Vacuum gauge probe structure and measurement system using the same

Abstract

A vacuum gauge probe structure and a measurement system using the same are disclosed. The main component is a cylindrical hollow structure with a threaded interface and an air hole at its lower end, and a first countersunk hole and a second countersunk hole at its upper end. The first countersunk hole, the second countersunk hole, and the air hole are interconnected from top to bottom. The first countersunk hole has a locking structure. A PCB board assembly is disposed in the first countersunk hole and has a mounting portion. A fastening assembly is disposed in the first countersunk hole and abuts against the mounting portion to cooperate with the locking structure, axially pressing the PCB board assembly. A sensor assembly is disposed in the second countersunk hole and includes a TO tube shell and a vacuum sensor. A sealing assembly is fitted onto the TO tube shell. The sealing assembly is surrounded and compressed by the stepped end face of the PCB board assembly, the TO tube shell, and the second countersunk hole to form a seal. This disclosure enables rapid installation, long-lasting sealing, strong anti-interference, and supports quick disassembly and maintenance.

Description

Technical Field

[0001] This disclosure relates to the field of industrial instruments, and more specifically, to a vacuum gauge probe structure and a measurement system using the same. Background Technology

[0002] Precise vacuum measurement is crucial in numerous fields, including scientific research, industrial production, medical and health care, and food processing. As a commonly used vacuum measurement device, the performance of a vacuum gauge directly affects the accuracy and reliability of the measurement results. With continuous technological advancements, the need for innovative vacuum gauge probe structures is increasingly urgent, necessitating innovative structural designs. Utility Model Content

[0003] This disclosure provides a vacuum gauge probe structure and a measurement system using the same, which features rapid installation, long-lasting sealing, strong anti-interference capabilities, and support for quick disassembly and maintenance.

[0004] According to one aspect of this disclosure, a vacuum gauge probe structure is provided, comprising: a main body component, the main body component being a columnar hollow structure, the lower end of the hollow structure being provided with a threaded interface and an air hole, the upper end being provided with a first countersunk hole and a second countersunk hole, the first countersunk hole, the second countersunk hole and the air hole being interconnected from top to bottom, and the first countersunk hole having a locking structure.

[0005] A PCB board assembly is disposed in the first countersunk hole, and the PCB board assembly has a mounting portion;

[0006] A fastening component is disposed in the first countersunk hole, and the fastening component abuts against the mounting part to cooperate with the locking structure, thereby axially pressing the PCB board assembly;

[0007] A sensor assembly is disposed in the second countersunk hole. The sensor assembly includes a TO tube housing and a vacuum sensor. The TO tube housing is fitted with a sealing assembly.

[0008] The sealing assembly is surrounded and compressed by the PCB board assembly, the TO tube shell, and the stepped end face of the second countersunk hole to form a seal.

[0009] In one exemplary embodiment of this disclosure, the locking structure is a thread provided on the inner wall of the first countersunk hole, and the fastening assembly includes a nut for engaging with the thread to press the PCB board assembly.

[0010] In one exemplary embodiment of this disclosure, the mounting portion includes at least two ends, which are pressed against the bottom of the fastening component to compress the sealing component.

[0011] In one exemplary embodiment of this disclosure, the locking structure comprises at least two threaded holes on the stepped end face of the first countersunk hole, and the fastening assembly includes a screw that passes through the through hole of the mounting portion and engages with the threaded holes for tightening.

[0012] In one exemplary embodiment of this disclosure, the mounting portion includes at least two ends, each of which has a through hole to extend into the at least two threaded holes.

[0013] In one exemplary embodiment of this disclosure, the sealing assembly includes an O-ring that is fitted around the circumference of the TO tube housing to form radial tension.

[0014] In one exemplary embodiment of this disclosure, the sealing assembly includes at least two O-rings.

[0015] In one exemplary embodiment of this disclosure, the vacuum gauge probe structure further includes:

[0016] A filter assembly is installed on the upper step of the air hole;

[0017] A limiting spring assembly is provided, through which the filter assembly is attached to the bottom of the sensor assembly.

