Ion implanter control device

Abstract

The utility model discloses a kind of ion implanter control devices, comprising: cabinet, cabinet includes side perimeter plate and backplate, side perimeter plate is enclosed rectangular cylinder structure, backplate is set in the rear end of side perimeter plate;Control assembly includes multiple circuit boards, multiple circuit boards are detachably set in cabinet, control assembly further includes output board, output board is set on the inner wall of backplate, multiple circuit boards are connected with output board, multiple interfaces are provided on the second surface of output board, the first end of circuit board is inserted with internal interface, the second end of circuit board is provided with panel, and multiple panels close the front end of cabinet.The utility model multiple circuit boards are independently set in the same cabinet, and simultaneously connected with output board, can realize unified power supply, and output control signal through output board.Circuit board and output board are connected in the mode of insertion, debugging and maintenance only need to be separately disassembled circuit board, do not need to plug wire material, can be completed in the front of cabinet.

Description

Technical Field

[0001] This utility model relates to the field of control device technology, and more specifically, to an ion implanter control device. Background Technology

[0002] In ion implantation systems, multiple controllers are required to precisely control their respective components. Currently, the control devices for existing ion implanters consist of multiple independent enclosures, each housing one controller, which occupies a significant amount of space. Furthermore, the control wiring harnesses for each controller are scattered, which is detrimental to space utilization and wiring planning. During commissioning and maintenance, the controller's control wiring harness must be removed to detach the controller, increasing the safety risks of accessing the rear of the electrical rack and the time required for commissioning and maintenance. Utility Model Content

[0003] In view of the shortcomings of the prior art, this utility model innovatively provides an ion implanter control device, which can solve the technical problems of large space occupation of ion implanter control devices and inconvenient debugging and maintenance caused by the dispersed wiring harness.

[0004] To achieve the above-mentioned technical objectives, this utility model discloses an ion implanter control device, comprising: The box body includes side panels and a back panel. The side panels form a rectangular cylindrical structure, and the back panel is located at the rear end of the side panels, so that the box body has a front opening structure. The control assembly includes multiple circuit boards detachably disposed within the housing. The control assembly also includes an output board disposed on the inner wall of the back panel. A plurality of external interfaces are provided on a first surface of the output board, and these external interfaces can be exposed through the back panel. Multiple circuit boards are arranged side-by-side and all connected to the output board. The second surface of the output board has multiple internal interfaces. The first end of each circuit board is inserted into one of the internal interfaces, enabling power and signal transmission between the circuit board and the output board. A panel is provided at the second end of the circuit board, and the panel is connected to the front end of the side plate. Multiple panels enclose the front end of the housing.

[0005] Furthermore, the circuit board includes a control board, a driver board, and a power supply board.

[0006] Furthermore, multiple guide rail assemblies are provided on the inner wall of the side peripheral plate of the housing. Each guide rail assembly includes two parallel guide rails, and each guide rail assembly is slidably connected to the edge of one of the circuit boards.

[0007] Furthermore, a connecting block is provided on the inner sidewall of the panel, and the circuit board is perpendicular to the panel and fixedly connected to the connecting block.

[0008] Furthermore, a handle is provided on the outer wall of the panel.

[0009] Furthermore, a connecting edge is provided on the outer edge of the front end of the side plate, the connecting edge is formed perpendicular to the side plate, and the panel is fixedly connected to the connecting edge.

[0010] Furthermore, the panel is provided with indicator lights, which are electrically connected to the circuit board.

[0011] Furthermore, at least the control board and the drive board are connected to a panel with a data interface.

[0012] Furthermore, a fan and ventilation holes are provided on the side plate, and a heat dissipation channel is formed inside the housing, which connects the fan and the ventilation holes.

[0013] The beneficial effects of this utility model are as follows: This utility model's ion implanter control device adopts a modular design, with multiple circuit boards independently housed within the same enclosure and simultaneously connected to the output board. This allows for unified power supply and control signal output via the output board. The circuit boards and output board are connected via plug-in connections, enabling debugging and maintenance by simply disassembling the individual circuit boards without needing to plug or unplug wires; this can be done from the front of the enclosure. Attached Figure Description

[0014] Figure 1 This diagram shows the circuit board layout of the ion implanter control device according to an embodiment of the present invention. Figure 2 This is a front view schematic diagram of the ion implanter control device according to an embodiment of the present invention; Figure 3 This is a rear view schematic diagram of the ion implanter control device according to an embodiment of the present invention; Figure 4 This diagram shows the assembly state of a portion of the circuit board of the ion implanter control device according to an embodiment of the present invention. Figure 5 This diagram shows the assembly state of the circuit board and panel according to an embodiment of the present invention. Figure 6 This diagram shows the assembly state of the circuit board and panel according to an embodiment of the present invention.

