Wafer surface foreign matter detection device for chip manufacturing

Abstract

The utility model provides a wafer surface foreign matter detection device for chip manufacturing relates to wafer detection technical field, including base, the base upper surface one side fixed mounting has riser, the riser one side fixed mounting has positioning frame. The utility model discloses when detection device is in non - working state, the staff drives screw thread post rotation through the hand wheel rotation, drives the moving plate to inboard along the installation groove, so that two arc -shaped blocks remove the main body position of optical imaging system, then the staff rotates the block, through the rotation biaxial screw rod, two arc -shaped blocks close and the inner wall and the main body outer wall are pasted, form annular sealing structure, then the staff promotes the moving block, makes the sliding block along the rubber column movement, makes the protective cover one end in the opening and sealing groove wear and tear cooperation, can all -round shield protection to the lens, avoids under non - working state lens and receives external force and collides and is damaged.

Description

Technical Field

[0001] This utility model relates to the field of wafer inspection technology, and more specifically, to a wafer surface foreign object detection device for chip manufacturing. Background Technology

[0002] In chip manufacturing, foreign object detection devices on the wafer surface are crucial for ensuring yield, and are typically implemented using high-resolution optical imaging systems. For example, the wafer inspection device proposed in publication number "CN217385235U" includes a base unit and an optical unit. The base unit includes a horizontal base and a column. The optical unit is connected to the column and is adapted to move in the X-axis, Y-axis, and Z-axis directions. The bottom surface of the horizontal base is flat, and a groove is formed in the center of the bottom surface. The area containing the groove is a negative pressure adsorption area, and the area of ​​the bottom surface of the horizontal base other than the groove is a positive pressure air flotation area. Positive pressure access holes and negative pressure access holes are respectively provided on the sides of the horizontal base.

[0003] However, in the above technical solution, the above detection device does not have a protective structure for the optical unit lens. When the equipment is not working for a long time, the optical lens is exposed to the working environment for a long time. Since the lens structure is relatively fragile and the workshop working environment is relatively complex, the lens is easily damaged by external impact when not working. Utility Model Content

[0004] The main purpose of this invention is to provide a wafer surface foreign object detection device for chip manufacturing, which can effectively solve the problem in the background technology that the detection device does not have a protective structure for the optical unit lens. When the device is not in operation for a long time, the optical lens is exposed to the working environment for a long time. Due to the relatively fragile lens structure and the relatively complex workshop working environment, the lens is easily damaged by external impact when not in operation.

[0005] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0006] A wafer surface foreign object detection device for chip manufacturing includes a base, a support frame fixedly installed on one side of the upper surface of the base, a positioning frame fixedly installed on one side of the support frame, a main body fixedly installed between the two sides of the inner wall of the positioning frame, and a lens provided at the lower end of the main body;

[0007] A support platform is fixedly installed in the middle of the upper surface of the base.

[0008] A mounting groove is provided through one side surface of the base, and a protective component for protecting the lens is provided in the mounting groove.

[0009] Preferably, the protective assembly includes two support frames, which are respectively fixedly installed on both sides of the inner wall of the mounting groove. A threaded column is rotatably installed between the two sides of the inner wall of one of the support frames. A movable plate is threaded on one side of the column. A vertical plate is fixedly installed on one upper surface of the movable plate. A sliding groove is opened through one side of the vertical plate. Two sliders are slidably arranged in the sliding groove. A crossbar is fixedly installed on one side of each of the two sliders. An arc-shaped block is fixedly installed at one end of each of the two crossbars.

[0010] A movable groove is provided through one side surface of the upright plate. A movable block is slidably disposed in the movable groove. A rubber column is fixedly installed between the two sides of the inner wall of the movable groove. The movable block is slidably disposed on one side of the rubber column. A protective cover is fixedly installed on one side of the movable block by a connecting frame.

[0011] One end of the threaded column passes through the corresponding support frame and is fixedly equipped with a handwheel;

[0012] Both of the arc-shaped blocks have sealing grooves on their lower surfaces;

[0013] Another support frame has a sliding rod fixedly installed between the two sides of its inner wall, and the movable plate is slidably disposed on one side of the sliding rod.

[0014] Preferably, a bidirectional threaded rod is rotatably installed between the two sides of the inner wall of the slide groove, and the two sliders are respectively threaded on both sides of the corresponding bidirectional threaded rod. One end of the bidirectional threaded rod passes through the vertical plate and is fixedly installed with a rotating block.

[0015] Preferably, limit plates are fixedly installed on both sides of the upper surface of the connecting frame.

