Low-height planar motor mobile lifting device and planar motor

Abstract

The utility model relates to a kind of low-height planar motor moving element lifting device, comprising: third stator, multiple third stator are sequentially arranged along path, the height of the third stator is sequentially increased from the first end to the end of path, the third stator is parallel between it.The utility model is composed of ladder by multiple third stator, moving element is elevated or lowered by moving on ladder, moving element always keeps level during movement, avoids the displacement of the article carried on moving element due to gravity;The height of moving element lifting can be changed by changing the number of third stator in ladder and the height difference between them, simple operation;Only moving element and planar motor are used during lifting process, other mechanical structures are not needed, avoid the particle generated by mechanical contact, oil mist pollution generated by mechanical equipment to air, more suitable for high-cleanliness environment.

Description

Technical Field

[0001] This utility model relates to the field of planar motors, and in particular to a low-height planar motor mover lifting device and a planar motor. Background Technology

[0002] A planar motor is a direct-drive electromagnetic actuator, consisting of a fixed stator and a moving rotor used to transport the load. Utilizing electromagnetic force, the mover enables precise two-dimensional linear motion on the stator plane without any intermediate mechanical transmission mechanisms (such as lead screws, belts, gears, etc.). Therefore, planar motors are commonly used in environments with high cleanliness requirements, such as wafer / mask transport, microelectronic component transport, biopharmaceutical sterile environment transport, and glass substrate handling.

[0003] Because there is a height difference between the devices at both ends of the planar motor, a small height difference can be resolved by increasing the levitation height of the mover. However, a larger height difference requires the mover to pass through an inclined stator to change its height. When transporting posture-sensitive items (such as liquid samples, precision optical components, wafers, etc.), the mover is also in an inclined state when passing through the inclined stator, which can easily cause the items being transported on the mover to shift or slip off. Utility Model Content

[0004] This invention aims to solve the above-mentioned problems by providing a low-height planar motor mover lifting device and a planar motor, which solves the problem of displacement of the transported items when the mover changes height. A low-height planar motor mover lifting device includes: a third stator, a plurality of third stators arranged sequentially along a path, the height of the third stators increasing sequentially from the beginning to the end of the path, and the third stators being parallel to each other.

[0005] Preferably, the height difference between two adjacent third stators is less than the maximum suspension height of the mover relative to the third stator.

[0006] Preferably, the horizontal gap between two adjacent third stators is less than half the length of the mover.

[0007] Preferably, the sides of two adjacent third stators are in contact.

[0008] Preferably, the path is a straight line, a curve, or a broken line.

[0009] Preferably, the system further includes a support bracket, with the lower end of the third stator fixedly connected to the support bracket.

[0010] A planar motor using the aforementioned low-height planar motor mover lifting device includes: a first stator, a second stator, and a mover. The first stator and the second stator are respectively located at the beginning and end of the path of the third stator. The height of the first stator is less than or equal to the height of the third stator at the beginning of the path, and the height of the second stator is greater than or equal to the height of the third stator at the end of the path.

[0011] Preferably, the first stator, the second stator, and the third stator are each equipped with coils, and the mover is equipped with a permanent magnet. The first stator, the second stator, and the third stator are driven by magnetic force to levitate and move the mover.

[0012] Preferably, the first stator, the second stator, and the third stator are each equipped with a permanent magnet or a coil, and the mover is equipped with a coil. The mover is suspended and moves on the first stator, the second stator, and the third stator by magnetic force.

[0013] Preferably, the first stator, the second stator, and the third stator are parallel to each other and parallel to the horizontal plane.

