A probe card test tool for wafer detection

Abstract

The utility model relates to probe card technical field, and specifically is a kind of probe card test tool for wafer detection, including lower part and upper part, the upper part cover is located in lower part top, and upper part one end is rotatably connected with lower part by pivot, the lower part includes box, the box is provided with multi-axial support mechanism, the lower part one side is provided with the operating opening for the multi-axial support mechanism to extend, the operating opening one side is rotatably installed with protective door by hinge, the protective door and the cover of operating opening are all glued with corresponding magnetic rubber strip, the box top is provided with detection port. Through the assembly of lower part and upper part, realize to provide the test tool with certain closed environment for the probe card test of wafer detection, improve stability in the testing process, and based on the setting of flip type lower part and upper part, the convenience during later maintenance is also better.

Description

Technical Field

[0001] This utility model relates to the field of probe card technology, and specifically to a probe card testing fixture for wafer inspection. Background Technology

[0002] In the semiconductor manufacturing industry, wafer inspection is a crucial step in ensuring product quality and performance. As a key tool in wafer inspection, probe cards require regular maintenance or adjustment because their probes frequently contact the wafer inspection points. However, current maintenance methods often require disassembling multiple components before the probe card can be positioned with the probes facing upwards for operation, increasing operational difficulty and time costs, and further impacting overall work efficiency.

[0003] Existing probe card testing lacks a closed testing environment and a probe card testing fixture structure that is both easy to operate and maintain while having multi-axial adjustment capabilities. Therefore, a probe card testing fixture for wafer inspection is proposed. Utility Model Content

[0004] To address the problems in the existing technology, this utility model provides a probe card testing fixture for wafer inspection.

[0005] The technical solution adopted by this utility model to solve its technical problem is a probe card test fixture for wafer inspection, including a lower part and an upper part. The upper part covers the top of the lower part, and one end of the upper part is rotatably connected to the lower part through a rotating shaft. The lower part includes a box, and a multi-axial support mechanism is provided inside the box. An operation port for the multi-axial support mechanism to extend is opened on one side of the lower part. A protective door is installed on one side of the operation port by means of a hinge. Corresponding magnetic rubber strips are glued to the cover of the protective door and the operation port. A detection port is opened at the top of the box. The upper part includes a probe card test chamber and a probe card. The bottom of the probe card test chamber is provided with a mounting plate. The probe card is installed on the bottom of the mounting plate by bolts, and the test pin of the probe card is aligned with the detection port.

[0006] By adopting the above technical solution, a test fixture with a certain degree of enclosure is provided for probe card testing of wafer inspection through the components composed of the lower and upper parts, which improves the stability during the testing process. Furthermore, the flip-type lower and upper parts also provide better convenience during later maintenance and repair. A protective door is installed on one side of the operating port via a hinge, and the connection between the protective door and the operating port is sealed by a magnetic rubber strip.

[0007] Specifically, pneumatic push rods are respectively provided on both sides of the housing. The sleeve cylinder of the pneumatic push rod is rotatably connected to the housing through a rotating shaft, and the output rod of the pneumatic push rod is rotatably connected to the housing of the probe card test chamber through a rotating shaft.

[0008] By adopting the above technical solution, the cylinder of the pneumatic push rod is rotatably connected to the housing through a rotating shaft, and the output rod is rotatably connected to the housing of the probe card test host through a rotating shaft, which is used to assist the opening and closing of the upper part.

[0009] Specifically, the multi-axial support mechanism includes a lower frame, a lower moving block is provided at the top of the lower frame, and Z-axis lead screws are connected to both ends of the lower moving block by threaded sleeves. The two ends of the Z-axis lead screws are rotatably connected to the lower frame by bearings. One end of the Z-axis lead screw passes through the lower frame and is equipped with a first synchronous pulley. The first synchronous pulleys are connected to each other by a synchronous belt. A first servo motor is installed at the end of the lower frame away from the first synchronous pulley, and the drive end of the first servo motor is connected to the rotation shaft of the Z-axis lead screw at the corresponding position. Support wheels aligned with the Z-axis lead screw are installed at both corners of the lower frame. A middle plate is bolted to the top of the lower moving block, and wheel grooves corresponding to the support wheels are opened on both sides of the top of the middle plate.

