Flow detection fixture for photomask apparatus

Abstract

A flow detection tool for a photomask device includes a tool body, a flow sensing module, a storage module, a transmission module and a power module. The tool body includes an upper housing and a base, the upper housing is disposed on the base, and a receiving space is formed between the upper housing and the base. The flow sensing module includes a digital gas flow meter, a programmable logic controller and a first display unit, the digital gas flow meter is connected to at least one gas inlet hole, the programmable logic controller is electrically connected to the digital gas flow meter and the first display unit, and the programmable logic controller is used to generate a flow display signal corresponding to the font color according to the flow sensing value transmitted by the digital gas flow meter, and transmit to the first display unit for display. The storage module is used to store the flow sensing value. The transmission module is used to transmit the flow sensing value to the back-end server. The power module is used to provide power. Accordingly, the user can more clearly know whether the current gas flow is within a reasonable range.

Description

Technical Field

[0001] This utility model relates to a flow detection fixture, and more particularly to a flow detection fixture for photomask equipment, which is used to detect the flow rate of the photomask equipment. Background Technology

[0002] In today's society, people's lives are filled with more and more communication and consumer electronics products (3C electronic products), which has led to an increasing demand for semiconductor components. Semiconductor components require many process steps in manufacturing, such as cutting, deposition, photolithography, development, etching, cleaning, and packaging. Because semiconductor components are precision components, they are very susceptible to contaminants in the air. Therefore, semiconductor components are first placed in photomask equipment used to store them, such as a dedicated semiconductor component storage box. Then, a clean gas (such as compressed dry air or nitrogen) is introduced into the box to clean the contaminants inside the box and prevent the semiconductor components inside the box from becoming contaminated.

[0003] However, if the injected gas is too strong, it may damage the semiconductor components; conversely, if the injected gas is too weak, it will not achieve the effect of cleaning and protecting the semiconductor components. Therefore, how to determine the amount of gas injected to ensure the correct gas injection is the focus of this invention. Utility Model Content

[0004] In view of this, the creator has created a flow detection fixture for photomask equipment based on professional knowledge and years of experience. It is used to detect the gas flow rate used by the photomask equipment and displays the gas flow status with the corresponding font color on the first display unit according to the gas flow rate, so that the user can more clearly know whether the current gas flow rate is within a reasonable range.

[0005] Based on at least one objective of this utility model, a flow detection fixture for a photomask device is provided, comprising a fixture body, a flow sensing module, a storage module, a transmission module, and a power module. The fixture body includes an upper housing and a base, wherein the upper housing is disposed on the base, and an accommodating space is formed between the upper housing and the base, and the base has at least one air inlet at its bottom. The flow sensing module includes a digital gas flow meter, a programmable logic controller (PLC), and a first display unit, wherein the digital gas flow meter and the PLC are disposed within the accommodating space of the fixture body, a portion of the first display unit is disposed within the accommodating space of the fixture body, and another portion of the first display unit is disposed outside the accommodating space of the fixture body, and the digital gas flow meter is connected to the at least one air inlet. The PLC is electrically connected to the digital gas flow meter and the first display unit, and the PLC generates a flow display signal corresponding to a font color based on a flow sensing value transmitted by the digital gas flow meter, and transmits it to the first display unit for display. The storage module is disposed within the accommodating space of the fixture body and electrically connected to the digital gas flow meter, for storing the flow sensing value generated by the digital gas flow meter based on a gas flow rate. The transmission module is disposed within the accommodating space of the fixture body and electrically connected to the flow sensing module, for transmitting the flow sensing value generated by the digital gas flow meter based on the gas flow rate to a back-end server. The power module is disposed within the accommodating space of the fixture body and electrically connected to the flow sensing module, the storage module, and the transmission module, for providing electrical energy.

[0006] In one embodiment of the present invention, the fixture body further includes an air supply pipe assembly, a portion of which is disposed within the accommodating space of the fixture body, and another portion of which is disposed outside the accommodating space of the fixture body. The air supply pipe assembly is connected to the air inlet and the digital gas flow meter of the flow sensing module.

[0007] In one embodiment of the present invention, the upper housing of the fixture body has a first side plate, a second side plate, a third side plate, a fourth side plate and a top plate, wherein the first side plate is adjacent to one side of the second side plate and one side of the fourth side plate, the third side plate is adjacent to the other side of the second side plate and the other side of the fourth side plate, and the top plate is adjacent to the top of the first side plate, the second side plate, the third side plate and the fourth side plate.

