Intelligent dust particle purification device

Through modular design and intelligent control system, the problems of unstable air volume, insufficient modularity and high energy consumption of FFU equipment are solved, realizing efficient and flexible air purification, which is suitable for fields such as semiconductors and biomedicine.

CN224680910UActive Publication Date: 2026-08-25JINYAO INTELLIGENT PRECISION MFG (SHENZHEN) CO LTD
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Patent Information

Application Number
CN202522037562.X
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-09-22
Publication Date
2026-08-25
Estimated Expiration
2035-09-22

AI Technical Summary

Technical Problem

Existing FFU equipment suffers from poor airflow stability, insufficient modular flexibility, low energy consumption and intelligence levels, and complex cleanroom design, making it difficult to meet modern air purification needs.

Method used

It employs a modular housing containing a variable frequency fan, HEPA or ULPA filters, and an intelligent control system, combined with a flow guide structure and sensor array, to achieve stable airflow, intelligent control, and flexible deployment.

Benefits of technology

It improves airflow stability, reduces energy consumption, enhances modular flexibility and intelligence, simplifies cleanroom design, and is suitable for fields such as semiconductor manufacturing and biomedicine.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses an intelligent dust particle purification equipment, including modular casing, be located in the fan of modular casing, filter and with intelligent control system of fan electricity is connected, modular casing top is equipped with air inlet channel, and bottom is equipped with air outlet channel, air inlet channel below is equipped with the flow guide structure, the fan is variable frequency fan, and the air inlet side of fan is linked with flow guide structure, and filter is located between fan and air outlet channel, intelligent control system includes PLC controller, touch -sensitive screen and the sensor group for monitoring operating parameter, and PLC controller is connected with touch -sensitive screen, sensor group and fan electricity respectively. The utility model effectively solved the air volume stability of existing FFU to be bad, and the problem such as insufficient modular flexibility, energy consumption and intelligent level are low and clean room design complex etc.
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Description

Technical Field

[0001] This utility model relates to the field of air purification technology, specifically to an intelligent dust particle purification device. Background Technology

[0002] FFU (Fan Filter Unit) is a widely used piece of equipment in SMT production lines. Its core function is to filter air particles by driving airflow through a high-efficiency particulate filter (HEPA or ULPA) with a fan, maintaining the cleanliness of a local or overall environment. While existing FFUs can filter particles by driving airflow through the filter with a fan, they have the following shortcomings:

[0003] 1) Poor airflow stability: When the resistance of the filter increases during use, it is easy to cause a decrease in airflow, which in turn leads to fluctuations in cleanliness.

[0004] 2) Insufficient modular flexibility: Most rely on centralized air conditioning systems or fixed air ducts, which can easily affect the overall clean environment during expansion and maintenance, making them unsuitable for phased construction or partial renovation projects;

[0005] 3) Low energy consumption and low level of intelligence: Most of them use AC fans, which have high energy consumption and lack real-time status monitoring and dynamic adjustment functions. Problems such as filter blockage and abnormal wind speed are difficult to detect in time, resulting in low operation and maintenance efficiency.

[0006] 4) Cleanroom design is complex: It requires complex supply and return air ducts, high floor height requirements, and large construction costs and space occupation.

[0007] The above shortcomings need to be improved. Utility Model Content

[0008] In order to overcome the problems of poor air volume stability, insufficient modular flexibility, low energy consumption and intelligence level, and complex cleanroom design of existing FFUs, this utility model provides an intelligent dust particle purification device.

[0009] The technical solution of this utility model is as follows:

[0010] A smart dust particle purification device includes a modular housing, a fan and a filter disposed within the modular housing, and a smart control system electrically connected to the fan.

[0011] The modular housing has an air inlet channel at the top and an air outlet channel at the bottom, with a flow guide structure below the air inlet channel;

[0012] The fan is a variable frequency fan, the air inlet side of the fan is connected to the air guide structure, and the filter is located between the fan and the air outlet channel;

[0013] The intelligent control system includes a PLC controller, a touch screen, and a sensor group for monitoring operating parameters. The PLC controller is electrically connected to the touch screen, the sensor group, and the fan.

