Controllable distance vacuum coating equipment

Abstract

The utility model provides a controllable interval vacuum coating equipment, including vacuum coating machine body, support bottom pole, substrate and coating reactor, be equipped with vacuum sealed chamber in the vacuum coating machine body, the coating reactor fixedly be equipped on the vacuum sealed chamber upper wall. This scheme passes through the dynamic adjustment interval between coating reactor and substrate, effectively avoided the problem that the coating is not uniform caused by fixed interval, in the coating process, can real -time adjustment interval according to the actual situation of the surface of the substrate, ensure that the uniform diffusion of reaction gas on the substrate surface, improve the coating uniformity, this scheme supports the dynamic adjustment of a variety of coating materials and process condition, can satisfy the coating demand of different photovoltaic and semiconductor product, through the change interval and process parameter, can easily realize the coating operation of different film layer thickness, component and structure, improve the process flexibility and adaptability.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating equipment technology, specifically to a controllable spacing vacuum coating equipment. Background Technology

[0002] Vacuum coating equipment (such as physical vapor deposition (PVD) and chemical vapor deposition (CVD)) has important applications in the photovoltaic and semiconductor industries. Typically, vacuum coating equipment consists of a vacuum chamber, a heating system, a coating source reactor, a motion system, a gas and plasma system, and a control system. Generally, the desired film structure is obtained by depositing the coating onto a substrate at a fixed interval through a reaction at the coating source.

[0003] Traditional fixed-spacing designs result in uneven diffusion of reactant gases. Specifically, due to gas velocity attenuation and boundary layer effects at the edges, reactant concentration gradients are significant, leading to differences in deposition rates. Uneven spatial airflow distribution causes fluctuations in film composition / thickness, making it difficult to achieve nanometer-level precision control.

[0004] Secondly, the fixed spacing architecture brings two constraints. The limited process window requires frequent adjustments to parameters such as power and gas flow rate to adapt to different material systems (such as ITO coating), which significantly increases development costs. At the same time, the spacing change directly affects the substrate temperature distribution, which can easily induce interfacial stress mismatch in the preparation of heterojunction films (such as amorphous / microcrystalline silicon stacks), leading to the risk of film peeling. Utility Model Content

[0005] (a) Technical problems to be solved

[0006] To address the shortcomings of existing technologies, this invention provides a controllable spacing vacuum coating device, which solves the problems mentioned in the background section.

[0007] (II) Technical Solution

[0008] To achieve the above objectives, this utility model provides the following technical solution: a controllable spacing vacuum coating equipment, comprising a vacuum coating machine body, supporting base rods, a substrate, and a coating reactor. The vacuum coating machine body is provided with a vacuum-sealed chamber. The coating reactor is fixedly mounted on the upper wall of the vacuum-sealed chamber. The substrate is located in the lower part of the vacuum-sealed chamber and can move up and down. Four supporting base rods are fixedly mounted at the four corners of the bottom of the vacuum coating machine body, and the supporting base rods are symmetrically arranged. Two sets of lifting and lowering mechanisms are fixedly mounted below the vacuum coating machine body, and the two sets of lifting and lowering mechanisms are symmetrically arranged. Each lifting and lowering mechanism includes two symmetrically arranged lifting and fixing frames. A lifting support frame that can be lifted and moved is provided between the two lifting and fixing frames. A vertically erected lifting transmission rod is fixedly mounted at the center of the top of the lifting support frame. The top of the lifting transmission rod extends upward into the vacuum-sealed chamber. A horizontal lifting lifting plate is fixedly mounted at the top of the two lifting transmission rods. The lifting lifting plate is fixedly connected to the substrate and provides a movable support effect.

[0009] Preferably, the lifting mechanism further includes lifting slide rails on both sides of the lifting fixing frame that are close to each other, and the two ends of the lifting support frame are slidably connected to the lifting slide rails on both sides.

[0010] Preferably, the lifting mechanism further includes a power transmission fixing frame fixedly disposed below the vacuum coating machine body, and a support base is fixedly disposed at the bottom of the power transmission fixing frame to provide support and fixation.

[0011] Preferably, two motors are fixedly mounted on both sides of the top of the power transmission mounting bracket, and two steering gearboxes are fixedly mounted on the top of the power transmission mounting bracket and on both sides of the motors, so that the steering gearboxes on both sides are symmetrically mounted on both sides of the motors.

[0012] Preferably, the motor is powered by two motor shafts at both ends, and the two motor shafts mesh with the gears of the steering gearbox.

[0013] Preferably, a ball screw is rotatably connected to the top of the steering gearbox, and the ball screws on both sides are respectively connected to the lifting support frame screw.

