A processing platform for substrate processing

Abstract

The utility model relates to the technical field of substrate processing equipment, concretely to a kind of processing platform for substrate processing, conveying assembly includes mounting bracket, and mounting bracket one end is equipped with driving motor, and driving motor output end is rotatably connected through pivot and belt pulley, and belt pulley outer end is equipped with conveyor belt, and the upper portion of conveyor belt is evenly equipped with limit strip, the utility model can reliably compact to substrate by driving cylinder and drive relevant component movement, ensure that substrate does not sway in processing process, improve processing accuracy;Silica gel elastic buffer layer in the bottom of compacting block can avoid rigid damage to substrate, play the role of protecting substrate.

Description

Technical Field

[0001] This utility model relates to the field of substrate processing equipment technology, specifically a processing platform for substrate processing. Technical Background

[0002] During substrate processing, operations such as conveying, positioning, and processing of the substrate are required. In the prior art, the device with patent number CN202022605417.4 fixes a limiting block at one end of the carrier plate. The limiting block has a limiting hole that communicates with the carrier plate. The support rod can pass through the limiting hole and connect to the dust collection hood. The support rod can move on the limiting block to adjust the position of the dust collection hood. The unpleasant odor generated during the electroplating process can be extracted through the dust collection hood, reducing the unpleasant odor at the processing site.

[0003] However, when the device transports the substrate, the substrate is prone to shifting, affecting the processing accuracy; moreover, the substrate may shake when the device processes it, leading to a decrease in processing quality; in addition, the device will generate vibration during operation, which will affect the service life and processing accuracy of the equipment in the long run.

[0004] Therefore, it is necessary to design a substrate processing platform that can stably transport, reliably position, and has vibration reduction function. Utility Model Content

[0005] This invention aims to solve the problems of unstable conveying, unreliable positioning, and vibration affecting processing accuracy and equipment life in existing substrate processing platforms.

[0006] A processing platform for substrate processing includes a conveying assembly, a clamping assembly, and a vibration damping assembly.

[0007] The conveying assembly includes a mounting bracket, one end of which is equipped with a drive motor. The output end of the drive motor is rotatably connected to a pulley via a rotating shaft. A conveyor belt is provided at the outer end of the pulley, and limit strips are evenly distributed above the conveyor belt.

[0008] The clamping assembly is located at both ends of the conveying assembly. The clamping assembly includes a mounting base. The mounting base has symmetrical mounting slots at both ends. A drive cylinder is installed inside each mounting slot. A fixed plate is installed at the top of the mounting base. The output end of the drive cylinder passes through the fixed plate. A movable plate is installed above the fixed plate.

[0009] The clamping assembly also includes a connecting rod, a crossbar, and a clamping block; one end of the connecting rod is hinged to one end of the fixed plate via a rotating shaft, and the other end of the connecting rod is hinged to one end of the movable plate via a rotating shaft. One end of the movable plate has a sliding groove, the output end of the drive cylinder passes through the sliding groove of the movable plate, the output end of the drive cylinder has a crossbar, the crossbar is slidably connected to the sliding groove of the movable plate, and a clamping block is provided at the bottom of the end of the movable plate away from the sliding groove.

[0010] The vibration damping component is located at the bottom of the conveying component. The vibration damping component includes a base. The top two ends of the base are symmetrically provided with dampers. The bottom end of the damper is fixedly connected to the top end of the base. The top end of the damper is fixedly connected to the bottom end of the mounting bracket. A buffer spring is sleeved on the outside of the damper. The bottom end of the buffer spring is fixedly connected to the top end of the base. The top end of the buffer spring is fixedly connected to the bottom end of the mounting bracket.

[0011] The vibration damping assembly also includes a slide groove, which is located at the top of the base. A slide rod is provided inside the slide groove, and sliders are symmetrically mounted above the slide rod. A spring is provided at one end of the slider, and the spring is sleeved above the slide rod. The top of the slider is hinged to a support rod through a hinge seat, and the top of the support rod is hinged to the bottom of the mounting bracket through a hinge seat.

[0012] The conveyor belt is made of highly wear-resistant rubber material, and the surface of the conveyor belt is evenly distributed with anti-slip patterns, which work together with the limit strips.

[0013] The bottom of the clamping block is equipped with an elastic buffer layer, which is made of silicone.

