Observation device and coating system

Abstract

This utility model relates to the field of vacuum coating technology and discloses an observation device and a coating system. The observation device includes a housing, an observation unit, and a blocking unit. By setting the housing, the observation unit, and the blocking unit, the service life of the observation structure can be extended. This allows for the replacement of the observation structure or the second light-transmitting element in the observation unit while performing routine maintenance on the component to be connected. This eliminates the need for multiple shutdowns of the component to be connected to replace the observation structure or the second light-transmitting element during the period between start-up and routine maintenance, as is done in related technologies. The observation device of this utility model can increase the working time of the component to be connected, thereby achieving the technical effects of improving the working efficiency of the component to be connected and saving the usage cost of the component to be connected.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating technology, specifically to an observation device and a coating system. Background Technology

[0002] Vacuum coating is a surface treatment technology. Its core lies in converting metallic, non-metallic, or compound materials (film materials) into a gaseous or plasma state through physical or chemical means in a high-vacuum environment, and then depositing them onto the surface of a substrate to form a thin film. This process can endow materials with new functions, such as radiation protection, increased light transmittance, electrical conductivity, insulation, wear resistance, high-temperature resistance, and corrosion resistance.

[0003] Compared with traditional wet coating methods such as electroplating and hot-dip plating, vacuum coating does not affect the quality of the coated material, and the coating materials are diverse. It can select environmentally friendly and energy-saving materials as much as possible to meet the required composition and structure of the film material technology, so as to enhance the protection of the environment.

[0004] Vacuum coating equipment typically includes a vacuum system, a coating process system, key subsystems, and a safety protection system. The vacuum system includes a high-vacuum generation system (such as a diffusion pump or molecular pump), a vacuum measurement and control system (such as PID control), and cavity sealing technologies (such as metal seals and fluororubber seals). The coating process system includes physical vapor deposition (PVD), chemical vapor deposition (CVD), magnetron sputtering, and electron beam evaporation. Key subsystems include a substrate heating and temperature control system, a film thickness monitoring system (quartz crystal oscillation method), and a plasma-assisted system. The safety protection system includes water shortage alarms, interlock protection, grounding devices, short-circuit protection, and overcurrent protection.

[0005] The vacuum coating equipment chamber is equipped with an observation device, such as an observation window, which allows users to observe the coating process of the vacuum coating equipment on the target workpiece. This allows users to understand the various aspects of the coating process in real time, such as the operating status of the substrate to be coated, the coating quality, the heating status of the evaporation boat, the operation of the receiving shaft, and the operation of the discharging shaft.

[0006] During the coating process, the film material needs to be vaporized so that the vaporized film particles can be deposited onto the target workpiece. Inevitably, these particles diffuse in all directions within the chamber, causing the surface of the observation window to become contaminated. This prevents the user from observing the interior of the chamber through the observation window, affecting its normal use. Replacing the observation window at this point means that the vacuum coating equipment needs to be shut down multiple times between machine startup and routine maintenance shutdowns. This not only affects coating efficiency but also increases coating costs by requiring the vacuum coating equipment to be re-vacuumed each time.

[0007] Existing observation devices utilize a flash plate and motor installed between the observation window and the chamber. Multiple narrow slits are cut into the flash plate, and the motor drives its rotation. This allows observation of the coating process through the narrow slits, taking advantage of the persistence of vision. Simultaneously, the small size of the slits reduces the amount of vaporized film particles passing through, thus extending the time required for the particles to adhere to the observation window. However, this method only reduces the number of downtimes for the vacuum coating equipment; it still cannot replace the observation window during routine maintenance. Therefore, this method still suffers from low coating efficiency and high coating costs. Utility Model Content

[0008] In view of this, the present invention provides an observation device and a coating system to solve the problems of existing observation devices that use a flash plate and a motor between the observation window and the chamber. The flash plate has multiple narrow slits, and the motor drives the rotation of the flash plate to utilize the persistence of vision effect of the human eye, allowing observation of the coating process through the narrow slits. Simultaneously, because the size of the narrow slits is small, the amount of vaporized film particles passing through can be reduced, thus extending the time required for the vaporized film particles to adhere to the observation window. However, this method only reduces the number of downtimes for the vacuum coating equipment; it still cannot wait until the user stops the machine for routine maintenance to replace the observation window. Therefore, this method still suffers from low coating efficiency and high coating cost.

[0009] In a first aspect, this utility model provides an observation device for connecting to a component to be connected, wherein the component to be connected has a working cavity, the working cavity being in communication with the observation device, and the observation device comprising:

[0010] A housing is connected to the component to be connected. The housing includes a first hollow structure. One end of the housing has an opening that communicates with one end of the first hollow structure, allowing the working cavity to communicate with the first hollow structure through the opening. The other end of the housing is closed to block communication between the other end of the first hollow structure and the outside. The other end of the housing also has a first light-transmitting element that corresponds to the desired observation position inside the component to be connected. The first light-transmitting element is used to observe the desired observation position.

[0011] An observation unit is disposed within the first hollow structure. The observation unit includes an observation structure and a slit structure. The observation structure is rotatably connected to the housing, and the axis of rotation of the observation structure is set as the rotation axis. The observation structure is provided with multiple second light-transmitting elements, which are detachably connected to the observation structure and / or the observation structure to the housing. The multiple second light-transmitting elements are arranged around the rotation axis and are used to drive the observation structure by external force so that one of the second light-transmitting elements corresponds to the desired observation position. The slit structure is disposed between the observation structure and the component to be connected and is rotatably connected within the first hollow structure. The slit structure has at least one light-transmitting slit on its side, which is used to observe the desired observation position through the second light-transmitting elements and the light-transmitting slit when the slit structure is driven to rotate by external force.

[0012] A blocking unit is disposed between the slit structure and the component to be connected. The blocking unit is provided with an observation slot corresponding to the desired observation position, so that when one of the second light-transmitting components passes through the observation slot and corresponds to the desired observation position, it blocks the communication between the remaining second light-transmitting components and the component to be connected.

[0013] Beneficial effects: By setting up a housing, an observation unit, and a blocking unit, the housing is connected to the component to be connected. The housing has a first light-transmitting element, which corresponds to the desired observation position on the component to be connected, allowing the user to observe the desired position through the first light-transmitting element. The observation unit includes an observation structure and a slit structure, both of which are rotatably connected within the first hollow structure of the housing. The observation structure has multiple second light-transmitting elements, and the slit structure has a light-transmitting slit. The blocking unit is located between the observation structure and the component to be connected, and the blocking unit has an observation slot. By rotating the observation structure, a second light-transmitting element passes through the observation slot and the light-transmitting slit, corresponding to the desired observation position. When the slit structure rotates, the persistence of vision allows the user to view the desired observation position through the light-transmitting slit. The blocking unit prevents the other second light-transmitting elements from connecting with the element to be connected. When one second light-transmitting element is contaminated, the other second light-transmitting elements are not contaminated. At this time, the observation structure is rotated by external force so that another second light-transmitting element corresponds to the observation slot. When multiple second light-transmitting elements are contaminated, the observation structure is replaced.

[0014] Based on this, the service life of the observation structure can be extended, so that the observation structure or the second light-transmitting element can be replaced while the connecting part is being routinely maintained. This eliminates the need for multiple shutdowns of the connecting part to replace the observation structure or the second light-transmitting element during the period between the start-up of the connecting part and routine maintenance, as is done in related technologies. The observation device of this utility model can increase the working time of the connecting part, thereby achieving the technical effects of improving the working efficiency of the connecting part and saving the usage cost of the connecting part.