[0014] Preferably, a metal-sealed corrugated pipe is directly installed on the bottom of the lifting support frame and the vacuum coating machine body, and the metal-sealed corrugated pipe is sleeved on the outer end of the lifting transmission rod.

[0015] Preferably, two symmetrically positioned motion ranging sensors are installed at the bottom of the vacuum-sealed chamber, with the two motion ranging sensors located below the substrate.

[0016] Preferably, two transmission fluid rods are fixedly provided on both sides of the inner wall of the vacuum sealed chamber, and the transmission fluid rods on both sides are symmetrically arranged. One end of each transmission fluid rod is fixedly connected to a transmission fluid magnet.

[0017] Preferably, a photoelectric detector is installed on one side wall of the vacuum sealed chamber, and two electric heaters are fixedly installed at the bottom of the vacuum sealed chamber.

[0018] (III) Beneficial Effects

[0019] This invention provides a controllable spacing vacuum coating device. It has the following beneficial effects:

[0020] 1. This solution effectively avoids the problem of uneven coating caused by a fixed spacing by dynamically adjusting the distance between the coating reactor and the substrate. During the coating process, the distance can be adjusted in real time according to the actual situation of the substrate surface to ensure uniform diffusion of the reaction gas on the substrate surface and improve the coating uniformity.

[0021] 2. This solution supports dynamic adjustment of various coating materials and process conditions, which can meet the coating requirements of different photovoltaic and semiconductor products. By changing the spacing and process parameters, coating operations with different film thicknesses, compositions and structures can be easily achieved, improving process flexibility and adaptability. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the external structure of this utility model;

[0023] Figure 2 This is a schematic diagram of the main structure of this utility model;

[0024] Figure 3 This is a front view structural diagram of the present utility model;

[0025] Figure 4 This is a side view of the structure of this utility model;

[0026] Figure 5 This utility model Figure 3 A cross-sectional view along the AA direction;

[0027] Figure 6 This utility model Figure 4 Cross-sectional view along the BB direction.

[0028] In the diagram: 101, Vacuum coating machine body; 102, Induction photoelectric detector; 103, Transmission magnet; 104, Lifting slide rail; 105, Support base rod; 106, Lifting support frame; 107, Motor; 108, Steering gearbox; 109, Power transmission fixing frame; 110, Support base; 112, Metal sealed bellows; 113, Lifting fixing frame; 114, Motion ranging sensor; 115, Ball screw; 116, Motor shaft; 117, Vacuum sealed chamber; 118, Substrate; 119, Lifting lifting plate; 120, Lifting transmission rod; 121, Transmission fluid rod; 122, Coating reactor; 123, Electric heater; 1001, Lifting and lifting mechanism. Detailed Implementation

[0029] This utility model provides a controllable spacing vacuum coating device, such as... Figure 1-6 As shown, the system includes a vacuum coating machine body 101, support rods 105, a substrate 118, and a coating reactor 122. The vacuum coating machine body 101 contains a vacuum-sealed chamber 117. The coating reactor 122 is fixedly mounted on the upper wall of the vacuum-sealed chamber 117. The substrate 118 is located below the vacuum-sealed chamber 117 and can move vertically. Four support rods 105 are fixedly mounted at the four corners of the bottom of the vacuum coating machine body 101, and the support rods 105 are symmetrically positioned. Two sets of lifting and lowering mechanisms 1001 are fixedly mounted below the vacuum coating machine body 101. The mechanism 1001 is symmetrically positioned. The lifting and raising mechanism 1001 includes two symmetrically arranged lifting fixing frames 113. A lifting support frame 106 that can be raised and lowered is provided between the two lifting fixing frames 113. A vertically erected lifting transmission rod 120 is fixed at the center of the top of the lifting support frame 106. The top of the lifting transmission rod 120 extends upward into the vacuum sealed chamber 117. A horizontal lifting lifting plate 119 is fixed at the top of the lifting transmission rod 120 on both sides. The lifting lifting plate 119 is fixedly connected to the substrate 118. The lifting lifting plate 119 serves as a movable support.

[0030] Furthermore, the lifting mechanism 1001 also includes lifting slide rails 104 on both sides of the lifting fixing frame 113, which are close to each other on one side, and the two ends of the lifting support frame 106 are slidably connected to the lifting slide rails 104 on both sides.

[0031] Furthermore, the lifting mechanism 1001 also includes a power transmission fixing frame 109 fixedly disposed below the vacuum coating machine body 101, and a support base 110 is fixedly disposed at the bottom of the power transmission fixing frame 109 to provide support and fixation.

[0032] Furthermore, two motors 107 are fixedly mounted on both sides of the top of the power transmission mounting bracket 109, and two steering gearboxes 108 are fixedly mounted on the top of the power transmission mounting bracket 109 and on both sides of the motors 107, so that the steering gearboxes 108 are symmetrically mounted on both sides of the motors 107.

