A rotary clamping device for wafer production

Abstract

The utility model relates to the technical field of semiconductor manufacturing discloses a kind of rotary clamping equipment for wafer production, comprising: substrate, one end is fixed on support by bolt, and the other end top surface is fixed with fixed cylinder;Fixed cylinder, cylinder recess is opened in the top of fixed cylinder, and cylinder rod is placed therein;Cylinder rod, two groups of buttons are arranged in the bottom end two sides, button penetrates the protruding portion of the top of fixed cylinder and is slidably connected therein, and there is still a protruding ring in the upper end of cylinder rod;Connecting plate, located in the top of cylinder rod, and one end is provided with slot, and one end of connecting plate is penetrated the top of cylinder rod and the bottom surface is attached with the ring of the upper end of cylinder rod, and the other end of connecting plate is provided with a cylinder pin, and cylinder pin is penetrated the other end of connecting plate and the bottom is fixed with shell. Through the cooperation of rotatable manipulator and hydraulic rod, the stable clamping of different diameter wafers is realized;With the aid of rotary head and fixed pin, multi-angle clamping is satisfied.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, specifically to a rotary clamping device for wafer production. Background Technology

[0002] In the semiconductor wafer manufacturing process, rotary clamping equipment is a key device for wafer handling and processing positioning. However, existing technologies for this type of equipment have several limitations: For angle adjustment, they rely on bolt fixing or complex transmission structures, making adjustment cumbersome and resulting in low angle positioning accuracy, making it difficult to quickly adapt to the positional requirements of different processing steps; when replacing components, vulnerable parts such as robotic arms are tightly connected to the main structure, requiring specialized tools for disassembly, leading to time-consuming replacements and production interruptions; in terms of adaptability, the fixed angle of the robotic arm makes it incompatible with wafers of different sizes; and lacks protective performance, easily allowing dust to penetrate, leading to accelerated wear and shortening the equipment's lifespan. Utility Model Content

[0003] The purpose of this invention is to address the shortcomings of existing technologies by proposing a rotary clamping device for wafer production.

[0004] To achieve the above objectives, the present invention adopts the following technical solution: a rotary clamping device for wafer production, comprising: a substrate, one end of which is fixed to a support by bolts, and a fixed cylinder fixed to the top surface of the other end; a fixed cylinder, the top of which has a cylindrical groove, in which a cylindrical rod is placed; a cylindrical rod, the bottom of which has two sets of buttons on both sides, the buttons passing through the protruding part at the top of the fixed cylinder and slidably connected therein, and the upper end of the cylindrical rod also has a protruding ring; a connecting plate, located at the top of the cylindrical rod, with a slot at one end, the slotted end of the connecting plate passing through the top of the cylindrical rod and the bottom surface fitting against the ring at the upper end of the cylindrical rod, and the other end of the connecting plate having a cylindrical pin passing through the other end of the connecting plate and the bottom fixed to the outer shell.

[0005] As a further description of the above technical solution:

[0006] The connecting plate includes: a housing located below the connecting plate, with a cylindrical pin passing through one end of the connecting plate at the top and fixed thereto; a hydraulic rod located inside the housing, with its top end fixed to the cylindrical pin at one end of the connecting plate and its bottom end fixed to a cylindrical block; and a robotic arm, consisting of three sets, connected to the cylindrical block at the bottom of the hydraulic rod via square blocks. The robotic arm is threadedly connected to the square blocks and can rotate on the square blocks.

[0007] As a further description of the above technical solution:

[0008] The button also contains a spring, which is located in a slot at the bottom of the cylindrical rod. One end of the spring is fixed to the inner wall of the cylindrical rod, and the other end is fixed to the button.

[0009] As a further description of the above technical solution:

[0010] The connecting plate is also provided with: a connecting column, which is a T-shaped cylinder, with its bottom fixed to the top of the connecting plate, and the bottom of the large cylinder below has a groove, with the part of the cylindrical rod on the connecting plate located in the groove, and its top surface fitting into the inside of the groove; and a protective cover, which is a cylindrical tube, fitted over the connecting column, with its upper and lower surfaces fitting into the connecting column and the rotating head respectively.

[0011] As a further description of the above technical solution:

[0012] The rotating head is located above the connecting column and has a circular groove at its bottom. The top of the connecting column is fixed to the inner wall of the rotating head, and several sets of strip grooves are evenly opened on the outer circumference of the rotating head.

