Grounding substrate based on triangular distribution gasket and discharge mechanism for ozone generation

Abstract

The utility model discloses a grounding substrate and discharge mechanism for ozone generation based on triangular distribution strip gasket relates to ozone production technical field, this grounding substrate includes the substrate main part, is equipped with the discharge cavity for ionizing oxygen -containing gas on the substrate main part, still includes strip gasket, the ozone outlet hole is equipped with in the bottom center position of discharge cavity, a plurality of strip gaskets are distributed in the triangle around ozone outlet hole, and the end between adjacent strip gaskets is provided with the ventilation interval. The utility model discloses through the air inlet hole of tangential setting makes the oxygen -containing gas that enters the discharge cavity form rotating vortex, and the rotating vortex forms the ventilation interval when passing through the triangle area each end point that strip gasket surrounds, and it is convenient to form complex three -dimensional turbulence, effectively realizes airflow high -efficient even diffusion and covers entire discharge area, guarantees the gas residence time, and it is convenient to get the electric field full effect.

Description

Technical Field

[0001] This utility model relates to the field of ozone production technology, and in particular to a grounding substrate based on triangularly distributed strip pads and a discharge mechanism for ozone generation. Background Technology

[0002] Ozone plays multiple roles in semiconductor manufacturing processes. For example, ozone is an excellent precursor in the ALD (Alternating Discharge) process. When depositing high-dielectric-constant materials or metal oxides, ozone provides a sufficient oxygen source to ensure accurate stoichiometry, high purity, good density, and controllable growth rate of the thin film. Therefore, ozone generation devices are required in semiconductor manufacturing processes.

[0003] Ozone generating devices generally mainly include a discharge mechanism. The discharge mechanism discharges oxygen-containing gas to produce ozone for use in semiconductor manufacturing. Existing ozone generating discharge mechanisms consist of conductive plates, ceramic separators, ceramic pads, tungsten plates, and base plates arranged sequentially from top to bottom. The tungsten plate and base plate form the grounding electrode. The ceramic pads are generally arranged in multiple circular pieces, distributed between the tungsten plate and the conductive plate or the dielectric plate below the conductive plate. They support the conductive plate and facilitate the formation of a discharge gap between the tungsten plate and the conductive plate, allowing the incoming oxygen-containing gas to react and generate ozone.

[0004] The shortcomings of existing ozone generation discharge mechanisms are as follows: Because the existing discharge mechanisms use multiple ceramic gaskets as supports at the edge of the discharge gap between the conductive plate and the grounding electrode, they only serve a supporting function. After oxygen-containing gas is directly injected into the discharge gap through the pipe, it cannot be effectively guided to flow and diffuse evenly. Most of the gas tends to flow directly from the inlet to the outlet via the shortest path, resulting in a short residence time and insufficient ionization by the electric field in the discharge gap. Furthermore, the airflow into the discharge gap is disordered and unevenly distributed due to the lack of effective guidance, easily creating dead zones. This affects the uniformity of ozone generation concentration and reduces generation efficiency. Utility Model Content

[0005] The purpose of this invention is to provide a grounding substrate based on triangularly distributed strip pads and a discharge mechanism for ozone generation, so as to solve the technical problem in the prior art that the discharge mechanism is not convenient to allow oxygen-containing gas to pass through the entire discharge gap fully and evenly, the residence time is short, and the uniformity of ozone generation concentration is affected.

[0006] The technical problem to be solved by this utility model can be achieved through the following technical solution: A grounding substrate based on triangularly distributed strip pads includes a substrate body, on which a discharge cavity for ionizing oxygen-containing gas is formed; and also includes strip pads. Multiple strip-shaped pads are provided and fixedly disposed within the discharge cavity. An ozone outlet is provided at the center of the bottom of the discharge cavity. The multiple strip-shaped pads are distributed in a triangular pattern around the ozone outlet. A ventilation gap is provided between the ends of adjacent strip-shaped pads. An air inlet is provided tangentially on the inner wall of the discharge cavity for oxygen-containing gas to enter.

[0007] Preferably, multiple air inlets are provided and are equidistantly distributed along the circumferential sidewall of the inner ring of the discharge cavity.

[0008] Preferably, the substrate body is a stainless steel structure.

[0009] Preferably, the height of the strip-shaped pad is equal to the depth of the discharge cavity.

[0010] Preferably, the discharge cavity is a cylindrical cavity.

[0011] An ozone generation discharge mechanism, including a grounding substrate based on triangularly distributed strip pads.

