A heater and chemical vapor deposition apparatus

Abstract

This utility model discloses a heater and a chemical vapor deposition apparatus. The heater includes a heating body comprising multiple circumferentially extending heating segments. These heating segments are sequentially connected by a reversing portion to form at least two radially arranged heating rings. Gaps exist between adjacent heating segments. The reversing portion is provided with a first through-hole communicating with the gaps. The cross-sectional area at the shortest distance between the wall of the first through-hole and the circumferentially extending sidewall of the reversing portion is not less than three-quarters of the cross-sectional area of ​​the heating segment. This utility model extends the service life of the heater by limiting the cross-sectional area at the shortest distance between the wall of the first through-hole and the circumferentially extending sidewall of the reversing portion.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and in particular to a heater and a chemical vapor deposition device. Background Technology

[0002] Thin film growth is an important process in semiconductor manufacturing, which uses physical or chemical methods to attach a substance (raw material) to the surface of a substrate. Thin film growth apparatus includes heaters to heat the substrate stage during the thin film growth process.

[0003] Please see Figure 1 , Figure 1 This is a schematic diagram of a heater in the prior art. The existing heater has a hole on the inner side of the bend. Due to the small hole diameter, the current path on the inner side of the bend is shorter than on the outer side, resulting in power density concentration around the hole. Please refer to [link / reference needed]. Figure 2 , Figure 2 This is a simulation diagram of the power density distribution at the bend of an existing heater. A continuous color gradient is used to represent the power density distribution, with red representing high power density areas and blue representing low power density areas. It should be noted that... (The rest of the text is incomplete and requires further context.) Figure 2 The numbers 1-4 marked in the text are only used to characterize the relative magnitude of power density and do not represent the actual power density values.

[0004] The concentration of power density around the hole makes this location prone to overheating and burning. Existing technology uses the method of increasing the diameter of the hole to extend the current path on the inside of the bend and reduce the difference in current paths between the inside and outside of the bend, which alleviates the concentration of power density around the hole to some extent. However, when the hole diameter is increased to a certain extent, a new local power density concentration area is generated between the hole wall and the heater sidewall due to the small distance, which will also lead to overheating and burning at this location.

[0005] Therefore, it is necessary to propose a new heater and chemical vapor deposition equipment to extend the service life of the heater.

[0006] The statements herein provide only background information relating to this invention and do not necessarily constitute prior art. Utility Model Content

[0007] The purpose of this invention is to provide a heater and a chemical vapor deposition apparatus to improve the power density concentration phenomenon between the bore wall and the side wall of the heater in existing heaters and extend the service life of the heater.

[0008] To achieve the above objectives, in a first aspect, this utility model provides a heater for heating a substrate support stage within a thin film growth apparatus, comprising:

[0009] Heating element, the heating element comprising:

[0010] Multiple heating sections extending circumferentially;

[0011] The folding section connects multiple heating segments sequentially to form at least two radially arranged heating rings, with gaps between adjacent heating segments.

[0012] The folding section is provided with a first through hole communicating with the gap, and the cross-sectional area at the shortest distance between the wall of the first through hole and the side wall extending circumferentially from the folding section is not less than three-quarters of the cross-sectional area of ​​the heating section.

[0013] Optionally, the lower surface of the heating element around the first through hole extends downward to form a first thickened portion.

[0014] Optionally, the first thickened portion is located near the edge of the heating section, and its extension line passes through the center of the heater.

[0015] Optionally, the distance between the edge of the first thickened portion near the heating section and the axis of the first through hole does not exceed 1.5 times the radial diameter of the first through hole.

[0016] Optionally, the first thickened portion is connected to a transition portion near the edge of the heating section, and the thickness of the transition portion decreases circumferentially from the edge of the first thickened portion.

[0017] Optionally, the radial diameter of the first through hole is not less than twice the width of the gap.

[0018] Optionally, the shortest distance between the wall of the first through hole and the circumferentially extending sidewall of the folded-back portion is not less than 0.4 times the radial width of the heating section.

[0019] Optionally, the shortest distance between the wall of the first through hole and the radially extending sidewall of the folded-back portion is not greater than 1.5 times the radial width of the heating section.