[0013] As a further description of the above technical solution:

[0014] The connecting column is provided with: a fixed plate, which is rectangular and located on one side of the connecting column, and one side of the fixed plate is fixed to the protective cover by bolts; a rotating column, which is the same length as the fixed plate and is rotatably connected to the other side of the fixed plate; a rectangular plate one, which is fixed in the middle of one side of the rotating column, and one end of the rectangular plate one is connected to a connecting spring; and a connecting spring, one end of which is fixed to the rectangular plate one and the other end of which is fixed to the protective cover.

[0015] As a further description of the above technical solution:

[0016] The connecting column is provided with: a second rectangular plate, which is fixed to the middle of one side of the rotating column but does not contact the first rectangular plate, and a fixing pin is fixed to one end of the second rectangular plate; the fixing pin is provided corresponding to the strip groove on the rotating head and can be inserted into it to restrict the rotation of the rotating head.

[0017] This utility model has the following beneficial effects:

[0018] 1. Flexible operation and high adaptability: The combination of a rotatable robotic arm and a hydraulic rod enables stable clamping of wafers of different diameters; the quick adjustment structure of the rotating head and the fixed pin allows for flexible adjustment of the clamping angle to meet diverse processing position requirements; the button and spring design makes it easy to replace the upper structure and robotic arm, reducing maintenance time and improving production continuity.

[0019] 2. Stable structure and strong safety: The solid connection between the substrate and the fixed cylinder provides reliable support for the whole. The combination of the connecting column and the protective cover strengthens the structural strength and isolates impurities, extending the equipment life. The linkage between the fixing pin and the connecting spring ensures that the device is firmly fixed after the angle is adjusted, avoiding displacement during processing or handling, reducing the risk of wafer damage, and ensuring processing accuracy. Attached Figure Description

[0020] Figure 1This is an overall appearance view of a rotary clamping device for wafer production proposed in this utility model;

[0021] Figure 2 This is an exploded view of the overall structure of a rotary clamping device for wafer production proposed in this utility model;

[0022] Figure 3 The present utility model proposes Figure 1 Enlarged view of point A in the middle;

[0023] Figure 4 This is a half-sectional view of a rotary clamping device for wafer production proposed in this utility model;

[0024] Legend:

[0025] 1. Base plate; 2. Fixed cylinder; 3. Cylindrical rod; 301. Button; 302. Spring; 4. Connecting plate; 5. Housing; 6. Hydraulic rod; 7. Robotic arm; 8. Connecting column; 9. Protective cover; 10. Rotating head; 11. Fixed plate; 12. Rotating column; 131. Rectangular plate one; 132. Connecting spring; 133. Rectangular plate two; 134. Fixing pin. Detailed Implementation

[0026] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0027] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The utility model will be further described in detail below with reference to the accompanying drawings.

[0028] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0029] Example 1:

[0030] like Figures 1 to 4 As shown, this embodiment provides a rotary clamping device for wafer production, comprising: a substrate 1, one end of which is fixed to a bracket by bolts, and a fixed cylinder 2 fixed to the top surface of the other end; the fixed cylinder 2, the top of which has a cylindrical groove, in which a cylindrical rod 3 is placed; the cylindrical rod 3, the bottom of which has two sets of buttons 301 on both sides, the buttons 301 passing through the protruding part at the top of the fixed cylinder 2 and slidably connected therein, and the upper end of the cylindrical rod 3 also has a protruding ring; a connecting plate 4, located at the top of the cylindrical rod 3, with a slot at one end, the slotted end of the connecting plate 4 passing through the top of the cylindrical rod 3 and the bottom surface fitting with the ring at the upper end of the cylindrical rod 3, the other end of the connecting plate 4 having a cylindrical pin, the cylindrical pin passing through the other end of the connecting plate 4 and the bottom fixed to the outer shell 5.

[0031] In this embodiment, the rotating head 10 and the fixing pin 134 constitute a rotating clamping device for wafer production according to this application.

[0032] It should also be noted that the robotic arm described in the text performs its grasping action through programming. This involves controlling the motion logic and planning the path: generating a motion trajectory using preset coordinate points (such as the material picking position, processing position, and material unloading position), controlling the robotic arm's movement path from the starting point to the end point. The sequence of actions is arranged according to process requirements, such as continuous actions like "descending → closing gripping → rising → rotating → descending → opening and releasing." Parameterized configuration is performed: parameters such as the hydraulic rod stroke (determining the gripping force and opening range) and rotation angle (controlled by the rotating head) are set as variables, supporting flexible adjustments for wafers of different sizes.

