A type of quartz boat

CN224710071UActive Publication Date: 2026-09-01中清智慧实业(湖北)有限公司
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Patent Information

Application Number
CN202521287452.2
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-06-23
Publication Date
2026-09-01
Estimated Expiration
2035-06-23

AI Technical Summary

Technical Problem

[0004]实际生产中光伏硅片有不同的厚度,多数硅片范围在0.13mm~0.18mm之间,而石英舟的开槽宽度若小于等于硅片厚度,会导致硅片无法插进开槽中或者由于开槽两侧对硅片施加过大的夹紧力,导致硅片崩裂,但是石英舟的开槽宽度过大,在移动石英舟时,又会增加硅片在开槽内的晃动幅度,容易使硅片被开槽边缘刮伤或者碰撞崩裂,因此想要安全承载硅片,需要使用开槽宽度与硅片厚度适配的石英舟,使硅片容易插进开槽中,又不会夹得过紧,也不会过于松动,这就导致企业在生产不同厚度的硅片时需要配备不同宽度开槽的石英舟,降低了石英舟的适用性,增加了企业配备石英舟的数量,提高了企业生产成本,因此需要一种能适配不同厚度硅片的石英舟

Benefits of technology

使用时,旋拧螺母,通过移动调节杆来调节夹片在插槽内的位置,使夹片与插槽侧立壁的距离与硅片的厚度适配,将硅片依次插进插槽中,通过调节夹片与插槽侧立壁之间的距离,可以使石英舟承载不同厚度的硅片,硅片既能顺利插入插槽内且不会因间隙过大导致晃动,或因间隙过小造成硅片边缘磨损,提高了石英舟的适用性,降低了企业的生产成本。

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Abstract

This utility model discloses a quartz boat, comprising two opposing side plates, with four support rods positioned between the two side plates. The two ends of each support rod are fixedly connected to the vertical surfaces of the side plates. Each support rod is a hollow tubular structure, with slots arranged radially on its body. Several slots are linearly arranged along the central axis of the support rod. An adjusting rod is slidably connected inside the support rod. Several clamping pieces that mate with the slots are linearly arranged along the central axis of the adjusting rod. One end of the adjusting rod is connected to an externally threaded rod. A through hole is provided at the connection between the side plate and the support rod. The externally threaded rod passes through the through hole and is fitted with a nut, which is rotatably connected to the through hole. By tightening the nut, the adjusting rod moves within the support rod, changing the distance between the adjusting clamping pieces and the side wall of the slot, thereby adjusting the width of the slot.
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Description

Technical Field

[0001] This utility model belongs to the field of photovoltaic production equipment technology, and in particular relates to a quartz boat. Background Technology

[0002] Quartz boats are boat-shaped containers used in the photovoltaic industry to support, transport, and heat silicon-based materials. In the production process of photovoltaic cells, quartz boats are mainly used to support silicon-based materials, allowing them to be uniformly heated and melted at high temperatures, thereby forming high-quality silicon-based solar cells.

[0003] Traditional quartz boats have fixed slot widths. For example, Chinese utility model patent CN208848872U discloses a small-pitch quartz boat, which includes side plates. An upper support rod is installed on the upper part of the inside of the two side plates. An upper quartz boat slot is installed on the inner side of the upper support rod. The upper quartz boat slot is used to fix the wafer. A lower support rod is installed on the lower part of the inside of the two side plates. A lower quartz boat slot is installed at the middle position of the upper part of the lower support rod. The lower quartz boat slot is used to hold the wafer. By reducing the spacing of the quartz boat slots, the number of wafers that can be carried can be increased without changing the length of the support rod, thereby increasing production capacity.

[0004] In actual production, photovoltaic silicon wafers come in various thicknesses, with most ranging from 0.13mm to 0.18mm. If the slot width of the quartz boat is less than or equal to the silicon wafer thickness, the wafer may not be able to be inserted into the slot, or the excessive clamping force applied to the wafer from both sides of the slot may cause it to crack. However, if the slot width of the quartz boat is too large, it will increase the swaying of the wafer within the slot when moving the boat, making it easy for the wafer to be scratched or cracked by the slot edge. Therefore, to safely support the silicon wafer, a quartz boat with a slot width that matches the silicon wafer thickness is needed, making it easy to insert the wafer into the slot without clamping it too tightly or too loosely. This means that companies need to equip themselves with quartz boats of different slot widths when producing silicon wafers of different thicknesses, reducing the applicability of the quartz boat, increasing the number of quartz boats required, and increasing production costs. Therefore, a quartz boat that can adapt to silicon wafers of different thicknesses is needed. Utility Model Content

[0005] The purpose of this invention is to solve the problem in the background art where the slot width of traditional quartz boats is fixed, and they can only support silicon wafers with a thickness that matches the slot width, thus reducing the applicability of quartz boats. This is achieved by setting the support rod as a hollow tubular structure and sliding an adjustment rod inside it. By controlling the position of the adjustment rod, the distance between the clip and the slot can be adjusted to match the thickness of the silicon wafer.