[0014] As a preferred embodiment of this utility model, the filter is a HEPA filter or a ULPA filter.

[0015] As a preferred embodiment of this utility model, the sensor group includes a differential pressure sensor, a wind speed sensor, and a filter resistance sensor, and the differential pressure sensor, the wind speed sensor, and the filter resistance sensor are all electrically connected to the PLC controller.

[0016] As a preferred embodiment of this utility model, the flow guiding structure includes an upper flow guiding cylinder with a diameter that gradually decreases from top to bottom and a lower flow guiding cylinder with a diameter that gradually increases from top to bottom. The upper end of the upper flow guiding cylinder is connected to the air inlet channel, the lower end of the upper flow guiding cylinder is connected to the upper end of the lower flow guiding cylinder, and the lower end of the lower flow guiding cylinder is connected to the air inlet side of the fan.

[0017] As a preferred embodiment of this utility model, the modular housing includes a box body, a front door panel disposed on the front side of the box body, and an upper sealing plate disposed on the top of the box body. The air inlet channel is disposed on the upper sealing plate, the air outlet channel is disposed at the bottom of the box body, a first chamber for accommodating the PLC controller is formed between the front door panel and the front side of the box body, the touch screen is disposed on the front door panel, and a second chamber for accommodating the air guiding structure, the fan, and the filter is formed inside the box body.

[0018] As a preferred embodiment of this utility model, the housing is provided with an installation slot for installing the filter, and an inspection port for the filter to enter and exit the installation slot is opened on the back of the housing corresponding to the position of the installation slot. A rear inspection plate for sealing the inspection port is detachably connected to the back of the housing.

[0019] As a preferred embodiment of this utility model, one side of the upper sealing plate is hinged to the top of the box body via a hinge.

[0020] As a preferred embodiment of this utility model, the modular housing is provided with a remote communication interface, which is electrically connected to the PLC controller.

[0021] As a preferred embodiment of this utility model, the modular housing is provided with a network interface, which is electrically connected to the PLC controller.

[0022] As a preferred embodiment of this utility model, the modular housing is provided with a power on / off button and a power interface, both of which are electrically connected to the PLC controller.

[0023] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0024] The intelligent dust particle purification equipment provided by this utility model features high-efficiency purification, modular and flexible deployment, intelligent energy saving, and strong adaptability, making it an indispensable device in modern air purification technology. It can be widely used in fields with stringent cleanliness requirements, such as semiconductor manufacturing, biomedicine, and aerospace. Its design not only meets the high-precision cleanliness requirements but also takes into account cost control and ease of operation and maintenance. It effectively solves the problems of poor airflow stability, insufficient modular flexibility, low energy consumption and intelligence level, and complex cleanroom design of existing FFUs. Attached Figure Description

[0025] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0026] Figure 1 This is a schematic diagram of the structure of an intelligent dust particle purification device according to one embodiment of the present invention;

[0027] Figure 2 This is a schematic diagram of the intelligent dust particle purification device from another perspective in one embodiment of the present invention;

[0028] Figure 3 This is an exploded view of an intelligent dust particle purification device according to an embodiment of the present invention;

[0029] Figure 4 This is a schematic diagram of the intelligent dust particle purification device in one embodiment of the present invention;

[0030] Figure 5 This is a schematic diagram of the structure of the box in one embodiment of the present invention.

[0031] In the diagram,

[0032] 1. Modular housing; 11. Air inlet duct; 12. Air outlet duct; 13. Housing; 131. Mounting slot; 132. Inspection port; 14. Front door panel; 15. Top sealing plate; 16. First chamber; 17. Second chamber; 18. Rear inspection plate; 19. Hinge; 2. Fan; 3. Filter; 4. Intelligent control system; 41. PLC controller; 42. Touch screen; 43. Sensor group; 5. Airflow guiding structure; 51. Upper airflow guide tube; 52. Lower airflow guide tube; 6. Remote communication interface; 7. Network interface; 8. Power on / off button; 9. Power interface. Detailed Implementation

[0033] To make the technical problem to be solved, the technical solution, and the beneficial effects of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be noted that similar reference numerals and letters in the following drawings indicate similar items; therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings. It is also declared that the embodiments described below are only for explaining this utility model and are not intended to limit this utility model.

