Nitrogen storage cabinet

Abstract

The utility model provides a kind of nitrogen storage cabinet, comprising: box, air inlet pipe, cabinet, air outlet pipe and filter membrane;Box, air inlet pipe, cabinet and air outlet pipe are sequentially connected, and each part inside is jointly communicated into closed space;Chip is stored in cabinet, nitrogen in cabinet enters box by air outlet pipe;Filter membrane is set on the cross section inside box, for filtering nitrogen transported by cabinet;The nitrogen filtered by box enters cabinet by air inlet pipe.The utility model is cleaned in nitrogen in cabinet at the same time, namely, it is completed nitrogen deoxidation and dehumidification and harmful gas self-cleaning at the same time, nitrogen can also be recycled, waste phenomenon is avoided.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor devices, and in particular to a nitrogen storage cabinet. Background Technology

[0002] In recent years, 2.5D / 3D packaging has developed rapidly and has achieved large-scale mass production. Compared with traditional packaging products, 2.5D / 3D packaging has a very high product integration, and the value of a single product is thousands or even tens of thousands of times that of traditional packaging. However, in actual production processes, despite its high value, it has not been equipped with a more secure and protective nitrogen storage cabinet for semiconductor products.

[0003] Therefore, how to design a storage nitrogen cabinet with protection capabilities suitable for high-value semiconductor products has become one of the technical problems that urgently need to be solved by those skilled in the art.

[0004] It should be noted that the above introduction to the technical background is only for the purpose of providing a clear and complete explanation of the technical solutions of this utility model and facilitating understanding by those skilled in the art. It should not be assumed that these technical solutions are known to those skilled in the art simply because they have been described in the background section of this utility model. Utility Model Content

[0005] In view of the shortcomings of the prior art described above, the purpose of this utility model is to provide a nitrogen storage cabinet to solve the problem that the nitrogen storage cabinet in the prior art has weak protection function for high-value semiconductor products.

[0006] To achieve the above and other related objectives, this utility model provides a nitrogen storage cabinet, which includes at least: a box body, an inlet pipe, a cabinet body, an outlet pipe, and a filter membrane; the box body, the inlet pipe, the cabinet body, and the outlet pipe are connected in sequence, and the interiors of the box body, the inlet pipe, the cabinet body, and the outlet pipe are interconnected to form a closed space; the filter membrane is disposed on the cross-section of the interior of the box body; one end of the inlet pipe connected to the box body and one end of the outlet pipe connected to the box body are respectively located on both sides of the filter membrane; the end of the inlet pipe connected to the cabinet body is higher than the end of the outlet pipe connected to the cabinet body, and the end of the inlet pipe connected to the box body is higher than the end of the outlet pipe connected to the box body.

[0007] Optionally, the nitrogen storage cabinet further includes an auxiliary air inlet pipe, which is connected between an external nitrogen source and the cabinet body, with one end of the auxiliary air inlet pipe connected to the cabinet body being higher than the end of the air outlet pipe connected to the cabinet body.

[0008] Alternatively, the end of the air intake pipe connected to the cabinet and the end of the auxiliary air intake pipe connected to the cabinet are arranged side by side.

[0009] Optionally, the nitrogen storage cabinet further includes an electrostatic eliminator, which is located at the top of the cabinet.

[0010] Alternatively, the cabinet body is provided with a cabinet door on its side, and the electrostatic removal device is activated according to the opening and closing of the cabinet door.

[0011] Optionally, the filter membrane is any one or a combination of two or more of hydrophobic zeolite materials, activated carbon, or carbon molecular sieves.

[0012] Optionally, the filter membrane is disposed on a diagonal cross-section of the housing.

[0013] Optionally, the filter membrane is disposed on a cross section of the housing parallel to the bottom surface.

[0014] Optionally, the nitrogen storage cabinet also includes a sensor, which is disposed inside the cabinet and located on the side of the filter membrane near the air inlet pipe.

[0015] Alternatively, the sensor may be one or a combination of two or more of the following: a temperature sensor, a humidity sensor, an oxygen sensor, and a particulate matter detection sensor.

