Heating plate (stainless steel)
CN309730956SActive Publication Date: 2026-01-09JIANGSU SHIWEI SEMICON TECH CO LTD
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Patent Information
- Application Number
- CN202530339401.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Filing Date
- 2025-06-13
- Publication Date
- 2026-01-09
- Estimated Expiration
- 2040-06-13
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Figure 000007_ABST
Abstract
1. The name of the design product: heating disc (stainless steel). 2. The use of the design product: In the field of semiconductor manufacturing, optical coating, material surface modification, etc., it is used as a component for carrying and heating the substrate in physical vapor deposition process. 3. The design points of the design product: in shape. 4. The picture or photo that best shows the design points: perspective view.
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