6. The annealing furnace temperature uniformity control device according to claim 1, characterized in that: The bottom of the annealing furnace body (1) is fixedly equipped with multiple support pads (11), and the height of the support pads (11) is between 5cm and 8cm.

7. The annealing furnace temperature uniformity control device according to claim 1, characterized in that: A high-precision temperature sensor (14) is fixedly installed at the corresponding position inside the annealing furnace body (1). The high-precision temperature sensor (14) is used for temperature detection.

8. The annealing furnace temperature uniformity control device according to claim 1, characterized in that: The main body (1) of the annealing furnace is provided with a control host (2) on the outside. The bottom of the control host (2) is fixedly installed with a fixing seat (20), and the fixing seat (20) is fixedly installed on the external frame.

Images