Cooling heat exchange system for semiconductor coating equipment
CN309588591SActive Publication Date: 2025-11-07ATOMIC NANO MATERIALS (NAN JING) CO LTD
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Patent Information
- Application Number
- CN202530105558.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-07
- Publication Date
- 2025-11-07
- Estimated Expiration
- 2040-03-07
Smart Images
Figure 000007_ABST
Abstract
1. The name of the design product: semiconductor coating equipment cooling heat exchange system. 2. The use of the design product: used for cooling the semiconductor coating equipment by circulating the air through the air duct and the water-cooled heat exchanger. 3. The design points of the design product: in shape. 4. The picture or photo that best shows the design points: perspective view.
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