[0015] In one optional implementation, the observation unit includes:

[0016] A first rotating structure is disposed within the first hollow structure and rotatably connected to the housing. The first rotating structure extends along the rotation axis and is used to connect with the observation structure and / or the slit structure, so that the observation structure and / or the slit structure are rotatably connected to the housing, and the observation structure and / or the slit structure are detachably connected to the first rotating structure.

[0017] In one alternative implementation, the observation structure includes:

[0018] An observation element is light-transmitting and is rotatably connected to the first rotating structure.

[0019] Alternatively, the observation structure includes:

[0020] The support member has light-blocking properties and is rotatably connected to the first rotating structure. The support member has multiple through holes, which correspond to and are connected to the second light-transmitting member.

[0021] In one alternative embodiment, the second light-transmitting element is made of glass.

[0022] And / or, the other end of the first hollow structure is connected to the outside, and the shell includes:

[0023] A first connecting structure is connected to the side of the shell away from the opening. The first connecting structure is used to seal the other end of the first hollow structure from the outside, so as to form a closed other end of the shell.

[0024] And / or, the observation device includes:

[0025] A first driving unit is connected to the housing and to the first rotating structure, and is used as an external force to drive the rotation of the slit structure through the first rotating structure.

[0026] And / or, a second drive unit, connected to the housing and connected to the first rotating structure, is used as an external force to drive the rotation of the observation structure through the first rotating structure;

[0027] And / or, a first connecting unit, one end of which is connected to one end of the housing, and the other end of the first connecting unit is used to connect the component to be connected, so that the first light-transmitting component corresponds to the desired observation position.

[0028] Beneficial effects: By limiting the second light-transmitting element to be made of glass, the light transmission effect of the second light-transmitting element can be improved, thereby achieving the technical effect of improving the accuracy of viewing the required observation position;

[0029] By setting up a first driving unit, the rotation of the slit structure can be driven by the first rotating structure as an external force, thereby achieving the technical effect of improving the ease of movement of the slit structure.

[0030] By setting a second driving unit, the rotation of the observation structure can be driven by the first rotating structure as an external force, thereby achieving the technical effect of improving the ease of observing the rotation of the structure.

[0031] In one optional embodiment, the second light-transmitting element is made of borosilicate glass and / or aluminosilicate glass and / or quartz glass.

[0032] And / or, the first connecting unit is detachably connected to the component to be connected;

[0033] And / or, the observation device includes:

[0034] An auxiliary unit, which is light-transmitting, is disposed in the mounting groove of the first connecting structure and is connected to the inner wall of the mounting groove. The auxiliary unit is used as the first light-transmitting element.

[0035] And / or, the first connection unit includes:

[0036] The second connecting structure has a connecting channel. The second connecting structure is connected to the housing and is detachably connected to the component to be connected, so that the connecting channel communicates with the first hollow structure. The other end of the connecting channel is used to communicate with the desired observation position.

[0037] Beneficial effects: By specifying that the second light-transmitting element is made of borosilicate glass and / or aluminosilicate glass and / or quartz glass, the second light-transmitting element can be made both heat-resistant and radiation-resistant, avoiding the material of the second light-transmitting element from affecting its performance, thereby achieving the technical effect of improving the service life of the second light-transmitting element;

[0038] By defining the connection between the second connecting structure and the housing, and the second connecting structure being detachably connected to the component to be connected, the connecting channel is made to communicate with the first hollow structure, and the other end of the connecting channel is used to communicate with the desired observation position. Based on this, the observation device and the component to be connected can be assembled and disassembled according to actual needs, thereby achieving the technical effect of improving the ease of use of the observation device.

[0039] In one optional embodiment, a first sealing structure is provided between the first connecting structure and the housing, the first sealing structure being used to seal the connection between the first connecting structure and the housing;

[0040] And / or, the auxiliary unit includes:

[0041] A fixing structure is provided in the mounting groove and is detachably connected to the housing; the fixing structure is provided with a fixing groove.

[0042] A visible structure, which is translucent, is disposed within the fixing groove, and the visible structure is connected to the inner wall of the fixing groove;

[0043] And / or, the second connection structure is frustum-shaped, the second connection structure includes a first connection surface and a second connection surface, the radial dimension of the first connection surface is smaller than the radial dimension of the second connection surface, the first connection surface is used to connect with the housing, and the second connection surface is used to detachably connect with the component to be connected.

[0044] Beneficial effects: By setting the first sealing structure, the connection tightness between the first connecting structure and the housing can be increased, and the vacuum in the observation device can be improved to ensure the normal use of the connected parts;

[0045] By making the fixed structure and the housing detachably connected, the technical effect of improving the ease of maintenance and replacement of the fixed structure can be achieved.

[0046] By defining the second connecting structure as a frustum shape, the user's field of vision is increased without increasing the radial dimensions of the first light-transmitting element, the observation slot, and the second light-transmitting element, thereby achieving the technical effect of improving the reliability of understanding the required observation position.

[0047] In one alternative embodiment, the fixing structure protrudes from the surface of the housing;

[0048] And / or, a second sealing structure is provided between the fixing structure and the housing, the second sealing structure being used to form a seal between the fixing structure and the housing.

[0049] Beneficial effect: By limiting the fixed structure to protrude from the shell, the visibility of the visible structure is improved, thereby achieving the technical effect of improving the ease of use of the observation device;

[0050] The second sealing structure between the fixed structure and the housing can improve the tightness of the connection between the fixed structure and the housing, thereby ensuring the vacuum of the observation device and thus improving the reliability of the observation device.

[0051] In one optional implementation, the first connection unit includes:

[0052] A third connecting structure is disposed between the second connecting structure and the component to be connected. The third connecting structure is arranged circumferentially along the second connecting structure and connected to the second connecting structure. The third connecting structure is used for detachable connection with the component to be connected.

[0053] Beneficial effect: By setting a third connection structure, the circumferential connection area between the second connection structure and the part to be connected can be increased, thereby achieving the technical effect of improving the connection reliability between the second connection structure and the part to be connected.

[0054] In one optional implementation, the observation device includes:

[0055] A cooling unit is disposed on the surface of the housing. The cooling unit is provided with a cooling channel. The inlet and outlet of the cooling channel are both connected to a cooling medium source so that a flowing cooling medium is provided in the cooling channel. The cooling unit is used to cool and reduce the temperature of the housing.

[0056] Beneficial effects: By incorporating a cooling unit, the housing is circulated and cooled. This extends the housing's lifespan and prevents the temperature of the vacuum coating equipment from affecting the normal operation of the observation device, thereby improving the reliability of the observation device.

[0057] Secondly, this utility model also provides a coating system, comprising:

[0058] The observation device described above;

[0059] A coating apparatus is provided with a working chamber. The coating apparatus is connected to the observation device so that the working chamber communicates with the first hollow structure of the observation device. The coating apparatus is used as a component to be connected.

[0060] Beneficial effects: Since the coating system includes an observation device, it has the same effect as the observation device, which will not be elaborated here. Attached Figure Description

[0061] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0062] Figure 1 This is a schematic diagram of the observation device in this embodiment;

[0063] Figure 2 This is an exploded view of the first connecting unit, slit structure, blocking unit, and observation structure in the observation device of this embodiment;

[0064] Figure 3 for Figure 1 A partial sectional view;

[0065] Figure 4 This is a schematic diagram of the slit structure in this embodiment;

[0066] Figure 5 This is a schematic diagram of the blocking unit in this embodiment;

[0067] Figure 6 This is a schematic diagram of the observation structure in this embodiment.