[0016] Preferably, one of the limiting plates has a limiting stud threaded through one side surface, and a semi-circular block is fixedly installed at one end of the limiting stud;

[0017] Both crossbars have silicone sleeves fitted on one side of their shafts;

[0018] Another limiting plate has an insertion hole on one side surface.

[0019] Preferably, the lower surface of the movable plate is provided with a plurality of semi-circular grooves, and a rotating wheel is rotatably installed between the two sides of the inner wall of each semi-circular groove.

[0020] Compared with the prior art, the present invention has the following beneficial effects:

[0021] (1) When the detection device is not in operation, the operator rotates the handwheel to drive the threaded column to rotate, driving the moving plate to move inward along the mounting groove, so that the two arc blocks move to the main body of the optical imaging system. Then the operator rotates the rotating block, and by rotating the bidirectional threaded rod, drives the two sliders to move towards each other along the slide groove, so that the two arc blocks close and the inner wall fits against the outer wall of the main body, forming an annular sealing structure. Then the operator pushes the moving block, so that the slider moves along the rubber column, so that the protective cover at the opening end interlocks with the sealing groove. Under the combined action of the annular sealing structure and the protective cover, the lens can be protected in all directions, avoiding damage to the lens from external impact when it is not in operation. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the overall structure of a wafer surface foreign object detection device for chip manufacturing according to the present invention;

[0023] Figure 2 This is a side view of the foreign object detection device on the wafer surface for chip manufacturing according to the present invention.

[0024] Figure 3 This invention relates to a foreign object detection device for wafer surface in chip manufacturing. Figure 2 Schematic diagram of the cross-sectional structure at point AA;

[0025] Figure 4 This invention relates to a foreign object detection device for wafer surface in chip manufacturing. Figure 2 Schematic diagram of the cross-sectional structure at point BB;

[0026] Figure 5 This invention relates to a foreign object detection device for wafer surface in chip manufacturing. Figure 4 An enlarged schematic diagram of the structure at point A in the middle.

[0027] In the diagram: 1. Base; 2. Stand; 201. Positioning frame; 3. Main body; 4. Lens; 5. Support platform; 6. Mounting slot; 7. Protective components; 701. Support frame; 702. Threaded post; 703. Moving plate; 704. Upright plate; 705. Slide groove; 706. Slider; 707. Crossbar; 708. Arc block; 709. Moving groove; 710. Moving block; 711. Rubber post; 712. Connecting frame; 713. Protective cover; 714. Handwheel; 8. Two-way threaded rod; 9. Rotating block; 10. Limiting plate; 11. Limiting stud; 12. Semicircular block; 13. Silicone sleeve; 14. Insertion hole; 15. Rotating wheel. Detailed Implementation

[0028] The technical solutions of this utility model will be clearly and completely described below with reference to the embodiments of this utility model. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of this utility model.

[0029] like Figures 1-5 As shown, a wafer surface foreign object detection device for chip manufacturing includes a base 1, a support frame 2 is fixedly installed on one side of the upper surface of the base 1, a positioning frame 201 is fixedly installed on one side of the support frame 2, a main body 3 is fixedly installed between the two sides of the inner wall of the positioning frame 201, and a lens 4 is provided at the lower end of the main body 3.

[0030] A support platform 5 is fixedly installed in the middle of the upper surface of the base 1.

[0031] A mounting groove 6 is provided through one side surface of the base 1, and a protective component 7 for protecting the lens 4 is provided in the mounting groove 6.

[0032] The protective component 7 includes two support frames 701, which are fixedly installed on both sides of the inner wall of the mounting groove 6. A threaded column 702 is rotatably installed between the two sides of the inner wall of one of the support frames 701. A movable plate 703 is threaded on one side of the column body of the threaded column 702. A vertical plate 704 is fixedly installed on one side of the upper surface of the movable plate 703. A sliding groove 705 is opened through one side of the vertical plate 704. Two sliders 706 are slidably arranged in the sliding groove 705. A crossbar 707 is fixedly installed on one side of each of the two sliders 706. An arc-shaped block 708 is fixedly installed at one end of each of the two crossbars 707.

[0033] A movable groove 709 is provided through one side surface of the upright plate 704. A movable block 710 is slidably disposed in the movable groove 709. A rubber column 711 is fixedly installed between the two sides of the inner wall of the movable groove 709. The movable block 710 is slidably disposed on one side of the column body of the rubber column 711. A protective cover 713 is fixedly installed on one side of the movable block 710 through a connecting frame 712.

[0034] One end of the threaded column 702 passes through the corresponding support frame 701 and is fixedly mounted with a handwheel 714;

[0035] Both arc-shaped blocks 708 have sealing grooves on their lower surfaces;

[0036] Another support frame 701 has a slide rod 715 fixedly installed between the two sides of the inner wall, and a movable plate 703 is slidably disposed on one side of the slide rod 715.

