A smart controllable gas filling device for vacuum coating machine

Abstract

This utility model relates to the field of vacuum coating technology, and more particularly to an intelligent controllable gas filling device for a vacuum coating machine. The utility model provides an intelligent controllable gas filling device for a vacuum coating machine, including a housing, a chamber door, placement racks, coating components, a fixing pipe, and connecting pipes. The chamber door is rotatably connected to the housing. Multiple placement racks are evenly spaced inside the housing. Coating components are symmetrically installed on the left and right sides of the housing. A fixing pipe is installed on the left side of the housing, and connecting pipes are symmetrically connected to the bottom of the fixing pipe. This device, through the use of a spiral plate and impeller structure, allows multiple gases to undergo multiple mixing processes before entering the vacuum chamber, significantly improving the uniformity of gas mixing and effectively solving the problem of unstable coating performance caused by uneven gas mixing in traditional gas filling devices.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating technology, and in particular to an intelligent controllable air filling device for a vacuum coating machine. Background Technology

[0002] Intelligent control vacuum coating machine is an advanced piece of equipment that combines traditional vacuum coating technology with modern automation control technology, intelligent sensing technology, and data processing and analysis technology. This type of coating machine is mainly used to deposit one or more thin films on the surface of various materials to change or enhance the physical and chemical properties of the substrate, such as hardness, wear resistance, conductivity, and reflectivity.

[0003] When using intelligent control vacuum coating machines for coating processes that require the mixing of multiple gases, existing gas filling devices typically employ a simple pipe-based gas mixing method. However, this method makes it difficult to achieve sufficient and uniform mixing between gases, resulting in differences in gas composition in different areas of the vacuum chamber after entering the chamber. This affects the uniformity and performance consistency of the coating layer, failing to meet the requirements of high-precision and high-quality coating processes.

[0004] To address the existing problems, there is a need for an intelligent, controllable gas filling device for vacuum coating machines that can fully mix gases. Utility Model Content

[0005] To overcome the drawback of not being able to fully mix gases, this invention provides an intelligent controllable gas filling device for a vacuum coating machine.

[0006] The technical solution of this utility model is: an intelligent controllable vacuum coating machine inflation device, comprising a shell, a chamber door, a placement rack, a coating assembly, a fixing pipe, a connecting pipe, an air tank, a disassembly plate, a spiral plate, a fan, an exhaust pipe, a sliding sleeve, a piston rod, and a flexible plate. The chamber door is rotatably connected to the shell. Multiple placement racks are evenly spaced inside the shell. The coating assembly is symmetrically installed on the left and right sides inside the shell. A fixing pipe is installed on the left side of the shell, and connecting pipes are symmetrically connected to the bottom of the fixing pipe. Air tanks are symmetrically installed on the front and back sides inside the shell. Two connecting pipes are connected to the corresponding air tanks. A disassembly plate is snapped onto the left side of the shell. A spiral plate is connected inside the fixing pipe, and a fan is rotatably connected to the spiral plate. An exhaust pipe is connected to the top of the shell. A sliding sleeve is connected to the top of the shell, and a piston rod is slidably connected inside the sliding sleeve. A flexible plate is connected inside the exhaust pipe, and the other end of the piston rod is connected to the flexible plate.

[0007] Furthermore, it also includes an observation window, which is embedded in the front side of the fixed tube.

[0008] Furthermore, it also includes a guide plate, which is connected to the exhaust pipe.

[0009] Furthermore, it also includes a vacuum gauge, which is installed inside the housing.

[0010] Furthermore, it also includes anti-slip pads, with anti-slip pads distributed symmetrically on the bottom of the casing.

[0011] Furthermore, each rack is equipped with multiple mounting rods.

