High-temperature-resistant cylinder integrated buffer limiting module

Abstract

The utility model discloses a kind of high-temperature-resistant cylinder integrated type buffer limiting module in display panel manufacturing technical field, including cylinder limiting block, fluorine rubber strip, screw and gasket;The cylinder limiting block is rectangle, the cylinder limiting block is located between cylinder barrel and gate fixed structure, and the cylinder limiting block and cylinder piston rod do not interfere with each other;The fluorine rubber strip is cylindrical, the fluorine rubber strip bottom position is fixedly embedded in U-shaped groove, and the fluorine rubber strip top is protruded above cylinder limiting block;The gasket is equipped with two clamping grooves, the gasket is installed between cylinder barrel and cylinder limiting block, and every clamping groove of the gasket can be disassembled with the screw rod of a screw clamping. The utility model can correct cylinder stroke end control, eliminate structure interference, so as to fundamentally reduce mechanical wear and tear and particulate matter generation, improve equipment overall operation stability and life.

Description

Technical Field

[0001] This utility model relates to the field of display panel manufacturing technology, and in particular to a high-temperature resistant cylinder integrated buffer limit module. Background Technology

[0002] In the manufacturing process of display panels, the high-temperature annealing furnace is one of the key pieces of equipment, used to bake and cure organic film layers on the substrate. This equipment typically controls the loading and unloading of the substrate and the sealing of the furnace chamber by using cylinders on both sides to drive the opening and closing of the gate.

[0003] In existing technologies, the drive cylinders used in high-temperature annealing furnaces are mostly standard industrial cylinders, whose design and material selection are primarily geared towards conventional operating conditions. Under harsh environments characterized by prolonged high temperatures, frequent start-stop cycles, and mechanical deviations, the cylinder system exhibits the following inherent defects, directly exacerbating the generation of particulate contaminants: Inaccurate control at the end of the cylinder stroke leads to rigid interference and friction in the mechanical structure. Standard cylinders typically rely on internal buffers or simple mechanical blocks to limit the stroke end. However, in high-temperature environments, sensors are prone to failure, making it difficult for the system to accurately control the gate's closing position. This causes the cylinder to push the gate to its limit with full thrust, resulting in direct collision and continuous compression friction between the specially treated steel structures of the upper and lower gates. This rigid contact not only generates a large amount of metal shavings, becoming an initial source of particulate contamination, but the resulting impact vibrations can also loosen the connections of adjacent components, inducing the generation and diffusion of secondary particulate matter.

[0004] A mismatch between cylinder thrust and load leads to seal wear and oil leakage contamination. When the gate deforms due to high-temperature baking or deviates from its track, the closing resistance increases abnormally. At this time, the cylinder continues to output constant or excessive thrust, causing its piston rod seal ring to bear abnormal lateral forces and friction, accelerating wear. The worn seal ring leads to lubricating grease leakage from the cylinder; the leaked grease carbonizes and cokes in the high-temperature furnace chamber, forming highly adhesive oil particles. Furthermore, seal failure causes a decrease in cylinder thrust and vibration, making the gate closing process unstable and exacerbating the fretting wear between the specially treated steel structures of the upper and lower gates, generating even finer wear particles.

[0005] The cylinders lack adaptive buffering capabilities, causing overload and component damage to the transmission mechanism. Existing cylinders have limited buffering capacity and cannot absorb the additional stroke energy generated by gate deformation or misalignment. Excessive impact energy is transmitted through the piston rod to the connected piston and other limiting mechanisms, leading to premature piston fatigue, breakage, or even oil leakage. Leaking hydraulic oil or lubricant directly contaminates the furnace environment, and its volatiles and decomposition products form new gaseous and solid pollutants at high temperatures. Simultaneously, the gate sealing strip cracks and breaks due to uneven and excessive pressure, and its debris further exacerbates particulate pollution.