[0034] It should be noted that the terms "installation," "setting," "connection," and "fixing" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly defined. Indications of orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product is in use, or the orientation or positional relationship commonly understood by those skilled in the art. They are used only for the convenience of describing this application and for simplifying the description, and do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. The terms "first" and "second" are used only for descriptive purposes and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features.

[0035] Please see Figures 1 to 4 An embodiment of this utility model provides an intelligent dust particle purification device, including a modular housing 1, a fan 2 disposed within the modular housing 1, a filter 3, and an intelligent control system 4 electrically connected to the fan 2.

[0036] The modular housing 1 has an air inlet channel 11 at the top and an air outlet channel 12 at the bottom. A flow guide structure 5 is located below the air inlet channel 11. The air inlet side of the fan 2 is connected to the flow guide structure 5. The filter 3 is located between the fan 2 and the air outlet channel 12.

[0037] Fan 2 is a variable frequency fan, such as an EC fan, which is usually adjustable from 0.3 to 0.8 m / s and can dynamically adjust the wind speed according to actual needs (such as the cleanliness requirements of different processes). Compared with traditional AC fans, it reduces energy consumption by 30-50% and has low operating noise (usually ≤60dB), making it suitable for noise-sensitive environments such as laboratories and medical clean areas.

[0038] The intelligent control system 4 includes a PLC controller 41, a touch screen 42, and a sensor group 43. The PLC controller 41 is electrically connected to the touch screen 42, the sensor group 43, and the fan 2. The touch screen 42 is used to set and view operating parameters. The sensor group 43 is used to monitor operating parameters in real time, such as differential pressure, wind speed, and filter resistance. The PLC controller 41 is used to automatically adjust the speed of the fan 2 according to the parameters, control the outlet wind speed within the range of 0.3-0.8 m / s, and support constant air volume operation. Even when the resistance of the filter 3 increases with the usage time, the air volume can be kept stable through wind pressure adjustment to avoid fluctuations in cleanliness.

[0039] The workflow is as follows:

[0040] 1) Air intake: The operation of fan 2 generates negative pressure, which draws in air from the surrounding environment (which can be indoor recirculated air or mixed fresh air) through the top air intake channel 11;

[0041] 2) Preliminary rectification: The intake air first passes through the guide structure 5 on the air inlet side of the fan 2 to make the airflow evenly distributed and avoid the impact of turbulence on the filtration efficiency.

[0042] 3) High-efficiency filtration: When airflow enters the filter 3 area, it passes through the multi-layer filter media of the filter 3 (such as glass fiber and polypropylene meltblown material), and uses the principles of interception, inertial collision, diffusion and adsorption to remove particles (including dust, aerosols, etc.) larger than 0.3μm (HEPA) or 0.12μm (ULPA) in the air.

[0043] 4) Clean air output: Filtered clean air is delivered from the bottom air outlet duct 12 at a uniform wind speed (usually 0.3-0.8m / s), forming a vertical laminar flow (unidirectional flow) in the clean room or local space, blowing pollutants in the area towards the return air vent, and maintaining the cleanliness of the environment inside the equipment.