[0006] The specific technical solution of this utility model is as follows: A quartz boat includes two opposing side plates, with four support rods positioned between them. The two ends of each support rod are fixedly connected to the vertical surfaces of the side plates. Two support rods are positioned opposite each other at the lower part of the side plates, and the other two are positioned opposite each other at the upper part of the side plates. Each support rod is a hollow tubular structure. Slots are provided radially on the rod body, with several slots arranged linearly along the central axis of the support rod. An adjusting rod is slidably connected inside the support rod. Several clamping pieces that mate with the slots are arranged linearly along the central axis of the adjusting rod. One end of the adjusting rod is connected to an externally threaded rod. A through hole is provided at the connection between the side plate and the support rod. The externally threaded rod passes through the through hole and is fitted with a nut, which is rotatably connected to the through hole.

[0007] Furthermore, the distance between the two lower support rods is smaller than the distance between the two upper support rods.

[0008] Furthermore, the slots of the two upper support rods are horizontally opposite each other, while the slots of the two lower support rods are opposite each other and tilted to both sides.

[0009] Furthermore, several window openings are provided on the side panel facade.

[0010] Furthermore, the top of the side panel is provided with a cantilever hole, which extends through both sides of the side panel.

[0011] Furthermore, the bottom of the side panels are provided with support feet.

[0012] Furthermore, the bottom of the side plate is provided with a track groove, which is located inside the support leg.

[0013] Furthermore, the inner wall of the through hole is provided with a limiting groove in the circumferential direction, and the outer wall of the nut is provided with a limiting protrusion in the circumferential direction. The nut achieves a rotatable connection with the through hole through the sliding fit between the limiting protrusion and the limiting groove. The nut is a wing nut.

[0014] Furthermore, the top of the clip is an arc surface that coincides with the top of the support rod, the bottom surface of the clip is a plane, the bottom surface of the slot is a plane, the bottom surface of the clip fits into the bottom surface of the slot, and the upper part of the adjusting rod inside the support rod is set as a plane, with the top plane of the adjusting rod coinciding with the bottom surface of the slot.

[0015] Furthermore, the inner wall of the support rod is provided with a limiting groove along the central axis, and the outer wall of the adjusting rod is provided with a limiting slider along the central axis. The adjusting rod achieves a sliding connection with the support rod through the sliding cooperation between the limiting slider and the limiting groove.

[0016] Compared with the prior art, the present invention has the following beneficial effects: In use, tighten the nut and adjust the position of the clip in the slot by moving the adjusting rod. This ensures that the distance between the clip and the side wall of the slot matches the thickness of the silicon wafer. Insert the silicon wafers into the slot one by one. By adjusting the distance between the clip and the side wall of the slot, the quartz boat can support silicon wafers of different thicknesses. The silicon wafers can be smoothly inserted into the slot without shaking due to excessive gaps or wear on the edges of the silicon wafers due to insufficient gaps. This improves the applicability of the quartz boat and reduces the production cost for enterprises. Attached Figure Description

[0017] Figure 1 This is a three-dimensional structural diagram of an embodiment of the present utility model; Figure 2 This is an assembly drawing of the support rod and adjusting rod in an embodiment of this utility model; Figure 3 for Figure 2 A magnified view of a portion of point A in the middle; Figure 4 This is an exploded view of the assembly of the nut and side plate in an embodiment of this utility model; Figure 5 for Figure 4 A magnified view of a portion of point B in the middle; Figure 6 This is a three-dimensional structural diagram of the support rod in an embodiment of the present utility model; Figure 7 This is a three-dimensional structural diagram of the adjusting rod in an embodiment of the present utility model; Figure label: 1. Side panel; 11. Through hole; 111. Limiting groove; 12. Window hole; 13. Boat cantilever hole; 14. Support leg; 15. Track groove; 2. Support rod; 21. Slot; 22. Limiting groove; 3. Adjusting rod; 31. Clamping plate; 32. Limiting slider; 33. External threaded rod 4. Nut; 41. Limiting protrusion. Detailed Implementation

[0018] To better understand the purpose, structure, and function of this utility model, the technical solutions in the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings.