[0033] The operator manually drags the robotic arm to perform a complete motion, and the system records the position and parameters of each key point, generating a program. Offline programming: A virtual environment is built on a computer using specialized software to design motion paths and generate code, which is then imported into the equipment for execution. Instruction programming: Position and force are controlled by inputting instructions through a human-machine interface.

[0034] Finally, the execution process involves powering on the equipment and returning each axis to its zero point (e.g., hydraulic rods retract to their initial position, rotary heads return to zero) to ensure consistent position references. The target program is read from the storage medium, and instruction parameters are parsed. Safety conditions (e.g., emergency stop button status, sensor functionality) and process conditions (e.g., wafer availability) are checked.

[0035] It should also be understood that some existing equipment uses bolts or clips to fix the rotation angle, and adjustments require disassembling the connecting parts, manually rotating them, and then re-fixing them; most robotic arms are fixed structures, and different sizes of robotic arms are used to adapt to the wafers, and when replacing them, the fixing screws need to be unscrewed and the position recalibrated.

[0036] In this embodiment, the user fixes the entire device to the desired equipment using bolts on the base plate 1. Pressing down on rectangular plate 131 causes the connecting spring 132 to contract, rotating column 12 and lifting rectangular plate 133. The fixing pin 134 disengages from the slot on the rotating head 10. Rotating the rotating head 10 causes the connecting column 8 to rotate the connecting plate 4, allowing adjustment of the position of the robotic arm 7 at the other end of the connecting plate 4. Releasing rectangular plate 131 causes the connecting spring 132 to spring back without force, rotating column 12 and re-engaging the fixing pin 134 into the slot of the rotating head 10 to fix its rotation. Programming is then imported to enable the robotic arm to grasp. The hydraulic cylinder moves the robotic arm 7 up and down to complete the grasping action. Pressing button 301 causes spring 302 to contract, retracting button 301 into the fixing cylinder 2, allowing the upper device to be removed and the robotic arm 7 replaced.

[0037] Specifically, the connecting plate 4 includes: a housing 5 located below the connecting plate 4, with a cylindrical pin passing through one end of the connecting plate 4 at the top and fixed thereto; a hydraulic rod 6 located inside the housing 5, with its top end fixed to the cylindrical pin at one end of the connecting plate 4 and its bottom end fixed to a cylindrical block; and a robotic arm 7, which is provided in three sets and connected to the cylindrical block at the bottom of the hydraulic rod 6 through a square block. The robotic arm 7 is threadedly connected to the square block and can rotate on the square block.

[0038] In this embodiment, the outer shell 5 is a rectangular aluminum alloy shell, one in number, located below the connecting plate 4; the hydraulic rod 6 is an alloy steel cylinder, one in number, vertically located inside the outer shell 5, its top end fixed to one end of the connecting plate 4 with a cylindrical pin, and its bottom end connected to a cylindrical block; the robotic arm 7 is an arc-shaped alloy steel claw, three in number, evenly distributed circumferentially, connected to the bottom cylindrical block of the hydraulic rod 6 through three square blocks, and the robotic arm 7 is threadedly connected to the square blocks and can rotate. The extension and retraction of the hydraulic rod 6 drives the bottom cylindrical block to move up and down, and through the square blocks, drives the three sets of robotic arms 7 to open or close synchronously. This achieves stable clamping and release of wafers of different diameters, and the robotic arm can rotate to adapt to the curvature of the wafer edge.

[0039] Specifically, a spring 302 is also provided inside the button 301. The spring 302 is located in the slot opened at the bottom of the cylindrical rod 3, and one end is fixed to the inner wall of the cylindrical rod 3, while the other end is fixed to the button 301.

[0040] In a preferred embodiment, two buttons 301, made of metal, are symmetrically distributed on both sides of the bottom end of the cylindrical rod 3. Two coil springs 302 are located within slots at the bottom end of the cylindrical rod 3. When button 301 is pressed, spring 302 compresses, and button 301 retracts into the fixed cylinder 2, releasing the lock between the cylindrical rod 3 and the fixed cylinder 2. After release, spring 302 returns to its original position, and button 301 pops out and engages with the fixed cylinder 2, locking their positions. This allows for quick locking and separation of the cylindrical rod 3 and the fixed cylinder 2, facilitating the disassembly and replacement of the upper structure.

[0041] Example 2:

[0042] Based on embodiment 1, in order to more effectively drive the rotation of the connecting plate 4, a connecting post 8 is provided on the connecting plate 4;

[0043] Specifically, the connecting plate 4 is also provided with: a connecting post 8, which is a T-shaped cylinder, the bottom of which is fixed to the top of the connecting plate 4, and the bottom of the large cylinder below has a groove, the part of the cylindrical rod 3 on the connecting plate 4 is in the groove, and the top surface is in contact with the inside of the groove; a protective cover 9, which is a cylindrical tube, is sleeved on the outside of the connecting post 8, and the upper and lower surfaces are in contact with the connecting post 8 and the rotating head 10 respectively.

