Automatic debonding and material removal recognition device

Abstract

The utility model provides a kind of automatic recognition device of degumming and material removal, it is related to silicon wafer production and processing technical field, to solve the existing mechanical arm to execute material removal action, because lack accurate, reliable material removal state identification mechanism, cannot accurately judge whether transfer frame has completely separated from mechanical arm and successfully fallen into degumming pool, this problem can lead to mechanical arm to lift reset, transfer frame is still not correctly separated, and then interfere with the normal progress of subsequent processing process Problem, including main frame;The main frame is rectangular long rod structure.After mechanical arm executes material removal action, before lifting reset, whether transfer frame completely separates from mechanical arm and falls into degumming pool is detected in real time, when identifying that material removal is not successful, can timely feedback to mechanical arm control device, to make mechanical arm execute material removal instruction again, avoid the problem that subsequent processing process is interfered because transfer frame is not correctly separated, the reliability of mechanical arm to execute material removal instruction is significantly improved.

Description

Technical Field

[0001] This utility model belongs to the field of silicon wafer production and processing technology, and more specifically, it relates to an automatic identification device for debonding and unloading. Background Technology

[0002] In the silicon wafer production process, the debonding process is a crucial step. After undergoing a series of complex processing steps, silicon wafers require a transfer frame for efficient transport to facilitate debonding. Currently, the industry commonly uses transfer frames to transport silicon wafers to the debonding process. Specifically, a robotic arm, following a pre-set program, precisely transports the transfer frame carrying the silicon wafers to the debonding tank. Once the robotic arm delivers the transfer frame to the designated position in the debonding tank, it releases the frame, completing the so-called "removal" operation and allowing the silicon wafers to undergo the debonding process.

[0003] However, the existing silicone transfer rack conveying robotic arm has certain technical defects in the unloading process:

[0004] On the one hand, when the robotic arm performs the unloading action, due to the lack of a precise and reliable unloading status recognition mechanism, it is impossible to accurately determine whether the transfer frame has completely detached from the robotic arm and successfully fallen into the degumming tank. This problem may cause the transfer frame to still not detach correctly after the robotic arm is lifted and reset, thereby interfering with the normal progress of subsequent processing steps.

[0005] On the other hand, due to the lack of an effective stripping identification device, the entire stripping process is difficult to automate and make intelligent. During the production process, it is necessary to frequently conduct visual inspections of the stripping status of the silicon wafer transfer frame, which not only consumes a lot of manpower and time, but also reduces production efficiency. Utility Model Content

[0006] To address the aforementioned technical problems, this utility model relates to an automatic degumming and material removal identification device. This device solves the problem that existing robotic arms, when performing degumming actions, lack a precise and reliable degumming status identification mechanism. This makes it impossible to accurately determine whether the transfer frame has completely detached from the robotic arm and successfully fallen into the degumming tank. This problem may lead to the transfer frame not properly detaching even after the robotic arm is raised and reset, thus interfering with the normal operation of subsequent processing steps. Furthermore, due to the lack of an effective degumming identification device, the entire degumming process is difficult to automate and become highly intelligent. During production, frequent manual visual inspections of the degumming status are required, which not only consumes a significant amount of manpower and time but also reduces production efficiency.

[0007] In a first aspect, this utility model provides an automatic identification device for degumming and material stripping, achieved by the following specific technical means:

[0008] An automatic identification device for degumming and material stripping, comprising:

[0009] Main frame; the main frame is a rectangular long rod structure; movable arms are provided at both ends of the main frame, the movable arms are slidably engaged with the adjustment grooves on the side of the main frame, and the movable arms are threadedly connected to the double-ended lead screws inside the main frame. The clamping blocks outside the movable arms are located at the side of the main frame, and the clamping blocks are provided with swing arms inside. The swing arms are rotatably installed in the inner grooves inside the clamping blocks, and the positioning holes inside the swing arms are penetrated by the limiting rods inside the clamping blocks.