[0008] In one embodiment of the present invention, the jig body further includes a first handle, which is disposed on the top plate of the upper housing of the jig body.

[0009] In one embodiment of the present invention, the jig body further includes two second handles, which are disposed on the base of the jig body and located near the second side plate and the fourth side plate of the upper housing, respectively.

[0010] In one embodiment of the present invention, the power module includes a battery unit and a power switch, wherein the battery unit is electrically connected to the power switch, and the power switch is electrically connected to the flow sensing module, the storage module and the transmission module. The battery unit is used to provide the power, and the power switch is used to connect or disconnect the power provided by the battery unit.

[0011] In one embodiment of the present invention, the power module further includes a second display unit electrically connected to the power switch, and a portion of the second display unit is disposed within the accommodating space of the fixture body, while another portion of the second display unit is disposed outside the accommodating space of the fixture body and is used to display the remaining charge of the battery unit.

[0012] In one embodiment of the present invention, the power module further includes a power input section electrically connected to the battery cell for insertion into a power supply port, so that the battery cell can be charged via the power input section.

[0013] In one embodiment of the present invention, the back-end server includes a central processing unit and a storage device. The central processing unit is electrically connected to the storage device, and the central processing unit is used to store the flow sensing value transmitted by the transmission module to the storage device.

[0014] In one embodiment of the present invention, the back-end server further includes a gas flow analyzer electrically connected to the central processing unit, which generates a standard value based on the flow sensing value transmitted by the transmission module, and then transmits the standard value to the transmission module.

[0015] In summary, the flow detection fixture for photomask equipment of this utility model allows gas to flow into the flow sensing module through at least one air inlet. The digital gas flow meter of the flow sensing module then generates a sensing value. The programmable logic controller then determines whether the sensing value is within the standard range and generates flow display signals with different font colors. The first display unit displays the gas flow status corresponding to the font color, allowing the user to more clearly know whether the current gas flow is within a reasonable range. Attached Figure Description

[0016] Figure 1 This is a first-view top perspective perspective view of the fixture body of the flow detection fixture according to an embodiment of the present utility model.

[0017] Figure 2 This is a second-view top perspective perspective view of the fixture body of the flow detection fixture according to an embodiment of the present utility model.

[0018] Figure 3 This is a bottom perspective view of the fixture body of the flow detection fixture according to an embodiment of the present utility model.

[0019] Figure 4 This is a perspective view of the flow sensing module of the flow detection fixture according to an embodiment of the present invention.

[0020] Figure 5 This is a block diagram of the system architecture of the flow detection fixture according to an embodiment of the present utility model.

[0021] Figure 6 This is a schematic diagram of the gas flow detection operation of the flow detection fixture according to an embodiment of the present invention.

[0022] Explanation of symbols in the attached diagram: 100: Flow detection fixture; 1: Fixture body; 11: Upper shell; 111: First side panel; 112: Second side panel; 113: Third side panel; 114: Fourth side panel; 115: Top plate; 116: Storage space; 12: Base; 121: Air intake; 13: First handle; 14: Second handle; 141: Ear lift; 15: Air supply pipe assembly; 2: Flow sensing module; 21: Digital gas flow meter; 22: Programmable Logic Controller; 23: First display unit; 3: Transmission module; 4: Storage module; 5: Power supply module; 51: Battery cell; 52: Power switch; 53: Second display unit; 54: Power input section; 6: Backend server; 61: Central Processing Unit; 62: Storage device; 63: Gas flow analysis instrument; S1: Gas flow rate; S2: Flow sensor value; S3: Flow rate display signal. Detailed Implementation

[0023] To facilitate understanding of the technical features, content, advantages, and effects of this utility model, the present utility model will be described in detail below with reference to the accompanying drawings and in the form of embodiments. The drawings used are for illustrative purposes only and to assist in the description. They may not represent the actual proportions and precise configurations of the present utility model after implementation. Therefore, the proportions and configurations of the accompanying drawings should not be used to interpret or limit the scope of the present utility model in actual implementation. This is hereby stated.

