A trolley for dismounting and mounting a motor of a semiconductor device

Abstract

The utility model relates to a technical field of semiconductor equipment maintenance device, especially a trolley for motor dismounting of semiconductor equipment. The trolley comprises a base, a supporting guide column, a lifting mechanism, a trapezoidal screw rod, a driving device, a sliding arm and a two-half type quick-mounting fixed clamp. The lifting mechanism is sleeved on the supporting guide column and can slide up and down along the supporting guide column, and is provided with an internal thread matched with the trapezoidal screw rod; the driving device comprises a hand-cranked disc and a first gear, and the first gear is engaged with a second gear at the top end of the trapezoidal screw rod to form a gear speed change mechanism; the sliding arm is provided on the lifting mechanism and can slide forward and backward through a pulley assembly; the two-half type quick-mounting fixed clamp is arranged at the front end of the sliding arm and is used for clamping and fixing the motor. The utility model aims at solving the problems of operation difficulty, safety risk and space limitation in the motor dismounting process and realizes safe and convenient motor dismounting operation.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment maintenance device technology, and in particular to a trolley for disassembling and assembling semiconductor equipment motors. Background Technology

[0002] As a core power component of semiconductor equipment, the disassembly and assembly of semiconductor equipment motors is particularly important. Currently, the disassembly and assembly of semiconductor equipment motors mainly rely on manual labor or simple tools. However, due to the large weight of the motor body and its auxiliary components, the disassembly and assembly process presents many safety hazards and operational difficulties.

[0003] The main problems with existing technologies are as follows: First, the total weight of the semiconductor equipment motor body and gearbox base structure is approximately 130 kg, posing a serious risk of crushing and injury during manual operation. Second, existing hoisting tools are inconvenient to use and difficult to operate, usually requiring multiple people to work together, resulting in low efficiency. Furthermore, in environments with confined spaces within semiconductor equipment, conventional hydraulic lifting vehicles are often ineffective. These problems severely impact the maintenance efficiency of semiconductor equipment and the safety of operators.

[0004] Therefore, there is an urgent need for a trolley specifically designed for the disassembly and assembly of motors in semiconductor equipment. This trolley should be characterized by its simple structure, convenient operation, and adaptability to working in confined spaces. It should be able to safely and efficiently complete the disassembly and assembly of motors, reduce the labor intensity of operators, and improve operational safety. Utility Model Content

[0005] The purpose of this utility model is to solve the problems of operational difficulties, safety risks and space limitations in the process of motor disassembly and assembly, and to achieve safe and convenient motor disassembly and assembly operations.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] According to a first aspect of this utility model, a trolley for assembling and disassembling a motor in a semiconductor device is provided, comprising: a base with movable wheels at its bottom; at least one support guide post fixedly disposed on the base; a lifting mechanism sleeved around the support guide post and slidable up and down along it; the lifting mechanism having an internal thread; a trapezoidal lead screw engaging with the internal thread of the lifting mechanism; a second gear fixedly mounted at the top end of the trapezoidal lead screw; a drive device including a hand crank and a first gear fixed at its bottom; the first gear meshing with the second gear at the top end of the trapezoidal lead screw to form a gear transmission mechanism; a sliding arm slidably disposed on the lifting mechanism via a pulley assembly disposed on the lifting mechanism; and a two-part quick-release clamp disposed at the front end of the sliding arm for clamping and fixing the motor.

[0008] Optionally, the pulley assembly includes an upper pulley and a lower pulley respectively disposed on the upper and lower sides of the sliding arm, and the upper and lower surfaces of the sliding arm respectively cooperate with the grooves of the pulleys.

[0009] Optionally, the trolley also includes a handle locking screw for locking the position of the sliding arm.

[0010] Optionally, the two-part quick-release clamp includes a front-end clamp and a rear-end clamp, which are quickly connected and separated by at least one positioning pin.

[0011] Optionally, the trolley may further include an deployable support structure, the support structure comprising: a side support foot rotatably disposed on the side of the base, the side support foot being fixed by a positioning pin; and / or, a front support rod slidably disposed at the front of the base, the bottom of the base being provided with a front support rod guide groove for receiving the front support rod, the front support rod being fixed by a positioning pin.