[0020] Optionally, the heating element includes:

[0021] The first heating section is generally annular and has two ends;

[0022] At least one pair of second heating segments, the second heating segments being arc-shaped, the two ends of the first heating segment being connected to the beginning of one of the second heating segments via the fold-back portion, and the ends of the two second heating segments being connected to the beginning of another pair of second heating segments or electrodes via the fold-back portion.

[0023] Optionally, the second heating section is semi-annular in shape and each pair of the second heating sections is mirror-symmetrical.

[0024] Optionally, the second heating section is disposed around the first heating section, and the ends of the outermost pair of the second heating sections are connected to electrodes.

[0025] Optionally, the heating element includes a first heating section and a pair of second heating sections, the ends of the two second heating sections being circumferentially spaced, and the portion of the first heating section located in the inner circle protruding outward to fill the gap.

[0026] Optionally, the portion of the first heating section located in the inner ring that protrudes outward to the interval is arc-shaped or rectangular.

[0027] Optionally, the first heating section is disposed around the second heating section, and the ends of the innermost pair of the second heating sections are connected to electrodes.

[0028] Optionally, a plurality of second through holes are provided on the extension path of the gap, and the lower surface of the heating element around the second through holes extends downward to form a second thickened portion.

[0029] Optionally, the cross-sectional area at the shortest distance between the wall of the second through hole and the outer wall of the heating section is not less than three-quarters of the cross-sectional area of ​​the heating section.

[0030] Optionally, the multiple second through holes are arranged in a centrally symmetrical relationship with the center of the heater as the center of symmetry.

[0031] Optionally, the circumferential edge of the second thickened portion extends through the center of the heater.

[0032] Secondly, this utility model provides a chemical vapor deposition apparatus, including a reaction chamber;

[0033] A substrate support stage is disposed within the reaction chamber, and the substrate support stage is used to place the substrate;

[0034] The heater provided in the first aspect of this utility model is disposed below the substrate support stage and is used to heat the substrate support stage;

[0035] A lifting pin is disposed within the reaction chamber to lift the substrate placed on the substrate support platform, or to allow the substrate to fall onto the substrate support platform.

[0036] Compared with the prior art, this utility model has at least the following advantages:

[0037] The heater provided by this utility model includes a heating body comprising multiple circumferentially extending heating segments. These heating segments are sequentially connected by a folding-back portion to form at least two radially arranged heating rings, with gaps between adjacent heating segments. The folding-back portion is provided with a first through-hole communicating with the gaps. The cross-sectional area at the shortest distance between the wall of the first through-hole and the circumferentially extending sidewall of the folding-back portion is not less than three-quarters of the cross-sectional area of ​​the heating segment. This utility model, by limiting the cross-sectional area at the shortest distance between the wall of the first through-hole and the circumferentially extending sidewall of the folding-back portion, compared to existing technologies, can increase the diameter of the first through-hole to reduce the difference in current paths between the inner and outer sides of the folding-back portion, while simultaneously uniformly distributing the current along the radial cross-section at various positions of the heating body. This improves the power density concentration phenomenon between the wall of the first through-hole and the circumferentially extending sidewall of the folding-back portion, thus extending the service life of the heater. Attached Figure Description

[0038] Figure 1 This is a schematic diagram of the structure of an existing heater;

[0039] Figure 2 A simulation diagram of the power density distribution at the bend of an existing heater;

[0040] Figure 3 A three-dimensional structural schematic diagram of a heater provided in an embodiment of this utility model;

[0041] Figure 4 A bottom view of the heater provided in an embodiment of the present invention;

[0042] Figure 5 for Figure 4 A partially enlarged schematic diagram of the foldback section of the heater shown;

[0043] Figure 6 for Figure 4 A schematic diagram of the AA cross-section of the heater shown;

[0044] Figure 7 for Figure 4 A schematic diagram of the BB cross-section of the heater shown;

[0045] Figure 8 This is a three-dimensional schematic diagram of the heater in an inverted state according to an embodiment of the present invention;

[0046] Figure 9 This is a top view of the heater reversal section provided in an embodiment of the present invention;

[0047] Figure 10 A simulation diagram of the power density distribution of a heater provided in an embodiment of this utility model;