[0024] Architecture description of flow detection fixture for photomask equipment Please refer to Figures 1 to 4 , Figure 1 This is a top view of the fixture body of the flow detection fixture (hereinafter referred to as the flow detection fixture) for a photomask device according to an embodiment of the present invention. Figure 2 This is a bottom view of the fixture body of the flow detection fixture according to an embodiment of the present invention. Figure 3 This is a first-view side view of the fixture body of the flow detection fixture according to an embodiment of the present invention, and Figure 4 This is a second-view side view of the fixture body of the flow detection fixture according to an embodiment of the present utility model.

[0025] The flow detection fixture 100 of this utility model includes a fixture body 1, a flow sensing module 2, a transmission module 3, a storage module 4, and a power module 5, and the flow detection fixture 100 is communicatively connected to a back-end server 6. The fixture body 1 includes an upper shell 11, a base 12, a first handle 13, two second handles 14, and an air supply pipe assembly 15.

[0026] The upper shell 11 has a first side plate 111, a second side plate 112, a third side plate 113, a fourth side plate 114, and a top plate 115. The first side plate 111 is adjacent to one side of the second side plate 112 and one side of the fourth side plate 114, while the third side plate 113 is adjacent to the other side of the second side plate 112 and the other side of the fourth side plate 114, so that the first side plate 111 and the third side plate 113 correspond to each other, the second side plate 112 and the fourth side plate 114 correspond to each other, and the top plate 115 is adjacent to the top of the first side plate 111, the second side plate 112, the third side plate 113, and the fourth side plate 114, so that the upper shell 11 has a cubic shell shape. In addition, the upper shell 11 is disposed on the base 12, and an accommodating space 116 is formed between the upper shell 11 and the base 12.

[0027] The first handle 13 is disposed on the top plate 115 of the upper housing 11, while the two second handles 14 are disposed on the base 12 and are respectively located near the second side plate 112 and the fourth side plate 114 of the upper housing 11. The second handle 14 has a lifting ear 141, which is located at the top of the second handle 14 and extends from the top of the second handle 14 in a direction away from the upper housing 11.

[0028] The base 12 has at least one air inlet 121 at its bottom. A portion of the air supply pipe assembly 15 is located within the accommodating space 116, while another portion is located outside the accommodating space 116. The air supply pipe assembly 15 located within the accommodating space 116 is connected to at least one air inlet 121.

[0029] The flow sensing module 2 includes a digital gas flow meter 21, a programmable logic controller (PLC) 22, and a first display unit 23. The PLC 22 is electrically connected to the digital gas flow meter 21 and the first display unit 23. The digital gas flow meter 21 and the PLC 22 are disposed within the accommodating space 116 of the fixture body 1. A portion of the first display unit 23 is located within the accommodating space 116, and another portion is located outside the accommodating space 116. Furthermore, the digital gas flow meter 21 is connected to the gas delivery pipe assembly 15 to sense the gas flow rate S1 entering the gas delivery pipe assembly 15. It should be noted that the digital gas flow meter 21 and the PLC 22 are independent hardware modules.

[0030] The transmission module 3 is electrically connected to the flow sensing module 2 and communicatively connected to the back-end server 6, and is disposed within the accommodating space 116 of the fixture body 1. The storage module 4 is electrically connected to the flow sensing module 2 and is disposed within the accommodating space 116 of the fixture body 1.

[0031] The power module 5 includes a battery unit 51, a power switch 52, a second display unit 53, and a power input section 54. The battery unit 51 is electrically connected to the power switch 52 and the power input section 54, and the power switch 52 is electrically connected to the second display unit 53 and the flow sensing module 2. The battery unit 51 and the power switch 52 are disposed within the accommodating space 116 of the fixture body 1. Parts of both the second display unit 53 and the power input section 54 are located within the accommodating space 116, while other parts are located outside the accommodating space 116. Furthermore, in one embodiment of this invention, the first display unit 23 of the flow sensing module 2 and the second display unit 53 of the power module 5 are correspondingly disposed. The first display unit 23 of the flow sensing module 2 is disposed on the third side plate 113 of the upper housing 11, while the second display unit 53 of the power module 5 is disposed on the first side plate 111 of the upper housing 11. Additionally, the battery unit 51 has a power manager and a battery holder to manage the electrical energy flowing into the power input section 54 and to charge the rechargeable battery disposed in the battery holder. Additionally, it should be noted that battery unit 51 is an independent hardware module.