[0012] Optionally, the front end of the front support rod is connected to the leak-proof tray of the organic platform, and the bottom of the front end of the front support rod is also provided with a roller.

[0013] Optionally, the sliding arm is provided with a limit stop to restrict its forward and backward sliding stroke.

[0014] Optionally, the base is also provided with a push rod to facilitate pushing the entire trolley.

[0015] Optionally, the sliding arm is provided with a handle for easy pushing and pulling.

[0016] The advantages of this utility model are:

[0017] 1. The trolley is small in size and has a compact overall structure, making it suitable for various confined space working environments and solving the problem of not being able to use hydraulic lifting vehicles between equipment in confined spaces;

[0018] 2. Through the cooperation of trapezoidal lead screw and gear transmission mechanism, the motor can be lifted safely and reliably. Compared with the original hoisting tools, it is more convenient to operate and does not require multiple people to work together.

[0019] 3. The movable wheels at the bottom of the base and the design of the expandable support structure allow the trolley to move flexibly under load, making it easy to disassemble and assemble the motor, while ensuring operational stability.

[0020] 4. The two-part quick-release clamp enables rapid assembly and disassembly through positioning pins, and the sliding arm can be adjusted forward and backward, greatly improving the motor assembly and disassembly process and avoiding potential safety hazards. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 This is a schematic diagram of the structure of the trolley for disassembling and assembling semiconductor equipment motors according to the present invention;

[0023] Figure 2 This is a schematic diagram of the trolley for disassembling and assembling semiconductor equipment motors according to this utility model from another angle.

[0024] In the diagram: 1. Base; 2. Moving wheel; 3. Guide column; 4. Lifting mechanism; 5. Trapezoidal screw; 6. Hand crank turntable; 7. Sliding arm; 8. First gear; 9. Second gear; 10. Upper pulley; 11. Lower pulley; 12. Handle locking screw; 13. Front fixing clip; 14. Rear fixing clip; 15. Side support foot; 16. Front support rod; 17. Front support rod guide groove; 18. Roller; 19. Machine anti-leakage plate; 20. Limit stop; 21. Hand push rod; 22. Handle. Detailed Implementation

[0025] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0026] Example 1

[0027] like Figure 1 and Figure 2 As shown, a trolley for disassembling and assembling a motor in semiconductor equipment includes a base 1, a support guide column 3, a lifting mechanism 4, a trapezoidal lead screw 5, a drive device, a sliding arm 7, and a two-part quick-release fixing clip.

[0028] The base 1 is equipped with casters 2 at its bottom, allowing the entire assembly / disassembly trolley to move easily within the semiconductor equipment area. At least one support guide post 3 is fixedly mounted on the base 1, extending upwards perpendicularly to the surface of the base 1, serving both support and guidance functions. The support guide post 3 is made of high-strength alloy steel, possessing excellent load-bearing capacity and durability.

[0029] The lifting mechanism 4 is sleeved on the outside of the supporting guide column 3 and can slide up and down along the supporting guide column 3. The lifting mechanism 4 has an internal thread, which cooperates with the trapezoidal lead screw 5. The lifting mechanism 4 is made of high-strength material, which can withstand the weight of the motor and ensure stability during the lifting process.

[0030] The trapezoidal lead screw 5 engages with the internal thread of the lifting mechanism 4, and its rotation drives the lifting mechanism 4 to move up and down. A second gear 9 is fixedly installed at the top of the trapezoidal lead screw 5, and the second gear 9 meshes with the first gear 8 of the drive device to form a gear transmission mechanism. The trapezoidal lead screw 5 is manufactured with high-precision technology to ensure smooth and accurate lifting.

[0031] The drive unit includes a hand-cranked turntable 6 and a first gear 8 fixed to its bottom. The hand-cranked turntable 6 is located on the upper part of the disassembly and assembly trolley for easy operation. The first gear 8 meshes with a second gear 9 at the top of the trapezoidal lead screw 5, forming a gear transmission mechanism. By rotating the first gear 8 through the hand-cranked turntable 6, the second gear 9 is driven to rotate, which in turn drives the trapezoidal lead screw 5 to rotate, thus realizing the up-and-down movement of the lifting mechanism 4. The design of the gear transmission mechanism allows the operator to achieve a large lifting force with a small amount of force.

