Calibration tool for plasma torch

Abstract

The utility model provides a kind of calibration tool for plasma torch, and plasma torch includes cavity, ion beam slit assembly and filament assembly, calibration tool includes: first positioner, including bottom plate and top plate, both are fixedly connected by side plate, and opening and closing piece is arranged between top plate and side plate, bottom plate is provided with first clamping groove, it is cooperated with the outer contour of ion beam slit assembly to be set to so that first clamping groove can be fitted and set in ion beam slit assembly, top plate is provided with second clamping groove, it is vertically direction center alignment with first clamping groove, second clamping groove is cooperated with the outer contour of filament assembly to be set to so that second clamping groove can be fitted and set in filament assembly, the alignment positioning of filament assembly and ion beam slit assembly is realized.The utility model can accurately calibrate the installation position of ion beam slit assembly and filament assembly, avoid the installation deviation of ion beam slit assembly and filament assembly to cause the problem of abnormal plasma extraction amount, and then effectively improve product yield.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor integrated circuit manufacturing equipment, and in particular relates to a calibration tool for plasma spray guns. Background Technology

[0002] The plasma spray gun is an indispensable component of ion implantation equipment, and its core function is to neutralize the charge of the ion beam within the equipment. During ion implantation, the effective neutralization amount of plasma is crucial for maintaining the stability of the ion beam and improving implantation efficiency. The plasma spray gun achieves charge neutralization by generating plasma, thereby ensuring that the ion beam can be uniformly implanted into the target material, avoiding equipment damage and reduced implantation efficiency caused by charge accumulation.

[0003] Plasma generation in plasma torches primarily relies on the electron beam method. In this process, electrons in atoms are separated by a high-energy electron beam, forming an aggregate of charged particles—plasma. Plasma generation involves complex physical processes, including electron excitation, ionization, and subsequent recombination. The generated plasma is then drawn to the host ion beam via the positive and negative electrode effect, achieving electrical neutralization.

[0004] In the reaction chamber structure of a plasma spray gun, the relative position of the ion beam slit and the filament, as well as the aperture size of the ion beam slit, significantly affect the plasma extraction rate. Improper settings of these parameters will directly impact the plasma extraction efficiency, thereby affecting the product's electrical properties and uniformity. Poor electrical properties and uniformity will lead to decreased product quality, affecting product stability and yield.

[0005] Currently, the installation and adjustment of plasma spray guns in the industry mainly rely on the operator's visual experience and subjective judgment. This method has significant limitations, including differences in experience levels and visual standards, which can lead to variations in plasma extraction rates, thus affecting product stability and yield. The lack of precise installation and adjustment standards makes product quality control difficult, limiting the development and application of plasma spray gun technology.

[0006] It should be noted that the above introduction to the technical background is only for the purpose of providing a clear and complete explanation of the technical solutions of this application and facilitating understanding by those skilled in the art. It should not be assumed that these technical solutions are known to those skilled in the art simply because they have been described in the background section of this application. Utility Model Content

[0007] In view of the shortcomings of the prior art described above, the purpose of this utility model is to provide a calibration tool for plasma spray guns to solve the problem that the alignment of the plasma spray gun filament and the ion beam slit is prone to deviation in the prior art.

[0008] To achieve the above and other related objectives, this utility model provides a calibration tool for a plasma spray gun. The plasma spray gun includes a cavity, an ion beam slit assembly, and a filament assembly. The calibration tool includes: a first positioner, comprising a bottom plate and a top plate disposed opposite each other, the bottom plate and the top plate being fixedly connected by a side plate, and an opening and closing member provided between the top plate and the side plate to allow the top plate to open and close relative to the side plate; a first slot provided on the bottom plate, the first slot being configured to fit with the outer contour of the ion beam slit assembly so that the first slot can be fitted snugly onto the ion beam slit assembly; and a second slot provided on the top plate, the second slot being aligned vertically with the first slot and being configured to fit with the outer contour of the filament assembly so that the second slot can be fitted snugly onto the filament assembly, thereby achieving alignment and positioning of the filament assembly and the ion beam slit assembly.

[0009] Optionally, the top plate has a first edge and a second edge, and the side plate has a first side and a second side. The first edge of the top plate is connected to the first side of the side plate by an opening and closing fastener, and the second edge of the top plate and the second side of the side plate are provided with a fastener for mating connection.

