Substrate holder based on magnetic coupling to transmit driving force

Abstract

This invention provides a substrate holder based on magnetic coupling for transmitting driving force, comprising: a main body defining a receiving cavity; at least one finger forming a partially overlapping area with the main body in a vertical direction and capable of translating relative to the main body in a predetermined movement direction; at least one first magnet connected to the finger in a relatively fixed manner; at least one second magnet slidably disposed within the receiving cavity; and a driving mechanism disposed within the receiving cavity and configured to drive the second magnet to translate in the predetermined movement direction; wherein the second magnet and the first magnet are at least partially correspondingly disposed in the vertical direction and form at least partially overlapping magnetic coupling areas, and the relative magnetic poles of the second magnet and the first magnet are opposite. This invention, through a retractable magnetic coupling driving design, allows the finger to retract into the main body when not in operation, shortening the overall length of the substrate holder, reducing the minimum turning radius of the robotic arm, and adapting to a more compact wafer processing equipment layout.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing equipment technology, and in particular to a substrate holder based on magnetic coupling to transmit driving force. Background Technology

[0002] In the semiconductor wafer manufacturing process, the end effector of the wafer transfer robot is the core component for achieving high-precision wafer transfer, and its structural design directly affects the safety, stability and efficiency of wafer transfer.

[0003] Existing end effectors typically employ a fixed structure for their fingers. This fixed structure results in a large turning radius for the robotic arm, thereby limiting the space utilization and operational flexibility of the equipment.

[0004] In view of this, it is necessary to propose a substrate holder based on magnetic coupling to transmit driving force in order to solve the above problems. Utility Model Content

[0005] The purpose of this invention is to provide a substrate holder based on magnetic coupling to transmit driving force, in order to solve the problem of large rotation radius of existing robotic hands due to the fixed structure of fingers.

[0006] This utility model provides a substrate holder based on magnetic coupling to transmit driving force, comprising: The main body defines a sealable cavity within it; At least one finger forms a partially overlapping area with the body in the vertical direction and can be translated relative to the body in a predetermined direction of movement; At least one first magnet is connected to the finger in a relatively fixed manner; At least one second magnet is slidably disposed within the receiving cavity; A driving mechanism, located within the receiving cavity of the main body, is configured to drive the second magnet to translate along the predetermined moving direction; Wherein, the second magnet and the first magnet are at least partially corresponding to each other in the vertical direction and form at least partially overlapping magnetic coupling regions, and the relative magnetic pole polarities of the second magnet and the first magnet are opposite.

[0007] In one possible embodiment, there is a gap in the vertical direction between the first magnet and the second magnet.

[0008] In one possible embodiment, the first magnet and the second magnet are arranged relatively parallel or at an angle.

[0009] In one possible embodiment, the first magnet moves synchronously with the second magnet.

[0010] In one possible embodiment, the first magnet and the second magnet are partially or completely overlapped in the vertical direction. In one possible embodiment, the projected area of ​​the first magnet in the vertical direction is greater than the projected area of ​​the second magnet in the vertical direction; or, The projected area of ​​the first magnet along the vertical direction is equal to the projected area of ​​the second magnet along the vertical direction; or, The projected area of ​​the first magnet in the vertical direction is smaller than the projected area of ​​the second magnet in the vertical direction.

[0011] In one possible embodiment, the cross-section of the first magnet in the horizontal direction is larger than the cross-section of the second magnet in the horizontal direction; or, The cross-section of the first magnet in the horizontal direction is equal to the cross-section of the second magnet in the horizontal direction; or, The cross-section of the first magnet in the horizontal direction is smaller than the cross-section of the second magnet in the horizontal direction.

[0012] In one possible embodiment, the first magnet is either a regular shape or an irregular shape. In one possible embodiment, the second magnet is either of a regular or irregular shape. In one possible embodiment, the first magnet is disposed within the finger; or... The first magnet is located on the side of the finger closest to the body; or, The first magnet is located on the side of the finger away from the main body; or, The first magnet is disposed in a fully or partially open receiving groove on the side of the finger facing the body.