[0044] In this embodiment, the intelligent dust particle purification equipment draws air directly from the top air intake channel 11 (indoor circulation or fresh air mixing), eliminating the need for complex supply and return air ducts, reducing the height requirements and construction costs of the cleanroom, making it particularly suitable for locations with limited ceiling height. The intelligent control system 4 adjusts the supply and return air volumes, easily achieving positive or negative pressure control of the cleanroom. Positive pressure prevents external contamination from intruding, while negative pressure prevents contamination leakage, such as from inside a biosafety laboratory. It can be directly installed above clean workbenches, clean booths, isolation chambers, and other localized spaces to quickly create localized high-cleanliness areas, meeting the needs of high-precision production (such as semiconductor chip and precision instrument assembly) or experiments, at a lower cost than overall cleanroom construction. Each intelligent dust particle purification device adopts a modular design, allowing for flexible combination and installation (such as matrix arrangement) according to cleanroom area and cleanliness requirements, eliminating reliance on centralized air conditioning systems and reducing dependence on overall air ducts. Furthermore, a single device failure does not affect the operation of other devices, and filter replacement or maintenance can be performed independently, minimizing interference with production or experiments, making it suitable for cleanroom projects requiring phased construction or renovation.

[0045] In a preferred embodiment, the modular housing 1 is made of corrosion-resistant and moisture-proof materials (such as stainless steel), which has certain corrosion-resistant and moisture-proof properties, strong anti-interference ability, and can adapt to different environments in the electronics, pharmaceutical and other industries.

[0046] In a preferred embodiment, filter 3 is a HEPA filter or ULPA filter, which has high filtration efficiency and can effectively remove dust, viruses and other fine particulate matter in the air, ensuring that the cleanliness of the output air meets the Class 1-1000 standard (ISO 1-8).

[0047] In a preferred embodiment, the sensor group 43 includes a differential pressure sensor, an air velocity sensor, and a filter resistance sensor, all of which are electrically connected to the PLC controller 41. The differential pressure sensor monitors the pressure difference between the inside and outside of the modular housing 1 and before and after the filter 3 in real time, directly reflecting changes in airflow resistance and preventing a decrease in clean air delivery efficiency due to abnormal housing sealing or airflow obstruction. The air velocity sensor directly collects the actual air velocity at the outlet duct 12, ensuring that the air velocity remains within the design range of 0.3-0.8 m / s, preventing energy waste due to excessively high air velocity and substandard cleanliness due to excessively low air velocity. The filter resistance sensor tracks the resistance changes of the filter 3 in real time during use, accurately capturing the critical point from normal use to blockage warning (such as resistance exceeding a preset threshold), preventing cleanliness fluctuations caused by filter 3 failure. Through the coordinated collection of these three sensors, a comprehensive data chain covering airflow resistance, outlet air velocity, and filtration status is formed, providing a real-time data foundation for stable equipment operation. For example, when the filter resistance sensor detects an increase in the resistance of filter 3, the PLC controller 41 can automatically increase the speed of fan 2, compensate for the resistance change by increasing the air pressure, ensure a constant air volume, and avoid the problem of decreased cleanliness caused by increased resistance in traditional equipment; when the wind speed sensor detects that the wind speed exceeds the requirements of the current process (such as low-cleanliness processes that do not require high wind speed), the PLC controller 41 can decrease the speed of fan 2, accurately control the wind speed within the appropriate range, and further reduce energy consumption; when the differential pressure sensor detects an abnormal pressure difference between the inside and outside of the housing (such as insufficient positive pressure or excessive negative pressure), the PLC controller 41 can adjust the air supply volume of fan 2 and the external return air volume ratio in conjunction, quickly restore the preset positive / negative pressure state without manual intervention.

[0048] Please see Figure 3 In a preferred embodiment, the flow guiding structure 5 includes an upper flow guiding cylinder 51 with a gradually decreasing diameter from top to bottom and a lower flow guiding cylinder 52 with a gradually increasing diameter from top to bottom. The upper end of the upper flow guiding cylinder 51 is connected to the air inlet channel 11, the lower end of the upper flow guiding cylinder 51 is connected to the upper end of the lower flow guiding cylinder 52, and the lower end of the lower flow guiding cylinder 52 is connected to the air inlet side of the fan 2. With the flow guiding structure 5 configured as described above, the upper flow guiding cylinder 51 can guide the air drawn in from the air inlet channel 11 to gradually contract and converge, avoiding the airflow from dispersing and forming vortices at the air inlet channel 11; the lower flow guiding cylinder 52 can slowly expand the converged airflow, allowing the airflow to enter the air inlet side of the fan 2 at a uniform speed and direction, completely eliminating turbulence; ultimately ensuring that the airflow enters the filter 3 smoothly, avoiding filtration dead zones or local overload of the filter material caused by airflow turbulence, allowing the filtration principles of the filter 3, such as interception and inertial collision, to fully function, and improving the overall filtration efficiency.