[0037] A bidirectional threaded rod 8 is rotatably installed between the two sides of the inner wall of the slide 705. Two sliders 706 are respectively threaded on both sides of the corresponding bidirectional threaded rod 8. One end of the bidirectional threaded rod 8 passes through the vertical plate 704 and is fixedly installed with a rotating block 9.

[0038] When the detection device is not in operation, the operator rotates the handwheel 714 to rotate the threaded column 702, driving the moving plate 703 inward along the mounting groove 6, so that the two arc-shaped blocks 708 move to the position of the main body 3 of the optical imaging system. Then, the operator rotates the rotating block 9, which, by rotating the bidirectional threaded rod 8, causes the two sliders 706 to move towards each other along the sliding groove 705, so that the two arc-shaped blocks 708 close and their inner walls fit against the outer wall of the main body 3, forming an annular sealing structure. Then, the operator pushes the moving block 710, so that the sliders 706 move along the rubber column 711, so that the protective cover 713 is located at one end of the opening and interlocks with the sealing groove. With the combined action of the annular sealing structure and the protective cover 713, the lens 4 can be protected from all directions, preventing the lens 4 from being damaged by external impact when not in operation. When testing is required, the rotating block 9 is rotated in the reverse direction, then the protective cover 713 is moved down and the handwheel 714 is rotated in the reverse direction, causing the moving plate 703 to retract. This causes the protective cover 713 and the arc block 708 to move away from the lens 4 area simultaneously, allowing the optical unit of the lens 4 to freely perform testing tasks. The operator places the wafer on the support platform 5 and fixes it by negative pressure adsorption to ensure no displacement during the testing process. The lens 4 illuminates the wafer surface, capturing the microstructure and foreign objects on the wafer surface. The acquired images are transmitted to the built-in image processing module for real-time analysis. The analysis data is transmitted to the industrial control computer via wires, allowing the operator to easily grasp the testing data and accurately determine whether there are foreign objects on the wafer surface.

[0039] In another embodiment of this utility model, limit plates 10 are fixedly installed on both sides of the upper surface of the connecting frame 712.

[0040] By setting the limiting plate 10, after the protective cover 713 and the sealing groove are interlocked, the limiting plate 10 limits the crossbar 707, preventing the rotating block 9 from rotating due to unexpected external force, preventing the two arc blocks 708 from shifting, and ensuring the stability of the sealing structure.

[0041] In another embodiment of the present invention, a limiting stud 11 is provided through a thread on one side surface of one of the limiting plates 10, and a semi-circular block 12 is fixedly installed at one end of the limiting stud 11.

[0042] Both crossbars 707 have silicone sleeves 13 fitted on one side of their shafts;

[0043] Another limiting plate 10 has an insertion hole 14 on one side surface.

[0044] When the operator rotates the limiting stud 11, the semi-circular block 12 follows the limiting stud 11 and presses against the silicone sleeve 13. This ensures that the threaded section of the limiting stud 11 is not blocked by one end of the silicone sleeve 13 during its subsequent movement. When the semi-circular block 12 is inserted into the insertion hole 14, the limiting stud 11 can fit against the silicone sleeve 13, thereby limiting the movement of the moving block 710 and preventing the protective cover 713 from shifting downwards due to external force and losing its protective effect. After contacting the threaded section, the silicone sleeve 13 can fit against and protect the threaded structure, preventing the threaded structure from colliding with the crossbar 707 and causing damage to the threaded structure.

[0045] In another embodiment of this utility model, a plurality of semi-circular grooves are provided on the lower surface of the movable plate 703, and a rotating wheel 15 is rotatably installed between the two sides of the inner wall of each semi-circular groove.

[0046] When the movable plate 703 slides along the mounting groove 6, the roller 15 rolls into contact with the bottom of the groove, effectively reducing frictional resistance and ensuring that the opening and closing of the protective component 7 is smooth and stable. The auxiliary support design of the roller 15 can share the load of the movable plate 703, preventing it from deforming and jamming, while reducing the wear of the drive threaded column 702 and improving the overall durability of the mechanism.