[0010] Optionally, the side plate is configured to fit the outer contour of the plasma spray gun cavity so that the side plate can be fitted and sleeved on the outer wall of the plasma spray gun.

[0011] Optionally, the bottom plate, top plate, and side plates are made of metal.

[0012] Optionally, after the filament assembly is aligned and positioned, it is fixed to the plasma spray gun cavity by a screw assembly.

[0013] Optionally, the calibration tool also includes a second positioner, which includes a main body and a needle head. The main body is configured to fit the inner contour of the plasma spray gun cavity so that the main body can fit against the inner wall of the plasma spray gun cavity. A connecting hole is provided at the bottom center of the main body. The first end of the needle head is provided with a connecting part that fits into the connecting hole so that the needle head can be detachably fixed to the main body. When the main body is placed on the inner wall of the plasma spray gun cavity, the second end of the needle head passes through the gap of the ion beam gap assembly so as to align and position the gap at the center of the plasma spray gun cavity through the needle head.

[0014] Optionally, the second end of the needle head has a tapered tip and a needle body of equal diameter connected to the tapered tip.

[0015] Optionally, it includes multiple needle heads, each having a connecting portion of the same size at its first end and a needle body of equal diameter at its second end, each having a diameter corresponding to a different gap size.

[0016] Optionally, the diameter of the equal-diameter needle body at the second end of the needle head ranges from 0.1 mm to 2 mm.

[0017] Optionally, the main body is a solid metal cylinder, and the needle head is a metal needle structure.

[0018] As described above, the calibration tool for plasma spray guns of this invention has the following beneficial effects:

[0019] This invention uses a second positioner, which includes a main body and a needle head, to align and position the ion beam slit assembly by means of the needle head, thereby ensuring that the ion beam slit assembly is located at the center of the plasma spray gun cavity.

[0020] This utility model uses a second locator comprising a bottom plate and a top plate arranged opposite to each other. The bottom plate is provided with a first slot that matches the outer contour of the ion beam slit assembly, and the top plate is provided with a second slot that matches the outer contour of the filament assembly. Since the first slot and the second slot are aligned in the vertical direction, the alignment and positioning of the filament assembly and the ion beam slit assembly can be guaranteed.

[0021] This invention can accurately calibrate the installation positions of the ion beam slit assembly and the filament assembly, avoiding abnormal plasma extraction caused by installation deviations of the ion beam slit assembly and the filament assembly, thereby effectively improving the product yield.

[0022] The calibration tool of this invention has a simple structure and is easy to operate, which can effectively improve the accuracy and stability of routine maintenance of plasma spray gun equipment. Attached Figure Description

[0023] The accompanying drawings, which form part of this specification, are used to provide a further understanding of the embodiments of this application and to illustrate the implementation of this application, together with the textual description, to explain the principles of this application. Obviously, the drawings described below are merely some embodiments of this application.

[0024] Figure 1 The diagram shown is a structural schematic of the first positioner of a calibration tool for a plasma spray gun according to an embodiment of the present invention.

[0025] Figures 2-5 The diagram shown is a structural schematic of the second positioner of the calibration tool for a plasma spray gun according to an embodiment of the present invention.

[0026] Figures 6-8The diagram shows the installation process of a calibration tool for a plasma spray gun according to an embodiment of the present invention.

[0027] Component designation explanation

[0028] 1 First Positioner

[0029] 11. Base Plate

[0030] 111 First Card Slot

[0031] 12 Top Plate

[0032] 121 Second Card Slot

[0033] 13 Side panels

[0034] 131 First Edge

[0035] 132 Second Edge

[0036] 133 Opening and closing fastener

[0037] 134 Fastener

[0038] 2 Second Positioner

[0039] 21 Main body

[0040] 22 Connecting parts

[0041] 23 needle head

[0042] 231 First End

[0043] 232 Second End

[0044] 2321 Conical tip

[0045] 2322 equal diameter needle body

[0046] 3. Plasma spray gun

[0047] 31. Plasma spray gun chamber

[0048] 32 Ion Beam Slit Assembly

[0049] 321 Gap

[0050] 322 screws

[0051] 33 Filament Assembly

[0052] 331 screws Detailed Implementation

[0053] The following specific examples illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. This utility model can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this utility model.

[0054] It should be emphasized that the term "including / comprises" as used herein refers to the presence of a feature, whole, step, or component, but does not exclude the presence or addition of one or more other features, wholes, steps, or components.

