Dynamic spray etching device

Abstract

The utility model discloses a dynamic spraying etching device, include: spray tank, set up in the spray tank's entrance and exit section, cleaning section, wind cut section, etching section in proper order, separate through the partition between adjacent sections, etching section includes: the rotatory bearing disc of rotation setting, set up a plurality of horizontal rotatory roller on the rotatory bearing disc, set up the spray assembly above, below the rotatory bearing disc, copper foil is transported to the rotatory bearing disc by the rotatory roller, and the spray assembly synchronously occurs horizontal rotation in the process of etching copper foil from top to bottom by spraying, copper foil horizontal place in the entrance and exit section, pass through cleaning section, wind cut section in proper order, reach etching section, and the rotatory bearing disc occurs rotation simultaneously in the process of etching copper foil by spraying, drive copper foil to rotate, realize the even etching of copper foil.

Description

Technical Field

[0001] This utility model relates to etching apparatus, and in particular to dynamic spray etching apparatus. Background Technology

[0002] Conventional copper foil etching is often achieved through a roller-type double-sided spraying method, which involves horizontally conveying the copper foil into the workspace and etching the upper and lower surfaces of the copper foil through multiple horizontally arranged nozzles.

[0003] However, the problem with the above etching method is that the etching solution cannot make uniform contact with the copper foil during the etching process, resulting in deficiencies in etching uniformity, etching solution utilization, and substrate transport stability.

[0004] In summary, improving the uniformity of etching has become a problem for researchers in this field. Utility Model Content

[0005] The technical problem to be solved by this invention is: how to improve the uniformity of etching;

[0006] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is as follows:

[0007] This utility model is a dynamic spray etching device, comprising: a spray box, an inlet / outlet section, a cleaning section, an air-cutting section, and an etching section arranged sequentially within the spray box, with adjacent sections separated by partitions; the etching section includes: a rotatably mounted rotating support disk, multiple horizontal rotating rollers mounted on the rotating support disk, and spray components positioned above and below the rotating support disk; copper foil is conveyed to the rotating support disk by the rotating rollers, and the spray components rotate horizontally synchronously during the up-and-down spray etching process of the copper foil.

[0008] Furthermore, a support portion and a drive gear meshing with the rotating bearing disk are respectively provided on one side of the rotating bearing disk. The rotating bearing disk is supported on the support portion and rotates under the transmission of the drive gear.

[0009] Furthermore, the rotating support plate is provided with two opposing first supports, each with a first U-shaped groove. The rotating roller is supported within the corresponding first U-shaped groove, and a first gear is provided at the end of the rotating roller support. A rotating shaft is provided on the outer side of one of the first supports, and a second gear meshing with the first gear is provided on the rotating shaft. An input shaft is vertically disposed at the bottom of the rotating support plate, and its top is connected to the output shaft through a gear pair. The output shaft is horizontally disposed at the bottom of the rotating support plate, and a third gear is provided at the end of the output shaft, which meshes with one of the second gears.

[0010] Furthermore, the spray assembly includes: a second bracket disposed above or below the rotating support plate, the second bracket having a second U-shaped groove, the end of the spray pipe being placed in the second U-shaped groove of the second bracket; multiple spray rods located above or below are each connected to a first connecting rod, the ends of the multiple first connecting rods are hinged to the same second connecting rod, and the output shaft of the motor is connected to an eccentric component, the eccentric component being hinged to the end of the corresponding second connecting rod through two third connecting rods.

[0011] Furthermore, the air-cutting section includes a plurality of air-cutting nozzles arranged vertically, wherein the air-cutting nozzles near the cleaning section face the cleaning section, and the air-cutting nozzles near the etching section face the etching section.

