A substrate positioning mechanism for a precise recognition and positioning glue coating and developing machine

Abstract

The utility model relates to the technical field of gluing developing machine, and disclose a kind of substrate positioning mechanism for gluing developing machine of accurate identification positioning, including positioning table and screw rod adjusting part, the top of positioning table is equipped with top hole, the inside of top hole is equipped with mounting seat, the mounting seat is installed on screw rod adjusting part, screw rod adjusting part controls mounting seat transverse movement, the top of mounting seat is equipped with adsorption fixed platform with sliding, one side of mounting seat is equipped with electric push rod fixedly. The utility model is through the utilization of calibration air port, air pump and annular cavity and internal pressure sensor, when carrying out substrate positioning, with the control substrate longitudinal movement, when substrate moves to accurate position, substrate seals and shields all calibration air port, so that the air pressure in annular cavity rises, and the pressure in annular cavity is sensed by pressure sensor, when detecting pressure rises, it is identified that substrate positioning is accurate, meets positioning requirement, completes accurate positioning calibration identification, easy to operate, and positioning effect is good.

Description

Technical Field

[0001] This utility model relates to the field of coating and developing machine technology, and more specifically, to a substrate positioning mechanism for a coating and developing machine with precise identification and positioning. Background Technology

[0002] Photoresist coating and developing machines are key equipment in semiconductor or flat panel display manufacturing. They are used to uniformly coat a substrate (such as a silicon wafer or glass substrate) with photoresist and form the desired pattern through a developing process. The substrate positioning mechanism refers to the mechanical structure used to precisely fix, align, and move the substrate during the coating and developing process to ensure the uniformity of the process and the accuracy of the pattern.

[0003] Existing substrate positioning mechanisms for precise identification and positioning in coating and developing machines achieve precise positioning of the substrate by adjusting its horizontal and vertical position. However, during the adjustment process, it is impossible to accurately identify whether precise positioning has been achieved. Furthermore, mechanical mechanisms are often used to determine this through resistance. However, the actual mechanical structure hinders the movement and adjustment of the substrate to some extent, and the accuracy of positioning is not determined by visual judgment. Overall, the effect is not good. Utility Model Content

[0004] In order to overcome the shortcomings of the prior art, this utility model provides a substrate positioning mechanism for a coating and developing machine with precise identification and positioning, which has the advantages of identifying and positioning positions and assisting in cleaning impurity particles.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a substrate positioning mechanism for a coating and developing machine with precise identification and positioning, comprising a positioning stage and a lead screw adjustment unit. The top of the positioning stage has a top hole, and a mounting seat is provided inside the top hole. The mounting seat is mounted on the lead screw adjustment unit, which controls the lateral movement of the mounting seat. An adsorption fixing stage is slidably provided on the top of the mounting seat. An electric push rod is fixed on one side of the mounting seat, which controls the longitudinal movement of the adsorption fixing stage. The adsorption fixing stage adsorbs and fixes the substrate. A positioning calibration mechanism is provided on the top of the positioning stage, which identifies the position of the substrate.

[0006] As a preferred technical solution of this utility model, the positioning calibration mechanism includes an annular cavity, a calibration air port, a pressure sensor, and an air pump. The annular cavity is opened inside the positioning stage, the calibration air port is opened on the top of the positioning stage and communicates with the annular cavity, the pressure sensor is set in the annular cavity, and the air pump is fixed on the side of the positioning stage. The air pump inputs pressurized air into the annular cavity. When the substrate completely covers the surrounding calibration air ports, the air pressure inside the annular cavity increases.

[0007] As a preferred embodiment of the present invention, the positioning calibration mechanism further includes a photosensitive sensor, which is fixed in the annular cavity and located below the calibration air port, with each photosensitive sensor corresponding to a calibration air port.

[0008] As a preferred embodiment of this utility model, the lead screw adjustment unit includes a lead screw, a support plate, and a bottom horizontal plate. The bottom of the positioning platform is provided with a bottom groove, the support plate is fixed in the bottom groove, the lead screw is rotatably sleeved in the support plate, and the bottom horizontal plate is fixed to the bottom of the positioning platform. The lead screw adjustment unit also includes a motor, which controls the forward and reverse rotation of the lead screw. The mounting seat is threaded onto the outside of the lead screw, and the bottom of the mounting seat is provided with a slider, which is slidably sleeved in a groove at the top of the bottom horizontal plate.

