Main roller device, thread cutting machine and dynamic balance adjusting system

CN224726172UActive Publication Date: 2026-09-08ZHEJIANG JINGSHENG MECHANICAL & ELECTRICAL CO LTD
View PDF 0 Cites 0 Cited by

Patent Information

Application Number
CN202521820991.8
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-08-26
Publication Date
2026-09-08
Estimated Expiration
2035-08-26

AI Technical Summary

Technical Problem

[0005]本申请的目的是针对现有技术中存在的上述问题,提出了一种主辊装置、线切机及动平衡调节系统,解决了现有技术线切机的主辊振动较强的问题,降低了线切机的主辊振动

Benefits of technology

[0017]This application utilizes the viscous energy dissipation characteristics of oil film by setting an oil film damper to directly absorb the vibration energy transmitted to the bearing when the main roller rotates, thereby reducing the radial runout amplitude of the main roller, reducing the amplitude, improving the stability of equipment operation, and reducing the wear rate of the raceway and rolling elements of the bearing due to the reduced vibration, thus extending the service life of the bearing.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN224726172U_ABST
    Figure CN224726172U_ABST
Patent Text Reader

Abstract

This application provides a main roller assembly, a wire cutting machine, and a dynamic balancing system, belonging to the field of crystal rod processing technology, and solves the problem of strong vibration of the main roller in existing wire cutting machines. The main roller assembly of this application includes: a main roller; a bearing housing, which is rotatably connected to the main roller via a bearing to give the main roller rotational freedom; and an oil film damper connected to the bearing housing. The oil film damper includes a housing, which is sleeved on the outer periphery of the bearing. An oil injection channel is provided through the housing in the radial direction for injecting oil into the outer periphery of the bearing to exert oil pressure on the bearing. By setting up an oil film damper, this application utilizes the viscous energy dissipation characteristics of the oil film to directly absorb the vibration energy transmitted to the bearing during the rotation of the main roller, reducing the radial runout amplitude of the main roller. This reduces the amplitude, improves the stability of equipment operation, and, due to reduced vibration, lowers the wear rate of the raceway and rolling elements of the bearing, effectively extending the bearing's service life.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] This application belongs to the field of crystal rod processing technology, specifically, it relates to a main roller device, a wire cutter and a dynamic balance adjustment system. Background Technology

[0002] The main roller assembly is the core component of the wire cutting machine. Multiple parallel main rollers, wound with diamond wire, form a cutting wire mesh. This mesh, rotating at high speed, creates relative motion with the crystal ingot, achieving the cutting process. With the increasing demand for thinner wafers in the photovoltaic / semiconductor industry, the main roller speed continues to rise.

[0003] In existing technologies, the uneven mass distribution caused by uneven material, assembly errors, or wear during high-speed rotation of the main roller can lead to strong vibrations. These vibrations are transmitted to the bearings and bearing housings, accelerating raceway wear, reducing bearing life, and causing radial runout of the main roller to cause fluctuations in wire mesh tension, resulting in wire marks or fragments on the silicon wafers and a decrease in yield.

[0004] Based on the above, the technical problem to be solved by this application is: how to reduce the vibration of the main roller of a wire cutting machine. Utility Model Content

[0005] The purpose of this application is to address the aforementioned problems in the prior art by proposing a main roller device, a wire cutter, and a dynamic balancing system, which solves the problem of strong vibration of the main roller in the prior art wire cutter and reduces the vibration of the main roller of the wire cutter.

[0006] The objective of this application can be achieved through the following technical solution: a main roller device, comprising: a main roller; a bearing housing, the bearing housing being rotatably connected to the main roller via a bearing to give the main roller rotational freedom; and an oil film damper, the oil film damper being connected to the bearing housing, the oil film damper including a housing, the housing being sleeved on the outer periphery of the bearing, the housing having a radially penetrating oil injection channel, the oil injection channel being used to inject oil into the outer periphery of the bearing so that oil pressure acts on the bearing. It is understood that the main roller of this application is the main roller in a wire cutting machine, the main roller being used to wind and cut the wire, and the bearing being used to support the main roller. The oil film damper, through the viscous energy dissipation characteristics of the oil film, directly absorbs the vibration energy transmitted to the bearing when the main roller rotates, reducing the radial runout amplitude of the main roller, thereby reducing the amplitude and improving the operational stability of the equipment. Due to the reduced vibration, the wear rate of the bearing's raceway and rolling elements decreases, extending the bearing's service life.