[0006] These contamination issues significantly jeopardize the baking process of organic films on substrates. Particles embedded in the film layer can affect pattern formation in subsequent photolithography processes, directly leading to a decrease in product yield. Therefore, there is an urgent need for a high-temperature resistant buffer limit solution that can be integrated with a cylinder to correct the end-stroke control of the cylinder, eliminate structural interference, and thereby fundamentally reduce mechanical wear and particulate matter generation, improving the overall operational stability and lifespan of the equipment.

[0007] Based on this, this utility model designs a high-temperature resistant cylinder integrated buffer limit module to solve the above problems. Utility Model Content

[0008] The purpose of this invention is to provide a high-temperature resistant cylinder integrated buffer limit module to correct the end control of the cylinder stroke, eliminate structural interference, thereby fundamentally reducing mechanical wear and particulate matter generation, and improving the overall operational stability and lifespan of the equipment.

[0009] This utility model is implemented as follows: a high-temperature resistant cylinder integrated buffer limit module, comprising: Cylinder limit block, fluororubber strip, screws and washers; The cylinder limiting block is rectangular and is located between the cylinder barrel and the gate fixing structure. The cylinder limiting block and the cylinder piston rod do not interfere with each other. The cylinder limiting block has a U-shaped groove and two countersunk holes at the top center. The U-shaped groove is a long groove and the U-shaped groove opens at the top of the cylinder limiting block. The U-shaped groove does not penetrate the cylinder limiting block. The two countersunk holes penetrate the cylinder limiting block vertically and are located at both ends of the U-shaped groove. The fluororubber strip is cylindrical, with its bottom fixedly fitted into a U-shaped groove, and its top protruding above the cylinder limit block. The cylinder limiting block is locked to the cylinder barrel by screws in the countersunk hole; The gasket has two snap-fit ​​grooves that penetrate vertically through the gasket and have an opening on one side. The two snap-fit ​​grooves correspond to the positions of the two countersunk holes. The gasket is installed between the cylinder barrel and the cylinder limit block. Each snap-fit ​​groove of the gasket can be detachably snapped into the screw of a screw.

[0010] Furthermore, both the cylinder limiting block and the gasket are integral structures made of aluminum oxide.

[0011] Furthermore, there are two cylinder limiting blocks, located on the left and right sides of the cylinder piston rod respectively, and the tops of the two cylinder limiting blocks are on the same plane.

[0012] Furthermore, there are several gaskets.

[0013] The beneficial effects of this utility model are: By adding a cylinder limit block between the gate's fixed structure and the cylinder, the cylinder's closing stroke is precisely controlled, completely eliminating direct collisions and continuous friction between the specially treated steel structures of the upper and lower gates. This prevents the generation of metal shavings at the source and significantly reduces the concentration of particulate contaminants within the equipment. The cylinder stops at a set position, preventing it from continuously outputting thrust to overcome deformation resistance, thus protecting the piston rod seal from abnormal wear and effectively preventing lubricating grease leakage and high-temperature carbonization contamination caused by seal failure. The fluororubber strip absorbs the impact energy at the closing end, preventing direct energy transfer to the mechanical piston and gate seal, thus preventing piston overload and oil leakage, and seal breakage due to compression, eliminating the source of oil and debris contamination. Adding a shim under the cylinder limit block ensures the consistency and repeatability of the gate's opening and closing movements, improving the equipment's operational stability and control reliability in high-temperature environments. By systematically reducing various contaminants such as mechanical wear particles, oil particles, and sealing debris, the risk of these contaminants adhering to the surface of the organic film layer on the substrate is significantly reduced, thereby directly improving the patterning yield of subsequent photolithography processes and demonstrating clear economic benefits. Attached Figure Description

[0014] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0015] Figure 1 This is a schematic diagram of the structure during installation of this utility model; Figure 2 This is a schematic diagram of the structure of this utility model; Figure 3 This is a schematic diagram of the structure of this utility model in use.

[0016] The attached diagram lists the components represented by each number as follows: 1-Cylinder limit block, 11-U-shaped groove, 12-Counterhead hole, 2-Fluoropolymer rubber strip, 3-Connector, 4-Gasket, 41-Snap-fit ​​groove, 5-Cylinder barrel, 51-Cylinder piston rod, 6-Gate fixing structure. Detailed Implementation

[0017] Please see Figures 1 to 3 As shown, this utility model provides a high-temperature resistant cylinder integrated buffer limit module. In order to better understand the above technical solution, the above technical solution will be described in detail below with reference to the accompanying drawings and specific embodiments.