[0068] Explanation of reference numerals in the attached figures:

[0069] 1. Housing; 101. Rotation axis; 102. First connecting structure;

[0070] 103. First light-transmitting element; 1031. Fixed structure; 1032. Visible structure;

[0071] 2. Observation Unit;

[0072] 201. Observe the structure; 2011. Second light-transmitting element; 2012. Support element; 2013. First connecting hole;

[0073] 202. Slit structure; 2021. Light-transmitting slit; 2022. Second connecting hole;

[0074] 203. First rotating structure; 2031. First axis; 2032. Second axis;

[0075] 3. Blocking unit; 301. Observation slot;

[0076] 4. Second connecting unit; 401. First positioning structure;

[0077] 402. Second positioning structure; 4021. Third positioning groove;

[0078] 403. First fixing structure; 404. Second fixing structure; 405. Third positioning structure;

[0079] 5. First connecting unit;

[0080] 501, Second connecting structure; 5011, First connecting surface; 5012, Second connecting surface;

[0081] 502. Third connection structure;

[0082] 6. Second drive unit; 601. Second drive structure; 602. Fifth rotary structure; 603. Sixth rotary structure; 604. Seventh rotary structure;

[0083] 7. First drive unit; 8. Cooling unit. Detailed Implementation

[0084] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0085] The following is combined with Figures 1 to 6 The following describes embodiments of the present invention.

[0086] According to an embodiment of the present invention, in one aspect, an observation device is provided for connecting to a component to be connected. The component to be connected has a working cavity, which communicates with the observation device. The observation device includes:

[0087] The housing 1 is connected to the component to be connected. The housing 1 includes a first hollow structure. One end of the housing 1 is provided with an opening that communicates with one end of the first hollow structure, so that the working cavity can communicate with the first hollow structure through the opening. The other end of the housing 1 is closed to block the other end of the first hollow structure from communicating with the outside. The other end of the housing 1 is provided with a first light-transmitting element 103 that corresponds to the required observation position inside the component to be connected. The first light-transmitting element 103 is used to observe the required observation position.

[0088] Observation unit 2, located within the first hollow structure, includes an observation structure 201 and a slit structure 202. The observation structure 201 is rotatably connected to the housing 1, with the axis of rotation of the observation structure 201 set as the rotation axis 101. Multiple second light-transmitting elements 2011 are provided on the observation structure 201, and these elements are detachably connected to the observation structure 201 and / or to the housing 1. The multiple second light-transmitting elements 2011 are arranged around the rotation axis 101 and are used to drive the observation structure 201 by external force, so that one of the second light-transmitting elements 2011 corresponds to the desired observation position. The slit structure 202 is located between the observation structure 201 and the component to be connected, and is rotatably connected within the first hollow structure. At least one light-transmitting slit 2021 is provided on the side of the slit structure 202, used to observe the desired observation position through the second light-transmitting element 2011 and the light-transmitting slit 2021 when the slit structure 202 is rotated by external force.

[0089] The blocking unit 3 is located between the slit structure 202 and the component to be connected. The blocking unit 3 is provided with an observation groove 301 corresponding to the desired observation position, so that when one second light-transmitting component 2011 passes through the observation groove 301 and corresponds to the desired observation position, it blocks the communication between the other second light-transmitting components 2011 and the component to be connected.

[0090] In the observation device of this embodiment, a housing 1, an observation unit 2, and a blocking unit 3 are provided. The housing 1 is connected to the component to be connected. The housing 1 is provided with a first light-transmitting element 103, which corresponds to the desired observation position of the component to be connected, so that the user can observe the situation at the desired position through the first light-transmitting element 103. The observation unit 2 includes an observation structure 201 and a slit structure 202, both of which are rotatably connected within the first hollow structure of the housing 1. The observation structure 201 is provided with a plurality of second light-transmitting elements 2011, and the slit structure 202 is provided with a light-transmitting slit 2021. The blocking unit 3 is located between the observation structure 201 and the component to be connected, and the blocking unit 3 is provided with an observation groove 301. By rotating the observation structure 201, a second light-transmitting element 2011 passes through the observation groove 301 and the light-transmitting slit 2021, and then corresponds to the desired observation position. When the slit structure 202 rotates, the persistence of vision allows the user to view the desired observation location through the light-transmitting slit 2021. The blocking unit 3 prevents the remaining second light-transmitting elements 2011 from connecting to the component. When one second light-transmitting element 2011 is contaminated, the others remain uncontaminated. In this case, by rotating the observation structure 201 with external force, another second light-transmitting element 2011 aligns with the observation slot 301. When multiple second light-transmitting elements 2011 are contaminated, the observation structure 201 is replaced.

[0091] Based on this, the service life of the observation structure 201 can be extended, so that the observation structure 201 or the second light-transmitting element 2011 can be replaced while the component to be connected is being routinely maintained. This eliminates the need for multiple shutdowns of the component to be connected to replace the observation structure 201 or the second light-transmitting element 2011 during the period between the start-up of the component and routine maintenance, as is done in related technologies. The observation device of this embodiment can increase the working time of the component to be connected, thereby achieving the technical effects of improving the working efficiency of the component to be connected and saving the cost of using the component to be connected.

[0092] In this embodiment, only the observation structure 201 and the housing 1 are detachably connected. Alternatively, only the plurality of second light-transmitting elements 2011 and the observation structure 201 may be detachably connected. Alternatively, the plurality of second light-transmitting elements 2011 and the observation structure 201, as well as the observation structure 201 and the housing 1, may be detachably connected.

[0093] In addition, in this embodiment, the observation device is located on the vacuum coating equipment, that is, the part to be connected is the vacuum coating equipment, and the required observation position is the coating position of the vacuum coating equipment, so as to check the operating status of the substrate, the coating quality, the heating status of the evaporation boat, and the operating status of the receiving and discharging shafts inside the vacuum coating equipment. At this time, the source of contamination of the second light-transmitting element 2011 is the vaporized film particles, and the light-transmitting slit 2021 allows only a small number of vaporized film particles to pass through, which can further extend the service life of the second light-transmitting element 2011.

[0094] Of course, in other embodiments, the specific types of the connectors to be connected and the required observation positions may be adjusted according to the usage scenario of the observation device.

[0095] Furthermore, in this embodiment, the observation structure 201, slit structure 202, and blocking unit 3 are heat-resistant cylindrical thin-plate structures, for example, all made of ultra-high temperature ceramic material. Based on this, using heat-resistant materials can improve the heat resistance of the observation structure 201, slit structure 202, and blocking unit 3, thereby improving their reliability. Simultaneously, by limiting the observation structure 201, slit structure 202, and blocking unit 3 to thin plates, the space requirements for installation can be reduced, thereby reducing the size of the observation device and saving installation space. The specific thickness of the thin plate is not limited and can be adjusted according to actual needs.

[0096] Of course, in other embodiments, the functions, shapes and materials of the observation structure 201, the slit structure 202 and the blocking unit 3 may be adjusted depending on the design of the observation device.

[0097] In addition, combined Figure 1 As shown, in this embodiment, the other end of the first hollow structure is connected to the outside, and the shell 1 includes:

[0098] The first connecting structure 102 is connected to the side of the shell 1 away from the opening. The first connecting structure 102 is used to seal the other end of the first hollow structure from the outside world, so as to form a closed other end of the shell 1.

[0099] In this embodiment, the first connecting structure 102 is a plate-like structure.

[0100] Preferably, combined with Figure 1 As shown, in this embodiment, the first connecting structure 102 is detachably connected to the housing 1. Based on this, by disassembling the first connecting structure 102, the observation structure 201 can be replaced, thereby achieving the technical effect of improving the ease of replacement of the observation structure 201.

[0101] Specifically, along Figure 1 In the Y-axis direction shown, the left side of the first connecting structure 102 is hinged to the housing 1 via a hinge, and the right side of the first connecting structure 102 is detachably connected to the housing 1 via a second connecting unit 4. The number of second connecting units 4 is not limited; it can be one, two, or more.