[0013] In one possible embodiment, a first guide structure is also included to define the finger movement path.

[0014] In one possible embodiment, a second guide structure is also included to define the movement path of the second magnet.

[0015] In one possible embodiment, the drive mechanism includes a drive source; The at least one finger includes one finger; One of the drive sources drives one of the fingers to translate relative to the body along the predetermined movement direction.

[0016] In one possible embodiment, the drive mechanism includes a drive source; The at least one finger includes two fingers; One of the drive sources drives the two fingers to translate simultaneously relative to the main body along a predetermined movement direction.

[0017] In one possible embodiment, the drive mechanism includes two drive sources; The at least one finger includes two fingers, and the two fingers are capable of independent movement relative to each other; in, The two drive sources simultaneously drive the two fingers to translate relative to the body along the same predetermined direction of movement; or, One of the drive sources drives one of the fingers to translate relative to the body along the predetermined direction of movement, and the other drive source drives another finger to translate relative to the body in a direction opposite to the predetermined direction of movement; or, One of the drive sources drives one of the fingers to translate relative to the body along the predetermined direction of movement, while the other drive source is not working and the other finger is stationary.

[0018] The beneficial effects of the substrate holder based on magnetic coupling for transmitting driving force provided by this utility model are as follows: 1. Through the magnetic coupling drive design of the retractable fingers, the fingers can be retracted into the turning radius of the main body when not in operation, which shortens the overall length of the substrate holder and reduces the minimum turning radius of the robot, making it suitable for more compact wafer processing equipment layouts.

[0019] 2. Magnetic coupling drive avoids vibration during movement, improves stability, and thus improves wafer transfer accuracy. Attached Figure Description

[0020] Figure 1 This is a diagram showing the state of a finger extending and retracting in the substrate holder based on magnetic coupling for transmitting driving force according to this utility model.

[0021] Figure 2 This is a schematic diagram of the substrate holder based on magnetic coupling to transmit driving force according to this utility model.

[0022] Figure 3 This is a schematic diagram of the main body of the substrate holder based on magnetic coupling to transmit driving force according to this utility model.

[0023] Figure 4 This is a schematic diagram of a driving mechanism installed inside the main body of the substrate holder based on magnetic coupling for transmitting driving force according to this utility model.

[0024] Figure 5 This is a schematic diagram of another driving mechanism for the substrate holder based on magnetic coupling to transmit driving force according to this utility model.

[0025] Figure 6This is a schematic diagram of the finger in the substrate holder based on magnetic coupling to transmit driving force according to this utility model.

[0026] Explanation of reference numerals in the attached drawings: 100, main body; 101, receiving cavity; 102, opening; 110, middle part; 120, branch part; 130, cover plate; 200, finger; 201, receiving groove; 210, root; 220, transition part; 230, bearing part; 300, first magnet; 400, second magnet; 410, fixing groove; 500, drive mechanism; 510, drive source; 511, drive wheel; 512, force transmission belt; 520, wheel belt drive mechanism; 521. 522. Main pulley; 523. Driven pulley; 524. Drive belt; 525. Fixed base; 526. Pulley assembly; 5251. Driving pulley; 5252. Driven pulley; 5253. Synchronous belt; 526. Transmission assembly; 5261. Transmission rod; 5262. Transmission wheel; 527. Mounting base; 600. First guide structure; 610. First guide rail; 620. First slider; 630. Connector; 700. Second guide structure; 710. Second guide rail; 720. Second slider. Detailed Implementation