[0018] In one exemplary embodiment of this disclosure, the vacuum sensor includes a detachable MEMS vacuum sensor, and the TO housing is electrically connected to the PCB board assembly.

[0019] According to another aspect of this disclosure, a vacuum measurement system is provided, including a vacuum gauge probe structure of any of the foregoing; and a measurement environment, wherein the measurement environment is sealed to the vacuum gauge probe structure via a threaded interface.

[0020] The vacuum gauge probe structure and measurement system disclosed herein, through a modular axial stacking structure and a fastener compression sealing mechanism, achieve convenient installation and excellent sealing. The modular design of multiple components enables rapid replacement or maintenance of components, which helps control the overall maintenance cost of the device. In addition, axial compression sealing is achieved between multiple components to form a sealing channel, and the compressed sealing components can achieve radial tension sealing, which greatly improves the sealing performance. The axial stacking structure can also reduce the impact of vibration offset, further improving sealing, reliability and stability; thus completely solving the four major problems of traditional vacuum gauge probes: "slow installation, poor sealing, easy damage, and unaffordable repair".

[0021] It should be understood that the above general description and the following detailed description are exemplary and explanatory only, and are not intended to limit this disclosure. Attached Figure Description

[0022] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this disclosure and, together with the description, serve to explain the principles of this disclosure. It is obvious that the drawings described below are merely some embodiments of this disclosure, and those skilled in the art can obtain other drawings based on these drawings without any inventive effort.

[0023] Figure 1 This is a schematic diagram of an exemplary embodiment of the vacuum gauge probe structure disclosed herein;

[0024] Figure 2 An exploded view of an exemplary embodiment of the vacuum gauge probe structure disclosed herein;

[0025] Figure 3 This is a schematic diagram of another exemplary embodiment of the vacuum gauge probe structure disclosed herein;

[0026] Figure 4 This is an exploded view of another exemplary embodiment of the vacuum gauge probe structure disclosed herein. Detailed Implementation

[0027] Exemplary embodiments will now be described more fully with reference to the accompanying drawings. However, these exemplary embodiments can be implemented in many forms and should not be construed as limited to the embodiments set forth herein; rather, they are provided so that this disclosure will be thorough and complete, and will fully convey the concept of the exemplary embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar structures, and therefore detailed descriptions of them will be omitted. Furthermore, the drawings are merely illustrative of this disclosure and are not necessarily drawn to scale.

[0028] Unless otherwise specified or stated, the technical or scientific terms used in this disclosure shall have the ordinary meaning understood by one of ordinary skill in the art to which this disclosure pertains. The terms “a,” “an,” “the,” “the,” and “at least one” are used to indicate the presence of one or more elements / components / etc.; the terms “comprising” and “having” are used to indicate an open-ended inclusion and to mean that additional elements / components / etc. may exist in addition to those listed; the terms “first” and “second” are used only as illustrative marks and are not intended to limit the number, importance, or order of their contents. For example, without departing from the scope of this application, a first power source may also be referred to as a second power source, and a second power source may also be referred to as a first power source. Depending on the context, “when…” may be interpreted as “when…”, “if…”, or “in response to determination.”

[0029] In the following description, suffixes such as "module" or "unit" used to denote elements are used only for the purposes of this application and have no specific meaning in themselves. Therefore, "module" or "unit" can be used interchangeably.

[0030] Please refer to Figures 1 to 4 , Figure 1 This is a schematic diagram of an exemplary embodiment of the vacuum gauge probe structure disclosed herein; Figure 2 An exploded view of an exemplary embodiment of the vacuum gauge probe structure disclosed herein; Figure 3 This is a schematic diagram of another exemplary embodiment of the vacuum gauge probe structure disclosed herein; Figure 4 An exploded view of another exemplary embodiment of the vacuum gauge probe structure disclosed herein.

[0031] In the description of this disclosure, for ease of explanation and understanding, the application of a vacuum gauge probe structure to a vacuum gauge or vacuum measurement system is used as an example.