[0019] In the description of this utility model, it should be understood that the terms "upper," "lower," "front," "rear," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the appendix. Figure 1 The orientations or positional relationships shown are for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0020] See Figures 1 to 7 This embodiment discloses a quartz boat, including two relatively vertically arranged side plates 1, with four support rods 2 disposed between the two side plates 1. The two ends of the support rods 2 are fixedly connected to the vertical surfaces of the side plates 1 on both sides. Both the support rods 2 and the side plates 1 are made of quartz and are fixedly connected by welding. Two support rods 2 are positioned opposite each other at the lower part of the side plates 1 and are horizontally collinear, used to support the bottom of the silicon wafer. The other two support rods 2 are positioned opposite each other at the upper part of the side plates 1 and are horizontally collinear, used to support the bottom of the silicon wafer. The support rod 2 is a hollow tubular structure located on the side supporting the silicon wafers. Slots 21 are provided radially on the rod body of the support rod 2, and several slots 21 are linearly arranged along the central axis of the support rod 2. These slots 21 allow the quartz boat to support multiple silicon wafers, improving process yield. An adjusting rod 3 is slidably connected inside the support rod 2. Clamping pieces 31 are provided radially on the rod body of the adjusting rod 3, and several clamping pieces 31 are linearly arranged along the central axis of the adjusting rod 3. Both the adjusting rod 3 and the clamping pieces 31 are made of quartz and are welded together. The clamping piece 31 is fixed to the adjusting rod 3. Each slot 21 has a clamping piece 31. The connection between the side plate 1 and the support rod 2 is provided with a through hole 11. One end of the adjusting rod 3 is connected to an external threaded rod 33. The end of the external threaded rod 33 passes through the through hole 11 and is located on the outside of the side plate 1. The external threaded rod 33 is equipped with a nut 4. Further optimization is that the thread of the external threaded rod 33 is selected as 4H grade, and the internal thread of the nut 4 is selected as 5H grade. The tightening adjustment of the nut 4 and the external threaded rod 33 can reach the micron level. The external threaded rod 33 and the nut 4 are made of alloy steel. The external threaded rod 33 is connected to the adjusting rod 3 by brazing, and the nut 4 is rotatably connected to the through hole 11. By rotating the nut 4, the adjusting rod 3 moves within the support rod 2 through the threaded connection between the external threaded rod 33 and the nut 4, thereby adjusting the position of the clamping piece 31 within the slot 21. This makes the distance between the clamping piece 31 and the side wall of the slot 21 match the thickness of the silicon wafer, allowing the silicon wafer to be smoothly inserted into the slot 21. Furthermore, the clamping piece 31 and the slot 21 reduce the wobble gap of the silicon wafer.

[0021] The distance between the two lower support rods 2 is smaller than the distance between the two upper support rods 2.

[0022] The slots 21 of the two upper support rods 2 are horizontally opposite each other, while the slots 21 of the two lower support rods 2 are opposite each other and tilted to both sides.

[0023] The side panel 1 has several windows 12. First, the windows 12 are for good flow of process gas, so that the silicon wafers are heated evenly to achieve a high-quality process effect. Second, the windows 12 make it easier for the operator to move the quartz boat by hand. Third, the windows 12 on the side panel 1 can reduce the materials used to make the quartz boat, reduce manufacturing costs, and reduce the weight of the quartz boat itself, making it easier to handle manually.

[0024] The top of the side panel 1 is provided with a boat-lifting hole 13, which penetrates both sides of the side panel 1. Its function is to retrieve and place the quartz boat by manually inserting a special boat-lifting tool into the boat-lifting hole 13. The bottom of the side panel 1 is provided with support feet 14 for supporting the quartz boat.

[0025] The bottom of the side plate 1 is provided with a track groove 15, which is located inside the support leg 14. If the quartz boat is pushed into the furnace by the track, the track groove 15 can cooperate with the track to make the quartz boat more stable during the pushing process.

[0026] The inner wall of the through hole 11 is provided with a limiting groove 111, and the outer wall of the nut 4 is provided with a limiting protrusion 41. The nut 4 achieves a rotatable connection with the through hole 11 through the sliding engagement of the limiting protrusion 41 and the limiting groove 111. The nut 4 is a wing nut, which is convenient for screwing operation.

[0027] The top of the clip 31 is an arc surface that coincides with the top of the support rod 2. The arc surface can prevent scratching the silicon wafer. The bottom surface of the clip 31 is flat, and the bottom surface of the slot 21 is flat. The bottom surface of the clip 31 fits against the bottom surface of the slot 21 to prevent the clip 31 from shaking in the slot 21. The upper part of the adjusting rod 3 located inside the support rod 2 is set as a flat surface. The top flat surface of the adjusting rod 3 coincides with the bottom surface of the slot. This ensures that the support rod 2 and the adjusting rod 3 are on the same plane when they contact the side of the silicon wafer, and will not damage the silicon wafer due to uneven contact surfaces.