[0027] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0028] To address the problems existing in the prior art, embodiments of this utility model provide a substrate holder based on magnetic coupling for transmitting driving force. (See [link to previous document]). Figures 1 to 4 The substrate holder includes a main body 100, at least one finger 200, at least one first magnet 300, at least one second magnet 400, and a drive mechanism 500. The main body 100 defines a closable cavity 101. The finger 200 forms a partially overlapping area with the main body 100 in the vertical direction, and the finger 200 can translate relative to the main body 100 in a predetermined movement direction. The first magnet 300 is fixedly connected to the finger 200. The second magnet 400 is slidably disposed within the cavity 101. The drive mechanism 500 is disposed within the cavity 101 of the main body 100 and is configured to drive the second magnet 400 to translate in the predetermined movement direction. The second magnet 400 and the first magnet 300 are at least partially corresponding in the vertical direction and form at least partially overlapping magnetic coupling areas. Furthermore, the relative magnetic poles of the second magnet 400 and the first magnet 300 are opposite, meaning they are magnetically attracted to each other.

[0029] The finger 200 can translate relative to the main body 100 along a predetermined movement direction, meaning the finger 200 is retractably mounted on the main body 100. A first magnet 300 is mounted on the finger 200, and a second magnet 400 is slidably mounted within the receiving cavity 101 of the main body 100. A drive mechanism 500 drives the second magnet 400 to translate along the predetermined movement direction. Utilizing the magnetic coupling design between the second magnet 400 and the first magnet 300, magnetic coupling drive of the finger 200 is achieved, allowing the finger 200 to extend outside or retract inside the main body 100. The extension / retraction length of the finger 200 can be flexibly adjusted according to process requirements. In the non-working state, the finger 200 can retract to within the turning radius of the main body 100, shortening the overall length of the substrate holder, significantly reducing the minimum turning radius of the robot, improving the space utilization of the equipment, and enabling the robot to operate flexibly in smaller spaces, adapting to more compact wafer processing equipment layouts.

[0030] The specific settings of the first magnet 300 and the second magnet 400 will be explained in detail below.

[0031] In one embodiment, see Figure 2 and Figure 4 There is a gap between the first magnet 300 and the second magnet 400 in the vertical direction. In other words, there is no direct mechanical contact between the first magnet 300 and the second magnet 400. This non-contact design will not generate mechanical friction and impact during movement, avoid vibration during movement, make the finger 200 move more smoothly, improve stability, and thus improve the accuracy of wafer transfer.

[0032] In one embodiment, see Figure 2 and Figure 4 The first magnet 300 and the second magnet 400 are arranged relatively parallel or inclined. The position of the first magnet 300 and the second magnet 400 affects the vertical projected area of ​​the first magnet 300 and the second magnet 400. When they are parallel and horizontally arranged, the vertical projected area of ​​each magnet is equal to its horizontal cross-section; when they are parallel and inclined, the vertical projected area of ​​each magnet is smaller than its horizontal cross-section; when one is horizontally arranged and the other is inclined, the vertical projected area of ​​the horizontally arranged magnet is equal to its horizontal cross-section, and the vertical projected area of ​​the inclined magnet is smaller than its horizontal cross-section.

[0033] In one specific embodiment, see Figure 2 , Figure 3 and Figure 4The first magnet 300 and the second magnet 400 move synchronously. The second magnet 400 is driven to translate along a predetermined moving direction by the drive mechanism 500. Due to the magnetic coupling design between the first magnet 300 and the second magnet 400, the second magnet 400 can move synchronously with the first magnet 300.

[0034] In some embodiments, see Figure 2 and Figure 4 The first magnet 300 and the second magnet 400 partially or completely overlap in their vertical projections. The overlapping area of ​​the first magnet 300 and the second magnet 400 in their vertical projections constitutes the magnetic coupling region between them. The larger the magnetic coupling region, the stronger the magnetic coupling driving force. The two magnets can be flexibly set to partially or completely overlap according to the required magnetic coupling strength to achieve a better magnetic coupling driving effect.