[0014] The present invention has the following advantages: 1. The present invention can limit the substrate by means of the limiting strip above the conveyor belt, so as to prevent the substrate from shifting during the conveying process and ensure the stability of the conveying; at the same time, the conveyor belt is made of high wear-resistant rubber material and has anti-slip texture on the surface, which further improves the stability of the substrate during the conveying and reduces the slippage phenomenon.

[0015] 2. This utility model uses a driving cylinder to move related components, which can reliably press the substrate, ensuring that the substrate will not shake during processing and improving processing accuracy; the silicone elastic buffer layer at the bottom of the pressing block can avoid hard damage to the substrate and play a role in protecting the substrate.

[0016] 3. This utility model effectively absorbs vibrations generated during the operation of the processing platform through the cooperation of damping and buffer springs; at the same time, the structure composed of slide groove, slide rod, slider, spring and support rod further enhances the vibration reduction effect, reduces the impact of vibration on equipment and processing accuracy, and extends the service life of equipment. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0018] Figure 2 This is a schematic diagram of the overall structure of the conveying component of this utility model;

[0019] Figure 3 This is a schematic diagram of the overall structure of the clamping assembly of this utility model;

[0020] Figure 4 This is a schematic diagram of the overall structure of the vibration damping component of this utility model.

[0021] The attached figures are labeled as follows:

[0022] 1. Conveying assembly; 11. Mounting bracket; 12. Drive motor; 13. Pulley; 14. Conveyor belt; 15. Limiting strip; 2. Pressing assembly; 21. Mounting base; 22. Drive cylinder; 23. Fixing plate; 24. Connecting rod; 25. Crossbar; 26. Movable plate; 27. Pressing block; 3. Vibration damping assembly; 31. Base; 32. Damping; 33. Buffer spring; 34. Slide groove; 35. Slide rod; 36. Slider; 37. Support rod; 38. Spring. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0024] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The utility model will be further described in detail below with reference to the accompanying drawings.

[0025] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0026] As attached Figure 1 To be continued Figure 4 The aforementioned processing platform for substrate processing includes a conveying assembly 1, a clamping assembly 2, and a vibration damping assembly 3.

[0027] Example 1

[0028] Specifically, the conveying assembly 1 includes a mounting bracket 11, one end of which is equipped with a drive motor 12. The output end of the drive motor 12 is rotatably connected to a pulley 13 via a rotating shaft. This connection method can effectively transmit the power of the drive motor 12 to the pulley 13, enabling the pulley 13 to obtain rotational power. A conveyor belt 14 is provided at the outer end of the pulley 13. The rotation of the pulley 13 can drive the conveyor belt 14 to move synchronously, thereby realizing the conveying of the substrate. Limiting strips 15 are evenly provided above the conveyor belt 14. The limiting strips 15 can limit the substrate on the conveyor belt 14 and prevent the substrate from shifting during the conveying process.

[0029] Example 2

[0030] Based on Example 1, in order to further improve the stability of the substrate processing, clamping components were provided at both ends of the conveying component.

[0031] Specifically, the clamping assembly 2 includes a mounting base 21, with mounting slots symmetrically opened at both ends of the mounting base 21. A drive cylinder 22 is installed inside each mounting slot, providing a stable mounting position for the drive cylinder 22 and ensuring the stability of the drive cylinder 22 during operation. A fixing plate 23 is provided at the top of the mounting base 21, and the output end of the drive cylinder 22 passes through the fixing plate 23. The fixing plate 23 guides and limits the movement of the output end of the drive cylinder 22. A movable plate 26 is provided above the fixing plate 23.

[0032] The clamping assembly 2 includes a connecting rod 24, a crossbar 25, and a clamping block 27. One end of the connecting rod 24 is hinged to one end of the fixed plate 23 via a rotating shaft, and the other end of the connecting rod 24 is hinged to one end of the movable plate 26 via a rotating shaft. This hinged connection allows the connecting rod 24 to rotate flexibly between the fixed plate 23 and the movable plate 26, thus transmitting force. One end of the movable plate 26 has a sliding groove, and the output end of the drive cylinder 22 passes through the sliding groove of the movable plate 26. The output end of the drive cylinder 22 has a crossbar 25, which is slidably connected to the sliding groove of the movable plate 26. The extension and retraction of the output end of the drive cylinder 22 can drive the movable plate 26 to move accordingly through the sliding of the crossbar 25 in the sliding groove. The bottom of the movable plate 26 away from the sliding groove has a clamping block 27. The movement of the movable plate 26 can drive the clamping block 27 to move up and down, thereby achieving the clamping or loosening of the substrate.