[0048] Figure 11 A three-dimensional structural schematic diagram of a heater provided in an embodiment of this utility model;

[0049] Figure 12 A three-dimensional structural schematic diagram of a heater provided in an embodiment of this utility model;

[0050] Figure 13 A three-dimensional structural schematic diagram of a heater provided in an embodiment of this utility model;

[0051] Figure 14 A three-dimensional structural schematic diagram of a heater provided in an embodiment of this utility model;

[0052] Figure 15 This is a schematic diagram of the structure of a heater provided in one embodiment of the present invention;

[0053] Figure 16 for Figure 15 The diagram shows the structure of the heater in its inverted state.

[0054] Figure 17 This is a schematic diagram of the structure of a chemical vapor deposition apparatus provided in an embodiment of the present invention.

[0055] Explanation of reference numerals in the attached figures:

[0056] 100-Heating element; 110-Heating section; 111-First heating section; 112-Second heating section; 120-Folding section; 130-Gap; 140-First through hole; 141-First thickened section; 142-Transition section; 150-Electrode; 160-Second through hole; 161-Second thickened section;

[0057] 10-Reaction chamber; 20-Substrate support stage; 30-Heater; 40-Lifting pin. Detailed Implementation

[0058] The heater and chemical vapor deposition apparatus of this utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments. The advantages and features of this utility model will become clearer from the following description. It should be noted that the drawings are in a very simplified form and use non-precise proportions, only for the purpose of conveniently and clearly illustrating the embodiments of this utility model. Please refer to the drawings to make the objectives, features, and advantages of this utility model more apparent and understandable. It should be understood that the structures, proportions, sizes, etc., depicted in the accompanying drawings are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed in the specification, and are not intended to limit the implementation conditions of this utility model. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in the proportional relationships, or adjustments to the size, without affecting the effects and objectives achieved by this utility model, should still fall within the scope of the technical content disclosed in this utility model.

[0059] As described in the background art, existing heaters have holes on the inner side of the bend. When the hole diameter is small, the power density concentration phenomenon occurs around the hole due to the large difference in current paths between the inner and outer sides of the bend, making this location prone to overheating and burning. Increasing the hole diameter will result in the distance between the hole wall and the heater sidewall being too small, which in turn will create a new local power density concentration area between the hole wall and the heater sidewall, also leading to overheating and burning, and failing to extend the service life of the heater.

[0060] To mitigate the power density concentration between the orifice wall and the heater sidewall and extend the heater's lifespan, this embodiment provides a heater. Please refer to [link to relevant documentation]. Figure 3 , Figure 3 This is a three-dimensional structural diagram of the heater provided in this embodiment. The heater includes a heating body 100, which includes a plurality of heating segments 110 extending circumferentially in the same plane, and a folding portion 120 connecting the plurality of heating segments 110 in sequence. The heating body 100 forms at least two radially arranged heating coils in the plane. Each heating coil includes at least one heating segment 110. Two heating segments 110 connected by a folding portion 120 are respectively located in two adjacent heating coils, and a gap 130 exists between two adjacent heating segments 110.

[0061] The folding portion 120 is provided with a first through hole 140 communicating with the gap 130. Specifically, the axis of the first through hole 140 is perpendicular to the plane where the heating element 100 is located. In this embodiment, the cross-sectional area at the shortest distance between the wall of the first through hole 140 and the circumferentially extending sidewall of the folding portion 120 is not less than three-quarters of the cross-sectional area of ​​the heating section 110. Please refer to [link / reference]. Figure 4 , Figure 4This is a bottom view of the heater provided in this embodiment. Figure 4 The cutting position of the section symbol AA is the shortest distance between the wall of the first through hole 140 and the circumferentially extending sidewall of the folded-back portion 120; please refer to Figure 5 , Figure 5 for Figure 4 The diagram shows a partially enlarged view of the reversing portion 120 of the heater. The shortest distance between the wall of the first through hole 140 and the circumferentially extending sidewall of the reversing portion 120 is L1. Please refer to [link / reference]. Figure 6 , Figure 6 for Figure 4 The diagram shows a cross-sectional view of the heater (AA section). Figure 6 The shaded area shown by the cross line is the cross section at the shortest distance L1, with a cross-sectional area of ​​S1. In this embodiment, the heater has a cross-sectional area S1 at the shortest distance L1 that is not less than three-quarters of the cross-sectional area of ​​the heating section 110. This increases the radial diameter of the first through hole 140 while alleviating the power density concentration between the hole wall of the first through hole 140 and the circumferentially extending sidewall of the return portion 120, thereby extending the service life of the heater.