[0102] Among them, combined Figure 1 As shown, in this embodiment, the second connection unit 4 includes:

[0103] A first positioning structure 401 is provided on the housing 1. The first positioning structure 401 has a first positioning groove along the direction parallel to the rotation axis 101 and a second positioning groove along the direction perpendicular to the rotation axis 101.

[0104] The second positioning structure 402 is disposed on the first connecting structure 102 and is correspondingly disposed to the first positioning structure 401. The second positioning structure 402 is provided with a third positioning groove 4021 along the direction parallel to the rotation axis 101.

[0105] The first fixing structure 403 is inserted into the second positioning groove and fixedly connected to the second positioning groove; wherein, the fixing connection method is not limited, it can be adhesive or welding;

[0106] The second fixing structure 404 is provided with a fixing hole for accommodating the first fixing structure 403, that is, the first fixing structure 403 passes through the fixing hole. The second fixing structure 404 rotates around the axis of the first fixing structure 403. The radial dimension of the second fixing structure 404 is slightly larger than the radial dimension of the third positioning groove 4021. For example, the radial dimension of the second fixing structure 404 is the radial dimension of the third positioning groove 4021 plus 1mm, so that the second fixing structure 404 can be engaged in the third positioning groove 4021, realizing the detachable connection between the first connecting structure 102 and the housing 1. The surface of the second fixing structure 404 is provided with threads.

[0107] The third positioning structure 405 has a threaded hole and is threadedly connected to the second fixing structure 404. The radial dimension of the third positioning structure 405 is greater than the radial dimension of the third positioning groove 4021, that is, greater than the radial dimension of the second fixing structure 404. This allows the third positioning structure 405 to fit tightly against the second positioning structure 402 when placed in the third positioning groove 4021, thereby improving the stability of the second fixing structure 404 when it is fastened into the third positioning groove 4021. This, in turn, improves the tightness of the connection between the second connecting unit 4 and the housing 1.

[0108] Among them, the first positioning structure 401 and the second positioning structure 402 are block structures, the first fixing structure 403 and the second fixing structure 404 are rod structures, and the third positioning structure 405 is a nut.

[0109] Of course, in other embodiments, the specific types of the first positioning structure 401, the second positioning structure 402, the first fixing structure 403, the second fixing structure 404, and the third positioning structure 405 may be adjusted according to the design of the observation device.

[0110] In other embodiments, depending on the design of the observation device, the detachable connection method between the first connecting structure 102 and the housing 1 is adjusted. For example, threaded holes are provided on the surfaces of the first connecting structure 102 and the housing 1 that contact each other. Bolts are used to thread the first connecting structure 102 and the housing 1 together, achieving a detachable connection. Alternatively, the connection method between the first connecting structure 102 and the housing 1 can be adjusted, such as a fixed connection or an integrated design. Fixed connections and integrated designs are mature technologies and will not be elaborated further here. In this case, the connection between the housing 1 and the component to be connected is disassembled to replace the observation unit 2. Compared to other embodiments, in this embodiment, the observation structure 201 is exposed by disassembling the first connecting structure 102 and the housing 1 without disassembling other structures. Therefore, the technical effect of improving the ease of maintenance of the observation device can be achieved.

[0111] In other embodiments, the shape of the first connecting structure 102 is adjusted depending on the design of the observation device.

[0112] In addition, combined Figure 1 As shown, in this embodiment, the opening is located at an eccentric position of the housing 1, that is, a position away from the rotation axis 101, and the radial dimension of the opening is smaller than the radius of the first hollow structure. The opening is located at a position corresponding to the desired observation position.

[0113] As an alternative implementation, the opening may be located at the center of the housing 1, that is, at the position of the rotation axis 101 of the housing 1, and the radial dimension of the opening may be equal to the radial dimension of the first hollow structure.

[0114] Of course, in other embodiments, the radial dimension and position of the opening may be adjusted depending on the design of the observation device.

[0115] In addition, combined Figure 1 As shown, in this embodiment, the observation device includes:

[0116] The auxiliary unit is light-transmitting and is located in the mounting groove of the first connecting structure 102 and connected to the inner wall of the mounting groove. The auxiliary unit serves as the first light-transmitting element 103.

[0117] Preferably, combined with Figure 1 As shown, in this embodiment, the auxiliary unit includes:

[0118] The fixing structure 1031 is disposed in the mounting groove and is detachably connected to the housing 1. The fixing structure 1031 protrudes from the surface of the housing 1 and is provided with a fixing groove. Alternatively, the fixing structure 1031 itself may protrude from the surface of the housing 1, or the fixing structure 1031 may protrude from the surface of the housing 1 through a protrusion.

[0119] The visible structure 1032 is light-transmitting and is used as the first light-transmitting element 103. It is disposed in the fixing groove and is connected to the inner wall of the fixing groove.

[0120] By providing the fixing structure 1031, the fixing structure 1031 can protrude from the housing 1, thereby increasing the visibility of the visible structure 1032 and improving the ease of use of the observation device. At the same time, by limiting the fixing structure 1031 to be detachably connected to the housing 1, the ease of maintenance and replacement of the fixing structure 1031 can be improved.

[0121] The fixing structure 1031 is a frame structure. The fixing structure 1031 and the housing 1 are detachably connected by threads. That is, both the fixing structure 1031 and the housing 1 are provided with threaded holes. The bolts are threadedly connected to the threaded holes on the fixing structure 1031 and the housing 1 to achieve the connection and fixation of the fixing structure 1031 and the housing 1.

[0122] Preferably, a second sealing structure is provided between the fixing structure 1031 and the housing 1. For example, the housing 1 has a sealing groove for installing the second sealing structure, which forms a seal between the fixing structure 1031 and the housing 1. Based on this, the second sealing structure between the fixing structure 1031 and the housing 1 can improve the tightness of the connection between them, ensuring the vacuum of the observation device and thus improving the reliability of the observation device. Alternatively, the fixing structure 1031 may also have a sealing groove for installing the second sealing structure; both are within the scope of this invention.

[0123] Furthermore, the dimensional relationship between the visible structure 1032, the observation slot 301, and the second light-transmitting element 2011, as well as their respective dimensions, are not limited. As long as the desired observation position can be viewed, they are all within the protection scope of this utility model.

[0124] Of course, in other embodiments, the auxiliary unit may not be provided, and the position in the housing 1 corresponding to the first light-transmitting element 103 may be made of a light-transmitting material. Alternatively, the entire housing 1 may be made of a light-transmitting material, for example, the same material as the second light-transmitting element 2011. The material of the housing 1 or the auxiliary unit may also be adjusted as needed.

[0125] In other embodiments, the type of fixing structure 1031 may be adjusted depending on the design of the observation device; for example, fixing structure 1031 may be a frame.

[0126] As an alternative implementation, the observation device may not include the fixing structure 1031, and the viewing structure 1032 may be directly fixed to the inner wall of the mounting groove. Alternatively, the detachable connection method between the fixing structure 1031 and the housing 1 may be adjusted, for example, by using a snap-fit ​​structure. Snap-fit ​​structures are a mature technology and will not be described in detail here.

[0127] In other embodiments, depending on the design of the observation device, the connection method between the fixing structure 1031 and the housing 1 can be adjusted. For example, the fixing structure 1031 and the housing 1 can be integrated or fixedly connected, all of which are within the protection scope of this utility model. Alternatively, no second sealing structure may be provided between the fixing structure 1031 and the housing 1.

[0128] In other embodiments, depending on the design of the observation device, either the fixing structure 1031 is limited to protruding from the surface of the housing 1, or the fixing structure 1031 and the housing 1 are provided with a second sealing structure, both of which are within the protection scope of this utility model.