[0033] Furthermore, the motor 107 is powered by two motor shafts 116 at both ends, and the two motor shafts 116 mesh with the steering gearbox 108.

[0034] Furthermore, a ball screw 115 is rotatably connected to the top of the steering gearbox 108, and the ball screws 115 on both sides are respectively connected to the screw of the lifting support frame 106.

[0035] It should be further explained that the steering gearbox 108 includes a gear groove and two sets of meshing reversing bevel gears. One reversing bevel gear is installed and connected to the bottom of the ball screw 115, and the other reversing bevel gear is installed and connected to the head end of the motor shaft 116.

[0036] It is worth further explaining that when the motor 107 starts, it can drive the motor shafts 116 on both sides to rotate and transmit power to the steering gearbox 108. Then, after the rotation changes direction, it drives the ball screw 115 to rotate. Then, through the ball screws 115 on both sides, it connects with the screw of the lifting support frame 106, thereby driving the lifting support frame 106 to move up and down.

[0037] Furthermore, a metal-sealed bellows 112 is directly installed on the bottom of the lifting support frame 106 and the vacuum coating machine body 101, and the metal-sealed bellows 112 is sleeved on the outer end of the lifting transmission rod 120.

[0038] It should be further explained that the metal-sealed bellows 112 serves to isolate and seal the pipe.

[0039] Furthermore, two symmetrically positioned moving distance sensors 114 are installed at the bottom of the vacuum sealed chamber 117, with the moving distance sensors 114 on both sides located below the substrate 118.

[0040] It is worth further explaining that the moving distance sensor 114 is used to monitor the distance between itself and the substrate 118.

[0041] Furthermore, two transmission fluid rods 121 are fixedly provided on both sides of the inner wall of the vacuum sealed chamber 117. The transmission fluid rods 121 on both sides are symmetrically arranged, and a transmission fluid magnet 103 is fixedly connected to one end of each transmission fluid rod 121.

[0042] It should be further explained that the transmission flow magnet 103 is a key technology for solving the dynamic sealing of rotating parts in vacuum equipment, replacing traditional mechanical seals or rubber seals, and avoiding the risk of vacuum leakage.

[0043] Furthermore, a photoelectric detector 102 is installed on one side wall of the vacuum sealed chamber 117, and two electric heaters 123 are fixedly installed at the bottom of the vacuum sealed chamber 117.

[0044] It should be further explained that the photoelectric detector 102 detects whether the carrier plate is in place, and the vacuum coating machine body 101 is equipped with a vacuum system and a PLC control system, which are used to evacuate the vacuum sealed chamber 117 to a predetermined vacuum level.

[0045] When using this solution, ensure that the vacuum coating machine 101 is in a clean and dust-free working environment. Check whether key components such as the vacuum sealed chamber 117, coating reactor 122, and lifting mechanism 1001 are intact. Then, turn on the power supply of the equipment, start the vacuum system in the vacuum coating machine 101, and evacuate the vacuum chamber to the predetermined vacuum level to ensure the purity of the vacuum sealed chamber 117. According to the coating process requirements, set the heating temperature of the electric heater 123 and the initial parameters of the gas and plasma systems, including temperature, gas flow rate, and gas pressure.

[0046] The substrate 118 to be coated is then placed on the lifting support plate 119 to ensure that the substrate 118 is flat and free of impurities. At the same time, the photoelectric detector 102 confirms that the substrate 118 has accurately reached the designated effective coating area.

[0047] When the spacing needs to be adjusted, the motor 107 is started, which drives the motor shafts 116 on both sides to rotate and transmit power to the steering gearbox 108. After the rotation changes direction, the ball screw 115 is driven to rotate. Then, the ball screws 115 on both sides are connected to the screws of the lifting support frame 106, which drives the lifting support frame 106 to move up and down.

[0048] During this process, the distance between the substrate 118 and the coating reactor 122 is monitored in real time using a moving distance sensor 114, and automatically adjusted to the distance required for the process production by a PLC control system.

[0049] When performing the coating process, the coating reactor 122 is turned on, and the coating operation is carried out according to the preset process parameters.

[0050] During the coating process, the vacuum level inside the vacuum chamber is kept stable, and the heating temperature of the electric heater 123 and the operating status of the gas and plasma systems are monitored to ensure the smooth progress of the coating process.

[0051] After the coating process is completed, the coating reactor 122 is shut down, and the lifting mechanism 1001 is operated to lower the substrate lifting mechanism to the initial position, so that the substrate 118 returns to the transmission magnetofluid.

[0052] After stabilizing the substrate 118, the substrate is transferred to the next process flow or unloading area via the transmission magnetofluid 103.