[0010] Furthermore, adjustment slots are provided at both ends of the main frame, and a double-ended lead screw is rotatably installed inside the main frame, with both ends of the double-ended lead screw extending into the adjustment slots.

[0011] Furthermore, a clamping block perpendicular to the side end of the movable arm is fixedly installed.

[0012] Furthermore, the clamping block has a through-type inner groove inside, and a limit rod is inserted laterally inside the clamping block, the limit rod passing through the inner groove.

[0013] Furthermore, the inner side of the swing arm is provided with positioning holes in an arc shape at equal intervals, and the positioning holes penetrate the swing arm.

[0014] Furthermore, the end of the swing arm is provided with an assembly groove, in which a networked identification module is inserted, and a tightening bolt is threaded on the outer end of the assembly groove, the end of which can contact the identification module.

[0015] Compared with the prior art, the present invention has the following beneficial effects:

[0016] 1. In this device, by setting an identification module at the end of the swing arm, it is possible to detect in real time whether the transfer frame has completely detached from the robotic arm and fallen into the debonding tank after the robotic arm performs the debonding action and before lifting and resetting. When unsuccessful debonding is detected, feedback can be sent to the robotic arm control device in a timely manner, prompting the robotic arm to re-execute the debonding command. This avoids the problem of subsequent processing steps being interfered with due to the transfer frame not detaching correctly, and significantly improves the reliability of the robotic arm executing the debonding command. At the same time, the automatic detection of the debonding status by the identification module replaces the traditional manual visual inspection method, reducing the frequency of manual intervention. This not only saves a lot of manpower and time costs, but also effectively improves production efficiency and meets the needs of modern silicon wafer production for efficient and stable processing procedures.

[0017] 2. In this device, the movable arms at both ends of the main frame cooperate with the double-ended lead screws to adjust the position of the movable arms according to the length of different silicon wafer transfer racks, so that the device can be stably clamped on silicon wafer transfer racks of various specifications. At the same time, the swing arm can adjust the angle through the cooperation of the positioning hole and the limit rod. Combined with the flexible assembly of the identification module, it can be adapted to complete the installation on different types of silicon wafer transfer racks, meet diverse identification and detection needs, and enhance the practicality and versatility of the device. Attached Figure Description

[0018] Those skilled in the art will gain a better understanding of the present invention through the accompanying drawings, and the advantages of the present invention will be more clearly demonstrated. The drawings described herein are for illustrative purposes only for the selected embodiments and not for all possible implementations, and are not intended to limit the scope of the present invention.

[0019] In the attached diagram:

[0020] Figure 1 This is a three-dimensional structural diagram of the present invention.

[0021] Figure 2 This is an exploded structural diagram of the present invention.

[0022] Figure 3 This is a schematic diagram of the side section structure of the main frame of this utility model.

[0023] Figure 4 This is a schematic diagram of the connection structure between the movable arm and the swing arm of this utility model.

[0024] Figure 5 This is a schematic diagram of the cross-sectional structure of the end of the swing arm of this utility model.

[0025] In the diagram, the correspondence between component names and drawing numbers is as follows:

[0026] 1. Main frame;

[0027] 101. Adjustment groove; 102. Double-ended lead screw;

[0028] 2. Movable arm; 201. Clamping block;

[0029] 202. Inner groove; 203. Limiting rod;

[0030] 3. Swing arm; 301. Positioning hole;

[0031] 302, Assembly slot; 3021, Identification module; 3022, Tightening bolt. Detailed Implementation

[0032] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the described embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0033] Example 1: As shown in the attached document Figure 1 To be continued Figure 5 As shown:

[0034] This utility model provides an automatic identification device for degumming and material removal, including: a main frame 1; the main frame 1 is a rectangular long rod structure; movable arms 2 are provided at both ends of the main frame 1, the movable arms 2 are slidably engaged with the adjustment groove 101 on the side end of the main frame 1, and the movable arms 2 are threadedly connected to the double-ended lead screw 102 inside the main frame 1, the clamping block 201 outside the movable arm 2 is located at the side end of the main frame 1, the clamping block 201 is provided with a swing arm 3 inside, the swing arm 3 is rotatably installed in the inner groove 202 inside the clamping block 201, and the positioning hole 301 inside the swing arm 3 is penetrated by the limiting rod 203 inside the clamping block 201.

