A mobile cleaning device

Abstract

The utility model relates to a kind of mobile cleaning devices, comprising: support assembly, cleaning component and drive assembly, support assembly includes support frame, first sprocket and second sprocket, first sprocket and second sprocket are set in support frame top;First sprocket and second sprocket between first chain are provided;Cleaning component includes moving frame, spray frame and blow frame, moving frame is set in the top of support frame, spray frame and blow frame are set in the bottom of moving frame, blow frame is connected with first chain;Drive assembly includes mounting plate, third sprocket, fourth sprocket, drive shaft and drive cylinder, mounting plate is set in the top of support frame one side, third sprocket and fourth sprocket between second chain are provided, drive shaft connects third sprocket and first sprocket, the telescopic end of drive cylinder is connected with second chain.The utility model effectively avoids the erosion of cleaning fluid to transmission and driving component in the process of spraying, significantly improves equipment operation reliability and service life.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a mobile cleaning device. Background Technology

[0002] In the manufacturing process of semiconductor devices, the cleaning process of semiconductor workpieces is a critical step in ensuring device performance and yield. Its core requirement is to remove particulate impurities, chemical residues, and other contaminants from the workpiece surface through precise spraying of cleaning fluid, while avoiding damage to the workpiece itself. With the continuous improvement of semiconductor device integration, the requirements for the precision and uniformity of the cleaning process are becoming increasingly stringent. Therefore, moving cleaning methods are widely adopted, where the cleaning nozzles move back and forth or in multiple dimensions relative to the semiconductor workpiece along a preset trajectory to achieve comprehensive, thorough cleaning of the workpiece surface.

[0003] In existing technologies, the driving and guiding functions of mobile cleaning mainly rely on precision transmission components such as guide rails and lead screws. Specifically, this type of technical solution typically integrates the drive mechanism (such as a motor and reducer) with the guide rail and lead screw assembly on one side of the cleaning nozzle. The drive mechanism drives the lead screw to rotate, which in turn drives the slider that cooperates with the lead screw, along with the cleaning nozzle, to move linearly along the guide rail, ultimately completing the mobile cleaning action. During the cleaning process, the cleaning nozzle needs to continuously spray high-pressure cleaning fluid. The water mist and splashed cleaning fluid generated by the spray can easily come into direct contact with or penetrate the surfaces of precision components such as the guide rail, lead screw, and drive mechanism located on one side of the nozzle. The moisture in the cleaning fluid can cause oxidation and corrosion of the metal guide rail and lead screw, damaging the precision coating on the surface of the components, and thus causing problems such as transmission jamming and guidance deviation, affecting the accuracy of the cleaning position. Secondly, if the cleaning fluid seeps into the interior of the drive mechanism, it will corrode core components such as the motor windings and reducer gears, leading to frequent drive mechanism failures and significantly reducing the operational reliability of the entire cleaning equipment. Utility Model Content

[0004] Therefore, the technical problem to be solved by this utility model is to overcome the technical defects of the existing mobile cleaning device, such as unreasonable installation layout, easy damage to the drive mechanism caused by spray liquid, and low reliability.

[0005] To solve the above-mentioned technical problems, this utility model provides a mobile cleaning device, comprising: A support assembly includes a support frame, a first sprocket, and a second sprocket, the first sprocket and the second sprocket being disposed on the top of the support frame; a first chain is disposed between the first sprocket and the second sprocket, the first chain being disposed along the length direction of the support frame; A cleaning assembly, comprising a movable frame, a spray frame, and a blower frame, wherein the movable frame is disposed on top of the support frame and is slidably connected to the support frame, and the spray frame and the blower frame are disposed at the bottom of the movable frame, and the blower frame is connected to the first chain; A drive assembly includes a mounting plate, a third sprocket, a fourth sprocket, a drive shaft, and a drive cylinder. The mounting plate is disposed on one side of the top of the support frame, and its axial direction is along the length of the support frame. The third and fourth sprockets are axially disposed at both ends of the mounting plate, and a second chain is disposed between the third and fourth sprockets. The drive shaft passes through the third and first sprockets. The drive cylinder's axial direction is along the length of the support frame, and its telescopic end is connected to the second chain.

[0006] In one embodiment of this utility model, rollers are provided on both sides of the movable frame, and guide rails that cooperate with the rollers are provided on the support frame.