[0053] After the coating operation is completed, the equipment should be cleaned and maintained to ensure that it is in good condition. The performance and wear of key components such as the vacuum system, heating system, and coating source reactor should be checked regularly, and damaged or aging parts should be replaced in a timely manner.

[0054] This solution effectively avoids the problem of uneven coating caused by a fixed spacing by dynamically adjusting the distance between the coating reactor 122 and the substrate 118. During the coating process, the distance can be adjusted in real time according to the actual situation of the substrate 118 surface to ensure uniform diffusion of the reaction gas on the substrate 118 surface and improve the coating uniformity.

[0055] Meanwhile, the solution supports dynamic adjustment of various coating materials and process conditions, which can meet the coating requirements of different photovoltaic and semiconductor products. By changing the spacing and process parameters, it can easily achieve coating operations with different film thicknesses, compositions and structures, thereby improving process flexibility and adaptability.

[0056] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A controllable spacing vacuum coating apparatus, comprising a vacuum coating machine body (101), a support base rod (105), a substrate (118), and a coating reactor (122), characterized in that: The vacuum coating machine body (101) is provided with a vacuum-sealed chamber (117). The coating reactor (122) is fixedly installed on the upper wall of the vacuum-sealed chamber (117). The substrate (118) is located below the vacuum-sealed chamber (117). Four support rods (105) are fixedly installed at the four corners of the bottom of the vacuum coating machine body (101). The support rods (105) are symmetrically arranged. Two sets of lifting mechanisms (1001) are fixedly installed below the vacuum coating machine body (101). The two sets of lifting mechanisms (1001) are symmetrically arranged. The structure (1001) includes two symmetrically arranged lifting and fixing frames (113). A lifting support frame (106) is provided between the two lifting and fixing frames (113). A lifting transmission rod (120) is fixedly provided at the center of the top of the lifting support frame (106). The top of the lifting transmission rod (120) extends upward into the vacuum sealed chamber (117). A lifting lifting plate (119) is fixedly provided at the top of the lifting transmission rod (120) on both sides. The lifting lifting plate (119) is fixedly connected to the substrate (118). The lifting lifting plate (119) plays the role of movable support.

2. The controllable spacing vacuum coating equipment according to claim 1, characterized in that: The lifting mechanism (1001) also includes lifting slide rails (104) on both sides of the lifting fixing frame (113) that are close to each other on one side, and the two ends of the lifting support frame (106) are slidably connected to the lifting slide rails (104) on both sides.

3. The controllable spacing vacuum coating equipment according to claim 2, characterized in that: The lifting mechanism (1001) also includes a power transmission fixing frame (109) fixedly installed below the vacuum coating machine body (101), and a support base (110) is fixedly installed at the bottom of the power transmission fixing frame (109) to provide support and fixation.

4. The controllable spacing vacuum coating equipment according to claim 3, characterized in that: Two motors (107) are fixedly arranged symmetrically on both sides of the top of the power transmission mounting bracket (109). Two steering gearboxes (108) are fixedly arranged on the top of the power transmission mounting bracket (109) and on both sides of the motors (107), so that the steering gearboxes (108) on both sides are symmetrically arranged on both sides of the motors (107).

5. The controllable spacing vacuum coating equipment according to claim 1, characterized in that: The motor (107) is powered by two motor shafts (116) at both ends, and the two motor shafts (116) mesh with the gears of the steering gearbox (108).

6. The controllable spacing vacuum coating equipment according to claim 5, characterized in that: The top of the steering gearbox (108) is rotatably connected to a ball screw (115), and the ball screws (115) on both sides are respectively connected to the screw of the lifting support frame (106).

7. The controllable spacing vacuum coating equipment according to claim 1, characterized in that: The lifting support frame (106) and the bottom of the vacuum coating machine body (101) are directly equipped with a metal sealing bellows (112), and the metal sealing bellows (112) is sleeved on the outer end of the lifting transmission rod (120).

8. The controllable spacing vacuum coating equipment according to claim 1, characterized in that: Two symmetrically positioned moving distance sensors (114) are installed at the bottom of the vacuum sealed chamber (117), with the moving distance sensors (114) on both sides located below the substrate (118).

9. The controllable spacing vacuum coating equipment according to claim 1, characterized in that: Two transmission fluid rods (121) are fixedly provided on both sides of the inner wall of the vacuum sealed chamber (117). The transmission fluid rods (121) on both sides are symmetrically arranged, and a transmission fluid magnet (103) is fixedly connected to one end of each transmission fluid rod (121).

10. A controllable spacing vacuum coating apparatus according to claim 1, characterized in that: A photoelectric detector (102) is installed on one side wall of the vacuum sealed chamber (117), and two electric heaters (123) are fixedly installed at the bottom of the vacuum sealed chamber (117).

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