[0035] In some specific embodiments, see Figure 2 and Figure 4 The projected area of ​​the first magnet 300 along the vertical direction is greater than that of the second magnet 400 along the vertical direction; or, the projected area of ​​the first magnet 300 along the vertical direction is equal to that of the second magnet 400 along the vertical direction; or, the projected area of ​​the first magnet 300 along the vertical direction is less than that of the second magnet 400 along the vertical direction. The projected areas of the first magnet 300 and the second magnet 400 along the vertical direction are flexibly set according to the required magnetic coupling strength, thereby controlling the overlapping area of ​​the vertical projections of the first magnet 300 and the second magnet 400 to achieve the desired magnetic coupling driving effect.

[0036] In some specific embodiments, see Figure 2 and Figure 4 The cross-section of the first magnet 300 along the horizontal direction is larger than that of the second magnet 400 along the horizontal direction; or, the cross-section of the first magnet 300 along the horizontal direction is equal to that of the second magnet 400 along the horizontal direction; or, the cross-section of the first magnet 300 along the horizontal direction is smaller than that of the second magnet 400 along the horizontal direction. The size of the magnet cross-section affects the magnetic field distribution and magnetic field strength of the magnet; the larger the cross-section, the stronger the magnetic field. By reasonably setting the size of the cross-section of the first magnet 300 and the second magnet 400 along the horizontal direction, the magnetic field distribution and magnetic field strength of the first magnet 300 and the second magnet 400 can be controlled to achieve the desired magnetic coupling driving effect.

[0037] In one specific embodiment, see Figure 2 and Figure 6The first magnet 300 can be a regular or irregular shape, such as a square or a circle. The shape of the magnet also affects the magnetic field distribution and intensity, as well as the size of the magnetic coupling region. By reasonably setting the shape of the first magnet 300, the desired magnetic coupling driving effect can be achieved.

[0038] In one specific embodiment, see Figure 4 The second magnet 400 can be a regular or irregular shape, such as a square or a circle. The shape of the magnet also affects the magnetic field distribution and intensity, as well as the size of the magnetic coupling region. By reasonably setting the shape of the second magnet 400, the desired magnetic coupling driving effect can be achieved.

[0039] It should be noted that the shapes of the first magnet 300 and the second magnet 400 may be different, and can be flexibly set according to requirements.

[0040] This utility model provides four specific examples of the placement positions of the first magnet 300.

[0041] In a first embodiment, a first magnet 300 is disposed within a finger 200. The first magnet 300 is protected by the outer shell of the finger 200. A second magnet 400 is disposed within the receiving cavity 101 of the main body 100, and is also protected by the outer shell of the main body 100. Simultaneously, the first magnet 300 and the second magnet 400 have sufficient magnetic attraction to achieve a magnetic coupling driving effect.

[0042] In the second specific embodiment, see Figure 2 The first magnet 300 is located on the side of the finger 200 near the main body 100. In this position, the first magnet 300 is closer to the second magnet 400, and the distance between the first magnet 300 and the second magnet 400 is closer, resulting in a stronger magnetic coupling driving force between them.

[0043] In the third specific embodiment, the first magnet 300 is located on the side of the finger 200 away from the main body 100. In this position, the first magnet 300 and the second magnet 400 are separated by the outer shell of the main body 100 and the finger 200. The distance between the first magnet 300 and the second magnet 400 is relatively large. When the magnetic field strength of the first magnet 300 and the second magnet 400 is strong, the desired magnetic coupling driving effect can be achieved by reasonably setting the position of the first magnet 300.

[0044] In the fourth specific embodiment, see Figure 6The first magnet 300 is disposed within a fully or partially open receiving groove 201 on the side of the finger 200 facing the main body 100. The first magnet 300 is embedded within the receiving groove 201, enhancing the stability of its installation. Depending on the magnetic field strength of the first magnet 300 and the second magnet 400, the opening of the receiving groove 201 can be flexibly selected to be fully or partially open to achieve the desired magnetic coupling driving effect.

