A multifunctional mobile platform and processing system

Abstract

The application relates to a multifunctional mobile platform and processing system, which comprises a mobile table, a plurality of processing assemblies and detection assemblies are connected to the mobile table, and the working ends of the processing assemblies and the detection assemblies are adapted to pass through through grooves on the mobile table and act on workpieces below the mobile table; a plurality of connecting structures are arranged on the surface of the mobile table; two supporting tables are arranged at intervals in the width direction of the supporting tables, and the mobile table is supported by the two supporting tables; a plurality of sliding assemblies are arranged on each supporting table, the sliding assembly comprises a sliding rail and a plurality of sliding blocks, the sliding rail is laid on the top surface of the supporting table in the length direction of the supporting table, and the plurality of sliding blocks are slidably arranged on the sliding rail. The mobile table is transversely arranged and slidably arranged on the two supporting tables through the sliding assembly, the through grooves are arranged on the mobile table, the processing and detection assemblies are conveniently installed, the processing integration is improved, and the movement precision is ensured.

Description

Technical Field

[0001] This application relates to the field of mobile platform technology, and in particular to a multifunctional mobile platform and processing system. Background Technology

[0002] Currently, in high-end manufacturing, especially in chip or PCB manufacturing, it is necessary to perform simultaneous inspection and processing to monitor the processing results in real time. Furthermore, the processing typically requires the use of various processing components to meet the diverse processing needs of the workpiece.

[0003] In related technologies, a gantry frame is arranged, slide rails and sliders are arranged on the gantry frame, and the required processing components and inspection components are arranged on the sliders. By driving the sliders to move, the movement of the processing parts and inspection components is realized.

[0004] However, when the processing system has a high degree of integration and requires a large number of processing and detection components, it is difficult to integrate multiple sets of processing and detection components onto the slider. Furthermore, an excessive number of processing components on the slider can easily lead to deformation of the slide rail, affecting motion accuracy and slide rail lifespan. Therefore, the gantry-type mounting structure in related technologies suffers from technical problems in improving processing integration and ensuring motion accuracy. Utility Model Content

[0005] This application provides a multifunctional mobile platform and processing system to solve the technical problems in related technologies, such as difficulty in improving processing integration and difficulty in ensuring motion accuracy.

[0006] Firstly, a multifunctional mobile platform is provided, comprising:

[0007] A movable stage with a through slot on its surface, the movable stage being used to connect various processing components and detection components, and the working ends of the processing components and the detection components being adapted to pass through the through slot and act on the workpiece below the movable stage; the surface of the movable stage is provided with multiple connection structures;

[0008] Two support platforms are arranged at intervals in the width direction of the support platforms, and the movable platform is supported by the two support platforms;

[0009] Multiple sets of sliding components are provided, with at least one set of the sliding components arranged on each support platform. Each sliding component includes a slide rail and multiple sliders. The slide rail is laid on the top surface of the support platform along the length direction of the support platform, and the multiple sliders are slidably disposed on the slide rail.

[0010] Each of the sliders is connected to the mobile platform through multiple connection structures.

[0011] In some embodiments, the mobile platform includes a marble platform.

[0012] In some embodiments, the two support platforms are a main platform and an auxiliary platform, and the connection structure includes a first connection structure and a second connection structure. The movable platform is connected to the slider on the main platform through the first connection structure, and the movable platform is connected to the slider on the auxiliary platform through the second connection structure.

[0013] In some embodiments, the first connection structure includes:

[0014] A positioning hole is formed through the surface of the moving platform;

[0015] A first connecting bolt passes through the positioning hole of the movable platform and is threadedly connected to the slider.

[0016] The diameter of the first connecting bolt is the same as the diameter of the positioning hole.

[0017] In some embodiments, the second connection structure includes:

[0018] The mounting slot is arranged along the line connecting the two support platforms, with its length direction aligned with the length of the mounting slot.

[0019] The second connecting bolt passes through the mounting groove, is threadedly connected to the slider, and the head of the second connecting bolt abuts against the moving platform;

[0020] The second connecting bolt is clearance-fitted with the mounting groove.