[0007] In one embodiment of this utility model, guide wheels are provided on both sides of the movable frame, and the guide wheels abut against the support frame.

[0008] In one embodiment of this utility model, a pressure block is provided between the telescopic end of the drive cylinder and the second chain.

[0009] In one embodiment of this utility model, a guide rail is provided on the surface of the mounting plate along the axial direction of the driving cylinder, and the pressure block is slidably connected to the guide rail.

[0010] In one embodiment of the present invention, the spray frame includes multiple spray pipes, which are connected end to end to form a spray frame, and nozzles are provided on the opposite side of any two spray pipes.

[0011] In one embodiment of the present invention, one of the spray pipes is provided with a water inlet.

[0012] In one embodiment of the present invention, the purge frame includes multiple air pipes connected end to end to form the purge frame, and an air nozzle is provided on the opposite side of any two air pipes.

[0013] In one embodiment of this utility model, one of the air pipes is provided with an air inlet.

[0014] The above-mentioned technical solution of this utility model has the following advantages compared with the prior art: The mobile cleaning device described in this utility model uses a drive cylinder to drive a multi-sprocket mechanism, thereby achieving smooth linear movement of the cleaning component along the length of the support frame. Secondly, by spatially separating the drive component and the cleaning component, the corrosion of the transmission and drive components by the cleaning liquid during the spraying process is effectively avoided, significantly improving the reliability and service life of the equipment. Attached Figure Description

[0015] To make the content of this utility model easier to understand, the present utility model will be further described in detail below with reference to specific embodiments and accompanying drawings. Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 for Figure 1 A schematic diagram of the structure of the central support component; Figure 3 for Figure 1 A schematic diagram of the structure of the cleaning component; Figure 4 for Figure 1 A schematic diagram of the structure of the drive component; Figure 5 for Figure 4 A schematic diagram of the local structure at point A in the middle; Explanation of reference numerals in the accompanying drawings: 1. Support assembly; 2. Cleaning assembly; 3. Drive assembly; 11. Support frame; 12. First sprocket; 13. Second sprocket; 14. First chain; 21. Moving frame; 22. Spray frame; 23. Blowing frame; 24. Roller; 25. Guide wheel; 31. Mounting plate; 32. Third sprocket; 33. Fourth sprocket; 34. Drive shaft; 35. Drive cylinder; 36. Second chain; 37. Pressure block; 38. Guide rail; 221. Spray pipe; 222. Nozzle; 223. Water inlet; 231. Air pipe; 232. Air nozzle; 233. Air inlet. Detailed Implementation

[0016] The present invention will be further described below with reference to the accompanying drawings and specific embodiments, so that those skilled in the art can better understand and implement the present invention. However, the embodiments are not intended to limit the present invention.

[0017] Reference Figures 1-5 As shown, this utility model discloses a mobile cleaning device, comprising: Support assembly 1 includes a support frame 11, a first sprocket 12 and a second sprocket 13, the first sprocket 12 and the second sprocket 13 are disposed on the top of the support frame 11; a first chain 14 is disposed between the first sprocket 12 and the second sprocket 13, the first chain 14 is disposed along the length direction of the support frame 11. Cleaning assembly 2 includes a movable frame 21, a spray frame 22, and a blowing frame 23. The movable frame 21 is disposed on the top of the support frame 11 and is slidably connected to the support frame 11. The spray frame 22 and the blowing frame 23 are disposed at the bottom of the movable frame 21, and the blowing frame 23 is connected to the first chain 14. The drive assembly 3 includes a mounting plate 31, a third sprocket 32, a fourth sprocket 33, a drive shaft 34, and a drive cylinder 35. The mounting plate 31 is disposed on one side of the top of the support frame 11, and the axial direction of the mounting plate 31 is arranged along the length direction of the support frame 11. The third sprocket 32 ​​and the fourth sprocket 33 are arranged at both ends of the mounting plate 31 along the axial direction of the mounting plate 31. A second chain 36 is disposed between the third sprocket 32 ​​and the fourth sprocket 33. The drive shaft 34 passes through the third sprocket 32 ​​and the first sprocket 12. The axial direction of the drive cylinder 35 is arranged along the length direction of the support frame 11, and the telescopic end of the drive cylinder 35 is connected to the second chain 36.