[0016] As described above, the nitrogen storage cabinet of this invention has the following beneficial effects:

[0017] 1. This utility model sets up a box outside the cabinet of the nitrogen storage cabinet and sets a filter membrane at the cross-section of the box so that the nitrogen in the cabinet is filtered, and completes the deoxidation, dehumidification and self-cleaning of nitrogen and harmful gases, and saves nitrogen resources through recycling.

[0018] 2. This utility model eliminates static electricity accumulated when chips are handled by humans by installing an electrostatic discharge device at the top of the nitrogen storage cabinet, thus protecting the product. Attached Figure Description

[0019] Figure 1 The diagram shown is a structural schematic of the nitrogen storage cabinet of this utility model.

[0020] Figure 2 The diagram shows the installation of the electrostatic removal device of this utility model in the cabinet.

[0021] Figure 3 The diagram shows the arrangement of the cabinet door on the side of the cabinet body according to this utility model.

[0022] Figure 4 This diagram shows the first possible arrangement of the filter membrane of this invention within the housing.

[0023] Figure 5 This diagram shows a second arrangement of the filter membrane in the housing according to the present invention.

[0024] Component designation explanation

[0025] 1 box

[0026] 2 intake pipes

[0027] 3 cabinets

[0028] 31 cabinet doors

[0029] 4 exhaust pipes

[0030] 5. Filter membrane

[0031] 6. Static electricity removal device

[0032] 7 Auxiliary intake pipe

[0033] 8 pipe fixing brackets Detailed Implementation

[0034] The following specific examples illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. This utility model can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this utility model.

[0035] Please see Figures 1-5 It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of this utility model. Therefore, the illustrations only show the components related to this utility model and are not drawn according to the actual number, shape and size of the components in the actual implementation. In the actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0036] One type of nitrogen cabinet uses an automatic refilling system. When the internal humidity is insufficient, it automatically replenishes nitrogen to meet the requirements. However, if volatile gases and harmful substances are present inside the cabinet, it cannot self-clean and may damage the stored chips. Furthermore, automatic refilling nitrogen cabinets require continuous nitrogen replenishment, resulting in relatively high costs. Additionally, during frequent chip handling, operators' hands come into frequent contact with the automatic refilling nitrogen cabinet itself, product trays, and magazines (also known as wafer cassettes or wafer holders), inevitably leading to static electricity buildup. If volatile organic compounds (VOCs) are generated during this process, there is a risk of contaminating the chips and affecting the product's electrical performance.

[0037] Therefore, in order to ensure product safety, reduce product oxidation, and avoid electrostatic damage, this utility model proposes a nitrogen storage cabinet, the specific technical solution of which is as follows:

[0038] Example 1

[0039] like Figure 1 As shown, this embodiment provides a nitrogen storage cabinet, including: a box body 1, an inlet pipe 2, a cabinet body 3, an outlet pipe 4, and a filter membrane 5.

[0040] like Figure 1 As shown, the box 1, air inlet pipe 2, cabinet 3 and air outlet pipe 4 are connected in sequence, and the interior of box 1, air inlet pipe 2, cabinet 3 and air outlet pipe 4 are connected to form a closed space.

[0041] Specifically, in this embodiment, the cabinet 3 contains nitrogen gas for protecting the chip, which is stored inside the cabinet 3. One end of the exhaust pipe 4 is connected to the cabinet 3, and the other end is connected to the housing 1, for the purpose of transporting the nitrogen gas from the cabinet 3 to the housing 1. The housing 1 filters out impurities from the nitrogen gas through a filter membrane 5 installed therein. One end of the intake pipe 2 is connected to the housing 1, and the other end is connected to the cabinet 3, for the purpose of transporting the filtered nitrogen gas from the housing 1 to the cabinet 3. Furthermore, this embodiment allows for the recycling of nitrogen gas through filtration, ensuring the self-cleaning of nitrogen gas in the cabinet 3 while also saving nitrogen gas and reducing costs in semiconductor manufacturing.