[0055] Features described and / or illustrated for one embodiment may be used in the same or similar manner in one or more other embodiments, combined with features in other embodiments, or substituted for features in other embodiments.

[0056] In the detailed description of the embodiments of this utility model, for ease of explanation, the cross-sectional views illustrating the device structure may be partially enlarged and not to scale. Furthermore, the schematic diagrams are merely examples and should not limit the scope of protection of this utility model. In actual manufacturing, the three-dimensional spatial dimensions of length, width, and depth should be included.

[0057] For ease of description, spatial relation terms such as “below,” “under,” “lower than,” “below,” “above,” and “upper” may be used herein to describe the relationship between one element or feature shown in the accompanying drawings and other elements or features. It will be understood that these spatial relation terms are intended to include directions other than those depicted in the drawings for devices in use or operation. Furthermore, when a layer is referred to as being “between” two layers, it may be the only layer between the two layers, or there may be one or more layers in between.

[0058] In the context of this application, the structure described above the first feature may include embodiments in which the first and second features are formed in direct contact, or embodiments in which additional features are formed between the first and second features, such that the first and second features may not be in direct contact.

[0059] It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of the present invention. Therefore, the illustrations only show the components related to the present invention and are not drawn according to the actual number, shape and size of the components in the actual implementation. In the actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0060] During the use of the plasma spray gun, in order to ensure the efficient and stable operation of the spray gun, it is necessary to perform precise calibration on the ion beam slit assembly 32 and the filament assembly 33 inside the spray gun. Traditional calibration methods often rely on manual operation, which is not only inefficient but also makes it difficult to guarantee the accuracy of the calibration.

[0061] like Figures 1 to 8 As shown, this embodiment provides a calibration tool for a plasma spray gun. The plasma spray gun 3 includes a cavity, an ion beam slit assembly 32, and a filament assembly 33. The calibration tool includes a first positioner 1.

[0062] like Figure 1 As shown, the first positioner 1 includes a bottom plate 11 and a top plate 12 arranged opposite to each other, and the bottom plate 11 and the top plate 12 are fixedly connected by a side plate 13.

[0063] like Figure 1 As shown, an opening and closing member is provided between the top plate 12 and the side plate 13, so that the top plate 12 can be opened and closed relative to the side plate 13. In one embodiment, the top plate 12 has opposing first edges 131 and second edges 132, and the side plate 13 has opposing first side edges and second side edges. The first edge 131 of the top plate 12 is connected to the first side edge of the side plate 13 by an opening and closing fastener 133, and the second edge 132 of the top plate 12 and the second side edge of the side plate 13 are provided with a engaging fastener 134.

[0064] In one embodiment, the side plate 13 is preferably configured to fit the outer contour of the plasma spray gun cavity 31 so that the side plate 13 can be fitted and sleeved on the outer wall of the plasma spray gun, thereby improving the mechanical and positional stability of the side plate 13 and preventing the side plate 13 from shifting during the installation of the filament assembly 33.

[0065] like Figure 1 As shown, the base plate 11 is provided with a first slot 111, which is configured to fit with the outer contour of the ion beam slit assembly 32 so that the first slot 111 can be fitted snugly onto the ion beam slit assembly 32. The top plate 12 is provided with a second slot 121, which is aligned vertically with the center of the first slot 111. The second slot 121 is configured to fit with the outer contour of the filament assembly 33 so that the second slot 121 can be fitted snugly onto the filament assembly 33, thereby achieving alignment and positioning between the filament assembly 33 and the ion beam slit assembly 32. In some embodiments, the first slot 111 can be, for example, rectangular, elliptical, circular, etc., and its specific shape and size can be set according to the outer contour of the ion beam slit assembly 32. Similarly, the second slot 121 can be, for example, rectangular, elliptical, circular, etc., and its specific shape and size can be set according to the outer contour of the filament assembly 33.

[0066] In one embodiment, the base plate 11, top plate 12, and side plate 13 are metal plates to ensure the strength and durability of the first positioner 1. For example, the base plate 11, top plate 12, and side plate 13 can be stainless steel, etc. Of course, the base plate 11, top plate 12, and side plate 13 can also be made of other materials, such as rigid materials that are not easily deformed, such as ceramics, glass, etc., and are not limited to the examples listed herein.

