Optical Roughness and Surface Profile Measuring Instrument

Abstract

1. Name of the Design Product: Optical Roughness and Surface Profile Measuring Instrument. 2. Use of the Design Product: Through optical phase-shift interference and white-light interference scanning technologies, it realizes rapid and high-precision measurement of the surface roughness of the object to be measured, and simultaneously completes the digital reconstruction of the three-dimensional profile of the object to be measured. It is applicable to fields such as ultra-precision optical element processing, semiconductor wafer defect detection, micro-electromechanical system structure detection, film thickness and overall morphology analysis, etc. 3. Design Key Points of the Design Product: Lies in the shape. 4. Picture or Photograph that Best Illustrates the Design Key Points: Perspective view.

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