[0049] Please see Figures 1 to 3In a preferred embodiment, the modular housing 1 includes a box 13, a front door panel 14 located on the front side of the box 13, and an upper sealing plate 15 located on the top of the box 13. An air inlet channel 11 is located on the upper sealing plate 15, and an air outlet channel 12 is located at the bottom of the box 13. A first chamber 16 for accommodating a PLC controller 41 is formed between the front door panel 14 and the front side of the box 13. A touch screen 42 is located on the front door panel 14. A second chamber 17 for accommodating a flow guiding structure 5, a fan 2, and a filter 3 is formed inside the box 13. The modular housing 1 consists of a box 13, a front door panel 14, and an upper sealing plate 15, dividing the interior into a first chamber 16 that houses the PLC controller 41 and a second chamber 17 that houses the airflow guiding structure 5, the fan 2, and the filter 3. This design prevents the PLC controller 41 from becoming loose or experiencing poor contact due to the fan 2 running, or from malfunctions caused by trace dust particles in the airflow adhering to the PLC controller 41's interface. This extends the service life of the intelligent control system 4 and reduces the risk of control failure due to vibration or dust. The second chamber 17 focuses on housing the core purification components such as the airflow guiding structure 5, the fan 2, and the filter 3. It forms a vertical airflow path with the air inlet channel 11 and the air outlet channel 12, preventing the control components in the first chamber 16 from occupying the purification airflow space. This ensures a smooth airflow path from the air inlet to the air outlet without any additional obstruction, maintaining a constant airflow and filtration efficiency.

[0050] Please see Figure 2 , Figure 3 , Figure 5 In a preferred embodiment, the housing 13 has an installation slot 131 for installing the filter 3. The installation slot 131 provides precise positioning for the filter 3, ensuring that the filter 3 is completely fitted to the sealing surface inside the housing 13. A maintenance port 132 is provided on the back of the housing 13 corresponding to the installation slot 131, allowing the filter 3 to enter and exit the installation slot 131. A rear maintenance plate 18 for sealing the maintenance port 132 is detachably connected to the back of the housing 13. With this configuration, the filter 3 can directly enter and exit the installation slot 131 through the rear maintenance port 132. When replacing the filter 3 of a single device, only the rear maintenance plate 18 of that device needs to be opened, simplifying the filter 3 replacement process, reducing maintenance time, and not affecting the operation of adjacent equipment, further reducing interference with production or experiments.

[0051] Please see Figure 1 , Figure 3 In a preferred embodiment, one side of the upper cover 15 is hinged to the top of the housing 13 via a hinge 19. By providing the hinge 19 between one side of the upper cover 15 and the top of the housing 13, the upper cover 15 can be opened and flipped to the top side of the housing 13 without detaching from the housing 13, making it convenient to open and close the upper cover 15.

[0052] Please see Figure 1 , Figure 4In a preferred embodiment, the modular housing 1 is equipped with a remote communication interface 6, such as a 485 interface, which is electrically connected to the PLC controller 41. When multiple devices are arranged in a matrix (e.g., in a large-area cleanroom), managers can connect to the remote communication interface 6 via a remote terminal (e.g., a computer or tablet) to obtain the operating parameters of each device in real time, eliminating the need to visit each device on-site and improving management efficiency. If it is necessary to adjust the device parameters, instructions can be sent to the PLC controller via the remote terminal to directly adjust the fan speed 2 without on-site operation, which is especially suitable for high-cleanliness scenarios where frequent personnel entry is inconvenient. In addition, when the sensing components detect abnormal parameters (e.g., excessive filtration resistance or abnormal airflow), the PLC controller 41 can push the warning information to the remote terminal in real time via the remote communication interface 6, avoiding equipment downtime due to failure to detect faults in a timely manner.