[0067] like Figure 7 As shown, the use of the first locator 1 includes the following steps:

[0068] 1) First, fix the ion beam slit assembly 32 to the bottom of the plasma spray gun cavity 31 with screws 322, etc.

[0069] 2) Open the top plate 12 of the first positioner 1 through the opening and closing parts (such as opening and closing discount, etc.), and put the first positioner 1 on the outer wall of the plasma spray gun cavity 31 from below to above, so that the first slot 111 is tightly fitted on the ion beam gap assembly 32.

[0070] 3) Place the filament assembly 33 on top of the plasma spray gun cavity 31 and position it initially with screws 331, but do not tighten the screws 331, so that the filament assembly 33 has a certain amount of translational space relative to the plasma spray gun cavity 31.

[0071] 4) Close the top plate 12 of the first positioner 1 by opening and closing the opening and closing parts, and at the same time adjust the position of the filament assembly 33 so that the second slot 121 is tightly fitted on the filament assembly 33. At this time, the filament assembly 33 and the ion beam slit assembly 32 are completely aligned.

[0072] 5) After the filament assembly 33 and the ion beam slit assembly 32 are aligned and positioned, tighten the screws 331 on the filament assembly 33 to fix the filament assembly 33 to the plasma spray gun cavity 31. During this process, since the filament assembly 33 is tightly connected to the second slot 121 of the top plate 12, it can be ensured that the position of the filament assembly 33 will not change during the tightening of the screws 331, thereby completing the assembly of the filament assembly 33 and ensuring that the filament assembly 33 and the ion beam slit assembly 32 are completely aligned.

[0073] like Figures 2-5As shown, the calibration tool also includes a second positioner 2, which includes a main body 21 and a needle head 23. The main body 21 is configured to fit the inner contour of the plasma spray gun cavity 31 so that the main body 21 can fit against the inner wall of the plasma spray gun cavity 31. A connecting hole is provided at the bottom center of the main body 21. The first end 231 of the needle head 23 is provided with a connecting part 22 that fits with the connecting hole so that the needle head 23 can be detachably fixed to the main body 21. When the main body 21 is placed on the inner wall of the plasma spray gun cavity 31, the second end 232 of the needle head 23 passes through the gap 321 of the ion beam gap assembly 32 so that the gap is aligned and positioned at the center of the plasma spray gun cavity 31 by the needle head 23.

[0074] like Figure 3 As shown, the second end 232 of the needle head 23 has a tapered tip 2321 and a needle body 2322 of equal diameter connected to the tapered tip 2321. When in contact with the ion beam slit assembly 32, the tapered tip 2321 first passes through the slit 321 of the ion beam slit assembly 32, and then gradually contacts the needle body 2322 of equal diameter along the tapered shape. This allows the needle head 23 to pass through the slit 321 of the ion beam slit assembly 32 more effectively and accurately, and can effectively avoid the situation where the needle head 23 collides with the ion beam slit assembly 32 and causes damage to the slit.

[0075] like Figure 4 As shown, it includes multiple needle heads 23. The first end 231 of the multiple needle heads 23 has a connecting part 22 of the same size, and the second end 232 of the needle body 232 of the same diameter has a diameter size corresponding to different gap sizes.

[0076] like Figure 4 As shown, the diameter of the equal-diameter needle body 2322 at the second end 232 of the needle head 23 ranges from 0.1 mm to 2 mm. For example, it can include four needle heads 23 of different sizes, with the equal-diameter needle bodies 2322 of the four needle heads 23 being: a first diameter D1 of 0.3 mm, a second diameter D2 of 0.5 mm, a third diameter D3 of 0.7 mm, and a fourth diameter D4 of 1.1 mm. Of course, needle heads 23 of more diameter sizes can be provided according to the actual size of the slit 321 of the ion beam slit assembly 32, and are not limited to the examples listed here.

[0077] In one embodiment, the main body 21 is a solid metal cylinder, and the needle head 23 is a metal needle structure to ensure the strength and durability of the second positioner 2 while reducing the processing difficulty of the second positioner 2. For example, the main body 21 and the needle head 23 can be made of stainless steel, etc., and are not limited to the examples listed herein.

[0078] The use of the second locator 2 includes the following steps:

[0079] 1) such as Figure 5 The needle head 23 of the required size is mounted on the main body 21 as shown.