[0007] In the aforementioned main roller assembly, the oil film damper further includes an elastic support, which is disposed between the housing and the bearing. The oil injection channel leads to the elastic support, allowing the elastic support to transmit oil pressure to the bearing. It can be understood that the elastic support, acting as an intermediate buffer layer, evenly transmits the oil pressure force of the oil film damper to the outer ring of the bearing, preventing bearing deformation caused by localized stress concentration, and simultaneously enhancing the system's adaptability to impact loads.

[0008] In the aforementioned main roller assembly, an installation gap is formed between the housing and the elastic support, and this installation gap communicates with the oil injection channel. An oil injection hole is provided on the housing, and this oil injection hole communicates with the oil injection channel. Oil is injected into the installation gap through the oil injection hole to form an oil film. It is understood that by injecting lubricating oil of different viscosities into the installation gap through the oil injection hole, the oil film damping coefficient can be adjusted in real time, with a wide adjustment range to adapt to the vibration reduction requirements of the main roller at different speeds. Furthermore, the oil injection design allows the damper to be replenished or replaced with lubricating oil without disassembly, significantly reducing maintenance time.

[0009] In the aforementioned main roller assembly, the elastic support is equipped with a sealing structure that seals the mounting gap in the radial direction of the elastic support. It is understood that the sealing structure ensures that oil in the mounting gap does not leak, safely forming an oil film.

[0010] In the aforementioned main roller assembly, the sealing structure includes: mounting grooves, having at least two grooves, which are spaced apart on the elastic support and distributed along the length of the mounting gap; and sealing rings, the number of which matches the number of mounting grooves, each sealing ring being disposed on one of the mounting grooves and abutting against the housing and the elastic support in the radial direction. It is understood that the multiple sealing rings, spaced apart, prevent oil leakage and ensure oil film stability; simultaneously, they prevent oil quality deterioration caused by external dust intrusion.

[0011] The aforementioned main roller assembly also includes a bearing housing, comprising: a first portion connected to the end of the main roller; and a second portion located on the outer periphery of the first portion, connected to an end of the elastic support away from the main roller. The housing is axially connected to the elastic support at an end near the second portion, thereby forming the installation gap between the housing and the elastic support in the radial direction. It is understood that by directly connecting the first portion to the end of the main roller and fixing the second portion to the elastic support, quick assembly and disassembly of the bearing housing are achieved, facilitating bearing replacement or damper maintenance. The axial connection between the housing and the elastic support ensures the uniformity of the installation gap, preventing damping failure caused by uneven oil film thickness.

[0012] The purpose of this application is also to provide a wire cutting machine, including: the aforementioned main roller assembly; and an oil injection mechanism disposed outside the main roller, the oil injection mechanism being connected to an oil injection channel to supply oil. Exemplarily, the oil injection mechanism includes a pump body and a delivery pipe, one end of the delivery pipe being connected to the pump body and the other end to an oil film damper. Oil is stored in the pump body, and the oil is pumped to the oil injection channel by the pump body, thereby allowing the oil film damper to act on the bearing, thus reducing the vibration of the main roller, ensuring continuous suppression of main roller vibration during the cutting process, and improving the silicon wafer cutting yield.

[0013] The purpose of this application is also to provide a dynamic balancing adjustment system, comprising: the aforementioned wire cutting machine, wherein the oil injection mechanism of the wire cutting machine has a control unit; a vibration detection element, wherein the vibration detection element is disposed on the bearing housing, and the vibration detection element is communicatively connected to the control unit. It is understood that by disposing of the vibration detection element on the bearing housing, the vibration of the bearing housing can be detected. Since the main roller and the bearing are connected, and the bearing and the bearing housing are connected, the vibration of the main roller can be detected. The control unit receives and processes the vibration data from the vibration detection element, thereby controlling the oil injection mechanism to inject an appropriate amount of oil into the oil film damper to provide suitable vibration damping.

[0014] In the aforementioned dynamic balancing system, the vibration detection component includes a vibration sensor. The vibration sensor is connected to the bearing housing to detect the vibration of the main roller, and it is also communicatively connected to the control unit. It is understood that the vibration sensor can detect information such as the amplitude, frequency, and direction of the main roller's vibration in space, and convert this information into readable signals, such as changes in voltage or current, for subsequent analysis and processing. Based on the vibration signals, the control unit can dynamically adjust the oil injection amount to achieve real-time optimization of the dynamic balance.