[0053] Please see Figure 1 , Figure 4 In a preferred embodiment, the modular housing 1 is provided with a network interface 7, which is electrically connected to the PLC controller 41. The network interface 7 allows the device to be connected to a factory or laboratory management system or a remote server.

[0054] Please see Figure 1 , Figure 4 In a preferred embodiment, the modular housing 1 is provided with a power on / off button 8 and a power interface 9, both of which are electrically connected to the PLC controller 41. The power on / off button 8 allows for quick start and stop of the equipment, while the power interface 9 facilitates connection to an external power supply line for powering the equipment.

[0055] It should be understood that those skilled in the art can make improvements or modifications based on the above description, and all such improvements and modifications should fall within the protection scope of the appended claims.

[0056] The present utility model patent has been described above with reference to the accompanying drawings. Obviously, the implementation of the present utility model patent is not limited to the above-described manner. Any improvements made by adopting the inventive concept and technical solution of the present utility model patent, or the direct application of the inventive concept and technical solution of the present utility model patent to other occasions without modification, are all within the protection scope of the present utility model.

Claims

1. An intelligent dust particle purification device, characterized in that, It includes a modular housing, a fan and a filter housed within the modular housing, and an intelligent control system electrically connected to the fan; The modular housing has an air inlet channel at the top and an air outlet channel at the bottom, with a flow guide structure below the air inlet channel; The fan is a variable frequency fan, the air inlet side of the fan is connected to the air guide structure, and the filter is located between the fan and the air outlet channel; The intelligent control system includes a PLC controller, a touch screen, and a sensor group for monitoring operating parameters. The PLC controller is electrically connected to the touch screen, the sensor group, and the fan.

2. The intelligent dust particle purification device according to claim 1, characterized in that, The filter is a HEPA filter or a ULPA filter.

3. The intelligent dust particle purification device according to claim 1, characterized in that, The sensor group includes a differential pressure sensor, a wind speed sensor, and a filter resistance sensor, all of which are electrically connected to the PLC controller.

4. The intelligent dust particle purification device according to claim 1, characterized in that, The flow guiding structure includes an upper flow guiding cylinder with a gradually decreasing diameter from top to bottom and a lower flow guiding cylinder with a gradually increasing diameter from top to bottom. The upper end of the upper flow guiding cylinder is connected to the air inlet channel, the lower end of the upper flow guiding cylinder is connected to the upper end of the lower flow guiding cylinder, and the lower end of the lower flow guiding cylinder is connected to the air inlet side of the fan.

5. The intelligent dust particle purification device according to claim 1, characterized in that, The modular housing includes a box body, a front door panel located on the front side of the box body, and an upper sealing plate located on the top of the box body. The air inlet channel is located on the upper sealing plate, and the air outlet channel is located at the bottom of the box body. A first chamber for accommodating the PLC controller is formed between the front door panel and the front side of the box body. The touch screen is located on the front door panel. A second chamber for accommodating the air guiding structure, the fan, and the filter is formed inside the box body.

6. The intelligent dust particle purification device according to claim 5, characterized in that, The housing has an installation slot for installing the filter inside. The back of the housing has an access port for the filter to enter and exit the installation slot. A rear access plate for sealing the access port is detachably connected to the back of the housing.

7. The intelligent dust particle purification device according to claim 5, characterized in that, One side of the upper sealing plate is hinged to the top of the box body via a hinge.

8. The intelligent dust particle purification device according to claim 1, characterized in that, The modular housing is equipped with a remote communication interface, which is electrically connected to the PLC controller.

9. The intelligent dust particle purification device according to claim 1, characterized in that, The modular housing is provided with a network interface, which is electrically connected to the PLC controller.

10. The intelligent dust particle purification device according to claim 1, characterized in that, The modular housing is equipped with a power on / off button and a power interface, both of which are electrically connected to the PLC controller.