[0021] In some embodiments, the connection structure further includes a receiving groove, which is formed on the top surface of the movable platform, and the mounting groove is formed at the bottom of the receiving groove. The head of the connecting bolt is located inside the receiving groove and abuts against the bottom of the receiving groove.

[0022] In some embodiments, the multifunctional mobile platform further includes multiple pads, all of which are connected to the bottom surface of the mobile platform, and the mobile platform contacts multiple sliders through the multiple pads respectively.

[0023] In some embodiments, the top surface of the mobile platform is provided with multiple mounting structures, which are arranged around the through slot.

[0024] The beneficial effects of the technical solution provided in this application include:

[0025] This application provides a multifunctional mobile platform. By creating through slots on the mobile platform, various processing and inspection components are arranged on it and supported by the platform. The through slots also allow the working ends of the processing and inspection components to extend below the platform, thus improving the processing integration and facilitating the integration of multiple processing and inspection components, supporting diverse processing applications. Furthermore, the mobile platform offers ample installation space, facilitating the integration of more components and simplifying subsequent replacement and maintenance.

[0026] The sliding stage moves on the support platform by utilizing the cooperation of a slider and a slide rail. The sliding stage applies vertical force to the slider, which is then transmitted to the support platform via the slide rail. The support platform's support of the slide rail ensures the accuracy of the slide rail, thereby guaranteeing the movement accuracy of the sliding stage. Furthermore, the large space beneath the sliding stage allows for the convenient arrangement of multiple sets of sliding components, further ensuring the movement accuracy of the sliding stage.

[0027] Secondly, a processing system is provided, including the multi-functional mobile platform described above.

[0028] In some embodiments, the processing system further includes a support platform located between two support platforms of the multifunctional mobile platform, the support platform being used to support the workpiece.

[0029] Another embodiment of this application provides a processing system. Since the processing system includes the multi-functional mobile platform described above, the beneficial effects of the processing system are the same as those of the multi-functional platform described above, and will not be repeated here. Attached Figure Description

[0030] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0031] Figure 1 A schematic diagram of a multifunctional mobile platform provided in an embodiment of this application;

[0032] Figure 2 A schematic diagram of the first connection structure, sliding component, and moving stage provided in the embodiments of this application.

[0033] Figure 3 A partial schematic diagram of the multifunctional mobile platform provided in the embodiments of this application;

[0034] Figure 4 A schematic diagram of the second connection structure, sliding component, and moving stage provided in an embodiment of this application;

[0035] Figure 5 This is a schematic diagram of the connection between the moving stage and the slider provided in an embodiment of this application.

[0036] In the diagram: 1. Moving platform; 1a. Through groove; 1b. Mounting structure; 21. First connecting structure; 21a. Positioning hole; 21b. First connecting bolt; 22. Second connecting structure; 22a. Mounting groove; 22b. Connecting bolt; 22c. Receiving groove; 3. Support platform; 31. Main platform; 32. Auxiliary platform; 4. Sliding assembly; 41. Slide rail; 42. Slider; 5. Gasket; 6. Bearing platform. Detailed Implementation

[0037] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0038] This application provides a multifunctional mobile platform and processing system. It utilizes a sliding component to slide a mobile stage across two support platforms. By creating through slots on the mobile stage, it facilitates the installation of processing and inspection components, improving processing integration and ensuring motion accuracy. This application solves the technical problems in related technologies where it is difficult to improve processing integration and guarantee motion accuracy.

[0039] Reference Figure 1 A multifunctional mobile platform includes a mobile stage 1, two support platforms 3, and a slide rail 41 assembly. The mobile stage 1 spans the two support platforms 3, which are spaced apart in the width direction of the support platforms 3, and the mobile stage 1 is supported by the two support platforms 3. Each mobile stage 1 is slidably connected to the support platforms 3 via at least one set of sliding components 4. A through slot 1a is formed on the surface of the mobile stage 1, which is used to connect various processing components and detection components, and the working ends of the processing components and detection components are adapted to pass through the through slot 1a and act on the workpiece below the mobile stage 1.