[0015] In the aforementioned dynamic balancing system, the vibration detection component includes a speed sensor, which is disposed within the main roller to detect the rotational speed of the main roller, and the speed sensor is communicatively connected to the control unit. For example, the speed sensor is a magnetoelectric sensor, and a gear may be provided at the end of the main roller. By detecting changes in the magnetic field of the gear at the end of the main roller, a square wave pulse signal is output, thereby determining the rotational speed of the main roller. Based on the rotational speed of the main roller, the control unit can dynamically adjust the oil injection amount to achieve real-time optimization of the dynamic balance.

[0016] Compared with the prior art, this application has the following beneficial effects:

[0017] This application utilizes the viscous energy dissipation characteristics of oil film by setting an oil film damper to directly absorb the vibration energy transmitted to the bearing when the main roller rotates, thereby reducing the radial runout amplitude of the main roller, reducing the amplitude, improving the stability of equipment operation, and reducing the wear rate of the raceway and rolling elements of the bearing due to the reduced vibration, thus extending the service life of the bearing. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the main roller assembly of this application;

[0019] Figure 2 This is a cross-sectional structural schematic diagram of the main roller assembly of this application;

[0020] Figure 3 yes Figure 2 Enlarged structural diagram of region A in the middle;

[0021] In the diagram, 100 is the main roller; 200 is the bearing housing; 210 is the bearing; 220 is the first part; 230 is the second part; 300 is the oil film damper; 310 is the housing; 311 is the oil injection channel; 312 is the oil injection hole; X is the installation gap; 320 is the elastic support; 400 is the sealing structure; 410 is the mounting groove; 420 is the sealing ring; 500 is the vibration detection component; 510 is the vibration sensor; and 520 is the speed sensor. Detailed Implementation

[0022] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0023] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0024] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0025] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0026] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0027] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only embodiments.

[0028] Please refer to the attached diagram in the instruction manual. Figures 1 to 3The main roller assembly of this application includes a main roller 100, a bearing housing 200, and an oil film damper 300. The bearing housing 200 is rotatably connected to the main roller 100 via a bearing 210, allowing the main roller 100 to have rotational freedom. The oil film damper 300 is connected to the bearing housing 200 and includes a housing 310, which is sleeved on the outer periphery of the bearing 210. The housing 310 has a radially penetrating oil injection channel 311 for injecting oil into the outer periphery of the bearing 210 to exert oil pressure on the bearing 210. It is understood that the main roller 100 of this application is the main roller 100 in a wire cutting machine, used for winding and cutting wire, and the bearing 210 is used to support the main roller 100. The oil film damper 300 directly absorbs the vibration energy transmitted to the bearing 210 when the main roller 100 rotates by utilizing the viscous energy dissipation characteristics of the oil film, thereby reducing the radial runout amplitude of the main roller 100, reducing large amplitude vibrations, and improving the operational stability of the equipment. Due to the reduced vibration, the wear rate of the raceway and rolling elements of the bearing 210 is reduced, which can effectively extend the service life of the bearing 210.

[0029] See Figure 3 In some embodiments, the oil film damper 300 further includes an elastic support 320, which is disposed between the housing and the bearing 210. An oil injection channel 311 leads to the elastic support 320, allowing the elastic support 320 to transmit oil pressure to the bearing 210. It is understood that the elastic support 320, acting as an intermediate buffer layer, evenly transmits the damping force of the oil film damper 300 to the outer ring of the bearing 210, preventing deformation of the bearing 210 due to localized stress concentration, and simultaneously enhancing the system's adaptability to impact loads. The oil injection channel 311 is used to inject oil into the elastic support 320, applying oil pressure to the elastic support 320, thereby utilizing the elastic support 320 to exert force on the bearing 210.

[0030] See Figure 3 In some embodiments, an installation gap X is formed between the housing 310 and the elastic support 320. The installation gap X communicates with the oil injection channel 311. An oil injection hole 312 is provided on the housing 310, which communicates with the oil injection channel 311. Oil is injected into the installation gap X through the oil injection channel 311 through the oil injection hole 312 to form an oil film. It can be understood that by injecting lubricating oil of different viscosities into the installation gap X through the oil injection hole 312, the oil film damping coefficient can be adjusted in real time, with a wide adjustment range to adapt to the vibration reduction requirements of the main roller 100 at different speeds. Furthermore, the oil injection design allows the damper to be replenished or replaced with lubricating oil without disassembly, significantly reducing maintenance time.

[0031] See Figure 3In some embodiments, the elastic support 320 is provided with a sealing structure 400, which seals the mounting gap X in the radial direction of the elastic support 320. It is understood that the sealing structure 400 is provided to ensure that oil in the mounting gap X does not leak and a safe oil film is formed.

