Device cavity temperature measurement system and device cavity with heating function

CN224695376UActive Publication Date: 2026-08-28IDEAL ENERGY (SHANGHAI) SUNFLOWER THIN FILM EQUIPMENT LTD
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Patent Information

Application Number
CN202521844391.5
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-08-28
Publication Date
2026-08-28
Estimated Expiration
2035-08-28

AI Technical Summary

Technical Problem

热电偶依靠波纹管提供的弹力与加热板压紧接触,每次操作并不能百分之百重复上次的压紧状态,存在弹性力不足,接触不好的可能,且操作比较繁琐复杂,不利于快速维护

Benefits of technology

[0016]与现有技术中采用波纹管提供弹力使热电偶与待测件贴合存在着安装维护难、热电信号采集不稳定、制造成本高相比,本实用新型的所述设备腔测温系统用于对设备腔中的n个加热板进行测温,其包括n个热电偶、第一支架、n个热电信号传输导线以及热电信号输出模块,所述n个热电信号传输导线与所述n个热电偶分别通过n个公母配套连接接头连接,所述n个公母配套连接接头以及n个热电信号传输导线沿着第一支架设置,所述热电信号输出模块与所述n个热电信号传输导线连接并将n个热电信号传送至设备腔外,所述设备腔测温系统还包括分别设置在n个加热板上的n个热电偶压块,通过调节每个热电偶压块以使所述热电偶与相应加热板相接触。

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Abstract

The utility model provides equipment cavity temperature measurement system and with the equipment cavity of heating function. Equipment cavity temperature measurement system is used for carrying out temperature measurement to n heating plate in equipment cavity, it includes n thermocouple, first support, n thermoelectric signal transmission wire and thermoelectric signal output module, n thermoelectric signal transmission wire with n thermocouple is connected respectively through n male female matching connecting joint, n male female matching connecting joint and n thermoelectric signal transmission wire are along first support setting, thermoelectric signal output module with n thermoelectric signal transmission wire is connected and transmits n thermoelectric signal to equipment cavity outside, equipment cavity temperature measurement system still includes the n thermocouple pressure block of setting respectively on n heating plate, through the adjustment of each thermocouple pressure block to make the thermocouple and corresponding heating plate contact. The utility model can realize the thermoelectric signal stable collection, transmission of thermocouple, reduce temperature measurement error, installation difficulty and manufacturing cost.
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