[0062] Specifically, please refer to Figure 7 , Figure 7 for Figure 4 The schematic diagram of the heater shown in the BB cross-section illustrates that the lower surface of the heating element 100 surrounding the first through hole 140 extends downward to form a first thickened portion 141. In this embodiment, when the radial diameter of the first through hole 140 is determined, the shortest distance L1 between the hole wall of the first through hole 140 and the circumferentially extending sidewall of the folded-back portion 120 is also determined. The size of the cross-sectional area S1 can be adjusted by changing the downward extension distance of the lower surface of the heating element 100 surrounding the first through hole 140, i.e., adjusting the thickness of the first thickened portion 141. For example, when the cross-sectional area S1 is too small, resulting in local power density concentration, the thickness of the first thickened portion 141 can be increased to limit the cross-sectional area S1 to not less than three-quarters of the cross-sectional area of ​​the heating section 110.

[0063] For more information, please refer to [the relevant documentation / reference]. Figure 4 and Figure 8 , Figure 8This is a three-dimensional schematic diagram of the heater in an inverted state according to an embodiment of the present invention. The first thickened portion 141 is near the edge of the heating section 110, and its extension line passes through the center O of the heater. In this embodiment, the extension line of the first thickened portion 141 near the edge of the heating section 110 passes through the center O, so that when the heating body 100 is in operation, the direction of current flow in the heating body 100 is perpendicular to the edge of the first thickened portion 141 near the heating section 110, which improves the uniformity of current distribution in the heating body 100 and helps to form a more uniform heat field.

[0064] For more information, please see Figure 5 The distance L2 between the edge of the first thickened portion 141 near the heating section 110 and the axis of the first through hole 140 does not exceed 1.5 times the radial diameter D1 of the first through hole 140. In this embodiment, limiting the distance L2 between the edge of the first thickened portion 141 near the heating section 110 and the first through hole 140 avoids the situation where the radial cross-sectional area of ​​a local location of the heating element 100 is too large, resulting in a local power density reduction and the formation of a cold zone.

[0065] For more information, please refer to [the relevant documentation / reference]. Figure 7 and Figure 8 The first thickened portion 141 is connected to a transition portion 142 near the edge of the heating section 110, and the thickness of the transition portion 142 decreases circumferentially from the edge of the first thickened portion 141. In this embodiment, the transition portion 142 is provided so that the cross-sectional area of ​​the heating element 100 changes relatively smoothly in the radial direction at various positions, further uniformly distributing the power density and extending the service life of the heater.

[0066] In this embodiment, please refer to Figure 9 , Figure 9 This is a top view of the heater reversal section 120 according to an embodiment of the present invention. The radial diameter D1 of the first through hole 140 is not less than twice the width D2 of the gap 130, so as to extend the current path inside the reversal section 120, reduce the difference in current paths between the inside and outside of the reversal section 120, and alleviate the phenomenon of power density concentration on the hole wall of the first through hole 140.

[0067] In this embodiment, please refer to Figure 9Specifically, the shortest distance L1 between the wall of the first through hole 140 and the circumferentially extending sidewall of the return portion 120 is not less than 0.4 times the radial width D3 of the heating section 110. In this embodiment, the purpose of increasing the radial diameter D1 of the first through hole 140 is to extend the current path inside the return portion 120 and avoid power density concentration inside the return portion 120. However, if the radial diameter D1 of the first through hole 140 is too large, it will not only cause power density concentration between the sidewall of the first through hole 140 and the circumferentially extending sidewall of the return portion 120, but also affect the thermal field distribution of the surrounding environment under the working state of the heater. Therefore, the distance L1 between the wall of the first through hole 140 and the circumferentially extending sidewall of the return portion 120 is limited to ensure that the heater can provide a relatively uniform thermal field under the working state.