[0032] See Figure 3 In some embodiments, the sealing structure 400 includes mounting grooves 410 and sealing rings 420. There are at least two mounting grooves 410, which are formed on the elastic bracket 320 and spaced apart along the length of the mounting gap X. The number of sealing rings 420 matches the number of mounting grooves 410, and each sealing ring 420 is disposed on a mounting groove 410, abutting against the housing 310 and the elastic bracket 320 in the radial direction. It is understood that the multiple sealing rings 420 spaced apart prevent oil leakage and ensure oil film stability; at the same time, they prevent oil quality deterioration caused by external dust intrusion.

[0033] In some embodiments, the main roller assembly of this application further includes a bearing housing 200, which includes a first portion 220 and a second portion 230. The first portion 220 is connected to the end of the main roller 100, and the second portion 230 is located on the outer periphery of the first portion 220. The second portion 230 is connected to the end of the elastic support 320 away from the main roller 100. The housing 310 is connected to the elastic support 320 axially near the end of the second portion 230, so that an installation gap X is formed between the housing 310 and the elastic support 320 in the radial direction. It is understood that by directly connecting the first portion 220 to the end of the main roller 100 and fixing the second portion 230 to the elastic support 320, the bearing housing 200 can be quickly disassembled and assembled, facilitating the replacement of the bearing 210 or maintenance of the damper. The axial connection between the housing 310 and the elastic support 320 ensures the uniformity of the installation gap X, avoiding damping failure caused by uneven oil film thickness.

[0034] The wire cutting machine of this application (not shown) includes a main roller assembly and an oil injection mechanism (not shown). The oil injection mechanism is located outside the main roller 100 and is connected to the oil film damper 300 to supply oil. For example, the oil injection mechanism includes a pump body (not shown) and a delivery pipe (not shown). One end of the delivery pipe is connected to the pump body, and the other end is connected to the oil film damper 300. The pump body stores oil, which is pumped to the oil film damper 300 by the pump body. The oil film damper 300 then acts on the bearing 210, thereby reducing the vibration of the main roller 100, ensuring continuous suppression of vibration during the cutting process, and improving the silicon wafer cutting yield.

[0035] The dynamic balancing system of this application (not shown) includes a wire cutting machine and a vibration detection element 500. The oil injection mechanism of the wire cutting machine has a control unit (not shown). The vibration detection element 500 is mounted on the bearing housing 200 and is communicatively connected to the control unit. It is understood that by mounting the vibration detection element 500 on the bearing housing 200, the vibration of the bearing housing 200 can be detected. Since the main roller 100 is connected to the bearing 210, and the bearing 210 is connected to the bearing housing 200, the vibration of the main roller 100 can be detected. The control unit receives and processes the vibration data from the vibration detection element 500, thereby controlling the oil injection mechanism to inject an appropriate amount of oil into the oil film damper 300 to provide suitable vibration damping.

[0036] See Figure 2 In some embodiments, the vibration detection component 500 includes a vibration sensor 510, which is connected to the bearing housing 200 to detect the vibration of the main roller 100, and is communicatively connected to the control unit. It is understood that the vibration sensor 510 can detect information such as the amplitude, frequency, and direction of the vibration of the main roller 100 in space, and convert it into readable signals, such as changes in voltage or current, for subsequent analysis and processing. Based on the vibration signals, the control unit can dynamically adjust the oil injection amount to achieve real-time optimization of dynamic balance.

[0037] See Figure 2 In some embodiments, the vibration detection element 500 includes a speed sensor 520, which is disposed within the main roller 100 to detect the rotational speed of the main roller 100, and the speed sensor 520 is communicatively connected to the control unit. For example, the speed sensor 520 is a magnetoelectric sensor, and a gear may be provided at the end of the main roller 100. By detecting changes in the magnetic field of the gear at the end of the main roller 100, a square wave pulse signal is output to determine the rotational speed of the main roller 100. Based on the rotational speed of the main roller 100, the control unit can dynamically adjust the oil injection amount to achieve real-time optimization of dynamic balance.

