Track structure of a semiconductor structure and test handler

Abstract

The application provides a track structure of a semiconductor structure and a test sorting machine. The track structure of the semiconductor structure comprises a track bottom plate and a track cover plate arranged on the track bottom plate, and the track bottom plate and the track cover plate enclose a hollow track channel. The cross-sectional size of the track channel is adjustable. The track structure of the semiconductor structure has an adjustable cross-sectional size of the track channel, so that the track structure of the semiconductor structure can meet the test requirements of products of different sizes, the downtime caused by replacing the track can be reduced, the production mode of multiple varieties and small batches is suitable, the equipment utilization rate is improved, the application range is wide, a special track does not need to be prepared for each product, the spare part inventory is reduced, and the cost is reduced.

Description

Technical Field

[0001] This application relates to the field of semiconductor equipment technology, and in particular to a track structure and test sorting machine for semiconductor structures. Background Technology

[0002] Existing semiconductor packaging and testing product sorting machines use fixed-size test conveyor tracks, each designed specifically for a particular product model and size, and cannot be adjusted to accommodate other sizes. When testing different product models and sizes, the entire track must be replaced, limiting its usability. Using unsuitable test tracks can lead to jams, flipping, and other anomalies during product transport due to size deviations, impacting production efficiency and quality. Therefore, related technologies require customized tracks for each product size, resulting in multiple track sizes for multiple package sizes, increasing the number of product models, hindering management, and raising purchase and maintenance costs. This type of track has limited adaptability and is ill-suited for the needs of multi-variety, small-batch production. Utility Model Content

[0003] This application provides a track structure for a semiconductor structure, which includes a track base plate and a track cover plate disposed on the track base plate. The track base plate and the track cover plate form a hollow track channel; wherein the cross-sectional dimensions of the track channel are adjustable.

[0004] In some embodiments, the height of the track cover relative to the track base plate is adjustable;

[0005] The track structure also includes a height adjustment component, which is used to adjust the relative height between the track cover plate and the track base plate.

[0006] In some embodiments, the height of the track cover and the track base plate is continuously adjustable.

[0007] In some embodiments, the track cover plate includes a first track cover plate and a second track cover plate arranged in the width direction of the track channel, and the track base plate includes a first track base plate and a second track base plate arranged in the width direction of the track channel, wherein the first track cover plate is disposed on the first track base plate and the second track cover plate is disposed on the second track base plate;

[0008] There are multiple height adjustment components, one part of which is connected to the first track cover plate and the first track base plate, and another part is connected to the second track cover plate and the second track base plate.

[0009] In some embodiments, the first track cover plate includes a first top wall portion and a first side wall portion connected together, and the second track cover plate includes a second top wall portion and a second side wall portion connected together;

[0010] The first track base plate has a first limiting groove that is adapted to the first side wall portion. One end of the first side wall portion away from the first top wall portion is disposed in the first limiting groove. The height adjustment component is assembled to the first side wall portion and the first track base plate.

[0011] The second track base plate has a second limiting groove that is adapted to the second side wall portion. One end of the second side wall portion away from the second top wall portion is disposed in the second limiting groove. The height adjustment member is assembled to the second side wall portion and the second track base plate.

[0012] In some embodiments, the track structure further includes a first connecting fastener for fixing the track cover plate and the track base plate; the height adjusting member and the first connecting fastener have the same structure;

[0013] The height adjustment component is a bolt.

[0014] In some embodiments, the track base plate includes a first track base plate and a second track base plate arranged in the width direction of the track channel, and the distance between the first track base plate and the second track base plate is adjustable;

[0015] The track structure includes a width adjustment component for adjusting the distance between the first track base plate and the second track base plate.

[0016] In some embodiments, the first track base plate is provided with a first assembly hole, and the second track base plate is provided with a second assembly hole opposite to the first assembly hole, and the width adjustment member is assembled in the first assembly hole and the second assembly hole;

[0017] The distance between the first track base plate and the second track base plate is continuously adjustable.

[0018] In some embodiments, the track structure further includes a second connecting fastener for fixing the first track base plate and the second track base plate; the width adjusting member and the second connecting fastener have the same structure;

[0019] The width adjustment component is a screw.

[0020] This application embodiment also provides a test sorting machine, which includes the track structure of the semiconductor structure described above;

[0021] The test sorting machine also includes a track support structure, and part of the track base plate of the track structure is fixed to the track support structure.