[0012] The beneficial effects of this utility model are: 1. This utility model uses tangentially arranged air inlets to create a rotating vortex of oxygen-containing gas entering the discharge cavity. When the rotating vortex passes through the ventilation gaps formed at each end of the triangular region surrounded by strip-shaped pads, part of the airflow is linearly guided by the corresponding strip-shaped pads to the next ventilation gap, colliding with the corresponding airflow. Another part of the airflow enters the triangular region through the current ventilation gap and, due to the spatial limitation and guidance effect inside the triangular region, collides with the airflow entering from other ventilation gaps at different positions. This facilitates the formation of complex three-dimensional turbulence, effectively achieving efficient and uniform diffusion of airflow to cover the entire discharge area, while ensuring the gas residence time, facilitating the full effect of the electric field, and improving the uniformity and efficiency of ozone generation.

[0013] 2. The strip-shaped gaskets of this utility model are triangularly distributed and can provide linear support, which can effectively stabilize the dielectric plates and conductive sheets stacked in the discharge mechanism and prevent deformation. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the overall structure of the grounding substrate based on triangularly distributed strip pads in this utility model; Figure 2 This is a schematic diagram showing the relative positions of the substrate body, conductive sheet, and strip-shaped pad in this utility model. Figure 3 This is a schematic diagram of the overall structure of the discharge mechanism for ozone generation in this utility model; Figure 4This is a schematic diagram of the overall structure of the discharge mechanism after the cooling plate is assembled in this utility model.

[0015] Explanation of reference numerals in the attached figures: 1. Conductive sheet; 2. Power cord; 3. Gas supply pipe; 4. Dielectric board; 5. Substrate body; 6. Discharge cavity; 7. Strip gasket; 8. Ozone outlet; 9. Cooling plate; 10. Air inlet; 11. Through hole; 12. Ventilation gap. Detailed Implementation

[0016] The specific embodiments of this utility model are described in detail below, but it should be understood that the protection scope of this utility model is not limited to the specific embodiments.

[0017] Example 1

[0018] like Figures 1-2 As shown, a grounding substrate based on triangularly distributed strip pads is used to install in an ozone generation discharge mechanism used in semiconductor manufacturing processes. The grounding substrate serves as a grounding electrode and is grounded through a wire. A potential difference can be generated between it and the conductive sheet 1 of the ozone generation discharge mechanism, which facilitates ozone generation through discharge. The grounding substrate includes a substrate body 5, which is a conductive metal body and grounded through a wire. A discharge cavity 6 for ionizing oxygen-containing gas is formed on the substrate body 5. Under the operation of the entire ozone generation discharge mechanism, the discharge cavity 6 generates an alternating electric field. This alternating electric field acts on the oxygen-containing gas in the discharge cavity 6, causing the oxygen molecules to ionize and form plasma. The oxygen molecules decompose into oxygen atoms, which then combine with undecomposed oxygen molecules to generate ozone. The grounding substrate also includes strip-shaped pads 7, of which multiple strip-shaped pads 7 are fixedly disposed within the discharge cavity 6. An ozone outlet 8 is provided at the center of the bottom of the discharge cavity 6. The multiple strip-shaped pads 7 are distributed in a triangular pattern around the ozone outlet 8. A ventilation gap 12 is provided between the ends of adjacent strip-shaped pads 7, and a certain gap is maintained between the end of each strip-shaped pad 7 and the inner sidewall of the discharge cavity 6. This gap can be designed based on the air pressure, the size of the discharge cavity 6, and the size of the strip-shaped pads 7. An air inlet 10 for oxygen-containing gas is tangentially provided on one inner wall of the discharge cavity 6. When the air inlet 10 sends airflow into the discharge cavity 6, the airflow first flows along the inner wall of the discharge cavity 6, which facilitates the formation of a rotating vortex. It should be noted that, in order to facilitate the tangential delivery of airflow, the air inlet 10 can be set as a short protruding conduit.

[0019] When oxygen-containing gas enters the discharge cavity 6 tangentially through the air inlet 10, it flows smoothly along the outer annular flow channel formed between the inner wall of the discharge cavity 6 and the triangularly distributed strip-shaped gaskets 7, forming a rotating vortex. This rotating vortex is separated by the ends of the corresponding strip-shaped gaskets 7 as it passes through each ventilation gap 12. A portion of the airflow is linearly guided by the corresponding strip-shaped gasket 7 and flows outwards to the outside of the next ventilation gap 12, where it collides with the airflow passing through the next ventilation gap 12, generating turbulence or vortices. Another portion of the airflow passes through the ventilation gap 12 and enters the strip-shaped gaskets. Within the triangular area enclosed by 7, under the guidance of the internal space of the triangularly distributed strip-shaped gaskets 7, the airflow entering from other different ventilation gaps 12 collides to generate turbulence or eddies, thus facilitating the formation of complex three-dimensional turbulence. This effectively prolongs the residence time of all gases passing through the discharge area, enabling efficient and uniform diffusion of airflow to cover the entire discharge area. This facilitates the full effect of the electric field, which is beneficial to improving the uniformity and efficiency of ozone generation and ensuring sufficient ozone generation. The ozone outlet 8 at the center efficiently collects the ozone generated from the edge to the center of the discharge cavity 6.