[0010] By adopting the above technical solution, the Z-axis lead screw is driven to rotate by the first servo motor, which causes the lower moving block to move the middle plate in the Z-axis direction. When personnel need to operate or replace the wafer placed above the multi-axis support mechanism, the middle plate can be extended from the operation port by the first servo motor, which facilitates personnel to operate above the multi-axis support mechanism. During the movement of the middle plate, the support wheels on the lower frame provide auxiliary rolling support for the middle plate.

[0011] Specifically, an upper frame is installed on the top of the middle plate, an upper moving block is provided on the top of the upper frame, and an X-axis lead screw is connected to both ends of the upper moving block by threaded sleeves. The two ends of the X-axis lead screw are rotatably connected to the upper frame by bearings. One end of the X-axis lead screw passes through the upper frame and is equipped with a second synchronous pulley. The second synchronous pulleys are connected by a synchronous belt. A second servo motor is installed at the end of the upper frame away from the second synchronous wheel, and the drive end of the second servo motor is connected to the rotation shaft of the X-axis lead screw.

[0012] By adopting the above technical solution, the X-axis lead screw is driven to rotate by the second servo motor, which in turn drives the upper moving block to move along the X-axis.

[0013] Specifically, an upper plate is installed on the top of the upper moving block, a lifting plate is provided on the top of the upper plate, and two sets of opposing support seats are installed at both ends of the top of the lifting plate by bolts. The top of the opposing surfaces of the support seats is provided with a groove for placing the wafer. Guide rods are fixedly connected to both sides of the top of the upper plate, and electric push rods are vertically installed at both ends of the bottom of the upper plate. The output end of the electric push rod passes through the upper plate and is fixedly installed at the bottom of the lifting plate.

[0014] By adopting the above technical solution, the wafer component to be tested is placed in the slot on the support base. The upper plate moves along the X-axis with the upper moving block, so that the lifting plate at the top of the upper plate can move in the X-axis. The electric push rod provides the lifting driving force for the lifting plate in the Y-axis, so that the support base on the lifting plate can move in the Z, X, and Y axes based on the component below. This allows the wafer placed in the slot to move and adjust flexibly under the probe card, which helps the probe card to detect the areas to be tested at different positions on the upper surface of the wafer.

[0015] The beneficial effects of this utility model are as follows: The lower and upper components provide a test fixture with a certain degree of enclosure for wafer inspection probe card testing, improving the stability during the testing process. Furthermore, the flip-top design of the lower and upper components enhances convenience during later maintenance and repair. The flip-top design, with its hinged connection and pneumatic push rod assisting in opening and closing, allows direct exposure of the probe card tip without cumbersome disassembly, greatly simplifying the debugging, inspection, and maintenance process and significantly reducing time costs. The lower housing and upper cover, when closed, form a relatively enclosed space. Combined with the protective door of the operating port and its magnetic rubber strip sealing design, this effectively isolates external dust, airflow, and other interference, providing a more stable and reliable environment for probe card testing. Simultaneously, the multi-axial support mechanism integrated within the housing enables independent or combined movement of the wafer support base in the X, Y, and Z axes. The wafer can be flexibly and accurately positioned at different detection points under the probe card to meet complex testing needs. It solves the problem that existing probe card testing lacks a closed testing environment and a probe card testing fixture structure that is both easy to operate and maintain while having multi-axial adjustment capabilities. Attached Figure Description