[0022] The main technical effects achieved by the embodiments of this application are:

[0023] The semiconductor structure track structure and testing and sorting machine provided in this application embodiment have an adjustable cross-sectional size for the track channel, allowing the track structure to be adjusted according to product model and size to meet the testing requirements of products of different sizes. This high flexibility reduces downtime caused by track replacement, making it suitable for multi-variety, small-batch production models, improving equipment utilization, and broad applicability. It eliminates the need for dedicated tracks for each product, reducing spare parts inventory and lowering costs. Attached Figure Description

[0024] Figure 1 This is a side view of a track structure of a semiconductor structure provided in an exemplary embodiment of this application;

[0025] Figure 2 This is a top view of a track structure of a semiconductor structure provided in an exemplary embodiment of this application;

[0026] Figure 3 It is along Figure 2 The sectional view obtained by section line AA shown;

[0027] Figure 4 This is a front view of a track structure of a semiconductor structure provided in an exemplary embodiment of this application;

[0028] Figure 5 This is a schematic diagram of a semiconductor structure provided in an exemplary embodiment of the present application, showing a semiconductor structure disposed within a track structure. Detailed Implementation

[0029] Exemplary embodiments will now be described in detail, examples of which are illustrated in the accompanying drawings. When the following description relates to the drawings, unless otherwise indicated, the same numerals in different drawings denote the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with this application. Rather, they are merely examples of apparatuses and methods consistent with some aspects of this application as detailed in the appended claims.

[0030] The terminology used in this application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. The singular forms “a,” “the,” and “the” used in this application and the appended claims are also intended to include the plural forms unless the context clearly indicates otherwise. It should also be understood that the term “and / or” as used herein refers to and includes any or all possible combinations of one or more of the associated listed items.

[0031] The following is in conjunction with the appendix Figures 1 to 5The following describes some embodiments of this application in detail. Unless otherwise specified, the embodiments and features described below can be combined with each other.

[0032] Reference Figure 1 and combine when necessary Figures 2 to 5 As shown, this application provides a track structure 100, including a track base plate 10 and a track cover plate 20 disposed on the track base plate 10. The track base plate 10 and the track cover plate 20 form a hollow track channel 1001. The cross-sectional dimensions of the track channel 1001 are adjustable. The cross-sectional dimensions of the track channel 1001 are the cross-sectional dimensions of the track channel 1001 perpendicular to the channel extension direction of the track channel 1001.

[0033] To ensure the smooth passage of the semiconductor structure, the track channel 1001 can be configured such that the cross-sectional dimensions of the track channel 1001 at different positions are the same along the channel extension direction of the track channel 1001, and the track channel 1001 can be a channel extending in a straight line.

[0034] The track structure 100 has a length direction L, a width direction W, and a height direction H. The track base plate 10 includes a first track base plate 11 and a second track base plate 12 arranged in the width direction of the track channel 1001. The channel extension direction of the track channel 1001 is consistent with the length direction L of the track structure 100. The width direction of the track channel 1001 is consistent with the width direction W of the track structure 100. The height direction of the track channel 1001 is consistent with the height direction H of the track structure 100.

[0035] The cross-sectional dimensions of the track channel 1001 are adjustable, meaning that at least a portion of the plates (including the track cover plate and the track base plate) that form the track channel 1001 are adjustable in at least one of the length direction L and the width direction W along the track structure 100.

[0036] Combination Figures 2 to 5 As shown, in some embodiments, the height and width of the track channel 1001 are adjustable. Specifically, the height of the track cover plate 20 relative to the track base plate 10 is adjustable, and the distance between the first track base plate 11 and the second track base plate 12 is adjustable, thus enabling both the height and width of the track channel 1001 to be adjusted. This allows for adjustments based on product model and size, meeting the testing requirements of products of different sizes. It offers high flexibility, reduces downtime due to track replacement, is suitable for multi-variety, small-batch production models, improves equipment utilization, and has a wide range of applications. It eliminates the need for dedicated tracks for each product, reducing spare parts inventory and lowering costs.

[0037] It should be noted that the height of the track cover plate 20 relative to the track base plate 10 is the dimension of the track cover plate 20 relative to the track base plate 10 in the height direction H of the track structure 100.