[0047] The working principle of a wafer surface foreign object detection device used in chip manufacturing:

[0048] In use, when the detection device is not in operation, the operator rotates the handwheel 714 to drive the threaded column 702 to rotate, driving the moving plate 703 to move inward along the mounting groove 6, so that the two arc-shaped blocks 708 move to the position of the main body 3 of the optical imaging system. Then, the operator rotates the rotating block 9, which, by rotating the bidirectional threaded rod 8, causes the two sliders 706 to move towards each other along the sliding groove 705, so that the two arc-shaped blocks 708 close and their inner walls fit against the outer wall of the main body 3, forming an annular sealing structure. Then, the operator pushes the moving block 710, so that the sliders 706 move along the rubber column 711, so that the protective cover 713 at the opening end interlocks with the sealing groove. With the combined effect of the annular sealing structure and the protective cover 713, the lens 4 can be protected from all directions, preventing the lens 4 from being damaged by external impact when not in operation. When testing is required, the rotating block 9 is rotated in the reverse direction, then the protective cover 713 is moved down and the handwheel 714 is rotated in the reverse direction, causing the moving plate 703 to retract. This causes the protective cover 713 and the arc block 708 to move away from the lens 4 area simultaneously, allowing the optical unit of the lens 4 to freely perform testing tasks. The operator places the wafer on the support platform 5 and fixes it by negative pressure adsorption to ensure no displacement during the testing process. The lens 4 illuminates the wafer surface, capturing the microstructure and foreign objects on the wafer surface. The acquired images are transmitted to the built-in image processing module for real-time analysis. The analysis data is transmitted to the industrial control computer via wires, allowing the operator to easily grasp the testing data and accurately determine whether there are foreign objects on the wafer surface.

[0049] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating this utility model, and are not intended to limit the implementation of this utility model. For those skilled in the art, other variations or modifications can be made based on the above description. It is impossible to exhaustively list all the implementation methods here. Any obvious variations or modifications derived from the technical solutions of this utility model are still within the protection scope of this utility model.

Claims

1. A wafer surface foreign object detection device for chip manufacturing, comprising a base (1), characterized in that: A stand (2) is fixedly installed on one side of the upper surface of the base (1), a positioning frame (201) is fixedly installed on one side of the stand (2), a body body (3) is fixedly installed between the two sides of the inner wall of the positioning frame (201), and a lens (4) is provided at the lower end of the body body (3). A support platform (5) is fixedly installed in the middle of the upper surface of the base (1); The base (1) has a through-hole groove (6) on one side surface. A protective component (7) for protecting the lens (4) is provided in the groove (6). The protective component (7) includes two support frames (701). The two support frames (701) are fixedly installed on both sides of the inner wall of the groove (6). A threaded column (702) is rotatably installed between the two sides of the inner wall of one of the support frames (701). A movable plate (703) is threaded on one side of the column body of the threaded column (702). A vertical plate (704) is fixedly installed on one side of the upper surface of the movable plate (703). A sliding groove (705) is through-hole on one side surface of the vertical plate (704). Two sliders (706) are slidably arranged in the sliding groove (705). A crossbar (707) is fixedly installed on one side of each of the two sliders (706). An arc block (708) is fixedly installed at one end of each of the two crossbars (707). A movable groove (709) is provided through one side surface of the upright plate (704). A movable block (710) is slidably disposed in the movable groove (709). A rubber column (711) is fixedly installed between the two sides of the inner wall of the movable groove (709). The movable block (710) is slidably disposed on one side of the column body of the rubber column (711). A protective cover (713) is fixedly installed on one side of the movable block (710) through a connecting frame (712). One end of the threaded column (702) passes through the corresponding support frame (701) and is fixedly mounted with a handwheel (714). Both of the arc-shaped blocks (708) have sealing grooves on their lower surfaces; Another support frame (701) has a slide rod (715) fixedly installed between the two sides of its inner wall, and the movable plate (703) is slidably disposed on one side of the slide rod (715); A bidirectional threaded rod (8) is rotatably installed between the two sides of the inner wall of the slide groove (705). The two sliders (706) are respectively threaded on both sides of the corresponding bidirectional threaded rod (8). One end of the bidirectional threaded rod (8) passes through the vertical plate (704) and is fixedly installed with a rotating block (9).

2. The wafer surface foreign object detection device for chip manufacturing according to claim 1, characterized in that: Limiting plates (10) are fixedly installed on both sides of the upper surface of the connecting frame (712).

3. The wafer surface foreign object detection device for chip manufacturing according to claim 2, characterized in that: One of the limiting plates (10) has a limiting stud (11) threaded through one side surface, and a semi-circular block (12) is fixedly installed at one end of the limiting stud (11). Both of the crossbars (707) have a silicone sleeve (13) fitted on one side of their shafts; Another limiting plate (10) has an insertion hole (14) on one side surface.

4. A wafer surface foreign object detection device for chip manufacturing according to claim 3, characterized in that: The lower surface of the movable plate (703) is provided with a number of semi-circular grooves, and a rotating wheel (15) is rotatably installed between the two sides of the inner wall of each semi-circular groove.

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