The outer peripheral portion of the cover ring

CN309374754SActive Publication Date: 2025-07-08TOKYO ELECTRON LTD
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Patent Information

Application Number
CN202430611162.3
Authority / Receiving Office
CN · China
Patent Type
Designs(China)
Current Assignee / Owner
Priority Date
2024-03-29
Filing Date
2024-09-25
Publication Date
2025-07-08
Estimated Expiration
2039-09-25

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Abstract

1. Name of the design product: Outer peripheral part of the cover ring. 2. Use of the design product: The whole product is a cover ring installed on the outer ring in semiconductor manufacturing equipment. The part to be protected is the outer peripheral part of the cover ring that prevents foreign objects from entering the base through the gap between the cover ring and the outer ring. 3. Design key points of the design product: Lies in the shape. 4. Picture or photo that best shows the design key points: Stereogram. 5. Other situations that need to be explained: Other explanations: The parts shown by solid lines in each view are the parts to be protected, and the parts shown by dashed lines are the parts not to be protected; The parts marked in red in the enlarged stereogram of the A-A sectional view are the parts to be protected.
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