[0020] In some specific embodiments of this example, the number of strip pads 7 can also be set to a multiple of three. As long as the overall distribution is triangular, multiple strip pads 7 can be linearly and equidistantly distributed on each side of the triangle.

[0021] In some other specific embodiments of this example, in order to facilitate the formation of vortex effect, multiple air inlets 10 may be provided and distributed equidistantly along the circumferential sidewall of the inner ring of the discharge cavity 6.

[0022] In some specific embodiments of this example, the substrate body 5 is a stainless steel structure that is conductive.

[0023] In some specific embodiments of this example, the strip-shaped pad 7 and the substrate body 5 are an integrated metal structure, which can be stamped in one go by a stamping process. This makes it easier to ensure that the strip-shaped pad 7 is of uniform size and to facilitate the support of the dielectric plate 4 and conductive sheet 1 of the discharge mechanism by the strip-shaped pad 7, ensuring that the discharge cavity 6 is uniform and improving discharge efficiency and stability. Compared with the existing multiple ceramic pads for support, this avoids problems such as ceramic debris. In addition, the integrated strip-shaped pad 7 and the substrate body 5 are made of the same material, which also facilitates the provision of a heat dissipation path with extremely low thermal resistance.

[0024] In addition, when the strip pad 7 is a metal structure, in order to avoid short circuit to ground of the high voltage electrode, a through hole 11 with the same shape as the strip pad 7 is opened on the conductive sheet 1 of the discharge mechanism.

[0025] In some other specific embodiments of this example, the strip-shaped gasket 7 may also be a non-metallic material, such as a Teflon material. If it is made of a non-metallic material, then there is no need to open a through hole 11 on the conductive sheet 1 of the discharge mechanism.

[0026] In some specific embodiments of this example, the height of the strip-shaped pad 7 may be equal to the depth of the discharge cavity 6.

[0027] In some specific embodiments of this example, the discharge cavity 6 is a cylindrical cavity, which facilitates the formation of a rotating vortex by the gas entering.

[0028] Example 2

[0029] refer to Figure 3 As shown, a discharge mechanism for ozone generation includes a conductive sheet 1, a dielectric plate 4, a gas supply pipe 3, and a grounding substrate as described in Embodiment 1. A power line 2 is electrically connected to one side of the conductive sheet 1, which energizes the conductive sheet 1. The dielectric plate 4 is disposed between the conductive sheet 1 and the substrate body 5 of the grounding substrate. The dielectric plate 4 is a ceramic sheet, but other insulating materials can also be selected according to actual needs. The gas supply pipe 3 is connected to the air inlet 10 and is used to transport oxygen-containing gas, allowing the oxygen-containing gas to enter the discharge cavity 6 through the air inlet 10. Here, the gas supply pipe 3 avoids the dielectric plate 4 and is connected to the edge of the substrate body 5. It should be noted that the diameter of the dielectric plate 4 is larger than the diameter of the discharge cavity 6, so that the edge of the dielectric plate 4 can be supported on the edge of the discharge cavity 6. The diameter of the conductive sheet 1 is smaller than the diameter of the discharge cavity 6, ensuring that the electric field is effectively generated in the discharge cavity 6.

[0030] The specific principle behind ozone generation is as follows: When high-voltage electricity is applied to the conductive plate 1 through the power line 2, the current cannot flow directly to the grounding electrode due to the obstruction of the dielectric plate 4. Charge accumulates on the side of the dielectric plate 4 closest to the conductive plate 1; this accumulated charge induces an opposite charge on the other side of the dielectric plate 4. This generates an alternating electric field that acts on the discharge cavity 6 filled with oxygen-containing gas. The alternating electric field ionizes the oxygen molecules in the discharge cavity 6, forming plasma. Oxygen molecules decompose into oxygen atoms, which then combine with undecomposed oxygen molecules to generate ozone. In addition, since the height of the strip-shaped pad 7 is equal to the depth of the discharge cavity 6 and is triangularly distributed, it is convenient to provide stable and effective support for the dielectric plate 4 and conductive sheet 1 stacked above.