[0018] In the above structure, the entire drive assembly 3 is mounted on one side of the top of the support frame 11 via the mounting plate 31, forming a spatially separate layout from the cleaning assembly 2. During the spraying process, the splashing cleaning fluid is unlikely to come into contact with core transmission and drive components such as sprockets, chains, and drive cylinders 35, avoiding corrosion, jamming, or malfunctions caused by the cleaning fluid. This significantly reduces the equipment failure rate and improves overall operational reliability and service life. The spray frame 22 and the purging frame 23 are integrated at the bottom of the same movable frame 21, moving synchronously along the length of the support frame 11 with the movable frame 21, enabling continuous cleaning and purging operations. The spray rack 22 can uniformly spray cleaning fluid onto the workpiece surface, effectively removing surface impurities and chemical residues. The subsequent blowing rack 23 can promptly blow away residual cleaning fluid and tiny impurities on the workpiece surface, preventing water stains or secondary pollution, significantly improving workpiece cleanliness, and providing a high-quality surface condition for subsequent processes. No additional independent blowing equipment is required, simplifying the operation process. Specifically, the meshing transmission between the first sprocket 12 and the second sprocket 13 and the first chain 14, as well as the cooperation transmission between the third sprocket 32 ​​and the fourth sprocket 33 and the second chain 36, allows the drive shaft 34 to synchronously drive the first sprocket 12 to rotate. The first sprocket 12 drives the first chain 14 to rotate, synchronously driving the cleaning assembly 2 to move linearly along the length of the support frame 11. In addition, using the drive cylinder 35 as a power source, the connection between the second chain 36 and the extension end of the drive cylinder 35 can convert the linear motion of the drive cylinder 35 into the rotational motion of the third sprocket 32, which is then transmitted to the first sprocket 12 through the drive shaft 34, thereby driving the rotation of the first chain 14.

[0019] This invention drives the multi-sprocket mechanism through the drive cylinder 35, thereby enabling the cleaning component 2 to move smoothly and linearly along the length of the support frame 11. Secondly, by spatially separating the drive component 3 from the cleaning component 2, the corrosion of the transmission and drive components by the cleaning liquid during the spraying process is effectively avoided, significantly improving the reliability and service life of the equipment.

[0020] Furthermore, rollers 24 are provided on both sides of the movable frame 21, and guide rails 38 that cooperate with the rollers 24 are provided on the support frame 11; guide wheels 25 are also provided on both sides of the movable frame 21, and the guide wheels 25 abut against the support frame 11.

[0021] Specifically, by the rolling engagement of the rollers 24 on both sides of the movable frame 21 with the corresponding guide rails 38 of the support frame 11, the sliding friction between the movable frame 21 and the support frame 11 is converted into rolling friction, which greatly reduces the frictional resistance during the movement and improves the smoothness and response efficiency of the reciprocating movement of the cleaning component 2. At the same time, the guide wheels 25 added to both sides of the movable frame 21 abut against the support frame 11 to form a bidirectional limit, which can effectively limit the lateral deviation and swaying of the movable frame 21 during movement. Combined with the guiding effect of the guide rails 38 on the rollers 24, the straightness and stability of the movable frame 21 moving in the preset direction are significantly enhanced, avoiding spray position deviation caused by deviation.

[0022] Furthermore, a pressure block 37 is provided between the telescopic end of the drive cylinder 35 and the second chain 36, and a guide rail 38 is provided on the surface of the mounting plate 31 along the axial direction of the drive cylinder 35, and the pressure block 37 is slidably connected to the guide rail 38.

[0023] Specifically, the pressure block 37 added between the telescopic end of the drive cylinder 35 and the second chain 36 can achieve a stable connection between the cylinder driving force and the second chain 36, avoiding disengagement and slippage during power transmission, and ensuring the stability and reliability of power transmission. At the same time, the guide rail 38 set along the axial direction on the mounting plate 31 slides in cooperation with the pressure block 37, which can accurately guide the movement trajectory of the pressure block 37, limit the lateral deviation of the pressure block 37 during power transmission, and ensure that the pressure block 37 drives the second chain 36 to move smoothly along the axial direction of the mounting plate 31.

[0024] Furthermore, the spray frame 22 includes multiple spray pipes 221, which are connected end to end to form the spray frame 22. A nozzle 222 is provided on the opposite side of any two spray pipes 221, and a water inlet 223 is provided on one of the spray pipes 221.