[0033] Specifically, the vibration damping component 3 is located at the bottom of the conveying component 1. The vibration damping component 3 includes a base 31, with dampers 32 symmetrically arranged at both ends of the top of the base 31. The bottom of the damper 32 is fixedly connected to the top of the base 31, and the top of the damper 32 is fixedly connected to the bottom of the mounting bracket 11. The damper 32 can effectively absorb vibration energy and reduce vibration transmission. A buffer spring 33 is sleeved on the outside of the damper 32. The bottom of the buffer spring 33 is fixedly connected to the top of the base 31, and the top of the buffer spring 33 is fixedly connected to the bottom of the mounting bracket 11. The buffer spring 33 and the damper 32 work together to further enhance the vibration damping effect and absorb vibration through their own expansion and contraction deformation.

[0034] The vibration damping component 3 also includes a slide groove 34, which is located at the top of the base 31. A slide rod 35 is installed inside the slide groove 34, providing a track for the sliding of the slider 36 and ensuring the stability of the slider 36's movement. Sliding sliders 36 are symmetrically positioned above the slide rod 35, with a spring 38 at one end. The spring 38 is sleeved above the slide rod 35. When the slider 36 slides on the slide rod 35, it compresses or stretches the spring 38, and the elastic force of the spring 38 buffers the movement of the slider 36. Support rods 37 are hinged to the top of the slider 36 via hinge seats. The top of the support rods 37 is hinged to the bottom of the mounting bracket 11 via hinge seats. Vibrations transmitted from the mounting bracket 11 cause the support rods 37 to move, thereby causing the slider 36 to slide on the slide rod 35. The deformation of the spring 38 absorbs vibration energy, further improving the overall vibration damping performance.

[0035] The conveyor belt 14 is made of high wear-resistant rubber material, which can improve the service life of the conveyor belt 14 and adapt to long-term substrate transportation. The surface of the conveyor belt 14 is evenly distributed with anti-slip texture. The anti-slip texture and the limiting strip 15 work together to enhance the friction between the conveyor belt 14 and the substrate, prevent the substrate from slipping during transportation, and further ensure the stability of substrate transportation in conjunction with the limiting strip 15.

[0036] The bottom of the clamping block 27 is provided with an elastic buffer layer made of silicone. When the clamping block 27 clamps the substrate, the elastic buffer layer can play a buffering role, preventing the clamping block 27 from causing hard damage to the substrate and protecting the substrate surface.

[0037] In actual use, the substrate is first placed on the conveyor belt 14, and the drive motor 12 is started. The output end of the drive motor 12 drives the pulley 13 to rotate through the shaft. The rotation of the pulley 13 drives the conveyor belt 14 to move. The conveyor belt 14 carries the substrate forward. During this process, the limiting strip 15 above the conveyor belt 14 plays a limiting role on the substrate to prevent the substrate from shifting laterally during the transport process.

[0038] When the substrate is transported to the processing position, the conveying assembly 1 stops working. At this time, the clamping assembly 2 starts to operate, and the drive cylinder 22 on the mounting base 21 is activated. The output end of the drive cylinder 22 extends and passes through the fixed plate 23. Since the output end of the drive cylinder 22 is provided with a crossbar 25, and the crossbar 25 is slidably connected to the sliding groove on the movable plate 26, the extension movement of the output end of the drive cylinder 22 drives the crossbar 25 to slide in the sliding groove of the movable plate 26. Since one end of the connecting rod 24 is hinged to the fixed plate 23 and the other end is hinged to the movable plate 26, under the pushing action of the crossbar 25, the movable plate 26 rotates around the hinge point with the connecting rod 24 as the fulcrum. The end of the movable plate 26 away from the sliding groove moves downward, thereby driving the clamping block 27 at the bottom to move downward, pressing the substrate tightly onto the conveyor belt 14. The silicone elastic buffer layer at the bottom of the clamping block 27 plays a buffering role during the clamping process, preventing the clamping block 27 from causing hard damage to the substrate.