[0032] like Figure 1 and Figure 2 As shown, in one embodiment, the vacuum gauge probe main body assembly 1 is preferably a hexagonal prism with a central control structure. The lower threaded interface connects to an external device, and the small hole above the threaded interface serves as a vent. This main body assembly 1 adopts a single-cavity mounting structure with the MEMS vacuum sensor assembly 5. Each vacuum sensor is designed with a TO tube shell for shielding and sealing support, and a vacuum sensor is located inside the tube shell. A filter assembly 2 is mounted on a step above the vent and fixed using a limiting spring assembly 3, located at the front end of the MEMS vacuum sensor assembly 5. The two countersunk holes at the top are connected to the air vent to form a cavity. It can be understood that the two countersunk holes include a first countersunk hole and a second countersunk hole for accommodating the TO tube shell. The first countersunk hole is used to mount the PCB board, while the TO tube shell under the PCB is set in the second countersunk hole. The MEMS sensor assembly 5 is connected to the PCB board. The sensor TO tube shell is fitted with a high-precision sealing O-ring assembly and is circumferentially tensioned and connected to the TO tube shell. This structure forms a single sensor vacuum detection channel. The PCB board assembly 6 is located in the first countersunk hole, which has threads. By installing the fastening assembly 7, the PCB board assembly 6 is pressed, so that the high-precision sealing O-ring assembly is squeezed by the top stepped end face of the vacuum gauge probe body and the TO tube shell to form a seal.

[0033] Specifically, the main component 1 is a columnar hollow structure with a threaded interface and air vent at the lower end and a first and second countersunk hole at the upper end. The first and second countersunk holes and the air vent are interconnected from top to bottom. The first countersunk hole has a locking structure. The PCB board assembly 6 is disposed in the first countersunk hole and has a mounting part. The locking structure is a thread on the inner wall of the first countersunk hole. The fastening component 7 is a nut with threads on its outer wall to engage with the threads and press the PCB board assembly 6. The sensor assembly 5 is disposed in the second countersunk hole and includes a TO tube shell and a vacuum sensor. The TO tube shell is fitted with a sealing component 4. The sealing component 4 is surrounded and compressed by the stepped end face of the PCB board assembly 6, the TO tube shell, and the second countersunk hole to form a seal. It can be understood that a groove is formed between the stepped end face of the second countersunk hole and the first countersunk hole to accommodate the sealing component 4.

[0034] like Figure 1 and Figure 2 As shown, the mounting portion may include at least two ends, which are pressed against the bottom of the nut to compress the sealing assembly 4.

[0035] In one embodiment, the sealing assembly 4 includes at least two O-rings that are fitted around the circumference of the TO tube housing to form radial tension.

[0036] In one specific embodiment, the main component 1 is a columnar hollow structure with a first countersunk hole, a second countersunk hole, an air hole, and a threaded interface from top to bottom. It can be understood that, from top to bottom, components such as a fastening component 7, a PCB board assembly 6, a sensor assembly 5, a sealing component 4, a limiting spring assembly 3, and a filter assembly 2 are installed. The fastening component 7 and the PCB board assembly 6 are installed in the first countersunk hole, while the sensor assembly 5, the sealing component 4, the limiting spring assembly 3, and the filter assembly 2 are installed in the second countersunk hole. The air hole and the threaded interface are used to connect to the external measurement environment. The fastening component 7 is detachably connected to the locking structure to press the sealing component 4, thereby achieving a sealing effect for the industrial measurement environment based on a modular design.

[0037] like Figure 1 and Figure 2 As shown, the filter assembly 2 is attached to the bottom of the sensor assembly 5 via the limiting snap ring assembly 3 and is installed on the upper step of the air hole of the main body assembly 1.

[0038] Preferably, the sensor assembly 5 includes a detachable MEMS vacuum sensor, and the TO tube housing is electrically connected to the PCB board assembly 6.