[0068] For more information, please see Figure 9 The shortest distance L3 between the wall of the first through hole 140 and the radially extending sidewall of the return portion 120 is not greater than 1.5 times the radial width D3 of the heating section 110. If the distance L3 between the wall of the first through hole 140 and the radially extending sidewall of the return portion 120 is too large, it will lead to a local power density reduction and the formation of cold zones. Therefore, limiting the distance L3 between the wall of the first through hole 140 and the radially extending sidewall of the return portion 120 avoids a local power density reduction in the heating element 100 and improves the heating uniformity of the heater.

[0069] It should be noted that the cross-sectional shape of the heating section 110 in this embodiment is rectangular. In other embodiments, heaters with other cross-sectional shapes, such as circles, squares, or other regular shapes, may also be used. This embodiment does not make specific limitations here.

[0070] In this embodiment, please refer to Figure 10 , Figure 10 This is a simulation diagram of the power density distribution of a heater according to an embodiment of the present invention. A continuous color gradient is used to represent the power density distribution, where red represents high power density areas and blue represents low power density areas. It should be noted that... Figure 10 The numbers 0.5-2 marked in the figure are only used to characterize the relative magnitude of power density and do not represent the actual power density values. It can be seen that the peak power density of the heater is significantly reduced compared with the prior art, while the distribution area of ​​high power density is effectively reduced, and the overall power distribution is more uniform. Therefore, the heater provided in this embodiment significantly improves the phenomenon of power density concentration.

[0071] In this embodiment, please refer to Figure 8 and Figure 11 , Figure 11This is a schematic diagram of a heater structure according to an embodiment of the present invention. In the heater provided in this embodiment, the heating element 100 includes: a first heating section 111, which is generally annular and has two ends; at least one pair of second heating sections 112, which are arc-shaped. The two ends of the first heating section 111 are respectively connected to the beginning of one of the second heating sections 112 via the fold-back portion 120, and the ends of the two second heating sections 112 are respectively connected to the beginning of another pair of second heating sections 112 or an electrode 150 via the fold-back portion 120. Specifically, Figure 8 A schematic diagram of a heater including a first heating section 111 and a pair of second heating sections 112 is shown. The heater as a whole includes two radially distributed heating rings, and the ends of the two second heating sections 112 located on the outer ring are respectively connected to an electrode 150. Figure 11 A schematic diagram of a heater including a first heating section 111 and two pairs of second heating sections 112 is shown. The heater as a whole includes three radially arranged heating coils, with the ends of the two outermost second heating sections 112 respectively connected to an electrode 150. It should be noted that in other embodiments, more pairs of second heating sections 112 can be provided to achieve more heating coils, which can be achieved according to the area of ​​the required heating region, and is not specifically limited here.

[0072] Specifically, in this embodiment, the second heating segment 112 is semi-annular in shape, and each pair of second heating segments 112 is mirror-symmetrical, making the heat field distribution around the heater more uniform during operation. In some embodiments, each pair of second heating segments 112 may include a second heating segment 112 extending approximately 90° circumferentially and a second heating segment 112 extending approximately 270° circumferentially, so that a pair of second heating segments 112 can be combined to form a complete heating ring. More often, in other embodiments, the second heating segment 112 may extend at other angles circumferentially, which is not specifically limited in this embodiment.

[0073] In this embodiment, the second heating section 112 can be disposed around the first heating section 111, and the ends of the outermost pair of second heating sections 112 are respectively connected to electrodes 150. Please refer to [link to relevant documentation]. Figure 8 and Figure 11 .

[0074] In other embodiments, the first heating section 111 may be positioned around the second heating section 112. Please refer to [link to relevant documentation]. Figure 12 , Figure 12This is a three-dimensional structural diagram of a heater provided in this embodiment. The ends of the pair of second heating sections 112 in the innermost circle are respectively connected to two electrodes 150. This embodiment does not impose any specific limitations.