[0028] The inner wall of the support rod 2 is provided with a limiting groove 22 along the central axis. In a further optimization, the limiting groove 22 is located at the bottom of the inner wall of the support rod 2. The outer wall of the adjusting rod 3 is provided with a limiting slider 32 along the central axis. In a further optimization, the limiting slider 32 is located at the bottom of the adjusting rod 3. The adjusting rod 3 achieves a sliding connection with the support rod 2 through the sliding cooperation between the limiting slider 32 and the limiting groove 22. Furthermore, the sliding cooperation between the limiting slider 32 and the limiting groove 22 can make the adjusting rod 3 slide more smoothly within the support rod 2.

[0029] In use, tighten nut 4 to make adjusting rod 3 slide inside support rod 2, thereby adjusting the position of clamp 31 in slot 21 so that the distance between clamp 31 and the side wall of slot 21 matches the thickness of silicon wafer. Insert silicon wafers into the gap between slot 21 and clamp 31 in sequence. The clamp 31 and slot 21 reduce the wobbling gap of silicon wafers.

[0030] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A quartz boat, characterized in that: It includes two opposing side plates (1), and four support rods (2) are arranged between the two side plates (1). The two ends of the support rods (2) are fixedly connected to the facades of the two side plates (1) respectively. Two support rods (2) are arranged opposite each other at the lower part of the side plates (1), and the other two support rods (2) are arranged opposite each other at the upper part of the side plates (1). The support rods (2) are hollow tubular structures, and slots (21) are provided on the rod body of the support rods (2) in the radial direction. The slots (21) are along the support rods (2). There are several linear arrays along the central axis. An adjusting rod (3) is slidably connected inside the support rod (2). Several clips (31) for use with the slot (21) are linearly arrayed along the central axis on the body of the adjusting rod (3). One end of the adjusting rod (3) is connected to an external thread rod (33). A through hole (11) is provided at the connection between the side plate (1) and the support rod (2). The external thread rod (33) passes through the through hole (11) and is equipped with a nut (4). The nut (4) is rotatably connected to the through hole (11).

2. The quartz boat according to claim 1, characterized in that, The distance between the two lower support rods (2) is smaller than the distance between the two upper support rods (2).

3. The quartz boat according to claim 2, characterized in that, The slots (21) of the two upper support rods (2) are set horizontally opposite each other, and the slots (21) of the two lower support rods (2) are set opposite each other and tilted to both sides.

4. The quartz boat according to claim 1, characterized in that, The side panel (1) has several window openings (12) on its facade.

5. The quartz boat according to claim 1, characterized in that, The top of the side panel (1) is provided with a cantilever hole (13), which penetrates the two sides of the side panel (1).

6. The quartz boat according to claim 1, characterized in that, The bottom of the side panel (1) is provided with support feet (14).

7. The quartz boat according to claim 6, characterized in that, The bottom of the side plate (1) is provided with a track groove (15), which is located inside the support leg (14).

8. The quartz boat according to claim 1, characterized in that, The inner wall of the through hole (11) is provided with a limiting groove (111) in the circumferential direction, and the outer wall of the nut (4) is provided with a limiting protrusion (41) in the circumferential direction. The nut (4) achieves rotational connection with the through hole (11) through the sliding fit between the limiting protrusion (41) and the limiting groove (111). The nut (4) is a wing nut.

9. The quartz boat according to claim 1, characterized in that, The top of the clip (31) is an arc surface that coincides with the top of the support rod (2). The bottom surface of the clip (31) is a plane, and the bottom surface of the slot (21) is a plane. The bottom surface of the clip (31) fits into the bottom surface of the slot (21). The upper part of the rod body of the adjusting rod (3) located inside the support rod (2) is set as a plane, and the top plane of the adjusting rod (3) coincides with the bottom surface of the slot.

10. The quartz boat according to claim 9, characterized in that, The inner wall of the support rod (2) is provided with a limiting groove (22) along the central axis direction, and the outer wall of the adjusting rod (3) is provided with a limiting slider (32) along the central axis direction. The adjusting rod (3) achieves sliding connection with the support rod (2) through the sliding cooperation between the limiting slider (32) and the limiting groove (22).

Citation Information

Patent Citations

  • Small-spacing quartz boat

    CN208848872U