[0129] Furthermore, in this embodiment, combined with Figure 1 As shown, the observation device includes:

[0130] The first connecting unit 5 is connected at one end to one end of the housing 1, and the other end of the first connecting unit 5 is used to connect the part to be connected so that the first light-transmitting part 103 corresponds to the desired observation position.

[0131] In this embodiment, the first connecting unit 5 is detachably connected to the component to be connected. This facilitates the disassembly of the first connecting unit 5, enabling maintenance and replacement of the observation device, thereby improving the ease of maintenance and replacement of the observation device.

[0132] Specifically, in combination Figure 2 and Figure 3 As shown, in this embodiment, the first connection unit 5 includes:

[0133] The second connecting structure 501 has a connecting channel. The second connecting structure 501 is connected to the housing 1 and is detachably connected to the component to be connected, so that the connecting channel communicates with the first hollow structure. The other end of the connecting channel is used to communicate with the desired observation position. Based on this, the observation device and the component to be connected can be assembled and disassembled according to actual needs, thereby improving the ease of use of the observation device.

[0134] The second connecting structure 501 can be fixedly connected to the housing 1 or detachably connected; no further restrictions are imposed here.

[0135] Combination Figure 3 As shown, preferably, the second connecting structure 501 is frustum-shaped. The second connecting structure 501 includes a first connecting surface 5011 and a second connecting surface 5012. The radial dimension of the first connecting surface 5011 is smaller than the radial dimension of the second connecting surface 5012. The first connecting surface 5011 is used to connect with the housing 1, and the second connecting surface 5012 is used to detachably connect with the component to be connected.

[0136] Based on this, without increasing the radial dimensions of the visible structure 1032, the observation slot 301, and the second light-transmitting element 2011, the user's field of vision is improved, thereby achieving the technical effect of improving the reliability of understanding the required observation position.

[0137] Furthermore, combined Figure 3 As shown, in this embodiment, the first connection unit 5 includes:

[0138] The third connecting structure 502 is disposed between the second connecting structure 501 and the part to be connected. The third connecting structure 502 is arranged along the circumference of the second connecting structure 501 and is connected to the second connecting structure 501. The third connecting structure 502 is used to detachably connect with the part to be connected, for example, by means of a threaded connection.

[0139] By setting the third connection structure 502, the circumferential connection area between the second connection structure 501 and the part to be connected can be increased, thereby achieving the technical effect of improving the connection reliability between the second connection structure 501 and the part to be connected.

[0140] The third connecting structure 502 can be a flange, which is readily available, so that the third connecting structure 502 does not need to be provided with additional holes, thereby achieving the technical effect of improving the simplicity of the observation device structure.

[0141] Specifically, the part to be connected is provided with a threaded hole, and a bolt is passed through the hole provided on the flange and threadedly connected to the threaded hole to realize the threaded connection between the second connection structure 501 and the part to be connected.

[0142] Of course, in other embodiments, depending on the design of the observation device, the holes on the flange may also be threaded holes, or the threaded connection between the third connecting structure 502 and the part to be connected may be achieved by screws. Alternatively, the specific type of the third connecting structure 502 may be adjusted, for example, the third connecting structure 502 may be an annular plate structure.

[0143] As an alternative implementation, the second connecting structure 501 can also be frustum-shaped. Alternatively, the specific shape of the second connecting structure 501 can be adjusted, as long as the radial dimensions of the first connecting surface 5011 and the second connecting surface 5012 are different. Alternatively, the radial dimension of the first connecting surface 5011 can be equal to the radial dimension of the second connecting surface 5012, all of which are within the protection scope of this utility model.

[0144] In other embodiments, depending on the design of the observation device, the detachable connection method between the second connecting surface 5012 and the component to be connected is adjusted, for example, by using a snap-fit ​​structure. This structure is a mature technology and will not be described in detail here.

[0145] As an alternative implementation, the structure of the first connecting unit 5 can be adjusted, for example, only the second connecting structure 501 or only the third connecting structure 502 can be provided. Alternatively, the observation device may not include the first connecting unit 5, and the housing 1 may be directly connected to the component to be connected.

[0146] In other embodiments, depending on the design of the observation device, the connection method between the first connecting unit 5 and the component to be connected may be adjusted. For example, the first connecting unit 5 and the component to be connected may be fixedly connected. All of these are within the protection scope of this utility model. Alternatively, the detachable connection method between the first connecting unit 5 and the component to be connected may be adjusted.

[0147] In addition, combined Figure 4 As shown, in this embodiment, the light-transmitting slit 2021 is a long, narrow slit, i.e., rectangular. This increases the length of the light-transmitting slit 2021, improving the user's observation range. In this embodiment, two light-transmitting slits 2021 are provided.

[0148] As an alternative implementation, the light-transmitting slit 2021 may be provided in one or more forms, all within the scope of protection defined by this utility model. Of course, in other embodiments, the shape of the light-transmitting slit 2021 may be adjusted according to the design of the observation device.

[0149] In addition, combined Figure 2As shown, in this embodiment, the second light-transmitting element 2011 is cylindrical, and the observation groove 301 is a cylindrical groove, so that the shape of the observation groove 301 corresponds to that of the second light-transmitting element 2011.

[0150] Of course, in other embodiments, the shapes of the second light-transmitting element 2011 and the observation slot 301 are adjusted according to the different designs of the observation device.

[0151] In addition, combined Figure 2 and Figure 6 As shown, in this embodiment, the observation structure 201 includes:

[0152] The support member 2012 has light-blocking properties. For example, the support member 2012 is made of non-oxide ceramic. The support member 2012 is rotatably connected to the housing 1. The support member 2012 has multiple through holes, which correspond to and are connected to the second light-transmitting member 2011.

[0153] In this embodiment, combined with Figure 2 and Figure 6 As shown, the through hole is circular. Of course, in other embodiments, the shape of the through hole may be adjusted depending on the design of the observation device.

[0154] Preferably, the second light-transmitting element 2011 is made of glass. This improves the light transmission effect of the second light-transmitting element 2011, thereby enhancing the accuracy of viewing the desired location. Alternatively, the second light-transmitting element 2011 can be a thin film.

[0155] Furthermore, the second light-transmitting element 2011 is made of borosilicate glass. This ensures that the second light-transmitting element 2011 is both heat-resistant and radiation-resistant, preventing the material of the second light-transmitting element 2011 from affecting its performance, thereby achieving the technical effect of extending the service life of the second light-transmitting element 2011.

[0156] Of course, in other embodiments, the specific structure of the observation structure 201 can be adjusted according to the design of the observation device. For example, the observation structure 201 may include an observation element that is light-transmitting and is rotatably connected to the housing 1. That is, the observation element itself is the second light-transmitting element 2011, and its material and type can be the same as those of the second light-transmitting element 2011.

[0157] Alternatively, the second light-transmitting element 2011 may be made of aluminosilicate glass or quartz glass.

[0158] In other embodiments, the type of the second light-transmitting element 2011 can be adjusted according to the design of the observation device. For example, the material of the second light-transmitting element 2011 can be any one, any two, or a combination of three of aluminosilicate glass, borosilicate glass, and quartz glass. Alternatively, any type that allows the observation position to be understood through the second light-transmitting element 2011 is within the scope of protection of this utility model. Alternatively, the material of the support element 2012 can be adjusted; opaque and high-temperature resistant materials are within the scope of protection of this utility model.

[0159] In addition, combined Figure 3 As shown, in this embodiment, the observation unit 2 includes:

[0160] The first rotating structure 203 is disposed within the first hollow structure and is rotatably connected to the housing 1. The first rotating structure 203 extends along the rotation axis 101 and is used to connect with the observation structure 201 and the slit structure 202, so that both the observation structure 201 and the slit structure 202 are rotatably connected to the housing 1, and both the observation structure 201 and the slit structure 202 are detachably connected to the first rotating structure 203.