[0016] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0017] Figure 1 This is a schematic diagram of the overall design of this utility model; Figure 2 This is a schematic diagram of the upper part of the present invention when opened; Figure 3 This is a schematic diagram of the multi-axial support mechanism of this utility model; Figure 4 This is an exploded view of the lower and upper frames of this utility model; Figure 5 This is a schematic diagram of the lifting plate of this utility model; In the diagram: Lower part 1, housing 101, operating port 11, protective door 12, detection port 13; Upper part 2, probe card testing chassis 21, mounting plate 22, probe card 23, pneumatic push rod 3, multi-axial support mechanism 4, lower frame 41, lower moving block 42, Z-axis lead screw 43, first synchronous pulley 44, first servo motor 45, support wheel 46, middle plate 47, upper frame 48, upper moving block 49, X-axis lead screw 410, second synchronous pulley 411, second servo motor 412, upper plate 413, lifting plate 414, support base 415, groove 416, guide rod 417, electric push rod 418. Detailed Implementation

[0018] To make the technical means, creative features, objectives and effects of this utility model easier to understand, the present utility model will be further described below in conjunction with specific embodiments.

[0019] like Figure 1-5 As shown, the probe card testing fixture for wafer inspection according to this utility model includes a lower part 1 and an upper part 2. The upper part 2 covers the top of the lower part 1, and one end of the upper part 2 is rotatably connected to the lower part 1 through a rotating shaft. The lower part 1 includes a box 101, and a multi-axial support mechanism 4 is provided inside the box 101. An operation port 11 for the multi-axial support mechanism 4 to extend is opened on one side of the lower part 1. A protective door 12 is rotatably installed on one side of the operation port 11 via a hinge. Corresponding magnetic rubber strips are glued to the cover of the protective door 12 and the operation port 11. A detection port 13 is opened at the top inside the box 101. The upper part 2 includes a probe card test box 21 and a probe card 23. The bottom of the probe card test box 21 is provided with a mounting plate 22. The probe card 23 is installed on the bottom of the mounting plate 22 by bolts, and the test pin of the probe card 23 is aligned with the detection port 13.

[0020] This utility model also includes pneumatic push rods 3 respectively provided on both sides of the housing 101. The sleeve cylinder of the pneumatic push rod 3 is rotatably connected to the housing 101 via a rotating shaft, and the output rod of the pneumatic push rod 3 is rotatably connected to the housing of the probe card test box 21 via a rotating shaft.

[0021] In use, the cylinder of the pneumatic push rod is rotatably connected to the housing via a rotating shaft, and the output rod is rotatably connected to the housing of the probe card test host via a rotating shaft to assist the opening and closing of the upper part.

[0022] This utility model also includes a multi-axial support mechanism 4 comprising a lower frame 41, a lower moving block 42 provided at the top of the lower frame 41, and a Z-axis lead screw 43 connected to both ends of the lower moving block 42 by threaded sleeves. The two ends of the Z-axis lead screw 43 are rotatably connected to the lower frame 41 by bearings. One end of the Z-axis lead screw 43 extends through the lower frame 41 and is equipped with a first synchronous pulley 44. The first synchronous pulleys 44 are connected to each other by a synchronous belt. A first servo motor 45 is installed at the end of the lower frame 41 away from the first synchronous wheel 44, and the drive end of the first servo motor 45 is connected to the rotation shaft of the Z-axis lead screw 43 at the corresponding position. The lower frame 41 is equipped with support wheels 46 at both corners that are aligned with the Z-axis lead screw 43. The top of the lower moving block 42 is bolted with a middle plate 47, and the top two sides of the middle plate 47 are provided with wheel grooves corresponding to the support wheels 46.

[0023] In use, the first servo motor 45 drives the Z-axis lead screw 43 to rotate, causing the lower moving block 42 to move the middle plate 47 along the Z-axis. When personnel need to operate or replace the wafer placed above the multi-axis support mechanism 4, the middle plate 47 can be extended from the operation port 11 by the first servo motor 45, making it convenient for personnel to operate above the multi-axis support mechanism 4. During the movement of the middle plate 47, the support wheel 46 on the lower frame 41 provides auxiliary rolling support for the middle plate 47.