[0045] Specifically, see Figure 2 and Figure 4 The first magnet 300 and the second magnet 400 are permanent magnets.

[0046] The specific design of the guide structure will be explained in detail below.

[0047] In one embodiment, see Figure 2 The substrate holder also includes a first guide structure 600 that defines the movement path of the finger 200. The first guide structure 600 extends along a predetermined movement direction to ensure that the finger 200 translates smoothly relative to the body 100 along the predetermined movement direction.

[0048] In one specific embodiment, see Figure 2 The first guide structure 600 is provided in a one-to-one correspondence with the finger 200 and includes at least one first guide rail 610 and at least one first slider 620. The first guide rail 610 is provided on the main body 100 along a predetermined moving direction. Each first guide rail 610 is provided with at least one first slider 620 that can slide along the first guide rail 610. The finger 200 slides on the corresponding first guide rail 610 through the first slider 620.

[0049] Further, see Figure 2 The first guide rail 610 of the first guide structure 600 consists of two rails located on both sides of the finger 200, which support the sides of the finger 200 and enhance the stability of the finger 200 movement.

[0050] In one specific embodiment, see Figure 1 and Figure 2 The finger 200 is connected to the first slider 620 via the connector 630, which is suitable for situations where the size of the finger 200 is limited, thereby expanding the attachment size of the finger 200.

[0051] Further, see Figure 1 and Figure 2 The connector 630 is located on the side of the finger 200 away from the main body 100. The two sides of the connector 630 extend out of the two sides of the finger 200 and are respectively connected to the first slider 620 on both sides.

[0052] Furthermore, see Figure 1 and Figure 2The finger 200 is located between the first slider 620 and / or the first guide rail 610, so that the finger 200 can be closer to the body 100, thereby reducing the gap between the first magnet 300 and the second magnet 400 and enhancing the magnetic coupling driving strength between them.

[0053] In another embodiment, see Figure 4 The substrate holder also includes a second guide structure 700 that defines the movement path of the second magnet 400.

[0054] Further, see Figure 4 The second guide structure 700 is provided in a one-to-one correspondence with the second magnet 400 and includes at least one second guide rail 710 and at least one second slider 720. The second guide rail 710 is provided on the main body 100 along a predetermined moving direction. Each second guide rail 710 is provided with at least one second slider 720 that can slide along the second guide rail 710. The second magnet 400 is slidably disposed on the corresponding second guide rail 710 through the second slider 720.

[0055] Furthermore, see Figure 4 The second guide structure 700 has two second guide rails 710, which are located on both sides of the second magnet 400 respectively. They support both sides of the second magnet 400 and enhance the stability of the movement of the second magnet 400.

[0056] The specific settings of the drive mechanism 500 will be explained in detail below.

[0057] In a first embodiment, the driving mechanism 500 includes a driving source 510, and at least one finger 200 is included. The driving source 510 drives the finger 200 to translate relative to the body 100 along a predetermined direction of movement. In this embodiment, only one finger 200 is provided on the body 100, and the driving source 510 drives this single finger 200 to extend outside or retract inside the body 100.

[0058] In the second embodiment, see Figure 1 and Figure 5 The driving mechanism 500 includes a driving source 510, and at least one finger 200 includes two fingers 200. The driving source 510 drives the two fingers 200 to simultaneously translate relative to the body 100 along a predetermined direction of movement. In this embodiment, only two fingers 200 are provided on the body 100, and the driving source 510 simultaneously drives the two fingers 200 to extend out of or retract into the body 100.