[0040] This configuration, by arranging various processing and inspection components on the moving stage 1, which supports these components, and by creating a through slot 1a, allows the working ends of the processing and inspection components to extend below the moving stage 1, thus improving the processing integration and facilitating the integration of multiple processing and inspection components, thereby supporting diverse processing applications. Furthermore, the moving stage 1 provides ample installation space, allowing for the integration of more components and facilitating subsequent replacement and maintenance.

[0041] Reference Figure 1 and Figure 2 Each support platform 3 is provided with at least one set of sliding components 4. The sliding components 4 include a slide rail 41 and multiple sliders 42. The slide rail 41 is laid on the top surface of the support platform 3 along the length direction of the support platform 3, and the multiple sliders 42 are slidably disposed on the slide rail 41. When there are multiple slide rails 41 on the surface of the support platform 3, the multiple slide rails 41 are arranged side by side.

[0042] The sliding table 1 slides on the support platform 3 by utilizing the cooperation of slider 42 and slide rail 41. The sliding table 1 applies vertical force to slider 42, which is then transmitted to the support platform 3 via slide rail 41. The support platform 3's support of slide rail 41 ensures the accuracy of slide rail 41, thereby guaranteeing the movement accuracy of the sliding table 1. Furthermore, the large space beneath the sliding table 1 allows for the convenient arrangement of multiple sets of sliding components 4, further ensuring the movement accuracy of the sliding table 1.

[0043] Reference Figures 1-4 The surface of the moving stage 1 is provided with multiple connecting structures 2, and each slider 42 is connected to the moving stage 1 through multiple connecting structures 2.

[0044] Reference Figures 1-4 The two support platforms 3 are the main platform 31 and the auxiliary platform 32, respectively. The connection structure includes a first connection structure 21 and a second connection structure 22. The moving platform 1 is connected to the slider 42 on the main platform 31 through the first connection structure 21, and the moving platform 1 is connected to the slider 42 on the auxiliary platform 32 through the second connection structure 22.

[0045] This configuration first connects the movable stage 1 to multiple sliders 42 on the main stage 31 via multiple first connection structures 21, ensuring the movement accuracy of the movable stage 1 on the main stage 31 and transferring the error to the auxiliary stage 32. This ensures the movement accuracy of the movable stage 1 above the main stage 31, thereby guaranteeing machining accuracy.

[0046] Specifically, the first connecting structure 21 includes a positioning hole 21a and a first connecting bolt 21b. The positioning hole 21a is formed through the surface of the movable stage 1, and the first connecting bolt 21b passes through the positioning hole 21a through the movable stage 1 and is threadedly connected to the slider 42. Thus, the movable stage 1 is fixed to the slider 42 by the first connecting bolt 21b.

[0047] By ensuring the installation accuracy of the slide rail 41 and the slider 42, the installation accuracy and movement accuracy of the movable stage 1 are guaranteed after the slider 42 on the main stage 31 is fixed. This ensures the installation and movement accuracy of the movable stage 1 on the main stage 31.

[0048] Furthermore, the diameter of the first connecting bolt 21b is the same as the diameter of the positioning hole 21a. After the first connecting bolt 21b fixes the moving stage 1 and the slider 42, the positioning of the moving stage 1 can be realized simultaneously, and subsequent movement of the moving stage 1 relative to the slider 42 is avoided, thereby ensuring the installation accuracy and movement accuracy of the moving stage 1.

[0049] Reference Figures 1-4 Specifically, the second connecting structure 22 includes a mounting groove 22a and a second connecting bolt 22b. The length direction of the mounting groove 22a is arranged along the line connecting the two support platforms 3. The second connecting bolt 22b passes through the mounting groove 22a, is threadedly connected to the slider 42, and the head of the second connecting bolt 22b abuts against the moving platform 1.