[0035] As a second embodiment of this application, based on embodiment 1, such as Figure 2 and Figure 3 As shown, the main frame 1 has adjustment slots 101 at both ends, and a double-ended lead screw 102 is rotatably installed inside the main frame 1, with both ends of the double-ended lead screw 102 extending into the adjustment slots 101; the main frame 1 is provided so that the movable arm 2 can be slidably installed at both ends of the main frame 1; the adjustment slots 101 are provided so that the movable arm 2 can be slidably installed on both sides of the main frame 1 through the adjustment slots 101; the double-ended lead screw 102 is provided so that the position of the movable arm 2 in the adjustment slots 101 can be adjusted by rotating the double-ended lead screw 102, thereby enabling the device to be clamped onto the silicon wafer transfer rack.

[0036] As a third embodiment of this application, based on embodiment 1, such as Figure 3 and Figure 4 As shown, a clamping block 201 perpendicular to the side end of the movable arm 2 is fixedly installed; the clamping block 201 has a through-type inner groove 202 inside, and a limiting rod 203 is horizontally inserted inside the clamping block 201, the limiting rod 203 passing through the inner groove 202; the movable arm 2 is provided, and by moving the movable arm 2 and cooperating with the clamping block 201, the device can be clamped onto the silicon wafer transfer rack; the inner groove 202 is provided, and the swing arm 3 can be rotatably installed onto the clamping block 201 through the inner groove 202; the limiting rod 203 is provided, and by passing the limiting rod 203 through the positioning hole 301, the swing arm 3 can be fixed in the inner groove 202.

[0037] By sliding the two sets of movable arms 2 into the adjustment groove 101 and controlling them with the double-headed screw 102, the position of the movable arms 2 can be adjusted according to the length of different silicon wafer transfer frames during use, which can better adapt to different silicon wafer transfer frames, thereby completing the clamping and fixing of this device on the silicon wafer transfer frame. The swing arm 3 is rotated and installed into the inner groove 202. By inserting the limit rod 203 into the positioning holes 301 at different positions, the fixing angle of the identification module 3021 can be flexibly adjusted according to practical needs, which can better complete the identification work.

[0038] As a fourth embodiment of this application, based on embodiment 1, such as Figure 5 As shown, the inner side of the swing arm 3 is provided with equidistant, arc-shaped positioning holes 301, which penetrate the swing arm 3. An assembly groove 302 is provided at the end of the swing arm 3. A networked identification module 3021 is inserted into the assembly groove 302, and a tightening bolt 3022 is threaded onto the outer end of the assembly groove 302. The end of the tightening bolt 3022 can contact the identification module 3021. The swing arm 3 allows adjustment of the installation angle of the identification module 3021. The positioning holes 301 allow the swing arm 3 to be fixed at different angles within the inner groove 202. The assembly groove 302 allows the identification module 3021 to be inserted into and fixed to the end of the swing arm 3. The identification module 3021 can detect and identify the unloading status of the silicon wafer transfer rack on the robotic arm. The tightening bolt 3022, when tightened, secures the identification module 3021 installed in the assembly groove 302.

[0039] The present invention inserts an identification module 3021 into the assembly slot 302 of the swing arm 3 and fixes it with a tightening bolt 3022. When the robotic arm is lifting to remove material, the identification module 3021 can identify and detect the removal status of the silicon wafer transfer frame. If the silicon wafer transfer frame has not completed the removal work on the robotic arm, the identification module 3021 can provide timely feedback to the robotic arm control device and make the robotic arm re-execute the removal command until the removal is completed.