[0059] In the third embodiment, see Figure 1 and Figure 4The drive mechanism 500 includes two drive sources 510, and at least one finger 200 includes two fingers 200, which can move independently relative to each other. Specifically, the two drive sources 510 simultaneously drive the two fingers 200 to translate relative to the body 100 along the same predetermined movement direction; or, one drive source 510 drives one finger 200 to translate relative to the body 100 along the predetermined movement direction, while the other drive source 510 drives the other finger 200 to translate relative to the body 100 in a direction opposite to the predetermined movement direction; or, one drive source 510 drives one finger 200 to translate relative to the body 100 along a direction opposite to the predetermined movement direction, while the other drive source 510 is not activated, and the other finger 200 remains stationary.

[0060] In this embodiment, only two fingers 200 are provided on a main body 100. The two fingers 200 are driven to move independently by two driving sources 510. That is, the two fingers 200 can extend out of the main body 100 or retract into the main body 100 simultaneously; or, the two fingers 200 can extend and retract relatively independently; or, one of the two fingers 200 can extend or retract while the other finger 200 does not work.

[0061] Specifically, the specific type and configuration of the drive source 510 can be flexibly set according to actual process requirements, and no specific limitations are made here. For example, the drive source 510 can be a drive device that can provide driving force, such as a motor, cylinder, or electric telescopic rod.

[0062] In one embodiment, see Figure 4 and Figure 5 The drive source 510 is a motor and is connected to the second magnet 400 through a belt drive mechanism 520.

[0063] In one specific embodiment, see Figure 4 In the case where a driving source 510 drives a finger 200, the belt drive mechanism 520 includes a main pulley 521, a driven pulley 522, and a drive belt 523 wound around the main pulley 521 and the driven pulley 522. The drive belt 523 is connected to the second magnet 400. The driving source 510 is connected to the main pulley 521. The driving source 510 drives the main pulley 521 to rotate. Through the transmission action of the drive belt 523, the driven pulley 522 is driven to rotate. That is, the drive belt 523 transmits power between the main pulley 521 and the driven pulley 522. The transmission direction of the drive belt 523 is a predetermined movement direction. The second magnet 400 moves with the transmission direction of the drive belt 523 on it, driving the first magnet 300 along the predetermined movement direction, and then driving the finger 200 to translate relative to the main body 100 along the predetermined movement direction.

[0064] Specifically, see Figure 4The main pulley 521 and the driven pulley 522 are respectively installed in the receiving cavity 101 through a fixed seat 524 and can rotate relative to the fixed seat 524.

[0065] In another specific embodiment, see Figure 5 For the scenario where one drive source 510 drives two fingers 200, the belt drive mechanism 520 includes two pulley assemblies 525 and a transmission assembly 526 connecting the two pulley assemblies. Each pulley assembly 525 includes a driving pulley 5251, a driven pulley 5252, and a synchronous belt 5253 wound around the driving pulley 5251 and the driven pulley 5252. The synchronous belt 5253 is correspondingly arranged with and connected to the corresponding second magnet 400. The transmission assembly 526 includes a transmission rod 5261 and a transmission wheel 5262 connected to one end of the transmission rod 5261. The other end of the transmission rod 5261 is connected to the driving pulley 5251 of one of the pulley assemblies 525. The drive end of the drive source 510 is connected to the driving pulley 5251 of the other pulley assembly 525. The drive end of the drive source 510 is also connected to a drive wheel 511. A force transmission belt 512 is wound around the drive wheel 511 and the transmission wheel 5262. The drive end of the drive source 510 simultaneously drives the drive wheel 5251 and drive wheel 511 of another pulley assembly 525 to rotate. The drive wheel 5251 of the other pulley assembly 525, through the transmission action of its synchronous belt 5253, drives its pulley 522 to rotate. The drive wheel 511, through the transmission belt 512, drives the transmission wheel 5262 to rotate, which in turn drives the transmission rod 5261 to rotate. This causes the drive wheel 5251 of one of the pulley assemblies 525 to rotate and, through the transmission action of its synchronous belt 5253, drives its pulley 522 to rotate. The transmission direction of the transmission belt 523 is a predetermined direction of movement. The transmission movement of the two synchronous belts 5253 can respectively drive the second magnet 400 on them to move, which in turn drives the two first magnets 300 to move, thereby driving the two fingers 200 to move.