[0009] As a preferred technical solution of this utility model, the adsorption fixing platform includes a platform body, a suction hole and an intermediate cavity. The intermediate cavity is opened in the platform body, the suction hole is opened at the top of the platform body, the intermediate cavity is connected to the suction hole, and a negative pressure pump is provided on the side of the mounting base. The suction pipe of the negative pressure pump is connected to the intermediate cavity.

[0010] As a preferred embodiment of this utility model, the bottom of the adsorption fixing platform is fixedly connected to a movable seat, the movable seat is slidably sleeved in the sliding groove at the top of the mounting base, the electric push rod is fixed on the mounting base by a bracket, and the movable end of the electric push rod is fixedly connected to the movable seat.

[0011] As a preferred technical solution of this utility model, the adsorption fixing platform is provided with a liftable suction end inside. The suction end corresponds one-to-one with the suction holes distributed around it. The suction end includes a suction cylinder, a filter screen sleeve and a suction port. The suction cylinder is located below the suction holes. The filter screen sleeve is threaded onto the bottom of the suction cylinder. The suction port is opened on the outer side of the suction cylinder.

[0012] As a preferred technical solution of this utility model, the interior of the intermediate cavity is provided with a connecting frame, the connecting frame is fixedly connected to the surrounding movable suction ends, the top of the connecting frame is fixedly connected with an auxiliary sealing plug, the interior of the movable seat is provided with a lifting mechanism, the movable end of the lifting mechanism passes through the bottom of the platform and is fixedly connected to the connecting frame, and controls the lifting and moving of the connecting frame.

[0013] Compared with the prior art, the beneficial effects of this utility model are as follows: 1. This utility model utilizes calibration air ports, an air pump, an annular cavity, and an internal pressure sensor. During substrate positioning, as the substrate moves longitudinally and laterally, when the substrate reaches the accurate position, the substrate seals and blocks all calibration air ports, causing the air pressure in the annular cavity to rise. The pressure sensor detects the internal pressure of the annular cavity. When the detected pressure rises, it is recognized that the substrate is accurately positioned and meets the positioning requirements, thus completing the calibration and recognition of precise positioning. The operation is simple and the positioning effect is good.

[0014] 2. This utility model utilizes a photosensitive sensor built into the annular cavity, and coordinates the photosensitive sensor with the calibration air port. When the calibration air port is sealed by the substrate, the photosensitive sensor there cannot detect light, while the photosensitive sensor corresponding to the unblocked calibration air port detects light and emits a sensing signal. By actively controlling the substrate to move closer to the photosensitive sensor that emits the sensing signal, the correct positioning and calibration direction of the substrate is determined, and the substrate actively seals all calibration air ports, so that no photosensitive sensor emits a sensing signal, enabling fast and accurate line-of-sight positioning adjustment and recognition.

[0015] 3. This utility model utilizes a suction movable end built into the adsorption fixing platform, and uses a lifting mechanism, connecting frame and auxiliary sealing plug. The lifting mechanism controls the auxiliary sealing plug and suction movable end to move upward synchronously to complete the sealing of the central suction hole, and makes the suction port of the suction movable end located at the top of the platform. By switching the air intake direction, impurities at the top of the platform are sucked in and filtered, thus completing automated and fast cleaning. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of this utility model; Figure 2 This is a cross-sectional view of the present invention; Figure 3 This is a cross-sectional view of the positioning platform of this utility model; Figure 4 This is a cross-sectional view of the adsorption fixing platform and mounting base of this utility model; Figure 5 This is a cross-sectional view of the inhalation movable end of this utility model.