[0015] In the picture, 1. Cabinet; 11. Side panel; 12. Back panel; 13. Connecting plate; 14. Guide rail; 2. Circuit board; 3. Output board; 4. Front panel; 41. Connecting block; 42. Handle; 43. Connecting screws. Detailed Implementation

[0016] The ion implanter control device provided by this utility model will be explained and described in detail below with reference to the accompanying drawings.

[0017] Ion implanter control units often use 1U short chassis, such as those measuring 360*240*44mm. Each chassis houses one controller, requiring multiple chassis. Each chassis needs to connect independent control lines, communication lines, ground lines, power lines, and other cables, resulting in a large overall footprint and a messy, unsightly wiring layout. Furthermore, debugging and maintenance require disassembling the corresponding cables and chassis. After removing the chassis, the cover must be opened to retrieve the controller board, consuming significant manpower and time. For example, if actual controller board maintenance takes 15 minutes, the time from disassembling the chassis to opening the cover and retrieving the controller board is approximately 30 minutes, significantly increasing time wasted in actual operation.

[0018] This utility model's ion implanter control device adopts a modular design, with multiple circuit boards independently housed within the same enclosure and simultaneously connected to the output board. This allows for unified power supply and control signal output via the output board. The circuit boards and output board are connected via a plug-in connection, enabling debugging and maintenance by simply disassembling the individual circuit boards without unplugging or reconnecting cables; this can be done from the front of the enclosure. The following detailed description of this utility model, in conjunction with specific embodiments, further illustrates this invention: In some embodiments, the present invention provides an ion implanter control device, such as... Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 As shown, the system includes a housing 1 and a control component housed within the housing 1. The control component includes multiple circuit boards 2 and an output board 3. Both circuit boards 2 and output board 3 are PCBs. The multiple circuit boards 2 and output board 3 are connected via an EtherCAT protocol communication interface. The host computer interacts with the multiple circuit boards 2 via the EtherCAT bus protocol. The system has signal control functions for digital input / output and analog input / output. The communication interface uses a photoelectric conversion module to achieve fiber optic communication connection, which has communication loop redundancy function and strong resistance to electromagnetic interference and stability.

[0019] The enclosure 1 includes side panels 11 and a back panel 12. The side panels 11 form a rectangular cylindrical structure, and the back panel 12 is located at the rear end of the side panels 11, making the enclosure 1 have a front-opening structure. The end face of the side panels 11 is rectangular. For example, the enclosure 1 adopts a standard 3U enclosure, that is, the external dimensions of the enclosure 1 are 482*390*133mm, and the depth is 300mm. In other embodiments, different sizes can be selected as needed. Optionally, the front end of the side panels 11 extends outward to form a connecting plate 13. The connecting plate 13 has connecting holes and is used for the fixed installation of the enclosure 1.

[0020] Output board 3 is mounted on the inner wall of back plate 12. Multiple external interfaces are provided on the first surface of output board 3, and multiple through holes are correspondingly provided on back plate 12. These external interfaces can pass through back plate 12 and are exposed for connecting control, communication, and power cables. Multiple circuit boards 2 are arranged side-by-side and connected to output board 3. Multiple internal interfaces are provided on the second surface of output board 3. The first end of circuit board 2 is inserted into an internal interface, enabling power and signal transmission between circuit board 2 and output board 3. Both external and internal interfaces use EtherCAT protocol communication interfaces. Furthermore, different types of internal interfaces are positioned at different heights, ensuring that each type of circuit board 2 can only contact one type of internal interface. That is, circuit board 2 can only connect to its matching internal interface when inserted in the correct position. If circuit board 2 is inserted incorrectly, it cannot contact the internal interface at that position, preventing damage to circuit board 2 or the internal interface caused by inserting into an incompatible internal interface.

[0021] The second end of the circuit board 2 is provided with a panel 4, which is connected to the front end of the side plate 11. Multiple panels 4 can be independently connected to the housing 1, and multiple panels 4 can close the front end of the housing 1.

[0022] In some embodiments, the circuit board 2 includes a control board, a driver board, and a power board. The number of each type of circuit board 2 can be selected as needed, and the size or appearance of the panel 4 corresponding to each type of circuit board 2 is different, making it easier to intuitively identify the type of internal circuit board 2. Indicator lights are provided on the panel 4, and the indicator lights are electrically connected to the circuit board 2. For example, when the circuit board 2 is a control board, power indicator lights, run indicator lights, I / O port indicator lights, etc., can be provided. The required indicator light types can be set according to the specific type of the circuit board 2. Furthermore, the panel 4 corresponding to the control board is also provided with data interfaces, such as a program download port and a debug port.

[0023] In some implementations, such as Figure 4As shown, multiple guide rail assemblies are provided on the inner wall of the side plate 11 of the housing 1. Each guide rail assembly includes two parallel guide rails 14, and each guide rail assembly is slidably connected to the edge of a circuit board 2. Two guide rails 14 of the guide rail assemblies are respectively provided on the top and bottom walls of the side plate 11. The multiple guide rail assemblies are parallel to each other, so that the multiple circuit boards 2 are also arranged parallel to each other. The guide rail assemblies guide the assembly and disassembly of the circuit boards 2 so that they can be accurately inserted into the internal interface on the output board 3. At the same time, the guide rail assemblies also limit the circuit boards 2 after installation, so that the circuit boards 2 do not wobble.