[0080] 2) such as Figure 6 As shown, the ion beam slit assembly 32 is placed at the bottom of the plasma spray gun cavity 31 and initially positioned by screws 322, but the screws 322 are not tightened, so that the ion beam slit assembly 32 has a certain translational space relative to the plasma spray gun cavity 31.

[0081] 3) Insert the second positioner 2 from the top of the plasma spray gun cavity 31, and make the needle tip 23 pass through the slit 321 of the ion beam slit assembly 32, so that the main body 21 is in close contact with the inside of the plasma spray gun cavity 31. At this time, the slit 321 of the ion beam slit assembly 32 is positioned at the center of the plasma spray gun cavity 31.

[0082] 4) After the ion beam slot assembly 32 is aligned and positioned, tighten the screws 322 on the ion beam slot assembly 32 to fix the ion beam slot assembly 32 to the plasma spray gun cavity 31. During this process, because the needle heads 23 of the ion beam slot assembly 32 are tightly connected, it can be ensured that the position of the ion beam slot assembly 32 will not change during the tightening of the screws 322, thus completing the installation of the ion beam slot assembly 32.

[0083] The first positioner 1 and the second positioner 2 mentioned above can be used together to ensure that the slit 321 of the ion beam slit assembly 32 is located at the center of the plasma spray gun cavity 31, and that the ion beam slit assembly 32 and the filament assembly 33 are precisely aligned. Specifically, this includes the following steps:

[0084] 1) such as Figure 5 The needle head 23 of the required size is mounted on the main body 21 as shown;

[0085] 2) such as Figure 6 As shown, the ion beam slit assembly 32 is placed at the bottom of the plasma spray gun cavity 31 and initially positioned by screws 322, but the screws 322 are not tightened, so that the ion beam slit assembly 32 has a certain translational space relative to the plasma spray gun cavity 31.

[0086] 3) Insert the second positioner 2 from the top of the plasma spray gun cavity 31, and make the needle tip 23 pass through the slit 321 of the ion beam slit assembly 32, and the main body 21 is in close contact with the inside of the plasma spray gun cavity 31. At this time, the slit 321 of the ion beam slit assembly 32 is positioned at the center of the plasma spray gun cavity 31.

[0087] 4) After the ion beam slot assembly 32 is aligned and positioned, tighten the screws 322 on the ion beam slot assembly 32 to fix the ion beam slot assembly 32 to the plasma spray gun cavity 31. During this process, because the needle heads 23 of the ion beam slot assembly 32 are tightly connected, it can be ensured that the position of the ion beam slot assembly 32 will not change during the tightening of the screws 322, thus completing the installation of the ion beam slot assembly 32.

[0088] 5) such as Figure 7 The top plate 12 of the first positioner 1 is opened by an opening and closing component (such as an opening and closing fold). The first positioner 1 is then fitted onto the outer wall of the plasma spray gun cavity 31 from below to above, so that the first slot 111 is tightly fitted onto the ion beam slit assembly 32.

[0089] 6) Place the filament assembly 33 on top of the plasma spray gun cavity 31 and position it initially with screws 331, but do not tighten the screws 331, so that the filament assembly 33 has a certain amount of translational space relative to the plasma spray gun cavity 31.

[0090] 7) Close the top plate 12 of the first positioner 1 by opening and closing the opening and closing parts, and at the same time adjust the position of the filament assembly 33 so that the second slot 121 is tightly fitted on the filament assembly 33. At this time, the filament assembly 33 and the ion beam slit assembly 32 are completely aligned.

[0091] 8) After the filament assembly 33 and the ion beam slit assembly 32 are aligned and positioned, tighten the screws 331 on the filament assembly 33 to fix the filament assembly 33 to the plasma spray gun cavity 31. During this process, because the filament assembly 33 is tightly connected to the second slot 121 of the top plate 12, it can be ensured that the position of the filament assembly 33 will not change during the tightening of the screws 331, thus completing the assembly of the filament assembly 33. Furthermore, the filament assembly 33 and the ion beam slit assembly 32 are completely aligned. The assembled plasma spray gun is as follows: Figure 8 As shown.

[0092] As described above, the calibration tool for plasma spray guns of this invention has the following beneficial effects:

[0093] This invention uses a second positioner 2, which includes a main body 21 and a needle head 23, to align and position the slit 321 of the ion beam slit assembly 32 by means of the needle head 23, thereby ensuring that the slit 321 of the ion beam slit assembly 32 is located at the center of the plasma spray gun cavity 31.