[0075] In some embodiments, please refer to Figure 13 and Figure 14 , Figure 13 and Figure 14 Both diagrams show a schematic of a heater including a first heating section 111 and a pair of second heating sections 112. The second heating sections 112 are disposed around the first heating section 111, and the ends of the two outermost second heating sections 112 are respectively connected to an electrode 150. More specifically, the ends of the two second heating sections 112 are circumferentially spaced, and the portion of the first heating section 111 located in the inner circle protrudes outward to fill the gap. For details, please refer to... Figure 13 The portion of the first heating section 111 located in the inner ring that protrudes outward to the interval is arc-shaped; see also Figure 14 The portion of the first heating section 111 located in the inner ring that protrudes outward to the interval is rectangular.

[0076] In other embodiments, please refer to Figure 15 In the heater, Figure 15 This is a schematic diagram of the heater structure provided in an embodiment of the present invention. Multiple second through holes 160 are provided along the extension path of the gap 130. A second thickened portion 161 extends downward from the lower surface of the heating element surrounding the second through hole 160. The cross-sectional area at the shortest distance between the hole wall of the second through hole 160 and the outer wall of the heating section 110 can be adjusted by adjusting the thickness of the second thickened portion 161. This ensures that the cross-sectional area of ​​the heating element 100 around the second through hole 160 in the radial direction is not too small, thus balancing the power density distribution and improving the heating uniformity of the heater. In this embodiment, the cross-sectional area at the shortest distance between the hole wall of the second through hole 160 and the outer wall of the heating section 110 is not less than three-quarters of the cross-sectional area of ​​the heating section 110. A portion of the second through hole 160 can be used for the passage of a lifting pin, thereby enabling substrate transfer. Preferably, the multiple second through holes 160 are arranged in a centrally symmetrical relationship with the center O of the heater as the center of symmetry, which is beneficial for improving the overall stress distribution uniformity of the heater.

[0077] Specifically, please refer to Figure 16 , Figure 16 for Figure 15The diagram shows a three-dimensional structure of the heater in an inverted state. The extension line of the circumferential edge of the second thickened portion 161 passes through the center O of the heater, so that when the heating body 100 is in operation, the direction of current flow in the heating body 100 is perpendicular to the circumferential edge of the second thickened portion 161, which improves the uniformity of current distribution in the heating body 100 and helps to form a more uniform heat field.

[0078] In summary, the heater provided in this embodiment includes a heating body 100, which includes a plurality of circumferentially extending heating segments 110. The plurality of heating segments 110 are sequentially connected by a folding portion 120 to form at least two radially arranged heating rings. There is a gap 130 between adjacent heating segments 110. The folding portion 120 is provided with a first through hole 140, which communicates with the gap 130. The cross-sectional area S1 at the shortest distance L1 between the hole wall of the first through hole 140 and the circumferentially extending side wall of the folding portion 120 is not less than three-quarters of the cross-sectional area of ​​the heating segment 110. In this embodiment, by setting the cross-sectional area S1 at the shortest spacing L1 to be no less than three-quarters of the cross-sectional area of ​​the heating section 110, the radial diameter of the first through hole 140 is increased to optimize the power density concentration on the hole wall of the first through hole 140. At the same time, the phenomenon of power density concentration between the hole wall of the first through hole 140 and the circumferentially extended sidewall of the folded-back portion 120 is also improved, thereby significantly extending the service life of the heater.

[0079] Based on the same inventive concept, this embodiment also provides a chemical vapor deposition apparatus; please refer to [link to relevant documentation]. Figure 17 The heating element includes:

[0080] Reaction chamber 10;

[0081] A substrate support stage 20 is disposed within the reaction chamber 10, and the substrate support stage 20 is used to place the substrate;

[0082] The heater 30 provided in this embodiment is disposed below the substrate support stage 20 and is used to heat the substrate support stage 20;

[0083] A lifting pin 40 is disposed in the reaction chamber 10 to lift the substrate placed on the substrate support stage 20, or to allow the substrate to fall onto the substrate support stage 20.

[0084] The chemical vapor deposition apparatus provided in this embodiment, having any of the heaters provided in this embodiment, can provide a uniform and stable thermal field while extending the service life of the heater.

[0085] In the description of this utility model, it should be understood that the terms "center," "height," "thickness," "upper," "lower," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," and "circumferential," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0086] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0087] Although the present invention has been described in detail through the above preferred embodiments, it should be understood that the above description should not be considered as a limitation of the present invention. Various modifications and substitutions to the present invention will be apparent to those skilled in the art after reading the above content. Therefore, the scope of protection of the present invention should be defined by the appended claims.