[0038] It is understandable that when using the track structure 100 to transport the semiconductor structure 200, the track structure 100 can be tilted, meaning that the length direction L of the track structure 100 can have a non-zero angle with the horizontal plane, such as an angle less than 5°, like 1°, 2°, 3°, 4°, or 5°. In this way, the semiconductor structure 200 can slide and be transported along the length L of the track structure 100 within the track channel 1001. Alternatively, the track structure 100 can be horizontally positioned, and correspondingly, the semiconductor structure 200 can be driven to slide within the track channel 1001 by gas blowing at one end of the track channel 1001.

[0039] In some embodiments, the height of the track cover 20 relative to the track base plate 10 is continuously adjustable. This allows for adjustment of the height of more track channels 1001 as needed.

[0040] The track structure 100 also includes a height adjustment component 40, which is used to adjust the relative height between the track cover plate 20 and the track base plate 10.

[0041] Combination Figures 2 to 5 As shown, in some embodiments, the track cover 20 includes a first track cover 21 and a second track cover 22 arranged in the width direction of the track channel 1001. The first track cover 21 is disposed on the first track base plate 11, and the second track cover 22 is disposed on the second track base plate 12.

[0042] There are multiple height adjustment components 40. A portion of the multiple height adjustment components 40 is connected to the first track cover plate 21 and the first track base plate 11, and another portion is connected to the second track cover plate 22 and the second track base plate 12.

[0043] Combination Figure 2 As shown, there are also multiple height adjustment components 40 connecting the first track cover plate 21 and the first track base plate 11, and these multiple height adjustment components 40 are arranged at intervals along the length direction L of the track structure 100. Preferably, the multiple height adjustment components 40 are evenly spaced along the length direction L of the track structure 100.

[0044] Combination Figures 3 to 5 As shown, the first track cover 21 includes a first top wall portion 211 and a first side wall portion 212 connected together, and the second track cover 22 includes a second top wall portion 221 and a second side wall portion 222 connected together.

[0045] The first track base plate 11 has a first limiting groove 1102 adapted to the first side wall portion 212. One end of the first side wall portion 212 away from the first top wall portion 211 is disposed in the first limiting groove 1102. The height adjustment member 40 is assembled to the first side wall portion 212 and the first track base plate 11. The first limiting groove 1102 can limit the first track base plate 11 in the width direction W of the track structure 100.

[0046] The second track base plate 12 has a second limiting groove 1202 adapted to the second side wall portion 222. One end of the second side wall portion 222 away from the second top wall portion 221 is disposed in the second limiting groove 1202. The height adjustment member 40 is assembled to the second side wall portion 222 and the second track base plate 12. The second limiting groove 1202 can limit the second track base plate 12 in the width direction W of the track structure 100.

[0047] In some embodiments, the track structure 100 further includes a first connecting fastener for fixing the track cover plate 20 and the track base plate 10, and the height adjusting member 40 has the same structure as the first connecting fastener. Thus, the height adjusting member 40 can achieve height adjustment while also serving as the first connecting fastener to fix the track cover plate 20 and the track base plate 10.

[0048] The height adjustment component 40 can be a bolt. The bolt allows for continuous height adjustment and also serves as a first connecting fastener to secure the track cover plate 20 and the track base plate 10.

[0049] Accordingly, the first track cover plate 21 and the first track base plate 11 are respectively provided with matching mounting holes 201 and 1101. The height adjustment component 40 can be installed in the corresponding mounting holes 201 and 1101 to realize the height adjustment of the first track cover plate 21 relative to the first track base plate 11 and the fixation of the two.

[0050] The second track cover plate 22 and the second track base plate 12 can be respectively provided with matching mounting holes 202 and 1201. The height adjustment component 40 can be installed in the corresponding mounting holes 202 and 1201 to realize the height adjustment of the second track cover plate 22 relative to the second track base plate 12 and the fixation of the two.

[0051] The outer wall of the bolt may be provided with an external thread 401, and the walls of the mounting holes 201 and 1101 may be provided with internal threads 204 that are compatible with the external thread 401 on the bolt. The outer wall of the bolt may also be provided with an external thread, and the walls of the mounting holes 202 and 1201 may be provided with internal threads that are compatible with the external thread on the bolt.

[0052] The first track cover plate 21 and the second track cover plate 22 may also be provided with clearance holes 203 that mate with the operating part (e.g., the nut of a bolt) of the height adjustment component 40. The clearance hole 203 of the first track cover plate 21 is located at the end of the corresponding mounting hole 201 opposite to the corresponding mounting hole 1101. The clearance hole of the second track cover plate 22 is located at the end of the corresponding mounting hole 202 opposite to the corresponding mounting hole 1201. The clearance hole 203 communicates with the corresponding mounting hole and is larger than the corresponding mounting hole, so as to form a limiting wall at the clearance hole 203 and the corresponding mounting hole, thereby limiting the inward movement of the operating part of the height adjustment component 40.