[0050] This configuration is advantageous because the moving platform 1 has a large span, especially since it needs to slide against the two support platforms 3. By arranging the mounting groove 2a, the second connecting bolt 22b can slide within it, ensuring a threaded connection between the second connecting bolt 22b and the slider 42. Furthermore, even if there are some errors in the installation of the slide rail 41, the connection between multiple sliders 42 and the moving platform 1 can still be guaranteed. Moreover, after the moving platform is fixed at multiple points, it will not pull on the sliders 42 and slide rail 41, thus ensuring that the sliders 42 and slide rail 41 are not subjected to lateral forces, guaranteeing their accuracy, and extending their service life.

[0051] Reference Figures 1-4 The second connecting structure 22 further includes a receiving groove 22c, which is formed on the top surface of the moving platform 1, and a mounting groove 2a is formed at the bottom of the receiving groove 22c. The head of the second connecting bolt 22b is located inside the receiving groove 22c and abuts against the bottom of the receiving groove 22c.

[0052] This arrangement of the receiving groove 22c accommodates the head of the second connecting bolt 22b, preventing the head of the second connecting bolt 22b from protruding from the surface of the moving stage 1 and avoiding interference with the installation of the components on the surface of the moving stage 1.

[0053] The second connecting bolt 22b is clearance-fitted with the mounting groove 22a.

[0054] With this configuration, after the second connecting bolt 22b passes through the mounting groove 22a, the second connecting bolt 22b is restricted from moving freely relative to the mounting groove 22a by pressing against the groove wall of the mounting groove 22a.

[0055] This ensures that the position of the mobile stage 1 on the auxiliary stage 32 is not easily changed, thereby guaranteeing the installation accuracy and movement accuracy of the mobile stage 1 on the auxiliary stage 32 to a certain extent.

[0056] In this embodiment, the movable platform 1 includes a marble platform. The marble platform has good flatness and is not easily deformed.

[0057] This configuration results in better surface flatness for the moving stage 1, making it easier to ensure the installation accuracy of the processing and detection components on its surface. Furthermore, it improves the overall height consistency of the moving stage 1, and the height consistency of the multiple sliders 42 after installation with the moving stage 1 is also better, thus ensuring the motion accuracy of the moving stage 1.

[0058] Reference Figure 1 and Figure 5 The multifunctional mobile platform also includes multiple pads 5, which are all connected to the bottom surface of the mobile platform 1, and the mobile platform 1 contacts multiple sliders 42 through the multiple pads 5 respectively.

[0059] With this configuration, the moving stage 1 contacts the slider 42 via the pad 5, and the slider 42 supports the moving stage 1 via the pad 5, increasing the force-bearing area of ​​the moving stage 1 and reinforcing the contact point between the moving stage 1 and the slider 42, thus preventing damage to the moving stage 1 due to localized stress.

[0060] In this embodiment, the gasket 5 includes a steel plate or marble. When the gasket 5 is a steel plate, the gasket 5 is fixed to the moving platform 1 by bolts. When the gasket 5 includes marble, the gasket 5 and the moving platform 1 are integrally formed.

[0061] Reference Figure 1 Optionally, the top surface of the mobile platform is provided with multiple mounting structures 1b, which are arranged around the through groove 1a.

[0062] Reference Figure 1 Specifically, the mounting structure 1b includes mounting holes for mounting the processing components and the testing components, and reserves mounting positions for external components.

[0063] This application provides a multifunctional mobile platform. By creating a through slot 1a on the mobile stage 1, various processing and inspection components are arranged on the mobile stage 1, which supports the processing and inspection components. The through slot 1a also allows the working ends of the processing and inspection components to extend below the mobile stage 1, thus improving the processing integration and facilitating the integration of multiple processing and inspection components, supporting diverse processing applications. Furthermore, the mobile stage 1 provides ample installation space, facilitating the integration of more components and simplifying subsequent replacement and maintenance.