[0038] Beneficial effects:

[0039] The main roller assembly of this application incorporates an oil film damper 300. Utilizing the viscous energy dissipation characteristics of the oil film, it directly absorbs the vibration energy transmitted to the bearing 210 during the rotation of the main roller 100, reducing the radial runout amplitude of the main roller 100. This reduces amplitude and improves equipment operational stability. Due to reduced vibration, the wear rate of the raceway and rolling elements in the bearing 210 decreases, effectively extending the bearing 210's service life. Furthermore, the elastic support 320 serves as an intermediate buffer layer, uniformly transmitting the damping force of the oil film damper 300 to the outer ring of the bearing 210, preventing localized stress concentration. The bearing 210 deforms, which enhances the system's adaptability to impact loads. The wire cutting machine of this application pumps oil to the oil film damper 300 through the pump body, so that the oil film damper 300 can act on the bearing 210, thereby reducing the vibration of the main roller 100, ensuring the continuous suppression of the vibration of the main roller 100 during the cutting process, and improving the silicon wafer cutting yield. The dynamic balance adjustment system of this application, through the cooperation of the control unit and the vibration detection component 500, can dynamically adjust the oil injection amount based on the vibration condition and speed of the main roller 100, so as to achieve real-time optimization of dynamic balance.

[0040] The specific embodiments described herein are merely illustrative examples of the spirit of this application. Those skilled in the art to which this application pertains may make various modifications or additions to the described specific embodiments or use similar methods to substitute them, without departing from the spirit of this application or exceeding the scope defined by the appended claims.

Claims

1. A main roller device, characterized in that, include: Main roller (100); A bearing housing (200), which is rotatably connected to the main roller (100) via a bearing (210) to give the main roller (100) rotational freedom; and An oil film damper (300) is connected to the bearing housing (200). The oil film damper (300) includes a housing (310) which is sleeved on the outer periphery of the bearing (210). The housing (310) has an oil injection channel (311) extending through it in the radial direction. The oil injection channel (311) is used to inject oil into the outer periphery of the bearing (210) so that oil pressure acts on the bearing (210).

2. The main roller assembly according to claim 1, characterized in that, The oil film damper (300) further includes an elastic bracket (320), which is disposed between the housing (310) and the bearing (210). The oil injection channel (311) leads to the elastic bracket (320) so that the elastic bracket (320) transmits oil pressure to the bearing (210).

3. The main roller assembly according to claim 2, characterized in that, An installation gap (X) is formed between the housing (310) and the elastic bracket (320). The installation gap (X) communicates with the oil injection channel (311). An oil injection hole (312) is provided on the housing (310). The oil injection hole (312) communicates with the oil injection channel (311). The oil injection hole (312) injects oil into the installation gap (X) through the oil injection channel (311) to form an oil film.

4. The main roller assembly according to claim 3, characterized in that, The elastic bracket (320) is provided with a sealing structure (400), which closes the installation gap (X) in the radial direction of the elastic bracket (320).

5. The main roller assembly according to claim 4, characterized in that, The sealing structure (400) includes: Mounting slots (410), having at least two mounting slots (410), the two mounting slots (410) being formed on the elastic bracket (320) and being distributed at intervals along the length direction of the mounting gap (X); The number of sealing rings (420) matches the number of mounting grooves (410). The sealing rings (420) are arranged one by one on the mounting grooves (410), and the sealing rings (420) abut against the housing (310) and the elastic bracket (320) in the radial direction.

6. The main roller assembly according to claim 3, characterized in that, The bearing housing (200) includes: The first part (220) is connected to the end of the main roller (100); The second part (230) is located on the outer periphery of the first part (220). The second part (230) is connected to one end of the elastic support (320) away from the main roller (100). The housing (310) is connected to the elastic support (320) in the axial direction near one end of the second part (230) so that the housing (310) forms the mounting gap (X) between itself and the elastic support (320) in the radial direction.

7. A wire cutting machine, characterized in that, The device includes the main roller assembly as described in any one of claims 1-6, and further includes an oil injection mechanism disposed on the outside of the main roller (100), the oil injection mechanism being connected to the oil injection channel (311) to supply oil.

8. A dynamic balancing adjustment system, characterized in that, The wire cutting machine as described in claim 7 includes an oil injection mechanism having a control unit and a vibration detection element (500) disposed on the bearing housing (200) and communicatively connected to the control unit.

9. The dynamic balancing system according to claim 8, characterized in that, The vibration detection component (500) includes a vibration sensor (510), which is connected to the bearing housing (200) to detect the vibration of the main roller (100), and the vibration sensor (510) is communicatively connected to the control unit.

10. The dynamic balancing system according to claim 8, characterized in that, The vibration detection component (500) includes a speed sensor (520), which is disposed inside the main roller (100) to detect the rotational speed of the main roller (100), and the speed sensor (520) is communicatively connected to the control unit.