[0032] The sliding arm 7 is slidably mounted on the lifting mechanism 4 via a pulley assembly. The pulley assembly includes an upper pulley 10 and a lower pulley 11 respectively located on the upper and lower sides of the sliding arm 7, with the upper and lower surfaces of the sliding arm 7 engaging with the grooves of the pulleys. This design makes the sliding arm 7 move more smoothly back and forth, reducing friction and facilitating precise positioning. A limit stop 20 is provided on the sliding arm 7 to limit its forward and backward travel and prevent it from disengaging from the pulley assembly. A handle 22 is also provided on the sliding arm 7 for the operator to push and pull it to adjust its position.

[0033] The trolley also includes a handle locking screw 12 for locking the position of the sliding arm 7. After the sliding arm 7 is adjusted to the appropriate position, the sliding arm 7 can be fixed in that position by turning the handle locking screw 12 to prevent displacement during use.

[0034] A two-part quick-release clamp is located at the front end of the sliding arm 7 and is used to clamp and fix the motor. The two-part quick-release clamp includes a front fixing clamp 13 and a rear fixing clamp 14, which are quickly connected and separated by at least one positioning pin.

[0035] The trolley also includes an expandable support structure to improve the overall stability of the trolley. The support structure includes side support feet 15 rotatably mounted on the side of the base 1 and a front support rod 16 slidably mounted on the front of the base 1. The side support feet 15 are fixed by positioning pins and can be retracted when not in use and expanded to increase the support area when in use. The bottom of the base 1 has a front support rod guide groove 17 for storing the front support rod 16. The front support rod 16 is fixed by positioning pins and can be pulled out for use when needed and stored in the guide groove when not in use.

[0036] The front end of the front support rod 16 is connected to the leak-proof tray 19 of the organic platform, which is used to collect any oil or other liquids that may leak during disassembly and assembly to prevent environmental pollution. The bottom of the front end of the front support rod 16 is also equipped with a roller 18, which makes the front support rod 16 smoother during unfolding and retraction and reduces friction with the ground.

[0037] The base 1 is also equipped with a push rod 21, which facilitates the movement of the entire trolley. The push rod 21 is located at the rear of the base 1 and is at a moderate height, making it easy for the operator to hold.

[0038] During use, the operator first pushes the disassembly trolley near the semiconductor equipment motor, unfolds the side support feet 15 and the front support rod 16 to increase the stability of the trolley. Then, the height of the lifting mechanism 4 is adjusted using the hand crank turntable 6 so that the sliding arm 7 is at the same height as the motor. Next, the sliding arm 7 is pushed so that the two-part quick-release clamps are close to the motor, and the front clamp 13 and the rear clamp 14 are connected by positioning pins to clamp and fix the motor. After fixing, the handle locking screw 12 is tightened to lock the position of the sliding arm 7. Finally, the height of the lifting mechanism 4 is adjusted using the hand crank turntable 6 to lift the motor, thus completing the disassembly of the motor. Installing the motor is done by reversing the steps.

[0039] This disassembly and assembly trolley has a simple structure and is easy to operate, which can effectively reduce the labor intensity of operators and improve the efficiency and safety of disassembly and assembly of semiconductor equipment motors.

[0040] Example 2

[0041] The structure and function of a trolley for disassembling and assembling semiconductor equipment motors have been described in detail in Embodiment 1. This embodiment will introduce a method for disassembling and assembling semiconductor equipment motors using the disassembly and assembly trolley.

[0042] The method includes the following steps:

[0043] The disassembly / assembly trolley is moved to the vicinity of the motor to be disassembled / assembled, and its side support legs 15 and front support rod 16 are unfolded to stabilize the trolley. Specifically, the operator first pushes the disassembly / assembly trolley near the semiconductor device motor by holding the push rod 21 on the base 1. Then, the side support legs 15 on the side of the base 1 are rotated and unfolded, and secured with positioning pins. Next, the front support rod 16 is pulled out from the front support rod guide groove 17 at the front of the base 1 and secured with positioning pins. After unfolding these support structures, the disassembly / assembly trolley gains a larger support area, significantly improving stability and providing safety for subsequent operations.