[0025] Specifically, multiple spray pipes 221 are connected end to end to form a spray frame 22. The entire spray frame 22 has a rectangular frame structure, which allows the cleaning fluid to enter through the inlet 223 and be evenly distributed inside the spray frame 22, ensuring that the pressure of the cleaning fluid in each spray pipe 221 is consistent and avoiding differences in spraying effect caused by uneven local pressure. Secondly, the layout of setting nozzles 222 on opposite sides of any two spray pipes 221 (spray pipes 221 are set in pairs) allows the nozzles 222 to spray and cover the workpiece from different directions, expanding the spraying range while achieving cleaning without dead angles, significantly improving the comprehensiveness and cleanliness of semiconductor workpiece cleaning.

[0026] Furthermore, the purge frame 23 includes multiple air pipes 231, which are connected end to end to form the purge frame 23. An air nozzle 232 is provided on the opposite side of any two air pipes 231, and an air inlet 233 is provided on one of the air pipes 231.

[0027] Similarly, multiple air pipes 231 are connected end to end to form a blowing frame 23. The blowing frame 23 has a rectangular frame structure. After the gas enters through the air inlet 233, it can be evenly distributed inside to ensure that the air pressure in each air pipe 231 is consistent and to ensure the pressure uniformity of the airflow ejected from the air nozzle 232, avoiding unstable blowing effect due to air pressure difference. The layout of setting air nozzles 232 on opposite sides of any two air pipes 231 can blow and cover the workpiece surface from different directions, effectively removing residual cleaning liquid and small impurities on the workpiece surface after cleaning, avoiding the formation of water stains or secondary pollution by residual liquid, further improving the cleanliness of the workpiece, and providing a good workpiece surface condition for subsequent processes.

[0028] In summary, this utility model introduces a mobile cleaning device. This utility model drives the multi-sprocket mechanism through the drive cylinder 35, thereby realizing the smooth linear movement of the cleaning component 2 along the length direction of the support frame 11. Secondly, by spatially separating the drive component 3 from the cleaning component 2, the corrosion of the transmission and drive components by the cleaning liquid during the spraying process is effectively avoided, significantly improving the reliability and service life of the equipment.

[0029] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the protection scope of this invention.

Claims

1. A mobile cleaning device, characterized in that, include: A support assembly includes a support frame, a first sprocket, and a second sprocket, the first sprocket and the second sprocket being disposed on the top of the support frame; a first chain is disposed between the first sprocket and the second sprocket, the first chain being disposed along the length direction of the support frame; A cleaning assembly, comprising a movable frame, a spray frame, and a blower frame, wherein the movable frame is disposed on top of the support frame and is slidably connected to the support frame, and the spray frame and the blower frame are disposed at the bottom of the movable frame, and the blower frame is connected to the first chain; A drive assembly includes a mounting plate, a third sprocket, a fourth sprocket, a drive shaft, and a drive cylinder. The mounting plate is disposed on one side of the top of the support frame, and its axial direction is along the length of the support frame. The third and fourth sprockets are axially disposed at both ends of the mounting plate, and a second chain is disposed between the third and fourth sprockets. The drive shaft passes through the third and first sprockets. The drive cylinder's axial direction is along the length of the support frame, and its telescopic end is connected to the second chain.

2. The mobile cleaning device according to claim 1, characterized in that: The movable frame is equipped with rollers on both sides, and the support frame is equipped with guide rails that cooperate with the rollers.

3. The mobile cleaning device according to claim 2, characterized in that: The movable frame is also provided with guide wheels on both sides, and the guide wheels abut against the support frame.

4. The mobile cleaning device according to claim 1, characterized in that: A pressure block is provided between the telescopic end of the drive cylinder and the second chain.

5. The mobile cleaning device according to claim 4, characterized in that: The mounting plate surface is provided with a guide rail along the axial direction of the drive cylinder, and the pressure block is slidably connected to the guide rail.

6. The mobile cleaning device according to claim 1, characterized in that: The spray frame includes multiple spray pipes, which are connected end to end to form the spray frame. Nozzles are provided on the opposite side of any two spray pipes.

7. The mobile cleaning device according to claim 6, characterized in that: One of the spray pipes is provided with a water inlet.

8. The mobile cleaning device according to claim 1, characterized in that: The purge frame includes multiple air pipes connected end to end to form the purge frame, and an air nozzle is provided on the opposite side of any two air pipes.

9. The mobile cleaning device according to claim 8, characterized in that: One of the trachea is equipped with an air inlet.

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