[0161] Preferably, the first rotating structure 203 is a magnetohydrodynamic (MHD) sealing shaft, which includes a first shaft 2031, a bearing, and a second shaft 2032. The first shaft 2031 has an installation channel, and the second shaft 2032 is disposed within the installation channel and connected to the first shaft 2031 via the bearing, so that the rotation of the first shaft 2031 and the second shaft 2032 will not affect each other. The MHD sealing shaft is a mature technology and will not be described in detail here.

[0162] Specifically, the support member 2012 and the first shaft 2031 are connected by a key to achieve a detachable connection between the first rotating structure 203 and the support member 2012. Based on this, when all the second light-transmitting elements 2011 on the support member 2012 become contaminated and affect its use, the support member 2012 can be replaced without having to scrap the entire observation device, thereby achieving the technical effect of reducing the maintenance cost of the observation device.

[0163] At this time, the blocking unit 3 is mounted on the first shaft 2031 via a bearing. Specifically, the blocking unit 3 has a mounting hole for connecting the bearing, which is then fitted onto the first shaft 2031 so that the rotation of the first shaft 2031 does not affect the position of the blocking unit 3. Simultaneously, the bearing is keyed to the first shaft 2031 to facilitate maintenance and replacement of the blocking unit 3.

[0164] Of course, in other embodiments, the type of the first rotating structure 203 can be adjusted according to the design of the observation device. For example, the first rotating structure 203 may be a rotating shaft, in which case the blocking unit 3 is fixedly connected to the housing 1. Compared with other embodiments, this embodiment can achieve both the rotation of the support member 2012 and the fixation of the position of the blocking unit 3 through the magnetic fluid sealing shaft, thereby achieving the technical effect of improving the ease of manufacturing the observation device.

[0165] Alternatively, the bearing connected to the blocking unit 3 may be fixedly connected to the first shaft 2031, all of which are within the protection scope of this utility model.

[0166] Of course, in other embodiments, depending on the design of the observation device, the detachable connection between the first shaft 2031 and the support member 2012 and between the bearing and the first shaft 2031 can be adjusted. For example, they can all be detachably connected by a snap-fit ​​structure. The snap-fit ​​structure is a mature technology and will not be described in detail here.

[0167] As an alternative implementation, the first rotation axis may be connected only to the observation structure 201 or only to the slit structure 202, both of which are within the protection scope of this utility model.

[0168] In other embodiments, depending on the design of the observation device, the support member 2012 can be fixedly connected to the first shaft 2031, and the second light-transmitting member 2011 can be detachably connected to the support member 2012. For example, two nails can be provided on both sides of the second light-transmitting member 2011 and connected to the support member 2012 to define the position of the second light-transmitting member 2011. When all the second light-transmitting members 2011 on the support member 2012 are contaminated and affect their use, the multiple second light-transmitting members 2011 can be replaced. Compared with other embodiments, in this embodiment, the replacement of multiple second light-transmitting members 2011 can be achieved by replacing the support member 2012, which can save the time required for replacing the second light-transmitting members 2011, thereby achieving the technical effect of improving the ease of replacement of multiple second light-transmitting members 2011.

[0169] Furthermore, in conjunction with Figure 1, preferably, the observation device includes:

[0170] The second drive unit 6 is connected to the housing 1 and the second drive unit 6 is connected to the first rotating structure 203, and is used as an external force to drive the rotation of the observation structure 201 through the first rotating structure 203.

[0171] By setting the second driving unit 6, the first rotating structure 203 can be used as an external force to drive the rotation of the observation structure 201, thereby achieving the technical effect of improving the ease of rotation of the observation structure 201.

[0172] Among them, combined Figure 3 As shown, in this embodiment, the second driving unit 6 includes:

[0173] The second drive structure 601 is connected to the housing 1 and is located on one side of the rotation axis 101, so that the second drive structure 601 is eccentrically positioned. Based on this, the position at the rotation axis 101 of the housing 1 can be avoided, so as to maximize the radial dimension of the auxiliary unit, thereby achieving the technical effect of improving the ease of observation for the user;

[0174] The fifth rotating structure 602 is disposed inside the first hollow structure and connected to the second driving structure 601, and is used to rotate with the second driving structure 601.

[0175] The sixth rotating structure 603 is disposed on the fifth rotating structure 602, and the sixth rotating structure 603 is used to rotate with the fifth rotating structure 602.

[0176] The seventh rotating structure 604 is connected to the sixth rotating structure 603 in a transmission manner, and the seventh rotating structure 604 is used to rotate with the sixth rotating structure 603.

[0177] The eighth rotating structure is connected to the seventh rotating structure 604 and to the observation structure 201. It is used to drive the rotation of the observation structure 201 so that one of the plurality of second light-transmitting elements 2011 corresponds to the desired observation position.

[0178] The second drive structure 601 is a handwheel, located outside the housing 1. The fifth rotating structure 602 is a rotating shaft, the eighth rotating structure is the first shaft 2031, the seventh rotating structure 604 is located on the first shaft 2031, and the sixth rotating structure 603 and the seventh rotating structure 604 are gears. The sixth rotating structure 603 and the seventh rotating structure 604 mesh with each other so that the rotation of the second drive structure 601 drives the rotation of the fifth rotating structure 602, the sixth rotating structure 603, the seventh rotating structure 604 and the eighth rotating structure, which in turn drives the rotation of the observation structure 201. This makes it convenient for other clean second light-transmitting elements 2011 to be aligned with the required observation position when one of the second light-transmitting elements 2011 needs to be replaced, by rotating the observation structure 201.

[0179] Specifically, the second driving structure 601 can be cylindrical. Alternatively, the second driving structure 601 can be cylindrical and have slots corresponding to the second light-transmitting element 2011. During the replacement of the second light-transmitting element 2011, by rotating the second driving structure 601, one of the slots will have its opening facing... Figure 1When the second light-transmitting component 2011 is positioned directly above the image, it indicates that the replacement of the second light-transmitting component 2011 is complete, thereby enhancing the user's understanding of the ease of replacement of the second light-transmitting component 2011.

[0180] Preferably, combined with Figure 6 As shown, the surface of the observation structure 201 is provided with a plurality of first connection holes 2013, and the second drive unit 6 includes:

[0181] The first auxiliary connection structure is ring-shaped and is connected to the first rotating structure 203, i.e., it is sleeved on the first shaft 2031. The first auxiliary connection structure is provided with multiple threaded holes corresponding to the first connection hole 2013, and bolts are threadedly connected to the threaded holes through the first connection hole 2013.

[0182] By setting the first auxiliary connection structure, the connection point between the observation structure 201 and the first rotating structure 203 can be improved, thereby reducing the torque borne by the observation structure 201 and achieving the technical effect of improving the reliability of the observation structure 201.

[0183] As an alternative implementation, the second drive unit 6 may not include the first auxiliary connection structure. Alternatively, the surface of the observation structure 201 may have multiple threaded holes, and the first auxiliary connection structure may have first connection holes 2013 corresponding to the multiple threaded holes, with screws passing through the first connection holes 2013 and connecting to the threaded holes. Alternatively, the shape of the first auxiliary connection structure may be adjusted.

[0184] As an alternative implementation, the housing 1 may be provided with an indicator mark, and the second drive structure 601 may be provided with a positioning mark corresponding to the position of each second light-transmitting element 2011. During the replacement of the second light-transmitting element 2011, the second drive structure 601 may be driven to rotate so that one of the multiple positioning marks coincides with the indicator mark, which indicates that the replacement of the second light-transmitting element 2011 is complete.