[0017] In the diagram: 1. Positioning platform; 2. Top hole; 3. Lead screw adjustment part; 31. Lead screw; 32. Support plate; 33. Bottom horizontal plate; 4. Mounting base; 5. Adsorption fixing platform; 51. Platform body; 52. Suction port; 53. Intermediate cavity; 6. Negative pressure pump; 7. Electric push rod; 8. Movable seat; 9. Annular cavity; 10. Calibration air port; 11. Pressure sensor; 12. Photosensitive sensor; 13. Air pump; 14. Suction movable end; 141. Suction cylinder; 142. Filter screen sleeve; 143. Suction port; 15. Lifting mechanism; 16. Connecting frame; 17. Auxiliary sealing plug. Detailed Implementation

[0018] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0019] like Figures 1 to 5 As shown, this utility model provides a substrate positioning mechanism for a coating and developing machine with precise identification and positioning. It includes a positioning stage 1 and a lead screw adjustment part 3. The top of the positioning stage 1 has a top hole 2, and a mounting seat 4 is provided inside the top hole 2. The mounting seat 4 is mounted on the lead screw adjustment part 3. The lead screw adjustment part 3 controls the horizontal movement of the mounting seat 4. A suction fixing platform 5 is slidably provided on the top of the mounting seat 4. An electric push rod 7 is fixed on one side of the mounting seat 4. The electric push rod 7 controls the vertical movement of the suction fixing platform 5. The suction fixing platform 5 suctions and fixes the substrate. A positioning calibration mechanism is provided on the top of the positioning stage 1. The positioning calibration mechanism identifies the position of the substrate.

[0020] The positioning calibration mechanism includes an annular cavity 9, a calibration air port 10, a pressure sensor 11, and an air pump 13. The annular cavity 9 is located inside the positioning stage 1. The calibration air port 10 is located on the top of the positioning stage 1 and communicates with the annular cavity 9. The pressure sensor 11 is located in the annular cavity 9. The air pump 13 is fixed to the side of the positioning stage 1 and the air pump 13 inputs pressurized air into the annular cavity 9. When the substrate completely covers the surrounding calibration air ports 10, the air pressure inside the annular cavity 9 increases.

[0021] Positioning identification is achieved by using a positioning calibration mechanism. The calibration port 10 discharges the internal air in the annular cavity 9, and the calibration port 10 is determined according to the standard positioning position. When the calibration port 10 is completely blocked, it is determined that the identification substrate is located in the positioning position, and the air pressure in the annular cavity 9 will increase. The judgment and identification are completed in conjunction with the pressure sensor 11.

[0022] Pressure sensor 11 is an existing structure, specifically model Honeywell SSCDANN015PGAA5.

[0023] The positioning calibration mechanism also includes a photosensitive sensor 12, which is fixed in the annular cavity 9. The photosensitive sensor 12 is located below the calibration air port 10, and there is a one-to-one correspondence between the photosensitive sensor 12 and the calibration air port 10.

[0024] The photosensitive sensor 12 has an existing structure, specifically model Broadcom APDS-9301.

[0025] The photosensitive sensor 12 senses external light through the calibration port 10. When the calibration port 10 is blocked, it cannot sense light. When light is sensed, it emits a sensing signal. By identifying the sensing signal area, it actively controls the substrate to move toward the sensing signal area, thereby sealing the calibration port 10 and completing the basic positioning adjustment in the determined direction.

[0026] The lead screw adjustment unit 3 includes a lead screw 31, a support plate 32, and a bottom horizontal plate 33. The bottom of the positioning table 1 is provided with a bottom groove, the support plate 32 is fixed in the bottom groove, the lead screw 31 is rotatably sleeved in the support plate 32, and the bottom horizontal plate 33 is fixed in the bottom of the positioning table 1. The lead screw adjustment unit 3 also includes a motor, which controls the forward and reverse rotation of the lead screw 31. The mounting seat 4 is threaded onto the outside of the lead screw 31, and the bottom of the mounting seat 4 is provided with a slider, which is slidably sleeved in the groove at the top of the bottom horizontal plate 33.

[0027] The lead screw adjustment unit 3 controls the movement of the mounting base 4 to complete the adjustment action.

[0028] The adsorption fixing platform 5 includes a platform body 51, a suction hole 52, and an intermediate cavity 53. The intermediate cavity 53 is opened in the platform body 51, and the suction hole 52 is opened at the top of the platform body 51. The intermediate cavity 53 is connected to the suction hole 52. A negative pressure pump 6 is provided on the side of the mounting base 4. The suction pipe of the negative pressure pump 6 is connected to the intermediate cavity 53. A movable seat 8 is fixedly connected to the bottom of the adsorption fixing platform 5. The movable seat 8 is slidably sleeved in the sliding groove at the top of the mounting base 4. The electric push rod 7 is fixed on the mounting base 4 by a bracket, and the movable end of the electric push rod 7 is fixedly connected to the movable seat 8.