[0014] This utility model has the following advantages: 1. Multiple third stators form a ladder, and the mover moves up or down the ladder to raise or lower the level. The mover remains horizontal throughout the movement, preventing the items carried on the mover from shifting due to gravity. Through step-by-step ladder-like lifting, the upper surface of the mover is kept parallel to the horizontal plane throughout the entire lifting process, solving the technical problem in existing inclined track solutions where posture-sensitive items are displaced or slip off due to track tilt. 2. The height of the mover can be changed by altering the number of third stators in the steps and the height difference between them; the operation is simple. 3. The lifting process uses only the mover and the planar motor, without the need for other mechanical structures, thus avoiding particle pollution from mechanical contact and oil mist pollution from mechanical equipment, making it more suitable for high-cleanliness environments. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only one embodiment of this utility model. For those skilled in the art, other embodiments can be derived from the provided drawings without creative effort.

[0016] Figure 1 : A schematic diagram of the main structure of this utility model (the path is a straight line); Figure 2 : Figure 1 A top-view structural diagram; Figure 3 : A schematic diagram of the main structure of this utility model (the path is a straight line); Figure 4 : Figure 3 A top-view structural diagram. Detailed Implementation

[0017] The present invention will be further described below with reference to the accompanying drawings and examples: The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0018] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0019] In the description of this utility model, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. like Figures 1 to 4 As shown, a low-height planar motor mover lifting device includes: a third stator 3, with multiple third stators 3 arranged sequentially along a path. The height of the third stators 3 increases sequentially from the beginning to the end of the path. The third stators 3 are parallel to each other, ensuring that the mover 4 remains parallel to the third stators 3 during climbing or descending. The upper surface of the mover 4 always remains parallel to the horizontal plane, preventing the goods on the mover 4 from shifting or spilling due to weight.

[0020] Preferably, the height difference between two adjacent third stators 3 is less than the maximum suspension height of the mover 4 relative to the third stator 3, thereby ensuring that the suspension height of the mover 4 is greater than the height of the next climbing third stator 3.

[0021] Preferably, the horizontal gap between two adjacent third stators 3 is less than half the length of the mover 4. This prevents the mover 4 from being suspended for too long, which could cause it to fall into the gap between the two third stators 3.

[0022] Preferably, the sides of two adjacent third stators 3 are in contact to minimize the gap between them and improve the stability of the mover 4 when it crosses the two third stators 3.

[0023] Preferably, the path is a straight line (e.g., ...). Figure 1 and Figure 2 As shown), curves or broken lines. Among them, Figure 4 The broken line shown is a V-shape rotated 90 degrees counterclockwise. The arrangement of the third stator 3 along the V-shaped path helps to reduce the space occupied in the horizontal direction.

[0024] Preferably, the system also includes a bracket 31, and the lower end of the third stator 3 is fixedly connected to the bracket 31.

[0025] Raise the height of mover 4: The direction of motion of mover 4 is as follows Figure 1 and Figure 4 As indicated by the arrow, the mover 4 first moves to the position close to the connection between the two third stators 3. Then, the mover 4 moves upward by magnetic force until the bottom surface of the mover 4 is higher than the top surface of the next (higher) third stator 3. Under the action of magnetic force, the mover 4 moves towards the next third stator 3, and the area of ​​the mover 4 on the next third stator 3 becomes larger and larger. When the permanent magnet (moving magnet planar motor) or coil (moving coil planar motor) of the mover 4 moves onto the next third stator 3, the two third stators 3 located below the mover 4 simultaneously apply magnetic force to the mover 4 to drive the mover 4 to levitate and move until the permanent magnet or coil of the mover 4 is completely above the previous third stator 3. After that, the next third stator 3 alone drives the mover 4 to move completely above it. As described above, the mover 4 passes through multiple third stators 3 that together form a stepped structure, according to the required lifting height.

[0026] When lowering the height of the mover 4: The mover 4 first moves to a position close to the connection between the two third stators 3. Under the action of magnetic force, the mover 4 moves towards the next (lower) third stator 3, and the area of ​​the mover 4 on the next third stator 3 becomes increasingly larger. When the permanent magnet (moving magnet planar motor) or coil (moving coil planar motor) of the mover 4 moves onto the next third stator 3, the two third stators 3 located below the mover 4 simultaneously apply magnetic force to the mover 4 to drive it to levitate and move, until the permanent magnet or coil of the mover 4 is completely above the previous third stator 3. After the next third stator 3 drives the mover 4 to move completely above it, the next third stator 3 drives the mover 4 to lower its height to reduce power consumption and prepare for moving to the next lower third stator 3. As described above, the mover 4 passes through multiple third stators 3 that together form a stepped structure, according to the required reduction height.

