Epitaxial growth in-situ detection equipment controller

Abstract

1. Name of the product in this design: Controller for in-situ detection equipment for epitaxial growth. 2. Purpose of this design: To collect process parameter information during the semiconductor epitaxial growth process and to process and output detection signals. 3. The key design point of this design product lies in the combination of shape and pattern. 4. The picture or photo that best illustrates the design points: three-dimensional picture.

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