[0066] Specifically, see Figure 4 and Figure 5 The drive wheel 5251, driven wheel 5252, and transmission wheel 5262, which are connected to the transmission rod 5261, are respectively installed in the receiving cavity 101 through a mounting base 527 and can rotate relative to the fixed base 524.

[0067] In one embodiment, see Figure 4 The second magnet 400 has a fixing groove 410 on the side near the belt drive mechanism 520. The second magnet 400 is installed on the belt drive mechanism 520 through the fixing groove 410. Specifically, the second magnet 400 is installed on the drive belt 523 or the synchronous belt 5253 through the fixing groove 410.

[0068] The specific structure of finger 200 will be explained in detail below.

[0069] In one embodiment, see Figure 6 The finger 200 includes an integrally formed root portion 210, a transition portion 220, and a support portion 230, the support portion 230 being used to support the substrate.

[0070] Further, see Figure 2 and Figure 6 The first magnet 300 is located at the root 210, which allows the finger 200 to have a larger retractable space relative to the main body 100.

[0071] The specific structure of the main body 100 will be explained in detail below.

[0072] In one embodiment, see Figure 2 The main body 100 includes a middle part 110 and at least one branch 120 disposed in the middle part 110 along a first direction. The fingers 200 are disposed in a one-to-one correspondence with the branch 120. Each branch 120 is provided with one finger 200. The fingers 200 form a partially overlapping area with the branch 120 in the vertical direction and can be translated relative to the branch 120 in a predetermined moving direction.

[0073] Further, see Figure 2 and Figure 3 The branch 120 consists of two parts, located at both ends of the middle part 110, so that the two fingers 200 are separated by a gap to avoid mutual interference when transferring the wafer.

[0074] Furthermore, see Figure 2 and Figure 3 The branch 120 and the middle part 110 are integrally formed structures.

[0075] Specifically, see Figure 4 The main body 100 has an opening 102 on the side near the finger 200 that communicates with the receiving cavity 101 and can be opened and closed. A cover plate 130 is detachably provided at the opening 102 to selectively open or close the receiving cavity 101, so as to facilitate the installation, maintenance and replacement of the device in the receiving cavity 101.

[0076] In the description of this utility model, it should be understood that the terms "comprising" and "having" as used herein, and any variations thereof, are intended to cover non-exclusive inclusion, for example, a process, method, system, product, or device that includes a series of steps or units is not necessarily limited to those steps or units that are explicitly listed, but may include other steps or units that are not explicitly listed or that are inherent to such process, method, product, or device.

[0077] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0078] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0079] While the embodiments of this utility model have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of this utility model as set forth in the claims. Furthermore, the utility model described herein may have other embodiments and can be implemented or realized in various ways. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by one of ordinary skill in the art to which this utility model pertains.

Claims

1. A substrate holder based on magnetic coupling for transmitting driving force, characterized in that, include: The main body (100) defines a closable cavity (101) inside. At least one finger (200) forms a partially overlapping area with the body (100) in the vertical direction and can be translated relative to the body (100) in a predetermined moving direction; At least one first magnet (300) is connected to the finger (200) in a relatively fixed manner; At least one second magnet (400) is slidably disposed within the receiving cavity (101); A drive mechanism (500) is disposed in the receiving cavity (101) of the main body (100) and configured to drive the second magnet (400) to translate along the predetermined moving direction; The second magnet (400) and the first magnet (300) are at least partially corresponding to each other in the vertical direction and form a magnetic coupling region that is at least partially overlapping, and the relative magnetic polarities of the second magnet (400) and the first magnet (300) are opposite.

2. The substrate holder based on magnetic coupling for transmitting driving force according to claim 1, characterized in that, There is a gap in the vertical direction between the first magnet (300) and the second magnet (400).