[0029] The adsorption fixing platform 5 fixes the substrate by negative pressure adsorption, and the movable seat 8 is moved by the electric push rod 7 to realize the movement of the adsorption fixing platform 5.

[0030] The adsorption station 5 has a liftable suction end 14 inside, which corresponds to the surrounding suction holes 52. The suction end 14 includes a suction cylinder 141, a filter screen sleeve 142, and a suction port 143. The suction cylinder 141 is located below the suction holes 52. The filter screen sleeve 142 is threaded onto the bottom of the suction cylinder 141. The suction port 143 is opened on the outer side of the suction cylinder 141. The intermediate cavity 53 has a connecting frame 16 inside, which is fixedly connected to the surrounding suction end 14. An auxiliary sealing plug 17 is fixedly connected to the top of the connecting frame 16. The movable seat 8 has a lifting mechanism 15 inside. The movable end of the lifting mechanism 15 passes through the bottom of the station body 51 and is fixedly connected to the connecting frame 16, and controls the lifting and moving of the connecting frame 16.

[0031] By removing the suction end 14, the suction direction is switched, so that the top of the adsorption station 5 is in a horizontal suction position, and the impurity particles on the top are sucked out and processed, ensuring that the subsequent substrate is placed flat, and the filter screen 12 achieves filtration.

[0032] The working principle and usage process of this utility model are as follows: During the positioning operation, the substrate to be positioned is placed on top of the positioning stage 1, with the substrate covering the top hole 2. At this time, the substrate also seals part of the calibration air port 10. The negative pressure pump 6 is started and the gas in the intermediate cavity 53 is drawn in. By having the substrate cover the suction hole 52 on the top of the stage 51, a low pressure is established in the intermediate cavity 53, creating a pressure difference between the substrate above and below the suction hole. The substrate is fixed on the adsorption fixing stage 5. The lead screw adjustment part 3 is started to control the horizontal movement adjustment of the mounting seat 4, and the electric push rod 7 controls the vertical movement adjustment of the movable seat 8. Thus, the adsorption fixing stage 5 is moved in both horizontal and vertical directions, which in turn moves the adsorbed and fixed substrate. When the substrate is accurately positioned, the substrate covers all the calibration air ports 10. As the air pump 13 inputs pressurized air into the annular cavity 9, the air pressure in the annular cavity 9 increases under the sealed state. The internal pressure sensor 11 detects the pressure increase and identifies the positioning accuracy. The positioning calibration is completed. When the position of the adsorption fixing stage 5 is adjusted and the position of the substrate is controlled, the substrate is actively controlled to move toward the photosensitive sensor 12 that senses the light, based on the sensing state of the photosensitive sensor 12 in the annular cavity 9. The direction of the positioning movement is determined. When all photosensitive sensors 12 do not generate a sensing signal, the calibration air port 10 is completely closed to ensure that the substrate is accurately positioned. After the substrate is coated with glue, the substrate is removed and the lifting mechanism 15 is started. The auxiliary sealing plug 17 and the suction movable end 14 are moved upward through the connecting frame 16. The auxiliary sealing plug 17 is fitted and seals the suction hole 52 in the center. The suction movable ends 14 distributed around the perimeter are fitted into the suction holes 52 distributed around the perimeter and extend upward. The suction port 143 on the outside of the suction cylinder 141 is located at the top of the stage 51. As the negative pressure pump 6 is started, impurities on the top of the stage 51 are sucked in through the suction port 143 and filtered into the inside of the suction cylinder 141.

[0033] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A substrate positioning mechanism for a coating and developing machine with precise identification and positioning, comprising a positioning stage (1) and a lead screw adjustment part (3), characterized in that: The top of the positioning platform (1) is provided with a top hole (2), and the inside of the top hole (2) is provided with a mounting seat (4). The mounting seat (4) is mounted on the lead screw adjustment part (3). The lead screw adjustment part (3) controls the mounting seat (4) to move laterally. The top of the mounting seat (4) is provided with a suction fixing platform (5). An electric push rod (7) is fixed on one side of the mounting seat (4). The electric push rod (7) controls the suction fixing platform (5) to move longitudinally. The suction fixing platform (5) suctions and fixes the substrate. The top of the positioning platform (1) is provided with a positioning calibration mechanism. The positioning calibration mechanism identifies the position of the substrate.