[0039] like Figure 3 and Figure 4As shown, in another embodiment, the vacuum gauge probe main body assembly 1 is preferably a hexagonal prism with a central control structure. The lower threaded interface connects to an external device, and the small hole above the threaded interface serves as a vent. This main body assembly 1 adopts a single-cavity mounting structure with the MEMS vacuum sensor assembly 5. Each vacuum sensor is designed with a TO tube shell for shielding and sealing support, and a vacuum sensor is located inside the tube shell. A filter assembly 2 is mounted on a step above the vent and fixed using a limiting spring assembly 3, located at the front end of the MEMS vacuum sensor assembly 5. The two countersunk holes at the top are connected to the air vent to form a cavity. It can be understood that the two countersunk holes include a first countersunk hole and a second countersunk hole for accommodating the TO tube shell. The first countersunk hole is used to mount the PCB board, while the TO tube shell under the PCB is set in the second countersunk hole. The MEMS sensor assembly 5 is connected to the PCB board. The sensor TO tube shell is fitted with a high-precision sealing O-ring assembly and is circumferentially tensioned and connected to the TO tube shell. This structure forms a single sensor vacuum detection channel. The PCB board assembly 6 is located in the first countersunk hole. The stepped end face of the first countersunk hole has two 3 / 4 threaded holes. By installing the fastening assembly 7 to press the PCB board assembly 6, the high-precision sealing O-ring assembly is squeezed by the top stepped end face of the vacuum sensing head body and the TO tube shell to form a seal.

[0040] Specifically, the main component 1 is a columnar hollow structure. The lower end of the hollow structure has a threaded interface and an air hole, while the upper end has a first countersunk hole and a second countersunk hole. The first countersunk hole, the second countersunk hole, and the air hole are interconnected from top to bottom. The first countersunk hole has a locking structure. A PCB board assembly 6 is disposed in the first countersunk hole and has a mounting portion. The locking structure consists of at least two threaded holes on the stepped end face of the first countersunk hole. A fastening component 7 includes screws that pass through the through-hole of the mounting portion and engage with the threaded holes for tightening. Figure 3 and Figure 4 As shown, the mounting portion may include at least two ends, each end having a through hole to connect to two threaded holes on the stepped end face of the first countersunk hole. The sensor assembly 5 is disposed in the second countersunk hole. The sensor assembly 5 includes a TO tube housing and a vacuum sensor. The TO tube housing is fitted with a sealing assembly 4. The sealing assembly 4 is surrounded and compressed by the PCB board assembly 6, the TO tube housing, and the stepped end face of the second countersunk hole to form a seal. It is understood that a groove is formed between the stepped end face of the second countersunk hole and the first countersunk hole to accommodate the sealing assembly 4.

[0041] In one embodiment, the sealing assembly 4 includes at least two O-rings that are fitted around the circumference of the TO tube housing to form radial tension.

[0042] In one specific embodiment, the main component 1 is a columnar hollow structure with a first countersunk hole, a second countersunk hole, an air hole, and a threaded interface from top to bottom. It can be understood that, from top to bottom, components such as a fastening component 7, a PCB board assembly 6, a sensor assembly 5, a sealing component 4, a limiting spring assembly 3, and a filter assembly 2 are installed. The fastening component 7 and the PCB board assembly 6 are installed in the first countersunk hole, while the sensor assembly 5, the sealing component 4, the limiting spring assembly 3, and the filter assembly 2 are installed in the second countersunk hole. The air hole and the threaded interface are used to connect to the external measurement environment. The fastening component 7 is detachably connected to the locking structure to press the sealing component 4, thereby achieving a sealing effect for the industrial measurement environment based on a modular design.

[0043] like Figure 3 and Figure 4 As shown, the filter assembly 2 is attached to the bottom of the sensor assembly 5 via the limiting snap ring assembly 3 and is installed on the upper step of the air hole of the main body assembly 1.

[0044] Preferably, the sensor assembly 5 includes a detachable MEMS vacuum sensor, and the TO tube housing is electrically connected to the PCB board assembly 6.

[0045] Understandable Figure 1 and Figure 2 The provided nut-type implementation method is suitable for rapid installation scenarios; Figure 3 and Figure 4 The provided screw-type implementation offers higher sealing accuracy through multiple threaded holes, making it particularly suitable for high-vibration environments.