[0031] Example 3

[0032] Based on Example 2, and referring to Figure 4To ensure the normal operation of the entire discharge mechanism, cooling plates 9 can be installed on both the upper and lower sides of the entire discharge mechanism to dissipate the heat generated during the ozone generation process. In addition, a layer of dielectric material can be installed above the conductive sheet 1, and a ceramic partition can be installed above the dielectric material. A cylindrical sleeve of matching size can also be fixed between the upper and lower cooling plates 9 to fix and limit the internal dielectric material, conductive sheet 1, grounding substrate and other components, ensuring that the whole is effectively pressed together.

[0033] To facilitate understanding of the embodiments of this solution by those skilled in the art, the working principle of this solution will now be briefly explained in conjunction with specific application scenarios: The tungsten plate and ceramic pads of the original discharge mechanism are removed, so that the substrate body 5 is made of conductive metal material and grounded through a wire, so as to facilitate the generation of a voltage difference between it and the conductive sheet 1, and facilitate the generation of an electric field in the discharge cavity 6. At the same time, multiple strip-shaped pads 7 are triangularly distributed in the discharge cavity 6. When the conductive sheet 1 and the dielectric plate 4 are pressed onto the substrate body 5 in sequence, they can be effectively supported by the triangularly distributed strip-shaped pads 7. Then, oxygen-containing gas is supplied into the discharge cavity 6 through the gas supply pipe 3. The oxygen-containing gas enters the discharge cavity 6 through the air inlet 10 and energizes the conductive sheet 1. When oxygen-containing gas enters the discharge cavity 6 tangentially through the air inlet 10, it flows smoothly along the outer annular flow channel formed between the inner wall of the discharge cavity 6 and the triangularly distributed strip-shaped gaskets 7, forming a rotating vortex. This rotating vortex is separated by the end of the corresponding strip-shaped gasket 7 when passing through each ventilation gap 12. A portion of the airflow is linearly guided by the corresponding strip-shaped gasket 7 and flows outwards to the outside of the next ventilation gap 12, where it collides with the airflow passing through the next ventilation gap 12, generating turbulence or vortices. Another portion of the airflow passes through the ventilation gap 12 and enters the strip-shaped gaskets. Within the triangular area enclosed by the strip 7, and under the guidance and constraint of the internal space of the triangularly distributed strip pads 7, the airflow entering from other different ventilation gaps 12 collides to generate turbulence or eddies, thus facilitating the formation of complex three-dimensional turbulence. This effectively prolongs the residence time of all gases passing through the discharge area, enabling efficient and uniform diffusion of airflow to cover the entire discharge area. This facilitates the full effect of the electric field, which is beneficial to improving the uniformity and efficiency of ozone generation and ensuring sufficient ozone generation. The ozone outlet 8 at the center efficiently collects the ozone generated from the edge to the center of the discharge cavity 6.

[0034] The above-disclosed embodiments are only a few specific examples of the present utility model. However, the embodiments of the present utility model are not limited thereto. Any changes that can be conceived by those skilled in the art should fall within the protection scope of the present utility model.

Claims

1. A grounding substrate based on triangularly distributed strip pads, comprising a substrate body (5), wherein a discharge cavity (6) for ionizing oxygen-containing gas is formed on the substrate body (5); characterized in that, It also includes strip gaskets (7); Multiple strip-shaped pads (7) are provided and fixedly disposed in the discharge cavity (6). An ozone outlet hole (8) is opened at the bottom center of the discharge cavity (6). Multiple strip-shaped pads (7) are distributed in a triangle around the ozone outlet hole (8). A ventilation gap (12) is provided between the ends of adjacent strip-shaped pads (7). An air inlet hole (10) for oxygen-containing gas to enter is provided tangentially on the inner wall of the discharge cavity (6).

2. The grounding substrate based on triangularly distributed strip pads according to claim 1, characterized in that, The air inlet (10) is provided in multiple locations and is distributed equidistantly along the inner ring sidewall of the discharge cavity (6).

3. The grounding substrate based on triangularly distributed strip pads according to claim 1, characterized in that, The substrate body (5) is a stainless steel structure.

4. The grounding substrate based on triangularly distributed strip pads according to claim 1, characterized in that, The height of the strip-shaped pad (7) is equal to the depth of the discharge cavity (6).

5. The grounding substrate based on triangularly distributed strip pads according to claim 1, characterized in that, The discharge cavity (6) is a cylindrical cavity.

6. A discharge mechanism for ozone generation, characterized in that, The grounding substrate based on triangularly distributed strip pads as described in any one of claims 1 to 5.

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