[0044] In this embodiment, the connecting column 8 is a T-shaped stainless steel cylinder, one in number, vertically fixed to the top of the connecting plate 4 at its bottom. The bottom groove of the larger cylinder wraps around the top of the cylindrical rod 3, with its top surface fitting flush with the inner wall of the groove. The protective cover 9 is a metal cylindrical tube, one in number, fitted over the connecting column 8, with its upper and lower ends respectively fitting flush with the connecting column 8 and the rotating head 10. The connecting column 8 connects the connecting plate 4 and the rotating head 10, while the protective cover 9 isolates external dust from the connection points of the connecting column 8 and the rotating head 10. This enhances the connection stability between the connecting plate 4 and the rotating head 10 and protects the internal structure from impurities.

[0045] Specifically, the rotating head 10 is located above the connecting column 8 and has a circular groove at its bottom. The top of the connecting column 8 is fixed to the inner wall of the rotating head 10, and several sets of strip grooves are evenly opened on the outer circumference of the rotating head 10.

[0046] In this configuration, the rotating head 10 is a single metal cylinder, with a circular groove at its bottom fitted onto the top of the connecting column 8, and its inner wall fixed to the top of the connecting column 8. Several sets of strip-shaped grooves are evenly distributed circumferentially on the outer circumference of the rotating head 10. When the rotating head 10 rotates, it causes the connecting column 8 and the structure below to rotate synchronously. This allows for multi-angle rotational adjustment of the clamping mechanism, meeting the needs of different processing positions.

[0047] Example 3:

[0048] Based on embodiment 2, in order to fix the rotation of the rotating head 10 and the structure below it, a fixing pin 134 is provided on the rectangular plate 133;

[0049] Specifically, the connecting column 8 is provided with: a fixed plate 11, which is rectangular and is located on one side of the connecting column 8, and one side of the fixed plate 11 is fixed to the protective cover 9 by bolts; a rotating column 12, which is the same length as the fixed plate 11 and is rotatably connected to the other side of the fixed plate 11; a rectangular plate 131, which is fixed to the middle of one side of the rotating column 12, and one end of the rectangular plate 131 is connected to a connecting spring 132; one end of the connecting spring 132 is fixed to the rectangular plate 131, and the other end is fixed to the protective cover 9.

[0050] The system comprises: a fixed plate 11, a rectangular stainless steel plate, vertically fixed to the outside of the protective cover 9; a rotating column 12, a metal cylinder, horizontally penetrating the fixed plate 11 and rotatably connected; a rectangular plate 131, a rectangular stainless steel plate, fixed to the middle of one side of the rotating column 12; and a connecting spring 132, a helical spring, connected at both ends to the rectangular plate 131 and the protective cover 9, and stretched in its natural state. Pressing the rectangular plate 131 causes the connecting spring 132 to contract, causing the rotating column 12 to rotate around the fixed plate 11; releasing the spring resets the spring, causing the rotating column 12 to rotate in the opposite direction. This provides the reset force for the fixing pin, enabling quick locking and unlocking of the rotating head.

[0051] Specifically, the connecting column 8 is provided with: a second rectangular plate 133, which is fixed in the middle of one side of the rotating column 12 but does not contact the first rectangular plate 131, and a fixing pin 134 is fixed at one end of the second rectangular plate 133; the fixing pin 134 is provided corresponding to the strip groove on the rotating head 10 and can be inserted into it to restrict the rotation of the rotating head 10.

[0052] In this embodiment, rectangular plate 133 is a rectangular stainless steel plate, one in number, fixed to the middle of the other side of the rotating column 12; fixing pin 134 is a metal cylinder, one in number, vertically fixed to one end of rectangular plate 133, its size matching the slot of the rotating head 10. The rotation of the rotating column 12 drives the rectangular plate 133 to move, causing the fixing pin 134 to insert into or disengage from the slot of the rotating head 10. This achieves angle fixation after the rotating head is adjusted, preventing angle deviation during processing or handling.