[0064] The sliding table 1 slides on the support platform 3 by utilizing the cooperation of slider 42 and slide rail 41. The sliding table 1 applies vertical force to slider 42, which is then transmitted to the support platform 3 via slide rail 41. The support platform 3's support of slide rail 41 ensures the accuracy of slide rail 41, thereby guaranteeing the movement accuracy of the sliding table 1. Furthermore, the large space beneath the sliding table 1 allows for the convenient arrangement of multiple sets of sliding components 4, further ensuring the movement accuracy of the sliding table 1.

[0065] Reference Figure 1 Another embodiment of this application provides a processing system including the multifunctional mobile platform described above.

[0066] The processing system also includes a support platform 6, which is located between two support platforms 3 of the multi-functional mobile platform and is used to support the workpiece.

[0067] Another embodiment of this application provides a processing system. Since the processing system includes the multi-functional mobile platform described above, the beneficial effects of the processing system are the same as those of the multi-functional platform described above, and will not be repeated here.

[0068] In the description of this application, it should be noted that the terms "upper," "lower," etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. Unless otherwise expressly specified and limited, the terms "installed," "connected," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication between two elements. For those skilled in the art, the specific meaning of the above terms in this application can be understood according to the specific circumstances.

[0069] It should be noted that in this application, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0070] The above description is merely a specific embodiment of this application, enabling those skilled in the art to understand or implement this application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of this application. Therefore, this application is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features claimed herein.

Claims

1. A multi-functional mobile platform, characterized in that, It includes: A movable stage with a through slot on its surface, the movable stage being used to connect various processing components and detection components, and the working ends of the processing components and the detection components being adapted to pass through the through slot and act on the workpiece below the movable stage; the surface of the movable stage is provided with multiple connection structures; Two support platforms are arranged at intervals in the width direction of the support platforms, and the movable platform is supported by the two support platforms; Multiple sets of sliding components are provided, with at least one set of the sliding components arranged on each support platform. Each sliding component includes a slide rail and multiple sliders. The slide rail is laid on the top surface of the support platform along the length direction of the support platform, and the multiple sliders are slidably disposed on the slide rail. Each of the sliders is connected to the mobile platform through multiple connection structures.

2. The multifunctional mobile platform according to claim 1, characterized in that, The mobile platform includes a marble platform.

3. The multifunctional mobile platform according to claim 1 or 2, characterized in that, The two support platforms are a main platform and an auxiliary platform, and the connection structure includes a first connection structure and a second connection structure. The movable platform is connected to the slider on the main platform through the first connection structure, and the movable platform is connected to the slider on the auxiliary platform through the second connection structure.

4. The multifunctional mobile platform according to claim 3, characterized in that, The first connection structure includes: A positioning hole is formed through the surface of the moving platform; A first connecting bolt passes through the positioning hole of the movable platform and is threadedly connected to the slider. The diameter of the first connecting bolt is the same as the diameter of the positioning hole.

5. The multifunctional mobile platform according to claim 4, characterized in that, The second connection structure includes: The mounting slot is arranged along the line connecting the two support platforms, with its length direction aligned with the length of the mounting slot. The second connecting bolt passes through the mounting groove, is threadedly connected to the slider, and the head of the second connecting bolt abuts against the moving platform; The second connecting bolt is clearance-fitted with the mounting groove.

6. The multifunctional mobile platform according to claim 5, characterized in that, The connection structure also includes a receiving groove, which is formed on the top surface of the moving platform, and the mounting groove is formed at the bottom of the receiving groove. The head of the connecting bolt is located inside the receiving groove and is pressed against the bottom of the receiving groove.

7. The multifunctional mobile platform according to claim 1, characterized in that, It also includes multiple pads, all of which are connected to the bottom surface of the moving platform, and the moving platform contacts the multiple sliders respectively through the multiple pads.

8. The multifunctional mobile platform according to claim 1, characterized in that, The top surface of the mobile platform is provided with multiple mounting structures, which are arranged around the through slot.

9. A processing system, characterized in that, Includes the multi-functional mobile platform as described in any one of claims 1 to 8.

10. The processing system according to claim 9, characterized in that, It also includes a support platform, which is located between the two support platforms of the multifunctional mobile platform and is used to support the workpiece.

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