[0032] Please refer to the following: Figure 5 , Figure 5 This is a block diagram of the system architecture of the flow detection fixture according to an embodiment of the present invention. The back-end server 6 includes a central processing unit 61, a storage device 62, and a gas flow analyzer 63. The central processing unit 61 is communicatively connected to the transmission module 3 and electrically connected to the storage device 62 and the gas flow analyzer 63. The back-end server 6 is used to store and analyze the data transmitted by the transmission module 3.

[0033] Instructions for operation of flow detection fixture Please refer to the following: Figure 6 , Figure 6 This is a schematic diagram of the gas flow detection operation of the flow detection fixture according to an embodiment of the present invention.

[0034] Display of gas sensor readings Then as Figure 3 , Figure 4 , Figure 6As shown, gas flow S1 enters the gas delivery pipe assembly 15 through the air inlet 121 at the bottom of the base 12. The digital gas flow meter 21 senses the gas flow S1 entering the air inlet 121 and generates a flow sensing value S2 based on the gas flow S1. The flow sensing value S2 is then transmitted to the programmable logic controller 22. The programmable logic controller 22 compares the flow sensing value S2 with the standard value stored in the storage module 4 and generates a flow display signal S3 based on the comparison result. The flow display signal S3 is then transmitted to the first display unit 23. It is worth noting that the flow display signal S3 corresponds to different font colors depending on the comparison result. For example, if the standard value is 10, and the digital gas flow meter 21 senses a gas flow S1 of 6, the first display unit 23 will display the value in green; if the digital gas flow meter 21 senses a gas flow S1 of 12, the first display unit 23 will display the value in red. The standard value and corresponding font color set in this invention are not limited to the above embodiment.

[0035] Battery level display Then as Figure 1 , Figure 5 As shown, the user can charge the battery unit 51 by plugging the power supply port into the power input section 54, and the charging status and remaining charge of the battery unit 51 can be displayed on the second display unit 53. In addition, the power switch 52 can connect or disconnect the power supplied by the battery unit 51 to the flow sensing module 2, the transmission module 3 and the storage module 4.

[0036] Backend data collection and analysis After the digital gas flow meter 21 generates a flow sensing value S2 based on the gas flow rate S1, it transmits the value to the transmission module 3. The transmission module 3 then transmits the flow sensing value S2 to the central processing unit 61 of the back-end server 6. The central processing unit 61 then transmits the flow sensing value S2 to the storage device 62 for storage, and simultaneously transmits it to the gas flow analyzer 63. Upon receiving the flow sensing value S2, the gas flow analyzer 63 generates a corresponding standard value based on parameter data. This parameter data may include the gas flow rate that the photomask can withstand, the reference value calculation method of the digital gas flow meter 21, and the error value generated during gas transmission. Furthermore, the parameter data can be adjusted by the user according to the actual measurement conditions to ensure that the gas flow analyzer 63 generates a more accurate standard value. After generating the standard value, the gas flow analyzer 63 transmits the standard value back to the transmission module 3, and the storage module 4 stores the standard value for use by the programming logic controller 22 during the next comparison.

[0037] In summary, the flow detection fixture for photomask equipment of this invention allows gas to flow into the flow sensing module through at least one air inlet. The digital gas flow meter of the flow sensing module then generates a sensing value. A programmable logic controller (PLC) determines whether the sensing value is within a standard range, generating flow display signals in different font colors. The corresponding gas flow status is displayed on a first display unit, allowing the user to clearly understand whether the current gas flow is within a reasonable range. Furthermore, the flow detection fixture for photomask equipment of this invention also transmits the flow sensing value to a backend server for storage and for use in correcting and comparing standard values, enabling the flow sensing module to more accurately determine the gas flow status.

[0038] However, the illustrations and descriptions above are merely preferred embodiments of the present utility model and are not intended to limit the scope of protection of the present utility model. Any other equivalent changes or modifications made by those skilled in the art based on the feature scope of the present utility model should be considered as not departing from the design scope of the present utility model.