[0053] The depth of the clearance hole 203 can be set to be greater than the height of the nut in the bolt, so that the nut does not protrude from the corresponding track cover plate or protrudes from the corresponding track cover plate as little as possible during height adjustment.

[0054] Of course, in other embodiments, the height of the track cover plate relative to the track base plate may also be discontinuously adjustable. For example, a shim structure that can be adjusted to different heights can be provided between the track cover plate and the track base plate as needed. Compared to the discontinuous adjustment of the height of the track cover plate relative to the track base plate, the above-mentioned continuously adjustable height of the track cover plate relative to the track base plate can accommodate products of more heights.

[0055] In some embodiments, the distance between the first track base plate 11 and the second track base plate 12 is continuously adjustable.

[0056] In some embodiments, when the distance between the first track base plate 11 and the second track base plate 12 is adjustable, the track structure 100 includes a width adjustment member 30 for adjusting the distance between the first track base plate 11 and the second track base plate 12.

[0057] In some embodiments, the first track base plate 11 is provided with a first assembly hole 1103, and the second track base plate 12 is provided with a second assembly hole 1203 opposite to the first assembly hole 1103. The width adjustment member 30 is assembled in the first assembly hole 1103 and the second assembly hole 1203.

[0058] In some embodiments, the track structure 100 further includes a second connecting fastener for fixing the first track base plate 11 and the second track base plate 12; the width adjusting member 30 and the second connecting fastener have the same structure.

[0059] The width adjusting member 30 is a screw. Accordingly, the outer wall of the screw may be provided with an external thread 301, and the walls of the first assembly hole 1103 and the second assembly hole 1203 are provided with internal threads 102 that are adapted to the external thread 301 on the screw.

[0060] The width adjusting member 30 includes a main body 31 and an operating part 32 located at one end of the main body 31. The first track base plate 11 is also provided with a limiting clearance groove 1104 for accommodating the operating part 32. The limiting clearance groove 1104 is located at one end of the first assembly hole 1103 opposite to the second assembly hole 1203 and communicates with the first assembly hole 1103. The radial dimension of the limiting clearance groove 1104 is larger than the radial dimension of the first assembly hole 1103, so as to form a limiting wall at the limiting clearance groove 1104 and the first assembly hole 1103 to limit the operating part 32 inward.

[0061] The thickness d of the operating part 32 can be less than the depth D of the limiting clearance groove 1104, so that when the width adjustment member 30 is adjusting the width, it does not protrude beyond the side wall of the first track base plate 11, or protrudes beyond the side wall of the first track base plate 11 as little as possible.

[0062] It should be noted that in some other embodiments, the distance between the first track base plate and the second track base plate may also be non-continuous and adjustable. The distance between the first track base plate and the second track base plate can also be set to multiple adjustable distances as needed. For example, spacer structures of different widths can be provided between the first track base plate and the second track base plate as needed.

[0063] It should also be noted that in some other embodiments, the track structure may be configured such that only the height of the track cover plate and the track base plate is adjustable, or only the distance between the first track base plate and the second track base plate is adjustable. Accordingly, the adjustable parts can be set with reference to the above-described related settings, and will not be repeated in this application.

[0064] It should also be noted that, in the above embodiments, when the width of the track channel 1001 is adjustable, the overall width of the track channel 1001 is adjustable, meaning that the width of each part of the track channel 1001 is simultaneously adjustable. Similarly, when the height of the track channel 1001 is adjustable, the overall height of the track channel 1001 is adjustable, meaning that the height of each part of the track channel 1001 is simultaneously adjustable. This type of adjustment allows for adjustment of the cross-sectional dimensions of the track channel 1001 while maintaining a simple overall track structure that is easy to install.

[0065] Of course, in other embodiments, the track channel 1001 can also be configured to have a partially adjustable height, for example, by dividing the track cover into more cover sections, some of which have adjustable height relative to the track base plate. The track channel 1001 can also be configured to have a partially adjustable width, for example, by dividing the track cover into more cover sections, some of which have adjustable height relative to the track base plate. For instance, the sidewalls forming the track (such as the first or second sidewall) can be divided into more relatively movable sidewalls, some of which have adjustable width. The cross-sectional dimensions of the track channel 1001 can be adjusted according to specific circumstances, and this application does not limit this.

