Grounding substrate based on discontinuous circular-arc-like gasket and discharge mechanism for ozone generation

Abstract

The utility model discloses a grounding substrate and discharge mechanism for ozone generation based on non - continuous circular - arc gasket relates to ozone production technical field, this grounding substrate includes substrate main part, discharge cavity and a plurality of support ring, every support ring includes a plurality of circular - arc gasket of equidistance distribution of circumference, and the end between adjacent circular - arc gasket is provided with ventilation interval, every ventilation interval is aligned with the circular - arc gasket midpoint position of adjacent position support ring, the inner wall of discharge cavity is provided with a plurality of air inlet, and every air inlet is aligned with the circular - arc gasket midpoint position of corresponding close position. The utility model relies on the circular - arc gasket of non - continuous distribution and constantly guides airflow even diffusion, is convenient for making airflow even diffusion to entire discharge cavity rapidly, and every ventilation interval can produce turbulence simultaneously, is convenient for making all airflow residence time even effectively, thereby guaranteeing ozone generation concentration even and generation efficiency.

Description

Technical Field

[0001] This utility model relates to the field of ozone production technology, and in particular to a grounding substrate based on a discontinuous arc-shaped gasket and a discharge mechanism for ozone generation. Background Technology

[0002] Ozone plays multiple roles in semiconductor manufacturing processes. For example, ozone is an excellent precursor in the ALD (Alternating Discharge) process. When depositing high-dielectric-constant materials or metal oxides, ozone provides a sufficient oxygen source to ensure accurate stoichiometry, high purity, good density, and controllable growth rate of the thin film. Therefore, ozone generation devices are required in semiconductor manufacturing processes.

[0003] Ozone generating devices generally mainly include a discharge mechanism. The discharge mechanism discharges oxygen-containing gas to produce ozone for use in semiconductor manufacturing. Existing ozone generating discharge mechanisms consist of conductive plates, ceramic separators, ceramic pads, tungsten plates, and base plates arranged sequentially from top to bottom. The tungsten plate and base plate form the grounding electrode. The ceramic pads are generally arranged in multiple circular pieces, distributed between the tungsten plate and the conductive plate or the dielectric plate below the conductive plate. They support the conductive plate and facilitate the formation of a discharge gap between the tungsten plate and the conductive plate, allowing the incoming oxygen-containing gas to react and generate ozone.

[0004] The shortcomings of existing ozone generation discharge mechanisms are as follows: Because the existing discharge mechanisms use multiple ceramic gaskets as supports at the edge of the discharge gap between the conductive plate and the grounding electrode, they only serve a supporting function. After oxygen-containing gas is directly injected into the discharge gap through the pipe, it cannot be effectively guided to flow and diffuse evenly. Most of the gas tends to flow directly from the inlet to the outlet via the shortest path, resulting in a short residence time and insufficient ionization by the electric field in the discharge gap. Furthermore, the airflow into the discharge gap is disordered and unevenly distributed due to the lack of effective guidance, easily creating dead zones. This affects the uniformity of ozone generation concentration and reduces generation efficiency. Utility Model Content

[0005] The purpose of this invention is to provide a grounding substrate based on a discontinuous arc-shaped pad and a discharge mechanism for ozone generation, so as to solve the technical problem in the prior art that the discharge mechanism is not convenient to allow oxygen-containing gas to pass through the entire discharge gap fully and evenly, the residence time is short, and the uniformity of ozone generation concentration is affected.

[0006] The technical problem to be solved by this utility model can be achieved through the following technical solution: A grounding substrate based on a discontinuous arc-shaped pad includes a substrate body, on which a discharge cavity for ionizing oxygen-containing gas is formed, and a support ring is also included. Multiple support rings are provided, and they are concentrically arranged with varying diameters inside the discharge cavity. Each support ring includes multiple circumferentially distributed arc-shaped gaskets. A ventilation gap is provided between the ends of adjacent arc-shaped gaskets. Each ventilation gap is aligned with the midpoint of the arc-shaped gasket of the adjacent support ring. Multiple air inlets are provided on the inner wall of the discharge cavity. Each air inlet is aligned with the midpoint of the corresponding nearby arc-shaped gasket. An ozone outlet is provided at the middle position inside the discharge cavity, which coincides with the center of the support ring.