[0044] The motor is secured using a two-piece quick-release clamp. In this step, the operator first separates the front clamp 13 and the rear clamp 14, then places them at the front and rear ends of the motor, respectively. Next, the front clamp 13 and the rear clamp 14 are connected by locating pins to form a complete clamping structure, firmly securing the motor. This quick-release design simplifies and speeds up the motor securing process, significantly improving work efficiency.

[0045] By rotating the hand crank 6, the first gear 8 at its bottom is driven. The first gear 8 drives the second gear 9 and the trapezoidal lead screw 5, which mesh with it, to rotate. This causes the lifting mechanism 4 with internal threads to rise and fall along the support guide post 3 and the rotating trapezoidal lead screw 5, thus raising and lowering the clamped motor. During this process, the operator can control the direction and height of the motor's lifting by rotating the hand crank 6 clockwise or counterclockwise. The gear transmission mechanism design allows the operator to achieve a large lifting force with a small amount of force, easily controlling the height of the motor.

[0046] Release the handle locking screw 12 and push or pull the sliding arm 7 to adjust the motor's forward and backward position to complete the motor's installation or removal. Once the motor has reached the appropriate height, the operator loosens the handle locking screw 12 to release the lock on the sliding arm 7. Then, using the handle 22 on the sliding arm 7, push or pull the sliding arm 7 forward and backward to precisely adjust the motor's horizontal position. Once the motor is aligned with the installation position on the equipment, the operator can install the motor onto the equipment; or, during disassembly, remove the motor from the equipment. After completing the operation, tighten the handle locking screw 12 again to lock the position of the sliding arm 7.

[0047] The above method simplifies, safes, and expedites the disassembly and assembly of semiconductor device motors. This method utilizes the various functions of the disassembly and assembly trolley, effectively reducing the workload of operators, avoiding potential safety hazards associated with traditional manual disassembly and assembly, while simultaneously improving work efficiency and reducing equipment maintenance costs.

[0048] The above description is merely a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the protection scope of the claims.

Claims

1. A trolley for assembling and disassembling motors in semiconductor equipment, characterized in that, include: The base has casters at its bottom; At least one supporting guide column is fixedly installed on the base; A lifting mechanism is sleeved on the support guide column and can slide up and down along it; the lifting mechanism is provided with internal threads. A trapezoidal lead screw engages with the internal thread of the lifting mechanism; a second gear is fixedly mounted at the top of the trapezoidal lead screw. The drive device includes a hand-cranked turntable and a first gear fixed to its bottom; the first gear meshes with a second gear at the top of the trapezoidal lead screw to form a gear transmission mechanism. The sliding arm is slidably mounted on the lifting mechanism via a pulley assembly mounted on the lifting mechanism; A two-part quick-release fixing clamp is located at the front end of the sliding arm and is used to clamp and fix the motor.

2. The trolley according to claim 1, characterized in that, The pulley assembly includes an upper pulley and a lower pulley respectively disposed on the upper and lower sides of the sliding arm, and the upper and lower surfaces of the sliding arm respectively cooperate with the grooves of the pulleys.

3. The trolley according to claim 1, characterized in that, The trolley also includes a handle locking screw for locking the position of the sliding arm.

4. The trolley according to claim 1, characterized in that, The two-part quick-release fixing clip includes a front fixing clip and a rear fixing clip, which are quickly connected and separated by at least one positioning pin.

5. The trolley according to claim 1, characterized in that, The trolley also includes a deployable support structure, which comprises: Side support feet are rotatably mounted on the side of the base, and the side support feet are fixed by positioning pins; And / or, a front support rod is slidably disposed at the front of the base, the bottom of the base is provided with a front support rod guide groove for receiving the front support rod, and the front support rod is fixed by a positioning pin.

6. The trolley according to claim 5, characterized in that, The front end of the front support rod is connected to the leak-proof plate of the organic platform, and a roller is also provided at the bottom of the front end of the front support rod.

7. The trolley according to claim 1, characterized in that, The sliding arm is equipped with a limit stop that restricts its forward and backward sliding stroke.

8. The trolley according to claim 1, characterized in that, The base is also equipped with a push rod to facilitate pushing the entire trolley.

9. The trolley according to claim 1, characterized in that, The sliding arm is equipped with handles for easy pushing and pulling.

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