[0066] This application also provides a test sorting machine. The test sorting machine includes the track structure 100 as described above or a similar track structure.

[0067] The test sorting machine may include a track support structure, and the track structure 100 may be fixed to the track support structure by a portion of the track base plate. For example, a second track base plate 12 may be fixed to the track support structure so that the positions of the track cover plate 20 and the first track base plate 11 can be adjusted by corresponding adjusting components.

[0068] The test and sorting machine also includes a semiconductor structure testing and sorting module for testing and sorting semiconductor structures. The track structure 100 can serve as the feed end transport track for the testing and analysis module.

[0069] Other embodiments of this application will readily occur to those skilled in the art upon consideration of the specification and practice of the disclosure herein. This application is intended to cover any variations, uses, or adaptations of this application that follow the general principles of this application and include common knowledge or customary techniques in the art not disclosed herein. The specification and examples are to be considered exemplary only, and the true scope and spirit of this application are indicated by the following claims.

[0070] It should be understood that this application is not limited to the precise structure described above and shown in the accompanying drawings, and various modifications and changes can be made without departing from its scope. The scope of this application is limited only by the appended claims.

Claims

1. A semiconductor orbital structure, characterized in that, It includes a track base plate and a track cover plate disposed on the track base plate, the track base plate and the track cover plate forming a hollow track channel; wherein, the cross-sectional dimensions of the track channel are adjustable.

2. The orbital structure of the semiconductor structure as described in claim 1, characterized in that, The height of the track cover plate relative to the track base plate is adjustable; The track structure also includes a height adjustment component, which is used to adjust the relative height between the track cover plate and the track base plate.

3. The orbital structure of the semiconductor structure as described in claim 2, characterized in that, The height of the track cover plate and the track base plate is continuously adjustable.

4. The orbital structure of the semiconductor structure as described in claim 2, characterized in that, The track cover plate includes a first track cover plate and a second track cover plate arranged in the width direction of the track channel, and the track base plate includes a first track base plate and a second track base plate arranged in the width direction of the track channel, with the first track cover plate disposed on the first track base plate and the second track cover plate disposed on the second track base plate; There are multiple height adjustment components, one part of which is connected to the first track cover plate and the first track base plate, and another part is connected to the second track cover plate and the second track base plate.

5. The orbital structure of the semiconductor structure as described in claim 4, characterized in that, The first track cover plate includes a first top wall portion and a first side wall portion connected together; the second track cover plate includes a second top wall portion and a second side wall portion connected together. The first track base plate has a first limiting groove that is adapted to the first side wall portion. One end of the first side wall portion away from the first top wall portion is disposed in the first limiting groove. The height adjustment component is assembled to the first side wall portion and the first track base plate. The second track base plate has a second limiting groove that is adapted to the second side wall portion. One end of the second side wall portion away from the second top wall portion is disposed in the second limiting groove. The height adjustment member is assembled to the second side wall portion and the second track base plate.

6. The orbital structure of the semiconductor structure as described in any one of claims 2 to 5, characterized in that, The track structure also includes a first connecting fastener for fixing the track cover plate and the track base plate; the height adjusting component and the first connecting fastener have the same structure; The height adjustment component is a bolt.

7. The orbital structure of the semiconductor structure as described in claim 1, characterized in that, The track base plate includes a first track base plate and a second track base plate arranged in the width direction of the track channel, and the distance between the first track base plate and the second track base plate is adjustable; The track structure includes a width adjusting member for adjusting the distance between the first track base plate and the second track base plate.

8. The orbital structure of the semiconductor structure as described in claim 7, characterized in that, The first track base plate is provided with a first assembly hole, and the second track base plate is provided with a second assembly hole opposite to the first assembly hole. The width adjustment component is assembled in the first assembly hole and the second assembly hole. The distance between the first track base plate and the second track base plate is continuously adjustable.

9. The orbital structure of the semiconductor structure as described in claim 7, characterized in that, The track structure further includes a second connecting fastener for fixing the first track base plate and the second track base plate; the width adjusting component and the second connecting fastener are of the same structure. The width adjustment component is a screw.

10. A testing and sorting machine, characterized in that, The test sorting machine includes a track structure for a semiconductor structure as described in any one of claims 1 to 9; The test sorting machine also includes a track support structure, and part of the track base plate of the track structure is fixed to the track support structure.

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