[0018] In a specific embodiment of the technical solution of this utility model: A high-temperature resistant cylinder integrated buffer limit module includes a cylinder limit block 1, a fluororubber strip 2, screws, and a washer 4. The cylinder limiting block 1 is rectangular, and the cylinder limiting block 1 is located between the cylinder barrel 5 and the gate fixing structure 6, and the cylinder limiting block 1 and the cylinder piston rod 51 do not interfere with each other. The cylinder limiting block 1 has a U-shaped groove 11 and two countersunk holes 12 at the top center. The U-shaped groove 11 is a long groove and the U-shaped groove 11 is open at the top of the cylinder limiting block 1. The U-shaped groove 11 does not penetrate the cylinder limiting block 1. The two countersunk holes 12 penetrate the cylinder limiting block 1 vertically and are located at both ends of the U-shaped groove 11. The cross-section of the U-shaped groove is U-shaped.

[0019] The fluororubber strip 2 is cylindrical, and its bottom position is fixedly embedded in the U-shaped groove 11. The top of the fluororubber strip 2 protrudes above the cylinder limit block 1. The screw head is located in the countersunk hole 12, and the screw shaft is screwed into the cylinder barrel 5; the cylinder limit block 1 is locked to the cylinder barrel 5 by the bolt in the countersunk hole 12. The gasket 4 has two snap-fit ​​grooves 41, which vertically penetrate the gasket 4 and are open on one side. The two snap-fit ​​grooves 41 correspond to the two countersunk holes 12. The gasket 4 is installed between the cylinder barrel 5 and the cylinder limiting block 1. Each snap-fit ​​groove 41 of the gasket 4 can be detachably snapped into the screw of a screw. In cross-section, this utility model forms a clear hierarchy from top to bottom. The top layer is composed of a raised cylindrical fluororubber strip 2, which serves as the first contact surface. The first layer is responsible for absorbing impact energy through elastic deformation, reducing hard impact and friction; the second layer consists of rectangular cylinder limit blocks 2, which serve as the core load-bearing structure, providing stable support for the fluororubber strip 2, and ultimately achieving mechanical hard limiting through its hard top plane; the third layer uses countersunk holes 12 and screws to anchor the cylinder limit blocks 2 to the cylinder barrel 5, ensuring reliable connection while facilitating disassembly and adjustment; this "flexible-rigid-solid" composite structure has distinct layers, each performing its own function, and working together to achieve efficient buffering and precise limiting.

[0020] When the shim 4 is inserted into the screw rod, the side of the locking groove 41 fits against the screw rod, which can effectively prevent the shim 4 from rotating during the tightening process or when the equipment vibrates, ensuring its fixed position and guaranteeing the height stability after adjustment.

[0021] Preferably, both the cylinder limiting block 1 and the gasket 4 are integral structures made of alumina. Alumina has extremely high hardness, excellent wear resistance, superior high-temperature resistance, and good chemical stability. This enhances the long-term working capability of the entire module in high-temperature, high-wear, or corrosive environments; ensures that the cylinder limiting block 1 and the gasket 4 maintain dimensional stability at high temperatures and are not easily deformed, thereby maintaining precise limiting positions and gaps for a long time and extending the service life of this invention.

[0022] Preferably, there are two cylinder limiting blocks, located on the left and right sides of the cylinder piston rod 51 respectively, and the tops of the two cylinder limiting blocks 1 are on the same plane. The bidirectional symmetrical limiting structure allows the impact force to be more evenly distributed on the two cylinder limiting blocks 1, improving the structural stability and mechanical reliability of this invention during limiting.