Claims

1. A flow detection fixture for a photomask device, characterized in that, Include: A fixture body (1) includes an upper housing (11) and a base (12), wherein the upper housing (11) is disposed on the base (12), and an accommodating space (116) is formed between the upper housing (11) and the base (12), and the base (12) has at least one air inlet (121) at one bottom. A flow sensing module (2) includes a digital gas flow meter (21), a programmable logic controller (22), and a first display unit (23). The digital gas flow meter (21) and the programmable logic controller (22) are disposed in the accommodating space (116) of the fixture body (1). A portion of the first display unit (23) is disposed in the accommodating space (116) of the fixture body (1), while another portion of the first display unit (23) is disposed in the fixture body. Outside the accommodating space (116) of (1), the digital gas flow meter (21) is connected to the at least one air inlet (121), the programming logic controller (22) is electrically connected to the digital gas flow meter (21) and the first display unit (23), and the programming logic controller (22) is used to generate a flow display signal (S3) corresponding to a font color according to a flow sensing value (S2) transmitted by the digital gas flow meter (21), and transmit it to the first display unit (23); A storage module (4) is disposed in the accommodating space (116) of the fixture body (1) and electrically connected to the digital gas flow meter (21) for storing the flow sensing value (S2) generated by the digital gas flow meter (21) based on a gas flow (S1). A transmission module (3), disposed within the accommodating space (116) of the fixture body (1) and electrically connected to the flow sensing module (2), is used to transmit the flow sensing value (S2) generated by the digital gas flow meter (21) based on the gas flow rate (S1) to a back-end server (6); and A power module (5) is disposed in the accommodating space (116) of the fixture body (1) and electrically connected to the flow sensing module (2), the storage module (4) and the transmission module (3) to provide power.

2. The flow detection fixture for a photomask device according to claim 1, characterized in that, The fixture body (1) further includes an air supply pipe assembly (15), a part of which is disposed within the receiving space (116) of the fixture body (1), and the other part of which is disposed outside the receiving space (116) of the fixture body (1). The air supply pipe assembly (15) is connected to the air inlet (121) and the digital gas flow meter (21) of the flow sensing module (2).

3. The flow detection fixture for a photomask device according to claim 1, characterized in that, The upper housing (11) of the fixture body (1) has a first side plate (111), a second side plate (112), a third side plate (113), a fourth side plate (114) and a top plate (115), wherein the first side plate (111) is adjacent to one side of the second side plate (112) and one side of the fourth side plate (114), the third side plate (113) is adjacent to the other side of the second side plate (112) and the other side of the fourth side plate (114), and the top plate (115) is adjacent to the top of the first side plate (111), the second side plate (112), the third side plate (113) and the fourth side plate (114).

4. The flow detection fixture for a photomask device according to claim 3, characterized in that, The jig body (1) further includes a first handle (13), which is disposed on the top plate (115) of the upper housing (11) of the jig body (1).

5. The flow detection fixture for a photomask device according to claim 3, characterized in that, The jig body (1) further includes two second handles (14), which are disposed on the base (12) of the jig body (1) and located near the second side plate (112) and the fourth side plate (114) of the upper housing (11), respectively.

6. The flow detection fixture for a photomask device according to claim 1, characterized in that, The power module (5) includes a battery unit (51) and a power switch (52), wherein the battery unit (51) is electrically connected to the power switch (52), and the power switch (52) is electrically connected to the flow sensing module (2), the storage module (4) and the transmission module (3). The battery unit (51) is used to provide the power, and the power switch (52) is used to connect or disconnect the power provided by the battery unit (51).

7. The flow detection fixture for a photomask device according to claim 6, characterized in that, The power module (5) further includes a second display unit (53), which is electrically connected to the power switch (52). A portion of the second display unit (53) is disposed within the accommodating space (116) of the fixture body (1), while another portion of the second display unit (53) is disposed outside the accommodating space (116) of the fixture body (1) and is used to display the remaining charge of the battery unit (51).

8. The flow detection fixture for a photomask device according to claim 6, characterized in that, The power module (5) further includes a power input section (54) which is electrically connected to the battery unit (51) for inserting a power supply port so that the battery unit (51) can perform a charging operation through the power input section (54).

9. The flow detection fixture for a photomask device according to claim 1, characterized in that, The back-end server (6) includes a central processing unit (61) and a storage device (62). The central processing unit (61) is electrically connected to the storage device (62), and the central processing unit (61) is used to store the flow sensing value (S2) transmitted by the transmission module (3) to the storage device (62).

10. The flow detection fixture for a photomask device according to claim 9, characterized in that, The back-end server (6) further includes a gas flow analyzer (63), which is electrically connected to the central processing unit (61) to generate a standard value based on the flow sensing value (S2) transmitted by the transmission module (3), and then transmit the standard value to the transmission module (3).

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