3. The substrate holder based on magnetic coupling for transmitting driving force according to claim 1, characterized in that, The first magnet (300) and the second magnet (400) are arranged relatively parallel or inclined.

4. The substrate holder based on magnetic coupling for transmitting driving force according to claim 1, characterized in that, The first magnet (300) moves synchronously with the second magnet (400).

5. The substrate holder based on magnetic coupling for transmitting driving force according to claim 1, characterized in that, The first magnet (300) and the second magnet (400) partially or completely overlap in the vertical direction.

6. The substrate holder based on magnetic coupling for transmitting driving force according to claim 1, characterized in that, The projected area of ​​the first magnet (300) in the vertical direction is greater than the projected area of ​​the second magnet (400) in the vertical direction; or, The projected area of ​​the first magnet (300) in the vertical direction is equal to the projected area of ​​the second magnet (400) in the vertical direction; or, The projected area of ​​the first magnet (300) in the vertical direction is smaller than the projected area of ​​the second magnet (400) in the vertical direction.

7. The substrate holder based on magnetic coupling for transmitting driving force according to claim 1, characterized in that, The cross-section of the first magnet (300) in the horizontal direction is larger than the cross-section of the second magnet (400) in the horizontal direction; or, The cross-section of the first magnet (300) in the horizontal direction is equal to the cross-section of the second magnet (400) in the horizontal direction; or, The cross-section of the first magnet (300) in the horizontal direction is smaller than the cross-section of the second magnet (400) in the horizontal direction.

8. The substrate holder based on magnetic coupling for transmitting driving force according to claim 1, characterized in that, The first magnet (300) has a regular shape or an irregular shape.

9. The substrate holder based on magnetic coupling for transmitting driving force according to claim 1, characterized in that, The second magnet (400) has a regular shape or an irregular shape.

10. The substrate holder based on magnetic coupling for transmitting driving force according to claim 1, characterized in that, The first magnet (300) is disposed within the finger (200); or, The first magnet (300) is disposed on the side of the finger (200) near the body (100); or, The first magnet (300) is located on the side of the finger (200) away from the body (100); or, The first magnet (300) is disposed in a fully or partially open receiving groove on the side of the finger (200) facing the body (100).

11. The substrate holder based on magnetic coupling for transmitting driving force according to claim 1, characterized in that, It also includes a first guide structure (600) that defines the movement path of the finger (200).

12. The substrate holder based on magnetic coupling for transmitting driving force according to claim 1, characterized in that, It also includes a second guide structure (700) that defines the movement path of the second magnet (400).

13. The substrate holder based on magnetic coupling for transmitting driving force according to claim 1, characterized in that, The drive mechanism (500) includes a drive source (510); The at least one finger (200) includes one finger (200); One of the drive sources (510) drives one of the fingers (200) to translate relative to the body (100) along the predetermined movement direction.

14. The substrate holder based on magnetic coupling for transmitting driving force according to claim 1, characterized in that, The drive mechanism (500) includes a drive source (510); The at least one finger (200) includes two fingers (200); One of the drive sources (510) drives the two fingers (200) to translate simultaneously relative to the body (100) along a predetermined movement direction.

15. The substrate holder based on magnetic coupling for transmitting driving force according to claim 1, characterized in that, The drive mechanism (500) includes two drive sources (510); The at least one finger (200) includes two fingers (200), which are movable independently relative to each other; in, The two drive sources (510) simultaneously drive the two fingers (200) to translate relative to the body (100) along the same predetermined direction of movement; or, One of the drive sources (510) drives one of the fingers (200) to translate relative to the body (100) along the predetermined direction of movement, and the other drive source (510) drives the other finger (200) to translate relative to the body (100) in a direction opposite to the predetermined direction of movement; or, One of the drive sources (510) drives one of the fingers (200) to translate relative to the body (100) along the predetermined direction of movement, while the other drive source (510) is not working and the other finger (200) is stationary.

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