[0046] According to another aspect of this disclosure, a vacuum measurement system is provided. The electrical system includes a measurement environment and a vacuum gauge probe structure as described above; the measurement environment is sealed to the vacuum gauge probe structure via a threaded interface.

[0047] In summary, the vacuum gauge probe structure and measurement system using it disclosed herein achieve convenient installation and excellent sealing through a modular axial stacking structure and a fastener compression sealing mechanism. The modular design of multiple components enables rapid replacement or repair of components, which helps control the overall maintenance cost of the device. In addition, axial compression sealing between multiple components forms a sealing channel, while the compressed sealing component 4 achieves radial tension sealing, significantly improving sealing performance. The axial stacking structure also reduces the impact of vibration offset, further improving sealing, reliability, and stability; thus completely solving the four major problems of traditional vacuum gauge probes: slow installation, poor sealing, easy damage, and unaffordable repair.

[0048] Other embodiments of this disclosure will readily occur to those skilled in the art upon consideration of the specification and practice of the utility models disclosed herein. This application is intended to cover any variations, uses, or adaptations of this disclosure that follow the general principles of this disclosure and include common knowledge or customary techniques in the art not disclosed herein. The specification and examples are to be considered exemplary only, and the true scope and spirit of this disclosure are indicated by the appended claims.

Claims

1. A vacuum gauge probe structure, characterized in that, The probe structure includes: The main component is a columnar hollow structure. The lower end of the hollow structure is provided with a threaded interface and an air hole, and the upper end is provided with a first countersunk hole and a second countersunk hole. The first countersunk hole, the second countersunk hole and the air hole are interconnected from top to bottom. The first countersunk hole has a locking structure. A PCB board assembly is disposed in the first countersunk hole, and the PCB board assembly has a mounting portion; A fastening component is disposed in the first countersunk hole, and the fastening component abuts against the mounting part to cooperate with the locking structure, thereby axially pressing the PCB board assembly; A sensor assembly is disposed in the second countersunk hole. The sensor assembly includes a TO tube housing and a vacuum sensor. The TO tube housing is fitted with a sealing assembly. The sealing assembly is surrounded and compressed by the PCB board assembly, the TO tube shell, and the stepped end face of the second countersunk hole to form a seal.

2. The vacuum gauge probe structure according to claim 1, characterized in that, The locking structure is a thread provided on the inner wall of the first countersunk hole, and the fastening assembly includes a nut, which is used to engage with the thread to press the PCB board assembly.

3. The vacuum gauge probe structure according to claim 2, characterized in that, The mounting portion includes at least two ends, which are pressed against the bottom of the fastening assembly to compress the sealing assembly.

4. The vacuum gauge probe structure according to claim 1, characterized in that, The locking structure consists of at least two threaded holes on the stepped end face of the first countersunk hole, and the fastening assembly includes a screw that passes through the through hole of the mounting part and engages with the threaded holes to tighten.

5. The vacuum gauge probe structure according to claim 4, characterized in that, The mounting portion includes at least two ends, each of which has a through hole to extend into the at least two threaded holes.

6. The vacuum gauge probe structure according to claim 1, characterized in that, The sealing assembly includes an O-ring, which is fitted around the circumference of the TO tube housing to form radial tension.

7. The vacuum gauge probe structure according to claim 1, characterized in that, The sealing assembly includes at least two O-rings.

8. The vacuum gauge probe structure according to claim 1, characterized in that, Also includes: A filter assembly is installed on the upper step of the air hole; A limiting spring assembly is provided, through which the filter assembly is attached to the bottom of the sensor assembly.

9. The vacuum gauge probe structure according to claim 1, characterized in that, The vacuum sensor includes a detachable MEMS vacuum sensor, and the TO tube housing is electrically connected to the PCB board assembly.

10. A vacuum measurement system, characterized in that, include: The vacuum gauge probe structure according to any one of claims 1 to 9; and The environment to be measured is sealed to the vacuum gauge probe structure via a threaded interface.

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