[0185] Of course, in other embodiments, the shape of the second drive structure 601 may be adjusted depending on the design of the observation device. Alternatively, the type of the second drive structure 601 may be adjusted; for example, the second drive structure 601 may be a motor, in which case the second drive structure 601 may be located either inside or outside the housing 1.

[0186] As an alternative implementation, the position of the second driving structure 601 can be adjusted. For example, the second driving structure 601 can be located on the rotation axis 101. In this case, the second driving unit 6 can only have the second driving structure 601 and not the fifth to eighth rotating structures 602.

[0187] In other embodiments, the structure of the second drive unit 6 may be adjusted according to the design of the observation device. For example, the second drive structure 601 may be a combination of a handwheel and a belt drive. All of these are within the protection scope of this utility model.

[0188] Alternatively, the seventh rotating structure 604 may not be located on the first axis 2031, but rather an additional rotating shaft may be provided. Compared to other embodiments, this embodiment eliminates the need for an additional rotating shaft, saving space occupied by the observation device and reducing the manufacturing difficulty of the observation device, thereby achieving the technical effect of improving the ease of manufacturing the observation device.

[0189] In addition, combined Figure 1 As shown, preferably, the observation device includes:

[0190] The first driving unit 7 is connected to the housing 1 and is also connected to the first rotating structure 203, and is used as an external force to drive the rotation of the slit structure 202 through the first rotating structure 203.

[0191] By setting the first driving unit 7, the rotation of the slit structure 202 can be driven by the first rotating structure 203 as an external force, thereby achieving the technical effect of improving the ease of movement of the slit structure 202.

[0192] Among them, combined Figure 1 As shown, in this embodiment, the first driving unit 7 includes:

[0193] The first drive structure is connected to the housing 1 and is located on one side of the rotation axis 101, so that the first drive structure is eccentrically positioned. Based on this, the position at the rotation axis 101 of the housing 1 can be avoided, so that the auxiliary unit can be made as large as possible in its own radial dimension, thereby achieving the technical effect of improving the ease of observation for the user;

[0194] The second rotating structure is connected to the first driving structure and is used to rotate with the first driving structure.

[0195] The third rotating structure is disposed on the second rotating structure and is used to rotate with the second rotating structure.

[0196] The transmission structure is connected to the third rotating structure via a transmission connection.

[0197] The fourth rotating structure is disposed on the first rotating structure 203 and is connected to the transmission structure for transmission. The fourth rotating structure is used to drive the first rotating structure 203 to rotate through the transmission structure.

[0198] Specifically, in this embodiment, the first drive unit 7 is a motor, and the housing 1 has a slot. One end of the first drive unit 7 is located outside the housing 1, and the other end is located inside the first hollow structure and connected to the second shaft 2032 in the first rotating structure 203. Based on this, the technical effect of improving the ease of maintenance and inspection of the first drive unit 7 can be achieved.

[0199] Furthermore, the third and fourth rotating structures are pulleys, the transmission structure is a belt, and the second rotating structure is a third rotating shaft. The pulleys, belts, and rotating shafts are simple in structure and readily available, thus achieving the technical effect of improving the ease of manufacturing the observation device.

[0200] Preferably, the surface of the slit structure 202 is provided with a plurality of second connection holes 2022, and the first driving unit 7 includes:

[0201] The second auxiliary connection structure is ring-shaped and is connected to the second shaft 2032. The second auxiliary connection structure is provided with multiple threaded holes corresponding to the second connection hole 2022. Bolts are threaded through the second connection hole 2022 and threadedly connected to the threaded holes.

[0202] By setting a second auxiliary connection structure, the connection point between the slit structure 202 and the second shaft 2032 can be improved, thereby reducing the torque borne by the slit structure 202 and thus achieving the technical effect of improving the reliability of the slit structure 202.

[0203] As an alternative implementation, the first driving unit 7 may not include the second auxiliary connecting structure. Alternatively, the surface of the slit structure 202 may be provided with multiple threaded holes, and the second auxiliary connecting structure may be provided with second connecting holes 2022 corresponding to the multiple threaded holes, with screws passing through the second connecting holes 2022 and connecting to the threaded holes. Alternatively, the shape of the second auxiliary connecting structure may be adjusted.

[0204] Of course, in other embodiments, the position of the first drive unit 7 may be adjusted depending on the design of the observation device. For example, the first drive unit 7 may be located inside the first hollow structure and connected to the housing 1. Alternatively, the type of the first drive unit 7 may be adjusted. For example, the first drive unit 7 may be a combination of a motor and gear transmission to achieve the rotation of the slit structure 202.

[0205] Alternatively, the first drive unit 7 can be a handwheel, in which case the first drive unit 7 is located outside the housing 1.

[0206] In other embodiments, the position of the first driving structure may be adjusted depending on the design of the observation device. For example, the first driving structure may be located on the rotation axis 101. In this case, the first driving unit 7 may only have the first driving structure and may not have the second rotation structure, transmission structure, third rotation structure and fourth rotation structure.

[0207] As an alternative implementation, the second light-transmitting element 2011 may be made of glass, the housing 1 may include a first connecting structure 102, the observation device may include a first driving unit 7, a second driving unit 6, and a first connecting unit 5, or a combination of these structures, all within the scope of this utility model. Alternatively, the second light-transmitting element 2011 may be made of borosilicate glass and / or aluminosilicate glass and / or quartz glass, the first connecting unit 5 may be detachably connected to the component to be connected, the observation device may include an auxiliary unit, and the first connecting unit 5 may include a combination of a second connecting structure 501, all within the scope of this utility model.

[0208] Furthermore, in this embodiment, the first driving structure can drive the slit structure 202 to rotate at a speed ranging from 52 r / min to 1300 r / min, so that the user can observe the situation at the desired observation position through the light-transmitting slit 2021.

[0209] Of course, in other embodiments, the rotation speed of the slit structure 202 may be adjusted depending on the design of the observation device.

[0210] In addition, combined Figure 1 As shown, in this embodiment, the observation device includes:

[0211] A cooling unit 8 is disposed on the surface of the housing 1 and the second connecting structure 501. The cooling unit 8 has cooling channels, both the inlet and outlet of which are connected to a cooling medium source, ensuring a flowing cooling medium within the channels. The cooling unit 8 is used to circulate and cool the housing 1 and the second connecting structure 501. This extends the service life of the housing 1 and the second connecting structure 501, prevents the temperature of the vacuum coating equipment from affecting the normal operation of the observation device, and thus improves the reliability of the observation device.

[0212] Specifically, the cooling medium source is a barrel-shaped structure containing a cooling medium, such as water.

[0213] Of course, in other embodiments, the type of cooling medium source and the type of cooling medium may be adjusted according to the design of the observation device. For example, the cooling medium source may be a box-shaped structure, and the cooling medium may be a gas with a temperature lower than that of the observation device. All of these are within the protection scope of this utility model.

[0214] As an alternative implementation, the observation device may not include the cooling unit 8. Alternatively, the cooling unit 8 may be located on one or more of the structures of the observation unit 2, the housing 1, and the second connecting structure 501, all of which are within the protection scope of this utility model.

[0215] Furthermore, in this embodiment, a first sealing structure is provided between the first connecting structure 102 and the housing 1, between the first driving structure and the housing 1, and between the third connecting structure 502 and the component to be connected. Based on this, the vacuum within the observation device can be improved to ensure the normal use of the component to be connected.

[0216] Specifically, in this embodiment, both the first sealing structure and the second sealing structure are fluororubber sealing rings.

[0217] Of course, in other embodiments, the types of the first and second sealing structures may be adjusted depending on the design of the observation device. For example, both the first and second sealing structures may be ordinary sealing rings. Alternatively, the types of the first and second sealing structures may be different.