[0007] Preferably, the spacing between adjacent support rings is equal to the width of the ventilation spacing.

[0008] Preferably, the substrate body is a stainless steel structure.

[0009] Preferably, the height of the arc-shaped pad is equal to the depth of the discharge cavity.

[0010] Preferably, the discharge cavity is a cylindrical cavity.

[0011] An ozone generation discharge mechanism, including a grounding substrate based on a discontinuous arc-shaped pad.

[0012] The beneficial effects of this utility model are: 1. This utility model blows air into the arc-shaped gasket of the outermost support ring through the air inlet to achieve uniform airflow. The airflow is guided to the arc-shaped gasket of the next support ring by the air gap between the discontinuously distributed arc-shaped gaskets. This continuous uniform airflow diffusion facilitates the rapid and uniform diffusion of airflow into the entire discharge cavity. At the same time, airflow collision can be achieved at each air gap to generate turbulence, which makes the residence time of all airflow uniform and effective, ensuring that the gas is fully and uniformly subjected to the electric field, thereby ensuring uniform ozone generation concentration and generation efficiency.

[0013] 2. The multiple concentrically distributed support rings of this utility model can effectively provide stable support for the conductive sheet of the discharge mechanism. At the same time, since each support ring is composed of discontinuously distributed arc-shaped pads, there are interconnected channels between adjacent support rings, which can ensure effective airflow diffusion and avoid excessive obstruction of airflow diffusion. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the overall structure of the grounding substrate based on the discontinuous arc-shaped pad in this utility model; Figure 2 This is a schematic diagram showing the relative positions of the substrate body, conductive sheet, and arc-shaped pad in this utility model. Figure 3 This is a cross-sectional structural diagram of the substrate body in this utility model; Figure 4 This is a schematic diagram of the overall structure of the discharge mechanism for ozone generation in this utility model; Figure 5 This is a schematic diagram of the overall structure of the discharge mechanism after the cooling plate is assembled in this utility model.

[0015] Explanation of reference numerals in the attached figures: 1. Conductive sheet; 2. Power cord; 3. Gas supply pipe; 4. Dielectric board; 5. Substrate body; 6. Discharge cavity; 7. Arc-shaped gasket; 8. Ozone outlet; 9. Cooling plate; 10. Air inlet; 11. Through hole; 12. Ventilation gap. Detailed Implementation

[0016] The specific embodiments of this utility model are described in detail below, but it should be understood that the protection scope of this utility model is not limited to the specific embodiments.