[0039] During the processing of the substrate, the processing operation will generate vibrations. These vibrations are transmitted to the vibration damping assembly 3 through the mounting bracket 11. The damper 32 in the vibration damping assembly will deform due to the vibration, thereby absorbing some of the vibration energy. At the same time, the buffer spring 33 sleeved on the outside of the damper 32 will also stretch and deform with the vibration, further absorbing the vibration energy. Together with the damper 32, it plays a preliminary role in vibration damping. In addition, the vibration of the mounting bracket 11 will drive the support rod 37 to move. The support rod 37 pushes the slider 36 to slide on the slide rod 35 in the slide groove 34. When the slider 36 slides, it will compress or stretch the spring 38 sleeved on the slide rod 35. The deformation of the spring 38 can absorb the vibration energy again, further weakening the vibration. Through the combined action of the damper 32, the buffer spring 33, and the structure composed of the slide rod 35, the slider 36, the spring 38 and the support rod 37, the impact of vibration on processing accuracy and equipment is effectively reduced.

[0040] It should be noted that all electrical components mentioned in this article are connected to an external main controller and 220V AC mains power. The main controller can be a conventional known device that can be controlled by a computer or other means. The detailed description of known functions and known components is omitted in the specific implementation of this disclosure. In order to ensure the compatibility of the device, the operating methods used are consistent with the parameters of commercially available instruments.

[0041] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A processing platform for substrate processing, characterized in that, include: Conveying assembly (1), clamping assembly (2), vibration damping assembly (3); The conveying assembly (1) includes a mounting bracket (11), one end of which is provided with a drive motor (12). The output end of the drive motor (12) is rotatably connected to a shaft and a pulley (13). The outer end of the pulley (13) is provided with a conveyor belt (14), and limit strips (15) are evenly provided above the conveyor belt (14).

2. The processing platform for substrate processing according to claim 1, characterized in that: The clamping assembly (2) is located at both ends of the conveying assembly (1). The clamping assembly (2) includes a mounting base (21). The mounting base (21) has symmetrical mounting slots at both ends. The mounting slots are equipped with drive cylinders (22). The top of the mounting base (21) is equipped with a fixing plate (23). The output end of the drive cylinder (22) passes through the fixing plate (23). The fixing plate (23) is equipped with a movable plate (26) above the fixing plate (23).

3. The processing platform for substrate processing according to claim 2, characterized in that: The clamping assembly (2) also includes a connecting rod (24), a crossbar (25), and a clamping block (27); One end of the connecting rod (24) is hinged to one end of the fixed plate (23) via a rotating shaft, and the other end of the connecting rod (24) is hinged to one end of the movable plate (26) via a rotating shaft. One end of the movable plate (26) is provided with a sliding groove. The output end of the drive cylinder (22) passes through the sliding groove of the movable plate (26). The output end of the drive cylinder (22) is provided with a crossbar (25). The crossbar (25) is slidably connected to the sliding groove of the movable plate (26). A clamping block (27) is provided at the bottom of the end of the movable plate (26) away from the sliding groove.

4. The processing platform for substrate processing according to claim 3, characterized in that: The vibration damping component (3) is located at the bottom of the conveying component (1). The vibration damping component (3) includes a base (31). The top two ends of the base (31) are symmetrically provided with dampers (32). The bottom end of the damper (32) is fixedly connected to the top end of the base (31). The top end of the damper (32) is fixedly connected to the bottom end of the mounting bracket (11). The damper (32) is covered with a buffer spring (33). The bottom end of the buffer spring (33) is fixedly connected to the top end of the base (31). The top end of the buffer spring (33) is fixedly connected to the bottom end of the mounting bracket (11).

5. A processing platform for substrate processing according to claim 4, characterized in that: The vibration damping component (3) also includes a slide groove (34), which is located at the top of the base (31). A slide rod (35) is provided inside the slide groove (34). A slider (36) is symmetrically mounted above the slide rod (35). A spring (38) is provided at one end of the slider (36). The spring (38) is sleeved above the slide rod (35). The top of the slider (36) is hinged to the support rod (37) through a hinge seat. The top of the support rod (37) is hinged to the bottom of the mounting bracket (11) through a hinge seat.

6. A processing platform for substrate processing according to claim 5, characterized in that: The conveyor belt (14) is made of high wear-resistant rubber material. Anti-slip textures are evenly distributed on the surface of the conveyor belt (14), and the anti-slip textures cooperate with the limiting strip (15).

7. A processing platform for substrate processing according to claim 6, characterized in that: The bottom of the clamping block (27) is provided with an elastic buffer layer, which is made of silicone.

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