[0023] Preferably, there are several shims 4. By increasing or decreasing the number of shims 4, the relative position between the cylinder limit block 1 and the cylinder barrel 5 can be finely adjusted, thereby accurately controlling the effective stroke end point of the cylinder piston rod 51. The shims 4 have various thicknesses, but all have the same shape, with a thickness range of 0.1-0.5 mm. Shims of different thicknesses can be added as needed. They are all inserted between the cylinder limit block 1 and the cylinder barrel 5 to raise the cylinder, facilitating the movement of the connecting piece 3.

[0024] In use, the two cylinder limit blocks 1 are fixed to the cylinder barrel 5 using countersunk holes 12 and screws. After confirming the special steel structure gap between the gates after closure, an alumina shim 4 is appropriately added between the cylinder limit blocks 1 and the cylinder barrel 5 to adjust the gap and gate level. A connector 3 is installed on the top of the cylinder piston rod 51, connecting the gate fixing structure 6 and the cylinder piston rod 51. The connector 3 does not contact the cylinder limit blocks 1, the fluororubber strip 2, or the shim 4. When the gate is fully closed, the top of the connector 3 is lower than the top of the fluororubber strip 2, ensuring that this invention achieves a two-stage buffering followed by limiting. During the protective action, as the gate gradually closes, the gate fixing structure 6 gradually contacts the fluororubber strip 2 downwards. The fluororubber strip 2 undergoes elastic deformation under pressure. When the top of the connector 3 is lower than the top of the fluororubber strip 2, the elastic deformation of the fluororubber strip 2 reaches its limit. By fully utilizing the buffering effect of this utility model, various contaminants such as mechanical wear particles, oil particles, and sealing debris are systematically reduced, significantly reducing the risk of them adhering to the surface of the organic film layer on the substrate. This directly improves the patterning yield of subsequent photolithography processes, resulting in clear economic benefits.

[0025] While specific embodiments of the present invention have been described above, those skilled in the art should understand that the specific embodiments described are merely illustrative and not intended to limit the scope of the present invention. Equivalent modifications and variations made by those skilled in the art in accordance with the spirit of the present invention should be covered within the scope of protection of the claims of the present invention.

Claims

1. A high-temperature resistant cylinder integrated buffer limit module, characterized in that, include: Cylinder limit block (1), fluororubber strip (2), screw and washer (4); The cylinder limiting block (1) is rectangular. The cylinder limiting block (1) is located between the cylinder barrel (5) and the gate fixing structure (6). The cylinder limiting block (1) and the cylinder piston rod (51) do not interfere with each other. The cylinder limiting block (1) has a U-shaped groove (11) and two countersunk holes (12) at the top center. The U-shaped groove (11) is a long groove and the U-shaped groove (11) is open at the top of the cylinder limiting block (1). The U-shaped groove (11) does not penetrate the cylinder limiting block (1). The two countersunk holes (12) penetrate the cylinder limiting block (1) vertically. The two countersunk holes (12) are located at the two ends of the U-shaped groove (11). The fluororubber strip (2) is cylindrical, and the bottom of the fluororubber strip (2) is fixedly embedded in the U-shaped groove (11). The top of the fluororubber strip (2) protrudes above the cylinder limit block (1). The cylinder limiting block (1) is locked to the cylinder barrel (5) by screws in the countersunk hole (12); The gasket (4) is provided with two snap-fit ​​grooves (41), which vertically penetrate the gasket (4) and have an opening on one side. The two snap-fit ​​grooves (41) correspond to the positions of the two countersunk holes (12). The gasket (4) is installed between the cylinder barrel (5) and the cylinder limit block (1). Each snap-fit ​​groove (41) of the gasket (4) can be detachably snapped with the screw of a screw.

2. The high-temperature resistant cylinder integrated buffer limit module according to claim 1, characterized in that: The cylinder limiting block (1) and the gasket (4) are both integral structures made of aluminum oxide.

3. The high-temperature resistant cylinder integrated buffer limit module according to claim 1, characterized in that: There are two cylinder limiting blocks, located on the left and right sides of the cylinder piston rod (51) respectively, and the tops of the two cylinder limiting blocks (1) are on the same plane.

4. The high-temperature resistant cylinder integrated buffer limit module according to claim 1, characterized in that: There are several gaskets (4).

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