[0024] The present invention also includes an upper frame 48 installed on the top of the middle plate 47, an upper moving block 49 provided on the top of the upper frame 48, an X-axis lead screw 410 connected to both ends of the upper moving block 49 by threaded sleeves, the two ends of the X-axis lead screw 410 being rotatably connected to the upper frame 48 by bearings, and a second synchronous pulley 411 installed at one end of the X-axis lead screw 410 through the upper frame 48, the second synchronous pulley 411 being connected to each other by a synchronous belt; A second servo motor 412 is installed at the end of the upper frame 48 away from the second synchronous wheel 411, and the drive end of the second servo motor 412 is connected to the rotation shaft of the X-axis lead screw 410.

[0025] In use, the second servo motor 412 drives the X-axis lead screw 410 to rotate, which in turn drives the upper moving block 49 to move along the X-axis.

[0026] The present invention also includes an upper plate 413 installed on the top of the upper moving block 49, a lifting plate 414 provided on the top of the upper plate 413, and two sets of opposing support seats 415 installed at both ends of the top of the lifting plate 414 by bolts. The top of the opposing surfaces of the support seats 415 are provided with a groove 416 for placing the wafer. Guide rods 417 are fixedly connected to the top two sides of the upper plate 413, and electric push rods 418 are vertically installed at both ends of the bottom of the upper plate 413. The output end of the electric push rod 418 passes through the upper plate 413 and is fixedly installed at the bottom of the lifting plate 414.

[0027] In use, the wafer component to be inspected is placed in the groove 416 on the support base 415. The upper plate 413 moves along the X-axis with the upper moving block 49, so that the lifting plate 414 on the top of the upper plate 413 can move along the X-axis. The electric push rod 418 provides the lifting driving force for the lifting plate 414 along the Y-axis, so that the support base 415 on the lifting plate 414 can move along the Z, X, and Y axes based on the components below. This allows the wafer placed in the groove 416 to move and adjust flexibly under the probe card 23, which helps the probe card 23 to inspect different areas on the upper surface of the wafer.

[0028] In use, the support base 415 of the required size slot 416 is installed on the lifting plate 414, and the power supply component in the work site provides power to the electrical components in this application. The dedicated host of the probe card corresponding to the probe card in the work site is connected to the probe card 23, and a PLC controller for controlling the electrical equipment in the multi-axial support mechanism 4 is provided to coordinate the control of electrical components such as the first servo motor 45, the second servo motor 412 and the electric push rod 418. During use, the first servo motor 45 drives the Z-axis lead screw 43 to rotate, causing the lower moving block 42 to move the middle plate 47 along the Z-axis. When personnel need to operate or replace the wafer placed above the multi-axis support mechanism 4, the first servo motor 45 can drive the middle plate 47 to extend from the operation port 11, facilitating personnel to operate above the multi-axis support mechanism 4. During the movement of the middle plate 47, the support wheels 46 on the lower frame 41 provide auxiliary rolling support for the middle plate 47. The second servo motor 412 drives the X-axis lead screw 410 to rotate, causing the X-axis lead screw 410 to move the upper moving block 49 and move along the X-axis. The wafer component to be inspected is placed in the groove 416 on the support base 415. The upper plate 413 moves along the X-axis with the upper moving block 49, so that the lifting plate 414 on the top of the upper plate 413 can move in the X-axis. The electric push rod 418 provides the lifting driving force for the lifting plate 414 in the Y-axis, so that the support base 415 on the lifting plate 414 can move in the Z, X and Y axes based on the component below. This allows the wafer placed in the groove 416 to move and adjust flexibly under the probe card 23, which helps the probe card 23 to inspect the area to be inspected at different positions on the upper surface of the wafer.