[0053] In actual use, the user fixes the entire device to the required equipment using bolts on the base plate 1. Pressing down on rectangular plate 131 causes the connecting spring 132 to contract, rotating the rotating column 12 and lifting rectangular plate 133. The fixing pin 134 disengages from the slot on the rotating head 10. Rotating the rotating head 10 causes the connecting column 8 to rotate the connecting plate 4, allowing the position of the robotic arm 7 at the other end of the connecting plate 4 to be adjusted. Releasing rectangular plate 131 causes the connecting spring 132 to spring back without force, allowing the rotating column 12 to rotate and re-engage the fixing pin 134 into the slot of the rotating head 10, thus fixing the rotation of the rotating head 10. Programming is then imported to enable the robotic arm 7 to grasp objects. The hydraulic cylinder moves the robotic arm 7 up and down to complete the grasping action. Pressing button 301 causes the spring 302 to contract, retracting button 301 into the fixing cylinder 2, allowing the upper device to be removed and the robotic arm 7 replaced.

[0054] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A rotary clamping device for wafer fabrication, characterized in that: include: The substrate (1) is fixed to the bracket at one end by bolts, and a fixing cylinder (2) is fixed to the top surface of the other end; A fixed cylinder (2) has a cylindrical groove at its top, into which the cylindrical rod (3) is placed; The cylindrical rod (3) has two sets of buttons (301) on both sides of its bottom end. The buttons (301) pass through the protruding part at the top of the fixed cylinder (2) and slide therein. There is also a protruding ring at the top of the cylindrical rod (3). The connecting plate (4) is located at the top of the cylindrical rod (3) and has a slot at one end. The slotted end of the connecting plate (4) passes through the top of the cylindrical rod (3) and its bottom surface fits against the ring at the upper end of the cylindrical rod (3). A cylindrical pin is provided at the other end of the connecting plate (4). The cylindrical pin passes through the other end of the connecting plate (4) and its bottom is fixed to the outer shell (5).

2. The rotary clamping device for wafer fabrication according to claim 1, characterized in that: The connecting plate (4) includes: a shell (5) located below the connecting plate (4), with a cylindrical pin passing through one end of the connecting plate (4) and fixed thereto; The hydraulic rod (6) is located inside the outer casing (5), with its top end fixed to a cylindrical pin at one end of the connecting plate (4) and its bottom end fixed to a cylindrical block. The robotic arm (7) is provided in three sets. It is connected to the cylindrical block at the bottom of the hydraulic rod (6) through a square block. The robotic arm (7) is threadedly connected to the square block and can rotate on the square block.

3. The rotary clamping device for wafer fabrication according to claim 2, characterized in that: The button (301) is also equipped with a spring (302). The spring (302) is located in the slot opened at the bottom of the cylindrical rod (3), and one end is fixed to the inner wall of the cylindrical rod (3), and the other end is fixed to the button (301).

4. The rotary clamping device for wafer fabrication according to claim 3, characterized in that: The connecting plate (4) is also provided with a connecting column (8), which is a T-shaped cylinder. The bottom is fixed to the top of the connecting plate (4), and the bottom of the large cylinder below has a groove. The part of the cylindrical rod (3) located on the connecting plate (4) is in the groove, and the top surface is in contact with the inside of the groove. The protective cover (9) is a cylindrical tube that is fitted outside the connecting column (8), and its upper and lower surfaces are respectively attached to the connecting column (8) and the rotating head (10).

5. The rotary clamping device for wafer fabrication according to claim 4, characterized in that: The rotating head (10) is located above the connecting column (8) and has a circular groove at the bottom. The top of the connecting column (8) is fixed to the inner wall of the rotating head (10), and several sets of strip grooves are evenly opened on the outer circumference of the rotating head (10).

6. The rotary clamping device for wafer fabrication according to claim 5, characterized in that: The connecting column (8) is provided with a fixing plate (11), which is rectangular and is located on one side of the outside of the connecting column (8). The fixing plate (11) is fixed to the protective cover (9) by bolts on one side. The rotating column (12) is the same length as the fixed plate (11) and is rotatably connected to the other side of the fixed plate (11); A rectangular plate (131) is fixed to the middle of one side of the rotating column (12), and a connecting spring (132) is connected to one end of the rectangular plate (131). The connecting spring (132) is fixed at one end to the rectangular plate (131) and at the other end to the protective cover (9).

7. The rotary clamping device for wafer fabrication according to claim 6, characterized in that: The connecting column (8) is provided with: a second rectangular plate (133), which is fixed in the middle of one side of the rotating column (12) but does not contact the first rectangular plate (131), and a fixing pin (134) is fixed at one end of the second rectangular plate (133); A fixing pin (134) is provided corresponding to the strip groove on the rotating head (10) and can be inserted into it to restrict the rotation of the rotating head (10).

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