[0012] The beneficial effects of this invention are as follows: By setting up a spiral plate and impeller structure, this device allows multiple gases to undergo multiple mixing processes before entering the vacuum chamber, significantly improving the uniformity of gas mixing and effectively solving the problem of unstable coating performance caused by uneven gas mixing in traditional gas filling devices. At the same time, the automatic exhaust and sealing mechanism composed of piston rod and flexible plate can exhaust gas in time when the internal pressure of the shell is too high, ensuring the safety and stability of equipment operation. It automatically resets and seals after the pressure drops, without manual intervention, improving the intelligence and automation level of the system. In addition, with the real-time monitoring function of the vacuum gauge, the operator can accurately control the gas pressure in the chamber to ensure that the coating process is always in the best condition. Attached Figure Description

[0013] Figure 1 This is a three-dimensional structural diagram of the present invention.

[0014] Figure 2 This is a three-dimensional structural diagram of the shell, placement rack, and fixing tube of this utility model.

[0015] Figure 3 This is a cross-sectional view of the housing of this utility model.

[0016] Figure 4 This is a cross-sectional view of the fixing tube of this utility model.

[0017] Figure 5 This is a cross-sectional view of the exhaust pipe and sliding sleeve of this utility model.

[0018] In the attached diagram, the following are the reference numerals: 1-shell, 2-door, 3-placement rack, 31-coating assembly, 4-fixed pipe, 5-observation window, 6-connecting pipe, 7-air tank, 8-disassembly plate, 9-spiral plate, 10-wind wheel, 11-exhaust pipe, 12-guide plate, 13-sliding sleeve, 14-piston rod, 15-soft plate, 16-vacuum gauge, 17-anti-slip pad. Detailed Implementation

[0019] The present invention will now be described in detail with reference to the accompanying drawings and specific embodiments.

[0020] Example: An intelligent controllable gas filling device for a vacuum coating machine, such as... Figures 1-5As shown, the device includes a housing 1, a door 2, a placement rack 3, a coating assembly 31, a fixing tube 4, an observation window 5, a connecting tube 6, a gas storage tank 7, a disassembly plate 8, a spiral plate 9, a fan wheel 10, an exhaust pipe 11, a guide plate 12, a sliding sleeve 13, a piston rod 14, a flexible plate 15, a vacuum gauge 16, and an anti-slip pad 17. The door 2 is rotatably connected to the housing 1. Multiple placement racks 3 are evenly spaced inside the housing 1, each with multiple mounting rods for placing coating items. The coating assembly 31 is symmetrically installed on the left and right sides inside the housing 1. A fixing tube 4 is installed on the left side of the housing 1, with an observation window 5 embedded on its front side to observe the gas conditions inside. Connecting tubes 6 are symmetrically connected to the bottom of the fixing tube 4. Gas storage tanks 7 are symmetrically installed on the front and back sides inside the housing 1 to store the process gases (such as argon, nitrogen, etc.) required for coating. Two connecting tubes 6 are connected to the corresponding gas storage tanks 7. A disassembly plate 8 is snapped onto the left side of the housing 1. 4. An internal spiral plate 9 is connected, whose spiral structure can guide the airflow to form a swirling state, enhance the uniformity of gas distribution, and improve the coating quality. A fan wheel 10 is rotatably connected to the spiral plate 9, which rotates under the push of the airflow to assist gas flow and mixing. An exhaust pipe 11 is connected to the top of the housing 1 to discharge excess gas in the chamber. A guide plate 12 is connected to the exhaust pipe 11 to guide the exhaust direction. A sliding sleeve 13 is connected to the top of the housing 1, and a piston rod 14 is slidably connected inside the sliding sleeve 13. A flexible plate 15 is connected inside the exhaust pipe 11. The other end of the piston rod 14 is connected to the flexible plate 15, which can move with the piston rod 14 to realize the automatic opening and closing of the exhaust port and adjust the pressure in the chamber. A vacuum gauge 16 is installed inside the housing 1 to monitor the vacuum degree in the chamber in real time, providing key data support for the coating process and ensuring the coating quality. Anti-slip pads 17 are symmetrically connected to the bottom of the housing 1, which have anti-slip and shock absorption functions and enhance the stability of the equipment when placed.