[0029] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The descriptions of the above embodiments and specifications are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of protection claimed by this utility model. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A probe card testing fixture for wafer inspection, characterized in that, It includes a lower part (1) and an upper part (2), the upper part (2) is covered on the top of the lower part (1), and one end of the upper part (2) is rotatably connected to the lower part (1) through a pivot. The lower part (1) includes a box (101), and a multi-axial support mechanism (4) is provided inside the box (101). An operation port (11) for the multi-axial support mechanism (4) to extend is provided on one side of the lower part (1). A protective door (12) is installed on one side of the operation port (11) by means of a hinge. Corresponding magnetic rubber strips are glued to the cover of the protective door (12) and the operation port (11). A detection port (13) is provided at the top inside the box (101). The upper part (2) includes a probe card test box (21) and a probe card (23). The bottom of the probe card test box (21) is provided with a mounting plate (22). The probe card (23) is installed on the bottom of the mounting plate (22) by bolts, and the test pin of the probe card (23) is aligned with the detection port (13).

2. The probe card testing fixture for wafer inspection according to claim 1, characterized in that, Pneumatic push rods (3) are respectively provided on both sides of the housing (101). The cylinder of the pneumatic push rod (3) is rotatably connected to the housing (101) through a rotating shaft. The output rod of the pneumatic push rod (3) is rotatably connected to the housing of the probe card test box (21) through a rotating shaft.

3. The probe card testing fixture for wafer inspection according to claim 2, characterized in that, The multi-axial support mechanism (4) includes a lower frame (41), a lower moving block (42) is provided on the top of the lower frame (41), and a Z-axis screw (43) is connected to both ends of the lower moving block (42) by a threaded connection. The two ends of the Z-axis screw (43) are rotatably connected to the lower frame (41) by bearings. One end of the Z-axis screw (43) passes through the lower frame (41) and is equipped with a first synchronous pulley (44). The first synchronous pulleys (44) are connected to each other by a synchronous belt. The lower frame (41) is equipped with a first servo motor (45) at the end away from the first synchronous wheel (44), and the drive end of the first servo motor (45) is connected to the rotation shaft of the Z-axis lead screw (43) at the corresponding position. The lower frame (41) has support wheels (46) installed at both corners that are aligned with the Z-axis lead screw (43). The lower moving block (42) has a middle plate (47) installed on its top by bolts. The middle plate (47) has wheel grooves on both sides of its top that correspond to the support wheels (46).

4. The probe card testing fixture for wafer inspection according to claim 3, characterized in that, The middle plate (47) is equipped with an upper frame (48) on top. The upper frame (48) is provided with an upper moving block (49) on top. The two ends of the upper moving block (49) are connected to an X-axis screw (410) through threaded sleeves. The two ends of the X-axis screw (410) are rotatably connected to the upper frame (48) through bearings. One end of the X-axis screw (410) passes through the upper frame (48) and is equipped with a second synchronous pulley (411). The second synchronous pulleys (411) are connected to each other through a synchronous belt. The upper frame (48) is equipped with a second servo motor (412) at the end away from the second synchronous wheel (411), and the drive end of the second servo motor (412) is connected to the rotation shaft of the X-axis lead screw (410).

5. A probe card testing fixture for wafer inspection according to claim 4, characterized in that, The upper moving block (49) is equipped with an upper plate (413) on top, and a lifting plate (414) is provided on the top of the upper plate (413). Two sets of opposing support seats (415) are installed at both ends of the top of the lifting plate (414) by bolts. The top of the opposing surface of the support seat (415) is provided with a groove (416) for placing the wafer. Guide rods (417) are fixedly connected to the top two sides of the upper plate (413), and electric push rods (418) are vertically installed at both ends of the bottom of the upper plate (413). The output end of the electric push rod (418) passes through the upper plate (413) and is fixedly installed at the bottom of the lifting plate (414).

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