RF Power Supply (High-end 04100Z)

CN309341289SActive Publication Date: 2025-06-17江苏神州半导体科技股份有限公司
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Patent Information

Application Number
CN202430700918.1
Authority / Receiving Office
CN · China
Patent Type
Designs(China)
Current Assignee / Owner
Filing Date
2024-11-06
Publication Date
2025-06-17
Estimated Expiration
2039-11-06

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Abstract

1. Name of the design product: Radio frequency power supply (High-end 04100Z). 2. Use of the design product: The design product is used to generate a sinusoidal voltage with a fixed frequency within the radio frequency range (about 3KHz - 300GHz) and is applied to equipment such as radio frequency sputtering, PECVD chemical vapor deposition, and reactive ion etching to supply power to these devices. 3. Design key points of the design product: Lies in the shape. 4. Picture or photograph that best shows the design key points: Perspective view.
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