[0017] Example 1

[0018] like Figures 1-3 As shown, a grounding substrate based on a discontinuous arc-shaped pad is used to install in an ozone generation discharge mechanism used in semiconductor manufacturing processes. The grounding substrate serves as a grounding electrode, and a potential difference can be generated between it and the conductive sheet 1 of the ozone generation discharge mechanism to facilitate ozone generation through discharge. The grounding substrate includes a substrate body 5, which is a conductive metal body and grounded through a wire. A discharge cavity 6 for ionizing oxygen-containing gas is formed on the substrate body 5. Under the operation of the entire ozone generation discharge mechanism, the discharge cavity 6 generates an alternating electric field. This alternating electric field acts on the oxygen-containing gas in the discharge cavity 6, causing the oxygen molecules to ionize and form plasma. The oxygen molecules decompose into oxygen atoms, which then combine with undecomposed oxygen molecules to generate ozone. The grounding substrate also includes multiple support rings, which are concentrically arranged with varying diameters at the center of the inner side of the discharge cavity 6. The diameters of the multiple support rings are distributed in an arithmetic sequence, with their centers coinciding, and gradually decreasing in size from the outside in. These rings can be named the first support ring, the second support ring, the third support ring, and so on. Each support ring includes multiple circumferentially spaced arc-shaped pads 7, preferably two arc-shaped pads 7. The multiple arc-shaped pads 7 are discontinuous and independent. A ventilation gap 12 is provided between the ends of adjacent arc-shaped pads 7. Each ventilation gap 12 is aligned with the midpoint of the arc-shaped pad 7 of the adjacent support ring. Furthermore, a certain distance is maintained between the arc-shaped pad 7 of the outermost support ring and the inner wall of the discharge cavity 6. The distance between the air inlets and the discharge cavity 6 can be designed based on the air pressure, the dimensions of the arc-shaped gaskets 7, and the inner wall of the discharge cavity 6 is provided with multiple air inlets 10, and the number of air inlets 10 corresponds one-to-one with the number of arc-shaped gaskets 7. Each air inlet 10 is aligned with the midpoint of the arc-shaped gasket 7 at the corresponding nearest position, that is, each air inlet 10 is aligned with the midpoint of the arc-shaped gasket 7 corresponding to the outermost or first support ring. When airflow is introduced into the discharge cavity 6 through each air inlet 10, the airflow first blows to the midpoint of the corresponding outermost arc-shaped gasket 7, and then is evenly divided into two airflows flowing out from both sides of the midpoint of the arc-shaped gasket 7. An ozone outlet 8 is provided at the middle position of the inner side of the discharge cavity 6, which coincides with the center of the support ring, for the ozone generated to be discharged. The specific gas flow is described as follows: When oxygen-containing gas enters the discharge cavity 6 through each air inlet 10, it first blows to the midpoint of the corresponding outermost arc-shaped gasket 7. Then, it is evenly divided into two airflows that flow from both sides of the midpoint of the arc-shaped gasket 7. Each airflow can flow along the corresponding arc-shaped gasket 7 to the nearest ventilation gap 12. Since there is airflow evenly divided into two directions on each arc-shaped gasket 7, two airflows will converge and collide at each ventilation gap 12, generating turbulence or eddies, achieving a certain degree of gas retention. At the same time, under the action of pressure difference, it will pass through the current ventilation gap 12 and enter the next layer of support. The airflow converges and collides at the location of the support ring and then passes through the corresponding arc-shaped gasket 7 for uniform distribution. It then reaches the next ventilation gap 12 to generate turbulence or eddies. This allows oxygen-containing gas to efficiently and uniformly cover the entire area of ​​the discharge cavity 6. At the same time, the airflow collision at each ventilation gap 12 position can achieve a certain degree of gas retention, so that all gases can be delayed to the same extent when passing through the discharge cavity 6. This facilitates the full effect of the electric field, which is beneficial to improving the uniformity and efficiency of ozone generation concentration and ensuring sufficient ozone generation. Finally, the generated ozone is discharged through the ozone outlet 8 at the center.

[0019] In some specific embodiments of this example, the spacing between adjacent support rings is equal to the width of the ventilation spacing 12, which facilitates effective gas flow.

[0020] In some specific embodiments of this example, the substrate body 5 is a stainless steel structure that is conductive.

[0021] In some specific embodiments of this example, the arc-shaped pad 7 and the substrate body 5 are an integrated metal structure, which can be stamped in one go by a stamping process. This makes it easy to ensure that the arc-shaped pad 7 has uniform size and can easily support the dielectric plate 4 and conductive sheet 1 of the discharge mechanism, ensuring that the discharge cavity 6 is uniform and improving discharge efficiency and stability. Compared with the existing multiple ceramic pads, this avoids problems such as ceramic debris. In addition, the integrated arc-shaped pad 7 and the substrate body 5 are made of the same material, which also facilitates the provision of a heat dissipation path with extremely low thermal resistance.

