Flow calibrator
CN309427817SActive Publication Date: 2025-08-08ADVANCED MICRO FAB EQUIP INC CHINA
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Patent Information
- Application Number
- CN202430745159.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-25
- Publication Date
- 2025-08-08
- Estimated Expiration
- 2039-11-25
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Figure 000007_ABST
Abstract
1. The name of this design product: flow calibrator. 2. Purpose of this design product: Integrated in the gas cabinet of semiconductor equipment, used for testing and calibration of mass flow controllers. 3. The key design point of this design product lies in the combination of shape and pattern. 4. The picture or photo that best illustrates the design points: three-dimensional picture.
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