[0218] Alternatively, the first and second sealing structures may not be provided.

[0219] In other embodiments, depending on the design of the observation device, the first connecting structure 102 and the housing 1 are provided with a first sealing structure, the auxiliary unit includes a fixing structure 1031 and a viewing structure 1032, and the second connecting structure 501 is a frustum-shaped structure or a combination of multiple structures, all of which are within the protection scope of this utility model.

[0220] According to an embodiment of the present invention, another aspect provides a coating system, comprising:

[0221] The observation device of this embodiment;

[0222] The coating apparatus has a working chamber and is connected to an observation device so that the working chamber is connected to the first hollow structure of the observation device. The coating apparatus is used as a component to be connected.

[0223] The coating device is a vacuum coating equipment, and the first hollow structure is also a vacuum along with the coating device. By installing an observation device on the vacuum coating equipment, the equipment can be run continuously for at least one day. Then, during equipment maintenance, the observation structure 201 is replaced. This reduces the number of downtimes for the vacuum coating equipment, thereby achieving the technical effects of cost savings and improved coating efficiency.

[0224] Although embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. An observation device, characterized in that, For connecting to a component to be connected, the component to be connected has a working cavity, the working cavity being in communication with the observation device, the observation device comprising: A housing (1) is connected to the component to be connected. The housing (1) includes a first hollow structure. One end of the housing (1) is provided with an opening that communicates with one end of the first hollow structure, so that the working cavity communicates with the first hollow structure through the opening. The other end of the housing (1) is closed to block the other end of the first hollow structure from communicating with the outside. The other end of the housing (1) is provided with a first light-transmitting element (103) corresponding to the required observation position inside the component to be connected. The first light-transmitting element (103) is used to observe the required observation position. An observation unit (2) is disposed within the first hollow structure. The observation unit (2) includes an observation structure (201) and a slit structure (202). The observation structure (201) is rotatably connected to the housing (1). The axis of rotation of the observation structure (201) is set as the rotation axis (101). The observation structure (201) is provided with a plurality of second light-transmitting elements (2011). The plurality of second light-transmitting elements (2011) are detachably connected to the observation structure (201) and / or to the housing (1). The observation structure (201) is arranged around the rotation axis (101) and is used to drive the observation structure (201) by external force so that a second light-transmitting element (2011) corresponds to the desired observation position; the slit structure (202) is arranged between the observation structure (201) and the component to be connected, and is rotatably connected in the first hollow structure; the slit structure (202) has at least one light-transmitting slit (2021) on its side, so that when the slit structure (202) is driven to rotate by external force, the desired observation position can be observed through the second light-transmitting element (2011) and the light-transmitting slit (2021); A blocking unit (3) is provided between the slit structure (202) and the component to be connected. The blocking unit (3) is provided with an observation slot (301) corresponding to the desired observation position, so that when one of the second light-transmitting components (2011) passes through the observation slot (301) and corresponds to the desired observation position, it blocks the communication between the other second light-transmitting components (2011) and the component to be connected.

2. The observation device according to claim 1, characterized in that, The observation unit (2) includes: A first rotating structure (203) is disposed within the first hollow structure and is rotatably connected to the housing (1). The first rotating structure (203) extends along the rotation axis (101) and is used to connect with the observation structure (201) and / or the slit structure (202) so that the observation structure (201) and / or the slit structure (202) are rotatably connected to the housing (1). The observation structure (201) and / or the slit structure (202) are detachably connected to the first rotating structure (203).

3. The observation device according to claim 2, characterized in that, The observation structure (201) includes: The observation element is transparent and is rotatably connected to the first rotating structure (203); Alternatively, the observation structure (201) includes: The support member (2012) has light-blocking properties. The support member (2012) is rotatably connected to the first rotating structure (203). The support member (2012) is provided with a plurality of through holes, which correspond to and are connected to the second light-transmitting member (2011).

4. The observation device according to claim 2 or 3, characterized in that, The second light-transmitting element (2011) is made of glass. And / or, the other end of the first hollow structure is in communication with the outside, and the shell (1) includes: A first connecting structure (102) is connected to the side of the shell (1) away from the opening. The first connecting structure (102) is used to seal the other end of the first hollow structure from the outside, so as to form the other end of the shell (1) closed. And / or, the observation device includes: The first driving unit (7) is connected to the housing (1) and the first driving unit (7) is connected to the first rotating structure (203) for driving the rotation of the slit structure (202) as an external force through the first rotating structure (203); And / or, a second drive unit (6) is connected to the housing (1) and the second drive unit (6) is connected to the first rotating structure (203) for driving the rotation of the observation structure (201) as an external force through the first rotating structure (203); And / or, one end of the first connecting unit (5) is connected to one end of the housing (1), and the other end of the first connecting unit (5) is used to connect the component to be connected so that the first light-transmitting component (103) corresponds to the desired observation position.

5. The observation device according to claim 4, characterized in that, The second light-transmitting element (2011) is made of borosilicate glass and / or aluminosilicate glass and / or quartz glass. And / or, the first connecting unit (5) is detachably connected to the component to be connected; And / or, the observation device includes: An auxiliary unit is light-transmitting. The auxiliary unit is disposed in the mounting groove of the first connecting structure (102) and connected to the inner wall of the mounting groove. The auxiliary unit is used as the first light-transmitting element (103). And / or, the first connection unit (5) includes: The second connecting structure (501) is provided with a connecting channel. The second connecting structure (501) is connected to the housing (1). The second connecting structure (501) is detachably connected to the part to be connected so that the connecting channel communicates with the first hollow structure. The other end of the connecting channel is used to communicate with the desired observation position.

6. The observation device according to claim 5, characterized in that, A first sealing structure is provided between the first connecting structure (102) and the housing (1), and the first sealing structure is used to seal the connection between the first connecting structure (102) and the housing (1); And / or, the auxiliary unit includes: A fixing structure (1031) is provided in the mounting groove and is detachably connected to the housing (1). The fixing structure (1031) is provided with a fixing groove. A visible structure (1032) is light-transmitting and is disposed in the fixing groove, wherein the visible structure (1032) is connected to the inner wall of the fixing groove; And / or, the second connection structure (501) is frustum-shaped, the second connection structure (501) includes a first connection surface (5011) and a second connection surface (5012), the radial dimension of the first connection surface (5011) is smaller than the radial dimension of the second connection surface (5012), the first connection surface (5011) is used to connect with the housing (1), and the second connection surface (5012) is used to detachably connect with the component to be connected.

7. The observation device according to claim 6, characterized in that, The fixing structure (1031) protrudes from the surface of the housing (1); And / or, a second sealing structure is provided between the fixing structure (1031) and the housing (1), the second sealing structure being used to form a seal between the fixing structure (1031) and the housing (1).

8. The observation device according to claim 7, characterized in that, The first connection unit (5) includes: A third connecting structure (502) is disposed between the second connecting structure (501) and the component to be connected. The third connecting structure (502) is arranged along the circumference of the second connecting structure (501) and connected to the second connecting structure (501). The third connecting structure (502) is used for detachable connection with the component to be connected.

9. The observation device according to any one of claims 1-3 and 5-8, characterized in that, The observation device includes: A cooling unit (8) is provided on the surface of the housing (1). The cooling unit (8) is provided with a cooling channel. The inlet and outlet of the cooling channel are connected to a cooling medium source so that a flowing cooling medium is provided in the cooling channel. The cooling unit (8) is used to cool and reduce the temperature of the housing (1).

10. A coating system, characterized in that, include: The observation device according to any one of claims 1-9; A coating apparatus is provided with a working chamber. The coating apparatus is connected to the observation device so that the working chamber communicates with the first hollow structure of the observation device. The coating apparatus is used as a component to be connected.

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