[0027] like Figures 1 to 4 As shown, a planar motor using the aforementioned low-height planar motor mover lifting device includes: a first stator 1, a second stator 2, and a mover 4. The first stator 1 and the second stator 2 are located at the beginning and end of the path of the third stator 3, respectively. The height of the first stator 1 is less than or equal to the height of the third stator 3 at the beginning of the path, and the height of the second stator 2 is greater than or equal to the height of the third stator 3 at the end of the path.

[0028] Preferably, the planar motor is a moving magnet planar motor, with coils installed on the first stator 1, the second stator 2 and the third stator 3 respectively, and a permanent magnet installed on the mover 4. The first stator 1, the second stator 2 and the third stator 3 drive the mover 4 to levitate and move through magnetic force.

[0029] Preferably, the planar motor is a moving-coil planar motor, with permanent magnets or coils installed on the first stator 1, the second stator 2, and the third stator 3, and a coil installed on the mover 4. The mover 4 is suspended and moves on the first stator 1, the second stator 2, and the third stator 3 by magnetic force.

[0030] Preferably, the first stator 1, the second stator 2, and the third stator 3 are parallel to each other and parallel to the horizontal plane, thereby ensuring that the mover 4 remains parallel to the motor plane and the horizontal plane during the movement from the first stator 1 to the second stator 2, and preventing the items carried on the mover 4 from being displaced by gravity.

[0031] The present invention has been described above by way of example, but the present invention is not limited to the specific embodiments described above. Any modifications or variations made based on the present invention shall fall within the scope of protection claimed by the present invention.

Claims

1. A low-height planar motor actuator lifting device, characterized in that, include: The third stator (3) is arranged in sequence along the path. The height of the third stator (3) increases from the beginning to the end of the path. The third stators (3) are parallel to each other.

2. The low-height planar motor mover lifting device according to claim 1, characterized in that: The height difference between two adjacent third stators (3) is less than the maximum suspension height of the mover (4) relative to the third stator (3).

3. The low-height planar motor mover lifting device according to claim 1, characterized in that: The horizontal gap between two adjacent third stators (3) is less than half the length of the mover (4).

4. The low-height planar motor mover lifting device according to claim 3, characterized in that: The sides of two adjacent third stators (3) are in contact.

5. A low-height planar motor actuator lifting device according to claim 1, characterized in that: The path can be a straight line, a curve, or a broken line.

6. A low-height planar motor mover lifting device according to claim 1, characterized in that: It also includes a bracket (31), the lower end of which is fixedly connected to the bracket (31).

7. A planar motor using the low-height planar motor mover lifting device as described in any one of claims 1 to 6, characterized in that, include: The first stator (1), the second stator (2), and the mover (4) are located at the beginning and end of the path of the third stator (3), respectively. The height of the first stator (1) is less than or equal to the height of the third stator (3) at the beginning of the path, and the height of the second stator (2) is greater than or equal to the height of the third stator (3) at the end of the path.

8. A planar motor according to claim 7, characterized in that: The first stator (1), the second stator (2) and the third stator (3) are respectively equipped with coils, and the mover (4) is equipped with a permanent magnet. The first stator (1), the second stator (2) and the third stator (3) drive the mover (4) to levitate and move by magnetic force.

9. A planar motor according to claim 7, characterized in that: The first stator (1), the second stator (2) and the third stator (3) are respectively equipped with permanent magnets or coils, and the mover (4) is equipped with a coil. The mover (4) is suspended and moves on the first stator (1), the second stator (2) and the third stator (3) by magnetic force.

10. A planar motor according to claim 7, characterized in that: The first stator (1), the second stator (2) and the third stator (3) are parallel to each other and parallel to the horizontal plane.

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