RF power calibration device
CN309762366SActive Publication Date: 2026-01-30HEFEI INSTITUTE OF PHYSICAL SCIENCE CHINESE ACADEMY OF SCIENCES
View PDF 0 Cites 0 Cited by
Patent Information
- Application Number
- CN202530379126.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Filing Date
- 2025-06-30
- Publication Date
- 2026-01-30
- Estimated Expiration
- 2040-06-30
Smart Images
Figure 000007_ABST
Abstract
1. Name of the product in this design: Radio Frequency Power Calibration Device. 2. Purpose of this design: To calibrate the power output of the power source for radio frequency ion source plasma discharge, providing accurate data for physical experimental analysis. 3. The key design feature of this product is its shape. 4. The image or photograph that best illustrates the design's key points: a 3D model.
Need to check novelty before this filing date? Find Prior Art