Main body of multifunctional coil holder
CN309666895SActive Publication Date: 2025-12-12BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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Patent Information
- Application Number
- CN202530169739.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Filing Date
- 2025-04-01
- Publication Date
- 2025-12-12
- Estimated Expiration
- 2040-04-01
Smart Images
Figure 000007_ABST
Abstract
1. The name of the design product: the main body of multifunctional coil support. 2. The use of the design product: the main body and the whole are used for fixing the upper electrode RF coil in the etching system. 3. The design points of the design product: in shape. 4. The picture or photo that best indicates the design points: perspective view 1.
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