[0024] In some embodiments, such as Figure 5 , Figure 6 As shown, a connecting block 41 is provided on the inner side wall of panel 4. Circuit board 2 is perpendicular to panel 4 and fixedly connected to connecting block 41. Optionally, connecting block 41 is provided with a slot. Circuit board 2 is inserted into the slot and connected to connecting block 41 with screws, ensuring that circuit board 2 and panel 4 cannot move relative to each other, so that circuit board 2 can be smoothly inserted into housing 1 through panel 4. A handle 42 is provided on the outer side wall of panel 4, which facilitates pulling panel 4 out.

[0025] In some embodiments, the outer edge of the front end of the side plate 11 is provided with a connecting edge, which is formed perpendicular to the side plate 11, and the panel 4 is fixedly connected to the connecting edge. Alternatively, in other embodiments, the connecting edge may also be formed inward of the side plate 11, and the panel 4 is provided with a plurality of connecting screws 43, which are used to connect the panel 4 to the connecting edge, preferably using anti-loosening screws.

[0026] In some embodiments, a fan and ventilation holes are also provided on the side plate 11, and a heat dissipation channel is formed inside the housing 1, which connects the fan and the ventilation holes. The fan is located on one side wall of the side plate 11 parallel to the circuit board 2, and the ventilation holes are formed on another side wall parallel to the circuit board 2. For example, multiple small holes are evenly distributed on the side wall, and the multiple small holes together constitute the ventilation holes to increase the ventilation area. A heat dissipation channel for air circulation is formed inside the side plate 11. For example, multiple flow holes can be formed on the slide rail, or flow holes can be formed at the connection between the slide rail and the side plate 11. Driven by the fan, air can flow through the inside of the housing 1 to help dissipate heat from the circuit board 2.

[0027] In this embodiment of the utility model, the ion implanter control device adopts a modular integration method, integrating control components including multiple circuit boards 2 into a housing 1. The circuit boards 2 are installed independently into the housing 1 by plugging and unplugging. The panel 4 is divided into multiple independent small blocks, and each circuit board 2 is fixedly connected to an independent panel 4. During testing, replacement and maintenance, the circuit board 2 of the corresponding panel 4 can be directly pulled out as a whole without removing the corresponding control wiring harness. This ensures that on-site personnel do not enter the machine, improving safety, while saving debugging and maintenance time and shortening the debugging cycle.

[0028] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0029] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0030] In the description of this specification, the references to terms such as "this embodiment," "an embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in a suitable manner in any at least one embodiment or example. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0031] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0032] The above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Any modifications, equivalent substitutions, and simple improvements made on the substantive content of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A control device for an ion implanter, characterized in that, include: The box body includes side panels and a back panel. The side panels form a rectangular cylindrical structure, and the back panel is located at the rear end of the side panels, so that the box body has a front opening. The control assembly includes multiple circuit boards detachably disposed within the housing. The control assembly also includes an output board disposed on the inner wall of the back panel. A plurality of external interfaces are provided on a first surface of the output board, and these external interfaces can be exposed through the back panel. Multiple circuit boards are arranged side-by-side and all connected to the output board. The second surface of the output board has multiple internal interfaces. The first end of each circuit board is inserted into one of the internal interfaces, enabling power and signal transmission between the circuit board and the output board. A panel is provided at the second end of the circuit board, and the panel is connected to the front end of the side plate. Multiple panels enclose the front end of the housing.

2. The ion implanter control device according to claim 1, characterized in that, The circuit board includes a control board, a driver board, and a power supply board.

3. The ion implanter control device according to claim 2, characterized in that, Multiple guide rail assemblies are provided on the inner wall of the side circumferential plate of the housing. Each guide rail assembly includes two parallel guide rails, and each guide rail assembly is slidably connected to the edge of a circuit board.

4. The ion implanter control device according to claim 3, characterized in that, A connecting block is provided on the inner sidewall of the panel, and the circuit board is perpendicular to the panel and fixedly connected to the connecting block.

5. The ion implanter control device according to claim 4, characterized in that, A handle is provided on the outer wall of the panel.

6. The ion implanter control device according to claim 2, characterized in that, The outer edge of the front end of the side panel is provided with a connecting edge, which is formed perpendicular to the side panel, and the panel is fixedly connected to the connecting edge.

7. The ion implanter control device according to claim 6, characterized in that, The panel is equipped with indicator lights, which are electrically connected to the circuit board.

8. The ion implanter control device according to claim 7, characterized in that, At least the control board and the driver board are connected to a panel with a data interface.

9. The ion implanter control device according to claim 2, characterized in that, The side panel is also provided with a fan and ventilation holes, and a heat dissipation channel is formed inside the box, which connects the fan and the ventilation holes.

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