[0040] The specific usage and function of this embodiment are as follows:

[0041] In this utility model, such as Figures 1 to 5As shown, the double-headed screw 102 inside the main frame 1 is rotated to allow the movable arm 2 to slide within the adjustment groove 101 to adjust its position until the clamping block 201 can stably clamp the silicon wafer transfer frame, thus fixing the device on the silicon wafer transfer frame. Next, according to the installation requirements, the swing arm 3 is rotated to a suitable angle, and the limiting rod 203 is inserted through the clamping block 201 and into the positioning hole 301 at the corresponding position of the swing arm 3 to fix the angle of the swing arm 3. Then, the identification module 3021 is inserted into the assembly groove 302 at the end of the swing arm 3, and the tightening bolt 3022 is tightened to press against the identification module 3021 to complete the fixation. When the robotic arm carries the transfer frame to the designated position in the degumming tank to perform the degumming action, the identification module 3021 immediately detects the degumming status of the silicon wafer transfer frame on the robotic arm. If the identification module 3021 detects that the transfer frame has not completely detached, it sends a signal to the robotic arm control device. After receiving the signal, the robotic arm re-executes the release action until the identification module 3021 detects that the transfer frame has successfully detached from the robotic arm.

[0042] The foregoing disclosure provides illustrations and descriptions, but is not intended to be exhaustive or to limit the embodiments to the precise forms disclosed. Modifications and variations can be made based on the above disclosure, or modifications and variations can be derived from the practice of the embodiments.

[0043] Even though specific combinations of features are recited in the claims or disclosed in the specification, these combinations are not intended to limit the disclosure of various embodiments. In fact, many of these features can be combined in ways not specifically recited in the claims and / or not specifically disclosed in the specification. Although each dependent claim listed below may depend directly on only one claim, the disclosure of various embodiments includes each dependent claim in combination with every other claim in the claim set.

Claims

1. An automatic identification device for degumming and material stripping, comprising: Main frame (1); the main frame (1) is a rectangular long rod structure; characterized in that movable arms (2) are provided at both ends of the main frame (1), the movable arms (2) are slidably engaged with the adjustment groove (101) at the side end of the main frame (1), and the movable arms (2) are threadedly connected to the double-headed screw (102) inside the main frame (1), the clamping block (201) outside the movable arm (2) is located at the side end of the main frame (1), the clamping block (201) is provided with a swing arm (3) inside, the swing arm (3) is rotatably installed in the inner groove (202) inside the clamping block (201), and the positioning hole (301) inside the swing arm (3) is penetrated by the limiting rod (203) inside the clamping block (201).

2. The automatic identification device for degumming and material stripping according to claim 1, characterized in that, The main frame (1) is provided with adjustment grooves (101) at both ends, and a double-ended screw (102) is rotatably installed inside the main frame (1), with both ends of the double-ended screw (102) extending into the adjustment groove (101).

3. The automatic degumming and degreasing identification device according to claim 1, characterized in that, The side end of the movable arm (2) is fixedly equipped with a clamping block (201) perpendicular to it.

4. The automatic identification device for degumming and material stripping according to claim 1, characterized in that, The clamping block (201) has a through-type inner groove (202) inside, and a limiting rod (203) is inserted horizontally inside the clamping block (201), the limiting rod (203) passing through the inner groove (202).

5. The automatic identification device for degumming and material stripping according to claim 1, characterized in that, The inner side of the swing arm (3) is provided with positioning holes (301) in an arc shape at equal intervals, and the positioning holes (301) penetrate the swing arm (3).

6. The automatic identification device for degumming and material stripping according to claim 1, characterized in that, The swing arm (3) has an assembly groove (302) at its end. A networked identification module (3021) is inserted inside the assembly groove (302). A tightening bolt (3022) is threaded onto the outer end of the assembly groove (302). The end of the tightening bolt (3022) can contact the identification module (3021).

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