[0022] In addition, when the arc-shaped gasket 7 is a metal structure, in order to avoid short-circuiting the high-voltage electrode to ground, a through hole 11 with the same shape as the arc-shaped gasket 7 is opened on the conductive plate 1 of the discharge mechanism.

[0023] In some other specific embodiments of this example, the arc-shaped gasket 7 may also be made of a non-metallic material, such as Teflon. If it is made of a non-metallic material, then there is no need to open a through hole 11 on the conductive sheet 1 of the discharge mechanism.

[0024] In some specific embodiments of this example, the height of the arc-shaped gasket 7 may be equal to the depth of the discharge cavity 6.

[0025] In some specific embodiments of this example, the discharge cavity 6 is a cylindrical cavity, which facilitates the formation of a rotating vortex by the gas entering.

[0026] Example 2

[0027] refer to Figure 4 As shown, a discharge mechanism for ozone generation includes a conductive sheet 1, a dielectric plate 4, a gas supply pipe 3, and a grounding substrate as described in Embodiment 1. A power line 2 is electrically connected to one side of the conductive sheet 1, which energizes the conductive sheet 1. The dielectric plate 4 is disposed between the conductive sheet 1 and the substrate body 5 of the grounding substrate. The dielectric plate 4 is a ceramic sheet, but other insulating materials can also be selected according to actual needs. The gas supply pipe 3 is connected to the air inlet 10 and is used to transport oxygen-containing gas, allowing the oxygen-containing gas to enter the discharge cavity 6 through the air inlet 10. Here, the gas supply pipe 3 avoids the dielectric plate 4 and is connected to the edge of the substrate body 5. It should be noted that the diameter of the dielectric plate 4 is larger than the diameter of the discharge cavity 6, so that the edge of the dielectric plate 4 can be supported on the edge of the discharge cavity 6. The diameter of the conductive sheet 1 is smaller than the diameter of the discharge cavity 6, ensuring that the electric field is effectively generated in the discharge cavity 6.

[0028] It should also be noted that since there are multiple air inlets 10, multiple air supply pipes 3 can be set for easy air supply, or only one air supply pipe 3 can be set. Then, an annular channel is set on the inner side of the edge of the substrate body 5. The air supply pipe 3 is connected to the annular channel, and each air inlet 10 is connected to the annular channel.

[0029] The specific principle behind ozone generation is as follows: When high-voltage electricity is applied to the conductive plate 1 through the power line 2, the current cannot flow directly to the grounding electrode due to the obstruction of the dielectric plate 4. Charge accumulates on the side of the dielectric plate 4 closest to the conductive plate 1; this accumulated charge induces an opposite charge on the other side of the dielectric plate 4. This generates an alternating electric field that acts on the discharge cavity 6 filled with oxygen-containing gas. The alternating electric field ionizes the oxygen molecules in the discharge cavity 6, forming plasma. Oxygen molecules decompose into oxygen atoms, which then combine with undecomposed oxygen molecules to generate ozone. In addition, since the height of the arc-shaped pad 7 of the support ring can be equal to the depth of the discharge cavity 6, it is convenient to provide stable and effective support for the dielectric plate 4 and conductive sheet 1 stacked above, while avoiding obstruction of gas flow and ensuring that the gas diffuses evenly throughout the discharge area.

[0030] Example 3

[0031] Based on Example 2, and referring to Figure 5 To ensure the normal operation of the entire discharge mechanism, cooling plates 9 can be installed on both the upper and lower sides of the entire discharge mechanism to dissipate the heat generated during the ozone generation process. In addition, a layer of dielectric material can be installed above the conductive sheet 1, and a ceramic partition can be installed above the dielectric material. A cylindrical sleeve of matching size can also be fixed between the upper and lower cooling plates 9 to fix and limit the internal dielectric material, conductive sheet 1, grounding substrate and other components, ensuring that the whole is effectively pressed together.