Claims

1. A heater for heating a substrate support stage within a thin film growth apparatus, characterized in that, include: Heating element, the heating element comprising: Multiple heating sections extending circumferentially; The folding section connects multiple heating segments sequentially to form at least two radially arranged heating rings, with gaps between adjacent heating segments. The folding section is provided with a first through hole communicating with the gap, and the cross-sectional area at the shortest distance between the wall of the first through hole and the side wall extending circumferentially from the folding section is not less than three-quarters of the cross-sectional area of ​​the heating section.

2. The heater as claimed in claim 1, characterized in that, The lower surface of the heating element around the first through hole extends downward to form a first thickened portion.

3. The heater as described in claim 2, characterized in that, The first thickened portion is located near the edge of the heating section, and its extension line passes through the center of the heater.

4. The heater as claimed in claim 2, characterized in that, The distance between the edge of the first thickened portion near the heating section and the axis of the first through hole does not exceed 1.5 times the radial diameter of the first through hole.

5. The heater as claimed in claim 2, characterized in that, The first thickened portion is connected to a transition portion near the edge of the heating section, and the thickness of the transition portion decreases circumferentially from the edge of the first thickened portion.

6. The heater as claimed in claim 1, characterized in that, The radial diameter of the first through hole is not less than twice the width of the gap.

7. The heater as claimed in claim 1, characterized in that, The shortest distance between the wall of the first through hole and the circumferentially extending sidewall of the folded-back portion is not less than 0.4 times the radial width of the heating section.

8. The heater as claimed in claim 1, characterized in that, The shortest distance between the wall of the first through hole and the radially extending sidewall of the folded-back portion is no greater than 1.5 times the radial width of the heating section.

9. The heater as claimed in claim 1, characterized in that, The heating element includes: The first heating section is generally annular and has two ends; At least one pair of second heating segments, the second heating segments being arc-shaped, the two ends of the first heating segment being connected to the beginning of one of the second heating segments via the fold-back portion, and the ends of the two second heating segments being connected to the beginning of another pair of second heating segments or electrodes via the fold-back portion.

10. The heater as claimed in claim 9, characterized in that, The second heating section is semi-circular in shape and each pair of the second heating sections is mirror-symmetrical.

11. The heater as claimed in claim 9, characterized in that, The second heating section is located around the first heating section, and the ends of the outermost pair of the second heating sections are connected to electrodes.

12. The heater as claimed in claim 11, characterized in that, The heating element includes a first heating section and a pair of second heating sections, the ends of the two second heating sections being circumferentially spaced, and the portion of the first heating section located in the inner circle protruding outward to fill the gap.

13. The heater as claimed in claim 12, characterized in that, The portion of the first heating section located in the inner ring that protrudes outward to the interval is arc-shaped or rectangular.

14. The heater as claimed in claim 9, characterized in that, The first heating section is located around the second heating section, and the ends of the innermost pair of the second heating sections are connected to electrodes.

15. The heater as claimed in claim 1, characterized in that, Multiple second through holes are provided along the extension path of the gap, and the lower surface of the heating element around the second through holes extends downward to form a second thickened portion.

16. The heater as claimed in claim 15, characterized in that, The cross-sectional area at the shortest distance between the wall of the second through hole and the outer wall of the heating section is not less than three-quarters of the cross-sectional area of ​​the heating section.

17. The heater as claimed in claim 15, characterized in that, Multiple second through holes are symmetrical about the center of the heater, forming a central symmetry relationship between each other.

18. The heater as claimed in claim 15, characterized in that, The circumferential edge of the second thickened portion extends through the center of the heater.

19. A chemical vapor deposition apparatus, characterized in that, include: reaction chamber; A substrate support stage is disposed within the reaction chamber, and the substrate support stage is used to place the substrate; The heater as described in any one of claims 1 to 18, wherein the heater is disposed below the substrate support stage and is used to heat the substrate support stage; A lifting pin is disposed within the reaction chamber to lift the substrate placed on the substrate support platform, or to allow the substrate to fall onto the substrate support platform.

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