[0094] This utility model uses a second locator 2 comprising a bottom plate 11 and a top plate 12 arranged opposite to each other. The bottom plate 11 is provided with a first slot 111, which is configured to fit the outer contour of the ion beam slit assembly 32. The top plate 12 is provided with a second slot 121, which is configured to fit the outer contour of the filament assembly 33. Since the first slot 111 and the second slot 121 are aligned in the vertical direction, the alignment and positioning of the filament assembly 33 and the ion beam slit assembly 32 can be guaranteed.

[0095] This invention can accurately calibrate the installation positions of the ion beam slit assembly 32 and the filament assembly 33, avoiding abnormal plasma extraction caused by installation deviations of the ion beam slit assembly 32 and the filament assembly 33, thereby effectively improving the product yield.

[0096] The calibration tool of this invention has a simple structure and is easy to operate, which can effectively improve the accuracy and stability of routine maintenance of plasma spray gun equipment.

[0097] Therefore, this utility model effectively overcomes the various shortcomings of the prior art and has high industrial application value.

[0098] The above embodiments are merely illustrative of the principles and effects of this utility model and are not intended to limit the scope of this utility model. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of this utility model. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this utility model should still be covered by the claims of this utility model.

Claims

1. A calibration tool for a plasma torch, characterized by, The plasma spray gun includes a cavity, an ion beam slit assembly, and a filament assembly; the calibration tool includes: The first positioner includes a base plate and a top plate disposed opposite to each other. The base plate and the top plate are fixedly connected by a side plate. An opening and closing member is provided between the top plate and the side plate so that the top plate can open and close relative to the side plate. The base plate is provided with a first slot, which is configured to cooperate with the outer contour of the ion beam slit assembly so that the first slot can be fitted and sleeved on the ion beam slit assembly. The top plate is provided with a second slot, which is aligned vertically with the center of the first slot. The second slot is configured to cooperate with the outer contour of the filament assembly so that the second slot can be fitted and sleeved on the filament assembly, thereby achieving alignment and positioning of the filament assembly and the ion beam slit assembly.

2. The calibration tool for a plasma torch of claim 1, wherein: The top plate has a first edge and a second edge, and the side plate has a first side and a second side. The first edge of the top plate is connected to the first side of the side plate by an opening and closing fastener, and the second edge of the top plate and the second side of the side plate are provided with a fastener for cooperation.

3. The calibration tool for a plasma spray gun according to claim 1, characterized in that: The side plate is configured to fit the outer contour of the plasma spray gun cavity so that the side plate can be fitted and sleeved on the outer wall of the plasma spray gun.

4. The calibration tool for a plasma spray gun according to claim 1, characterized in that: The bottom plate, top plate, and side plates are metal plates.

5. The calibration tool for a plasma spray gun according to claim 1, characterized in that: After the filament assembly is aligned and positioned, it is fixed to the plasma spray gun cavity by a screw assembly.

6. The calibration tool for a plasma spray gun according to claim 1, characterized in that, The calibration tool further includes a second positioner, which includes a main body and a needle head. The main body is configured to fit the inner contour of the plasma spray gun cavity so that the main body can fit against the inner wall of the plasma spray gun cavity. A connecting hole is provided at the bottom center of the main body. The first end of the needle head is provided with a connecting part that fits into the connecting hole so that the needle head can be detachably fixed to the main body. When the main body is placed on the inner wall of the plasma spray gun cavity, the second end of the needle head passes through the gap of the ion beam gap assembly so as to align and position the gap at the center of the plasma spray gun cavity through the needle head.

7. The calibration tool for a plasma spray gun according to claim 6, characterized in that: The second end of the needle head has a tapered tip and a needle body of equal diameter connected to the tapered tip.

8. The calibration tool for a plasma spray gun according to claim 7, characterized in that: It includes multiple needle heads, each having a connecting portion of the same size at its first end and a needle body of equal diameter at its second end, each having a diameter corresponding to a different gap size.

9. The calibration tool for a plasma spray gun according to claim 8, characterized in that: The diameter of the equal-diameter needle body at the second end of the needle head ranges from 0.1 mm to 2 mm.

10. The calibration tool for a plasma spray gun according to claim 6, characterized in that: The main body is a solid metal cylinder, and the needle head is a metal needle structure.

Images