[0042] Specifically, in this embodiment, since semiconductor product packages are generally large in size and have a larger contact area with the outside world, therefore... Figure 2 As shown, the nitrogen storage cabinet also includes an electrostatic discharge (ESD) device 6. The ESD device 6 is located at the top inside the cabinet 3 to broaden its coverage and ensure it covers the area where personnel may handle the chips. Further, as... Figure 3As shown, a cabinet door 31 is provided on the side of the cabinet 3. The electrostatic discharge device 6 is activated when the cabinet door 31 is open and deactivated when the cabinet door 31 is closed. The purpose is to ensure that the electrostatic discharge device 6 works normally when the chip is removed to eliminate accumulated static electricity and protect the product, and does not work when the chip is not removed to save resources. As an example, the electrostatic discharge device 6 uses a plasma fan. In practical applications, the specific type of electrostatic discharge device 6 is selected according to needs and is not limited to this embodiment.

[0043] like Figure 1 As shown, the filter membrane 5 is disposed on the cross-section inside the housing 1.

[0044] Specifically, in this embodiment, the filter membrane 5 is any one or a combination of two or more of hydrophobic zeolite materials, activated carbon, or carbon molecular sieves. Activated carbon or carbon molecular sieves have advantages such as large specific surface area, high adsorption capacity, and low cost, making them suitable for adsorbing VOCs in normal and low-humidity environments. Hydrophobic zeolite materials have advantages such as high hydrophobicity, high temperature resistance, and long lifespan. As an example, the filter membrane 5 can be ZSM-5 (Zeolite Socony Mobil-5, aluminosilicate zeolite molecular sieve). In practical applications, the specific material and combination of the filter membrane 5 can be selected according to needs, and are not limited to this embodiment. Furthermore, the filter membrane 5 is arranged in a cross-sectional form inside the housing 1. Volatile gases and harmful substances in the nitrogen gas received by the housing 1 can be filtered out after passing through the filter membrane 5. Figure 4 As shown, the filter membrane 5 is disposed on the cross-section between the diagonal vertices of the housing 1. This is to maximize the area of ​​the filter membrane 5 to filter out more impurities, such as... Figure 5 As shown, the filter membrane 5 is positioned on a cross-section parallel to the bottom surface inside the housing 1. This is to make the placement of the filter membrane 5 more convenient and stable. Furthermore, the nitrogen storage cabinet also includes a sensor. The sensor is located inside the housing 1 and on one side of the filter membrane 5, near the inlet pipe 2. This sensor is used to directly detect whether the filtered nitrogen meets the standards, allowing for timely troubleshooting of any problems with the nitrogen storage cabinet. As an example, the sensor may be one or a combination of two or more of a temperature sensor, humidity sensor, oxygen sensor, and particulate matter detection sensor. In practical applications, the specific type and combination of sensors are selected according to needs, and are not limited to this embodiment.

[0045] like Figure 1 As shown, the end of the air inlet pipe 2 connected to the housing 1 and the end of the air outlet pipe 4 connected to the housing 1 are located on both sides of the filter membrane 5, respectively. The end of the air inlet pipe 2 connected to the cabinet 3 is higher than the end of the air outlet pipe 4 connected to the cabinet 3; the end of the air inlet pipe connected to the housing is higher than the end of the air outlet pipe connected to the housing.

[0046] Specifically, in this embodiment, such as Figure 4 , Figure 5 As shown, one end of the inlet pipe 2 connected to the housing 1 and the other end of the outlet pipe 4 connected to the housing 1 are located on both sides of the filter membrane 5, respectively. This is to ensure that the filter membrane 5 effectively removes impurities from the nitrogen gas. Further, as... Figure 1 As shown, the end of the inlet pipe 2 connected to the cabinet 3 is higher than the end of the outlet pipe 4 connected to the cabinet 3. This is because common impurities in nitrogen are denser than nitrogen, such as benzene, toluene, and xylene among volatile organic compounds. Placing the outlet pipe 4 below the cabinet 3 ensures that impurities in the nitrogen are transported out to the greatest extent. Similarly, the end of the inlet pipe 2 connected to the box 1 is higher than the end of the outlet pipe 4 connected to the box 1 to ensure that the nitrogen transported to the cabinet 3 is free of impurities to the greatest extent possible. Furthermore, the nitrogen storage cabinet also includes an auxiliary air inlet pipe 7, which connects the external nitrogen source and the cabinet body 3. The end of the auxiliary air inlet pipe 7 connected to the cabinet body 3 is higher than the end of the outlet pipe 4 connected to the cabinet body 3. The purpose of the auxiliary air inlet pipe 7 is to automatically replenish nitrogen from the external nitrogen source to meet the minimum flow requirements of the nitrogen storage cabinet when the nitrogen flow rate of the inlet pipe 2 is insufficient. For ease of installation, the ends of the inlet pipe 2 and the auxiliary air inlet pipe 7 connected to the cabinet body 3 can be arranged side-by-side and secured by a pipe fixing bracket 8. In practical applications, the specific location of the auxiliary air inlet pipe 7 can be set as needed, and is not limited to this embodiment.