[0021] When this device is needed, the operator can connect the external exhaust equipment to the exhaust pipe 11. After connecting the exhaust pipe 11, open the chamber door 2 and place the workpieces to be coated on the multiple placement racks 3 in sequence. Then close the chamber door 2. Next, start the two gas storage tanks 7. The gas flows into the fixed pipe 4 through the connecting pipe 6. During this process, the two gases rise along the spiral channel of the spiral plate 9 to achieve preliminary mixing. When the gas rises to the upper part of the fixed pipe 4, its impact force drives the impeller 10 to rotate, thereby further improving the uniformity of gas mixing. The mixed gas enters the housing 1 to coat the workpieces placed on the placement racks 3. When the gas pressure inside the housing 1 is too high, the gas pressure will push the piston rod 14 upward. The pressure rises, causing the flexible plate 15 to open the exhaust channel, allowing excess gas to be discharged through the exhaust pipe 11. When the air pressure drops, the piston rod 14 automatically resets due to gravity, causing the flexible plate 15 to reseal the exhaust pipe 11. The operator can monitor the pressure change inside the housing 1 in real time through the vacuum gauge 16. When the pressure reaches the set threshold, the gas storage tank 7 is closed to stop the gas supply. After the coating process is completed, the external exhaust equipment is started to evacuate the gas inside the housing 1 through the exhaust pipe 11. At this time, the suction will once again drive the flexible plate 15 and piston rod 14 to move upward. After evacuation, the exhaust equipment is closed, and the flexible plate 15 and piston rod 14 automatically reset and seal the exhaust pipe 11. Finally, the chamber door 2 is opened, and the coated workpiece is taken out. The entire operation process is completed.

[0022] The above description is merely an embodiment of this utility model and does not limit the patent scope of this utility model. Any equivalent structural or procedural transformations made using the content of this utility model specification, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.

Claims

1. A smart controllable gas filling device for a vacuum coating machine, characterized in that: The system includes a shell (1), a door (2), a rack (3), a coating assembly (31), a fixing pipe (4), a connecting pipe (6), a gas storage tank (7), a disassembly plate (8), a spiral plate (9), a windmill (10), an exhaust pipe (11), a sliding sleeve (13), a piston rod (14), and a flexible plate (15). The door (2) is rotatably connected to the front side of the shell (1). Three racks (3) are fixedly connected at even intervals inside the bottom of the shell (1). The coating assembly (31) is symmetrically installed on the left and right sides of the top inside the shell (1). The fixing pipe (4) is fixedly connected to the left side of the shell (1). The connecting pipe is symmetrically fixedly connected to the bottom of the fixing pipe (4). (6) A gas storage tank (7) is symmetrically installed inside the shell (1) at the front and back. Two connecting pipes (6) are fixedly connected to the gas storage tank (7) at the corresponding positions. A disassembly plate (8) is snapped into the bottom of the left side of the shell (1). A spiral plate (9) is fixedly connected inside the fixed pipe (4). A wind wheel (10) is rotatably connected to the upper end of the spiral plate (9). An exhaust pipe (11) is fixedly connected to the middle of the top surface of the shell (1). A sliding sleeve (13) is connected to the right side of the top of the shell (1). A piston rod (14) is slidably connected inside the sliding sleeve (13). A flexible plate (15) is connected inside the exhaust pipe (11). The other end of the piston rod (14) is fixedly connected to the flexible plate (15).

2. The intelligent controllable vacuum coating machine gas filling device according to claim 1, characterized in that: It also includes an observation window (5), which is embedded on the front side of the fixed tube (4).

3. The intelligent controllable vacuum coating machine gas filling device according to claim 2, characterized in that: It also includes a guide plate (12), and the upper end of the exhaust pipe (11) is fixedly connected to the guide plate (12).

4. The intelligent controllable vacuum coating machine gas filling device according to claim 3, characterized in that: It also includes a vacuum gauge (16), which is installed on the right wall inside the housing (1).

5. The intelligent controllable vacuum coating machine gas filling device according to claim 4, characterized in that: It also includes anti-slip pads (17), and the bottom of the shell (1) is symmetrically connected with anti-slip pads (17) distributed on the left and right sides.

6. The intelligent controllable vacuum coating machine gas filling device according to claim 5, characterized in that: Each placement rack (3) has multiple mounting rods.

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