2. The substrate positioning mechanism for a coating and developing machine with precise identification and positioning according to claim 1, characterized in that: The positioning calibration mechanism includes an annular cavity (9), a calibration air port (10), a pressure sensor (11), and an air pump (13). The annular cavity (9) is located inside the positioning stage (1). The calibration air port (10) is located on the top of the positioning stage (1) and communicates with the annular cavity (9). The pressure sensor (11) is located in the annular cavity (9). The air pump (13) is fixed on the side of the positioning stage (1) and the air pump (13) inputs pressurized air into the annular cavity (9). When the substrate completely covers the surrounding calibration air ports (10), the air pressure inside the annular cavity (9) increases.

3. The substrate positioning mechanism for a coating and developing machine with precise identification and positioning according to claim 2, characterized in that: The positioning calibration mechanism also includes a photosensitive sensor (12), which is fixed in the annular cavity (9). The photosensitive sensor (12) is located below the calibration air port (10), and the photosensitive sensor (12) corresponds one-to-one with the calibration air port (10).

4. The substrate positioning mechanism for a coating and developing machine with precise identification and positioning according to claim 3, characterized in that: The lead screw adjustment part (3) includes a lead screw (31), a support plate (32) and a bottom horizontal plate (33). The bottom of the positioning platform (1) is provided with a bottom groove. The support plate (32) is fixed in the bottom groove. The lead screw (31) is rotatably sleeved in the support plate (32). The bottom horizontal plate (33) is fixed in the bottom of the positioning platform (1). The lead screw adjustment part (3) also includes a motor. The motor controls the forward and reverse rotation of the lead screw (31). The mounting seat (4) is threaded onto the outside of the lead screw (31). The bottom of the mounting seat (4) is provided with a slider. The slider is slidably sleeved in the groove at the top of the bottom horizontal plate (33).

5. The substrate positioning mechanism for a coating and developing machine with precise identification and positioning according to claim 1, characterized in that: The adsorption fixing platform (5) includes a platform body (51), a suction hole (52) and an intermediate cavity (53). The intermediate cavity (53) is opened in the platform body (51), and the suction hole (52) is opened at the top of the platform body (51). The intermediate cavity (53) is connected to the suction hole (52). A negative pressure pump (6) is provided on the side of the mounting base (4), and the suction pipe of the negative pressure pump (6) is connected to the intermediate cavity (53).

6. The substrate positioning mechanism for a coating and developing machine with precise identification and positioning according to claim 5, characterized in that: The bottom of the adsorption fixing platform (5) is fixedly connected to a movable seat (8), which is slidably sleeved in the sliding groove at the top of the mounting base (4). The electric push rod (7) is fixed on the mounting base (4) by a bracket, and the movable end of the electric push rod (7) is fixedly connected to the movable seat (8).

7. The substrate positioning mechanism for a coating and developing machine with precise identification and positioning according to claim 6, characterized in that: The adsorption station (5) is provided with a liftable suction end (14) inside. The suction end (14) corresponds one-to-one with the surrounding suction holes (52). The suction end (14) includes a suction cylinder (141), a filter screen sleeve (142) and a suction port (143). The suction cylinder (141) is located below the suction holes (52). The filter screen sleeve (142) is threaded onto the bottom of the suction cylinder (141). The suction port (143) is opened on the outer side of the suction cylinder (141).

8. The substrate positioning mechanism for a coating and developing machine with precise identification and positioning according to claim 7, characterized in that: The intermediate cavity (53) is provided with a connecting frame (16), which is fixedly connected to the surrounding suction movable end (14). An auxiliary sealing plug (17) is fixedly connected to the top of the connecting frame (16). The movable seat (8) is provided with a lifting mechanism (15). The movable end of the lifting mechanism (15) passes through the bottom of the platform (51) and is fixedly connected to the connecting frame (16), and controls the lifting and moving of the connecting frame (16).

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