[0047] In summary, the nitrogen storage cabinet of this invention includes: a box body, an inlet pipe, a cabinet body, an outlet pipe, and a filter membrane; the box body, inlet pipe, cabinet body, and outlet pipe are connected sequentially, and the interiors of each part are interconnected to form a closed space; the chip is stored in the cabinet body, and nitrogen in the cabinet body enters the box body through the outlet pipe; the filter membrane is disposed on the cross-section inside the box body to filter the nitrogen transported by the cabinet body; the nitrogen filtered by the box body enters the cabinet body through the inlet pipe. This invention cleans the nitrogen in the cabinet body, simultaneously completing nitrogen deoxidation, dehumidification, and self-cleaning against harmful gases, while also allowing for nitrogen recycling, avoiding waste. Therefore, this invention effectively overcomes the various shortcomings of the prior art and has high industrial application value.

[0048] The above embodiments are merely illustrative of the principles and effects of this utility model and are not intended to limit the scope of this utility model. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of this utility model. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this utility model should still be covered by the claims of this utility model.

Claims

1. A nitrogen storage cabinet, characterized in that, The nitrogen storage cabinet includes at least: a box, an inlet pipe, a cabinet, an outlet pipe, and a filter membrane; The box, the air inlet pipe, the cabinet and the air outlet pipe are connected in sequence, and the interior of the box, the interior of the air inlet pipe, the interior of the cabinet and the interior of the air outlet pipe are connected to form a closed space. The filter membrane is disposed on the cross-section inside the housing; The end of the air inlet pipe connected to the cabinet and the end of the air outlet pipe connected to the cabinet are respectively located on both sides of the filter membrane; the end of the air inlet pipe connected to the cabinet is higher than the end of the air outlet pipe connected to the cabinet, and the end of the air inlet pipe connected to the cabinet is higher than the end of the air outlet pipe connected to the cabinet.

2. The nitrogen storage cabinet according to claim 1, characterized in that: The nitrogen storage cabinet also includes an auxiliary air inlet pipe, which is connected between an external nitrogen source and the cabinet body. The end of the auxiliary air inlet pipe connected to the cabinet body is higher than the end of the air outlet pipe connected to the cabinet body.

3. The nitrogen storage cabinet according to claim 2, characterized in that: The air intake pipe is connected to one end of the cabinet, and the auxiliary air intake pipe is connected to one end of the cabinet, which are arranged side by side.

4. The nitrogen storage cabinet according to claim 1, characterized in that: The nitrogen storage cabinet also includes an electrostatic discharge device, which is located at the top of the cabinet.

5. The nitrogen storage cabinet according to claim 4, characterized in that: The cabinet has a door on its side. The electrostatic discharge device is activated based on the opening and closing of the cabinet door.

6. The nitrogen storage cabinet according to any one of claims 1-5, characterized in that: The filter membrane is any one or a combination of two or more of the following: hydrophobic zeolite material, activated carbon, or carbon molecular sieve.

7. The nitrogen storage cabinet according to any one of claims 1-5, characterized in that: The filter membrane is disposed on the diagonal cross-section of the housing.

8. The nitrogen storage cabinet according to any one of claims 1-5, characterized in that: The filter membrane is disposed on a cross section of the housing parallel to the bottom surface.

9. The nitrogen storage cabinet according to any one of claims 1-5, characterized in that: The nitrogen storage cabinet also includes a sensor, which is located inside the cabinet and on the side of the filter membrane near the air inlet pipe.

10. The nitrogen storage cabinet according to claim 9, characterized in that: The sensor is one or a combination of two or more of the following: temperature sensor, humidity sensor, oxygen sensor, and particulate matter detection sensor.

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