[0012] The beneficial effects of this utility model are as follows: This utility model is a dynamic spray etching device. The copper foil is placed horizontally in the inlet and outlet section, and passes through the cleaning section and the air cutting section in sequence before reaching the etching section. During the process of spray etching the copper foil, the rotating support plate rotates at the same time, which drives the copper foil to rotate, thereby achieving uniform etching of the copper foil. Attached Figure Description

[0013] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0014] Figure 1 This is a schematic diagram of the structure of this utility model;

[0015] Figure 2 This is a partial schematic diagram of the etched portion;

[0016] Figure 3 This is a schematic diagram of the etched portion;

[0017] Figure 4 This is a schematic diagram of the spray assembly. Detailed Implementation

[0018] The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic diagrams, illustrating only the basic structure of the present invention, and therefore only show the components relevant to the present invention.

[0019] See Figure 1-4This embodiment is a dynamic spray etching device, including: a spray box 01, in which an inlet / outlet section 1, a cleaning section 2, an air-cutting section 3, and an etching section 4 are arranged sequentially from left to right, and adjacent sections are separated by partitions 02; the etching section 4 includes: a rotating support disk 41, multiple horizontal rotating rollers 42 arranged on the rotating support disk 41, and spray components 43 arranged above and below the rotating support disk 41; copper foil is conveyed to the rotating support disk 41 by the rotating rollers 42, and the spray components 43 rotate horizontally synchronously during the up-and-down spray etching of the copper foil;

[0020] In this embodiment, the copper foil is placed horizontally in the inlet / outlet section 1, and passes through the cleaning section 2 and the air cutting section 3 in sequence to reach the etching section 4. During the process of spraying and etching the copper foil, the rotating support disk 41 rotates at the same time, which drives the copper foil to rotate, so as to achieve uniform etching of the copper foil.

[0021] After the copper foil etching is completed, it passes through the air cutting section 3 and the cleaning section 2 in sequence, and is placed at the inlet / outlet section 1. The air cutting section 3 can prevent the water vapor generated by the cleaning section 2 from mixing with the chemical solution at the etching section 4; this layout can also reduce the overall length of the spray box 01.

[0022] In some possible embodiments, in order to illustrate how the rotating bearing disk 41 rotates, this embodiment uses a support part 411 and a drive gear 412 meshing with the rotating bearing disk 41 on one side of the rotating bearing disk 41. The rotating bearing disk 41 is supported on the support part 411 and rotates under the transmission of the drive gear 412.

[0023] In this embodiment, the outer periphery of the rotating bearing disk 41 may be provided with teeth, which mesh with the drive gear 412. The drive gear 412 is controlled by a motor to rotate, driving the rotating bearing disk 41 to rotate. In addition, the support part 411 is used to support the rotating bearing disk 41, so that the rotating bearing disk 41 remains horizontal during rotation.

[0024] In some possible embodiments, to illustrate the rotation of the rotating roller 5 on the rotating support disk 41, this embodiment uses two opposing first supports 51 on the rotating support disk 41. Each first support 51 has a first U-shaped groove 52, and the rotating roller 5 is supported within the corresponding first U-shaped groove 52. A first gear 61 is provided at the support end of the rotating roller 5. A rotating shaft 71 is provided on the outer side of one of the first supports 51, and a second gear 62 meshes with the first gear 61 on the rotating shaft 71. An input shaft 72 is vertically disposed at the bottom of the rotating support disk 41, and its top is connected to an output shaft 73 via a gear pair. The output shaft 73 is horizontally disposed at the bottom of the rotating support disk 41, and a third gear 63 is provided at the end of the output shaft 73, which meshes with one of the second gears 62.

[0025] In this embodiment, the input shaft 72 is controlled to rotate by a motor, and the power is transmitted to the output shaft 73 through the engagement of a gear pair. The output shaft 73 and the rotating shaft 71 are connected by the meshing of the second gear 62 and the third gear 63 to achieve power transmission. Due to the meshing of the second gear 62 and the first gear 61, the rotational power can be transmitted to the rotating roller 5, so as to realize the synchronous rotation of multiple rotating rollers 5, thereby realizing the copper foil moving into or out of the etching section 4.