[0032] To facilitate understanding of the embodiments of this solution by those skilled in the art, the working principle of this solution will now be briefly explained in conjunction with specific application scenarios: The tungsten plate and ceramic pad of the original discharge mechanism are removed, so that the substrate body 5 is made of conductive metal material and grounded through a wire, so as to facilitate the generation of a voltage difference between it and the conductive sheet 1, and facilitate the generation of an electric field in the discharge cavity 6. At the same time, multiple concentric support rings are set in the discharge cavity 6. When the conductive sheet 1 and dielectric plate 4 are pressed onto the substrate body 5 in sequence, they can be effectively supported by the support rings. Then, oxygen-containing gas is supplied into the discharge cavity 6 through the gas supply pipe 3. The oxygen-containing gas enters the discharge cavity 6 through the air inlet 10 and energizes the conductive sheet 1. When oxygen-containing gas enters the discharge cavity 6 through each air inlet 10, it first blows to the midpoint of the outermost corresponding arc-shaped gasket 7, and then splits into two streams that flow from both sides of the midpoint of the arc-shaped gasket 7. Each stream can flow along the corresponding arc-shaped gasket 7 to the nearest ventilation gap 12. Since there is airflow on each arc-shaped gasket 7 flowing in two directions, two streams of air will converge and collide at each ventilation gap 12, generating turbulence or eddies, achieving a certain degree of gas retention. At the same time, under the action of pressure difference, the gas will pass through the current ventilation gap 12 and enter the next... The airflow converges and collides at the next ventilation gap 12, generating turbulence or eddies. This allows oxygen-containing gas to efficiently and evenly cover the entire discharge cavity 6 area. At the same time, the airflow collision at each ventilation gap 12 position can achieve a certain degree of gas retention, so that all gases can be delayed to the same extent when passing through the discharge cavity 6, which is conducive to the full effect of the electric field. This is beneficial to improving the uniformity and efficiency of ozone generation, ensuring that ozone is fully generated. Finally, the generated ozone is discharged through the ozone outlet 8 at the center position.

[0033] The above-disclosed embodiments are only a few specific examples of the present utility model. However, the embodiments of the present utility model are not limited thereto. Any changes that can be conceived by those skilled in the art should fall within the protection scope of the present utility model.

Claims

1. A grounding substrate based on a discontinuous arc-shaped pad, comprising a substrate body (5), wherein a discharge cavity (6) for ionizing oxygen-containing gas is formed on the substrate body (5), characterized in that, It also includes support rings; Multiple support rings are provided, and they are concentrically varied in diameter and located inside the discharge cavity (6). Each support ring includes multiple circumferentially distributed arc-shaped gaskets (7). A ventilation gap (12) is provided between the ends of adjacent arc-shaped gaskets (7). Each ventilation gap (12) is aligned with the midpoint of the arc-shaped gasket (7) of the adjacent support ring. Multiple air inlets (10) are provided on the inner wall of the discharge cavity (6). Each air inlet (10) is aligned with the midpoint of the corresponding arc-shaped gasket (7) at the nearest position. An ozone outlet (8) is provided at the middle position inside the discharge cavity (6) and coincides with the center of the support ring.

2. The grounding substrate based on a discontinuous arc-shaped pad according to claim 1, characterized in that, The spacing between adjacent support rings is equal to the width of the ventilation spacing (12).

3. The grounding substrate based on a discontinuous arc-shaped pad according to claim 1, characterized in that, The substrate body (5) is a stainless steel structure.

4. The grounding substrate based on a discontinuous arc-shaped pad according to claim 1, characterized in that, The height of the arc-shaped gasket (7) is equal to the depth of the discharge cavity (6).

5. The grounding substrate based on a discontinuous arc-shaped pad according to claim 1, characterized in that, The discharge cavity (6) is a cylindrical cavity.

6. A discharge mechanism for ozone generation, characterized in that, The grounding substrate based on a discontinuous arc-shaped pad as described in any one of claims 1 to 5.

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