[0026] In some possible embodiments, to illustrate the specific structure of the spray assembly 43, this embodiment uses the spray assembly 43 as follows: a second support 81 disposed above or below the rotating support plate 41, the second support 81 having a second U-shaped groove 82, the end of the spray pipe 83 being placed in the second U-shaped groove 82 of the second support 81; a plurality of spray rods 83 located above or below are all connected to a first connecting rod 84, the ends of the plurality of first connecting rods 84 are hinged to the same second connecting rod 85, the output shaft of the motor 86 is connected to an eccentric member, the eccentric member being hinged to the end of the corresponding second connecting rod 85 through two third connecting rods 87;

[0027] In this embodiment, the spray pipe 83 is rotatably mounted in the second U-shaped groove 82 of the second bracket 81. The upper spray pipe 83 sprays downwards, and the lower spray pipe 83 sprays upwards. The motor 86 rotates and transmits the rotation to the first link 84 via the third link 87 and the second link 85, thereby realizing the reciprocating rotation of the spray pipe 82. That is, during the spraying process, the spray angle of the spray pipe 82 will be adjusted within a certain range to achieve the purpose of uniform spraying.

[0028] In some possible embodiments, in order to avoid the water vapor generated in the cleaning section during the cleaning process from mixing with the chemical solution in the etching section and affecting the cleaning or etching of the copper foil, this embodiment adopts the air cutting section 3, which includes a plurality of air cutting nozzles 31 arranged vertically, wherein the air cutting nozzles 31 near the cleaning section 2 face the cleaning section 2, and the air cutting nozzles 31 near the etching section 4 face the etching section 4.

[0029] In this embodiment, the upper and lower air-cutting nozzles 31 on the left are set at an angle to the left, and the upper and lower air-cutting nozzles 31 on the right are set at an angle to the right. This can prevent the water vapor generated in the cleaning section 2 during the cleaning process from mixing with the medicine solution in the etching section 4.

[0030] Based on the above-described preferred embodiments of this utility model, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined according to the scope of the claims.

Claims

1. A dynamic spray etching device, characterized in that, include: The spray box is sequentially arranged with an inlet / outlet section, a cleaning section, an air-cutting section, and an etching section, with adjacent sections separated by partitions; The etching section includes: a rotating support disk that is rotatably mounted, multiple horizontal rotating rollers mounted on the rotating support disk, and spraying components mounted above and below the rotating support disk; The copper foil is conveyed to the rotating support plate by the rotating roller, and the spray assembly rotates horizontally simultaneously during the process of spraying and etching the copper foil from top to bottom.

2. The dynamic spray etching apparatus according to claim 1, characterized in that, The rotating bearing disk is provided with a support part on one side and a drive gear meshing with the rotating bearing disk. The rotating bearing disk is supported on the support part and rotates under the drive gear.

3. The dynamic spray etching apparatus according to claim 1, characterized in that, The rotating bearing disk is provided with two opposing first supports, each of which has a first U-shaped groove. The rotating roller is supported in the corresponding first U-shaped groove, and a first gear is provided at the end of the rotating roller support. One of the first brackets has a rotating shaft on its outer side, and a second gear that meshes with the first gear is provided on the rotating shaft; The input shaft is vertically mounted at the bottom of the rotating bearing disk, and its top is connected to the output shaft through a gear pair. The output shaft is horizontally mounted at the bottom of the rotating bearing disk, and a third gear is provided at the end of the output shaft. The third gear meshes with one of the second gears.

4. The dynamic spray etching apparatus according to claim 1, characterized in that, The spray assembly includes: a second bracket disposed above or below the rotating support plate, the second bracket having a second U-shaped groove, and the end of the spray pipe being placed in the second U-shaped groove of the second bracket; Multiple spray bars located above or below are connected to a first connecting rod. The ends of the multiple first connecting rods are hinged to the same second connecting rod. The output shaft of the motor is connected to an eccentric component, which is hinged to the end of the corresponding second connecting rod via two third connecting rods.

5. The dynamic spray etching apparatus according to claim 1, characterized in that, The air-cutting section includes multiple air-cutting nozzles arranged vertically, wherein the air-cutting nozzles near the cleaning section face the cleaning section, and the air-cutting nozzles near the etching section face the etching section.

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